JPS6376863A - Pellet supplying device - Google Patents
Pellet supplying deviceInfo
- Publication number
- JPS6376863A JPS6376863A JP22016786A JP22016786A JPS6376863A JP S6376863 A JPS6376863 A JP S6376863A JP 22016786 A JP22016786 A JP 22016786A JP 22016786 A JP22016786 A JP 22016786A JP S6376863 A JPS6376863 A JP S6376863A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- slit
- curved pipe
- push
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 title claims abstract description 19
- 239000002994 raw material Substances 0.000 abstract description 28
- 239000002184 metal Substances 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 241000168041 Mazama Species 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Special Conveying (AREA)
- De-Stacking Of Articles (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、例えば金属蒸気発生装置へペレット状の原料
を供給する際等に使用するペレット供給装置に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pellet feeding device used, for example, when feeding pellet-shaped raw materials to a metal steam generator.
[従来の技術]
例えば、真空容器内に坩堝を置き、該坩堝内の溶融金属
に電子ビームを当てて蒸発させ、該蒸発金属を金属表面
に蒸着させるようにした金属蒸気発生装置においては、
従来、原料を坩堝に供給する場合、連続的に供給する装
置が未だ開発されていないので、間欠的に行っている。[Prior Art] For example, in a metal vapor generating device in which a crucible is placed in a vacuum container, molten metal in the crucible is evaporated by being irradiated with an electron beam, and the evaporated metal is deposited on the metal surface.
Conventionally, raw materials have been supplied to a crucible intermittently, since a device for continuously supplying raw materials has not yet been developed.
[発明が解決しようとする問題点]
そのため従来は、原料を供給する度に作業を中断しなけ
ればならず、能率が悪かった。[Problems to be Solved by the Invention] Conventionally, therefore, the work had to be interrupted every time raw materials were supplied, resulting in poor efficiency.
本発明は斯かる実情に鑑み、連続的に原料を供給し得る
ようにしたものである。In view of such circumstances, the present invention is designed to enable continuous supply of raw materials.
E問題点を解決するための手段〕
本発明は、ケーシング内に、直管路の下部に曲管路を連
設してなるガイド筒を配置し、該ガイド筒の側壁部に、
上記曲管路端より直管路上端部に至るスリットを刻設し
、上記曲管路端を平面的に通る円軌跡上に、内部にペレ
ットを積層して収納し得るようにした複数の筒状カセッ
トを上記円軌跡に沿って移動し得るよう設けると共に、
該各カセット内のペレットの下方への落下を防止するテ
ーブルを上記曲管路端上に位置するカセットを除く各カ
セットの下部位置に配置し、又上記曲管路端上に位置し
たカセット内のペレットを順次上方へ押上げてケーシン
グ上部の出口より排出する所要数の押上げブロックを、
上記ガイド筒内に折曲げ自在に連結挿入して、直管路上
端寄りに位置する押上げブロックに、上記スリットを貫
通して外部へ突出する操作杆を固設し、更にガイド筒の
スリットと連通ずるスリットを各カセットの側壁部所定
位置に刻設し、上記操作杆が上記各スリットに沿って移
動し得るようにした構成を有する。Means for Solving Problem E] The present invention provides a guide cylinder in which a curved pipe line is connected to the lower part of a straight pipe line in a casing, and a side wall of the guide cylinder,
A plurality of cylinders are provided with slits extending from the curved pipe end to the straight pipe upper end, and pellets can be stacked and stored inside the cylinders on a circular locus passing through the curved pipe end in a plane. The shaped cassette is provided so as to be movable along the circular locus, and
A table for preventing the pellets in each cassette from falling downward is placed at the bottom of each cassette except for the cassette located on the end of the curved pipe, and A required number of push-up blocks are installed to sequentially push the pellets upward and discharge them from the outlet at the top of the casing.
An operating rod is inserted into the guide cylinder in a bendable manner, and is fixed to a push-up block located near the top end of the straight pipe. A communicating slit is carved at a predetermined position on the side wall of each cassette, and the operating rod is movable along each slit.
[作 用]
ペレットを収納したカセットを曲管路端上に位置させた
状態において、操作杆をスリット沿って移動させると、
操作杆に押された押上げブロックがカセット内のペレッ
トを押上げ、ケーシング上部の出口から排出させる。[Function] When the operating rod is moved along the slit with the cassette containing pellets positioned on the end of the curved pipe,
A push-up block pushed by the operating rod pushes up the pellets in the cassette, causing them to be discharged from the outlet at the top of the casing.
