JPS6384507U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図及び第３図はこの考案のそれぞ
れ第１、第２及び第３の実施例の要部の構成を示
す原理図、第４図は従来提案されている表面三次
元形状測定装置の側面図、第５図は第４図の測定
装置の測定原理の説明に供するための原理図、第
６図は第４図の測定装置で使用される電子回路部
のブロツク図、第７図は第６図の要部の動作波形
図、第８図は第４図の測定装置において検出器の
光軸上の所要な被写界深度の説明に供するための
原理図、第９図は第４図の測定装置で測定したと
き、被測定点からの反射光が被測定体の一部で遮
られて検出できない場合の説明に供するための原
理図である。 Figures 1, 2, and 3 are principle diagrams showing the configuration of the main parts of the first, second, and third embodiments of this invention, respectively, and Figure 4 is a three-dimensional surface shape that has been proposed in the past. 5 is a principle diagram for explaining the measurement principle of the measuring device shown in FIG. 4, and FIG. 6 is a block diagram of the electronic circuit used in the measuring device shown in FIG. 4. Figure 7 is an operational waveform diagram of the main part of Figure 6, Figure 8 is a principle diagram for explaining the required depth of field on the optical axis of the detector in the measuring device of Figure 4, and Figure 9. 4 is a principle diagram for explaining a case where reflected light from a point to be measured cannot be detected because it is blocked by a part of the object to be measured when measuring with the measuring device shown in FIG. 4. FIG.

Claims (1)

【実用新案登録請求の範囲】 基準軸を軸心として位置する被測定体に対して
、前記基準軸上の複数位置に向けて光波を照射す
る発光源が前記基準軸を軸心とする回転面上に配
設され、 前記被測定体と前記発光源とは前記基準軸の廻
りに相対的に回動可能に取り付けられ、 前記発光源は前記複数位置への光波の照射に対
応して前記回転面上において前記基準軸に対して
ほぼ平行な線上に位置し、 前記被測定体の照射位置からの反射光が検出器
で受光検出され、 この検出器の検出出力に基づいて前記基準軸か
ら前記被測定体表面の照射位置までの距離が測定
され、 前記発光源の光軸は前記基準軸に対し斜めとな
つている表面三次元形状測定装置。[Claims for Utility Model Registration] A light emitting source that irradiates light waves toward a plurality of positions on the reference axis of an object to be measured, which is positioned with the reference axis as the axis, is a rotating surface with the reference axis as the axis. the object to be measured and the light emitting source are mounted so as to be relatively rotatable around the reference axis, and the light emitting source rotates in response to the irradiation of light waves to the plurality of positions. located on a line substantially parallel to the reference axis on the surface, the reflected light from the irradiation position of the object to be measured is received and detected by a detector, and based on the detection output of this detector, from the reference axis to the A three-dimensional surface shape measuring device, wherein a distance to an irradiation position on a surface of a measured object is measured, and an optical axis of the light emitting source is oblique to the reference axis.