JPS6383755U - - Google Patents
Info
- Publication number
- JPS6383755U JPS6383755U JP17821686U JP17821686U JPS6383755U JP S6383755 U JPS6383755 U JP S6383755U JP 17821686 U JP17821686 U JP 17821686U JP 17821686 U JP17821686 U JP 17821686U JP S6383755 U JPS6383755 U JP S6383755U
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- resolution
- deposited
- standard sample
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Description
第１図は本考案による分解能測定標準試料の作
製実施例を示す図、第２図は分解能測定標準試料
の最終的な形を示す図である。
１……カーボン、２……アルミニユーム、３…
…タングステイン線、４……モリブデイボード、
５……電極、６……真空蒸着装置。
FIG. 1 is a diagram showing an example of the preparation of a standard sample for resolution measurement according to the present invention, and FIG. 2 is a diagram showing the final form of the standard sample for resolution measurement. 1... Carbon, 2... Aluminum, 3...
...Tungstein wire, 4...Molybd day board,
5... Electrode, 6... Vacuum evaporation device.
Claims (1)
のアルミニユームの粒子間隔により分解能を測定
する事を特徴とする走査形電子顕微鏡の分解能測
定標準試料。 ２ 請求の範囲第１項において、アルミニユーム
蒸着膜に粒状性を持たせるために、カーボンを加
熱しながらアルミニユーム蒸着を行う事を特徴と
する走査形電子顕微鏡の分解能測定標準試料。[Claims for Utility Model Registration] 1. A standard sample for measuring the resolution of a scanning electron microscope, characterized in that aluminum is vapor-deposited on carbon and the resolution is measured by the interval between particles of the aluminum. 2. The standard sample for measuring the resolution of a scanning electron microscope according to claim 1, characterized in that aluminum is deposited while heating carbon in order to impart granularity to the aluminum deposited film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17821686U JPS6383755U (en) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17821686U JPS6383755U (en) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6383755U true JPS6383755U (en) | 1988-06-01 |
Family
ID=31120144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17821686U Pending JPS6383755U (en) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6383755U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011158257A (en) * | 2010-01-29 | 2011-08-18 | Hitachi High-Technologies Corp | Sample for image resolution evaluation, charged particle beam device, and sample preparation method |
-
1986
- 1986-11-21 JP JP17821686U patent/JPS6383755U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011158257A (en) * | 2010-01-29 | 2011-08-18 | Hitachi High-Technologies Corp | Sample for image resolution evaluation, charged particle beam device, and sample preparation method |
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