[実 施 例] 以下、図面を参照して本発明の詳細な説明する。[Example] Hereinafter, the present invention will be described in detail with reference to the drawings.
第1図及び第2図に示す如く、開閉可能なケーシングl
内に直管路2の下部に所要の曲率半径の曲管路3を一体
連設して略J字状に形成したガイド筒4を、上記曲管路
3端がケーシングl山中央部に位置するよう配設すると
共に、該ガイド筒4の周壁部前後対向位置に、直管路2
の上端部より曲管路3端に至るよう1字状のスリット5
を刻設する。ケーシングl内のガイド筒4の隣りの位置
には、曲管路3の端面と同一レベルでテーブル6を設置
する。尚テーブル6は第3図に示すように曲管路3端の
位置において、スリット5と干渉しないよう曲管路3側
の部分を適宜切欠いである。テーブル6には、内部の上
下方向にペレット状の原料を積層収納し得るようにした
円筒状カセット8を、周方向所定間隔で複数(図では4
つ)配列すると共に、該各カセット8を第4図にも示す
ように連結材9によって連結し、且つ該連結材9をテー
ブル6の下部に設置したモータ10の軸1.1に連結し
、モータ10の駆動によって各カセット8がテーブルB
上を周方向にスライドするようにし、且つ順次カセット
8が曲管路3端と一致し得るよう構成する。又各カセッ
ト8の側壁部周方向対向位置には、曲管路3端と一致し
た時にスリット5と連通ずるようにしたスリット12を
下端部より上方所定位置まで刻設しである。As shown in Figures 1 and 2, the casing l can be opened and closed.
A guide cylinder 4 formed into a substantially J-shape by integrally connecting a curved pipe line 3 with a required radius of curvature at the lower part of the straight pipe line 2, with the end of the curved pipe line 3 located at the center of the casing L mountain. At the same time, a straight pipe line 2 is arranged at a position facing the front and back of the peripheral wall of the guide cylinder 4.
A single-shaped slit 5 extending from the upper end to the end of the curved pipe 3
to be engraved. A table 6 is installed at a position next to the guide tube 4 in the casing 1 at the same level as the end surface of the curved pipe line 3. As shown in FIG. 3, the table 6 is appropriately cut out at the end of the curved pipe 3 so as not to interfere with the slit 5. The table 6 has a plurality of cylindrical cassettes 8 arranged at predetermined intervals in the circumferential direction (in the figure, 4
(1) arranging the cassettes 8 and connecting each cassette 8 with a connecting member 9 as shown in FIG. Each cassette 8 is moved to the table B by the drive of the motor 10.
The cassette 8 is configured to slide on the top in the circumferential direction, and to sequentially align the cassette 8 with the end of the curved pipe 3. Further, a slit 12 is carved at a circumferentially opposing position on the side wall of each cassette 8 from the lower end to a predetermined position above the lower end so as to communicate with the slit 5 when aligned with the end of the curved pipe line 3.
又、上記ガイド筒4内には、カセット8内に収納された
原料7を順次上方へ押出すための所要数の押上げブロッ
ク13を移動可能に挿入し、該各押上げブロック13の
うちの直管路2端側に位置するブロック13には、スリ
ット5を介してガイド筒4外へ突出する操作杆14を固
設する。In addition, a required number of push-up blocks 13 are movably inserted into the guide cylinder 4 to sequentially push the raw material 7 stored in the cassette 8 upward, and each of the push-up blocks 13 is An operating rod 14 that projects outside the guide tube 4 through the slit 5 is fixed to the block 13 located on the end side of the straight pipe 2.
更に、ガイド筒4の前側部及び後側部には、曲管路3の
曲率半径中心位置と、その上方でスリット5端と同一高
さ位置とに夫々チェンスブロケット15.15を設け、
且つ該上下のスプロケット15.15間に無端チェノ1
6を掛回し、該チェノ1Bに上記操作杆14を接続して
、ケーシング1外に設置したモータ27によりスプロケ
ット15を駆動することによって、操作杆14がスリッ
ト5、更にはスリット12に沿って移動し得るよう構成
する。Further, chain brockets 15 and 15 are provided on the front and rear sides of the guide cylinder 4, respectively, at the center position of the radius of curvature of the curved pipe 3 and above it at the same height as the end of the slit 5.
And an endless chino 1 between the upper and lower sprockets 15 and 15
6, the operating rod 14 is connected to the chino 1B, and the sprocket 15 is driven by the motor 27 installed outside the casing 1, so that the operating rod 14 moves along the slit 5 and further along the slit 12. Configure it so that it can be done.
上記押上げブロック13の詳細は第5図及び第6図に示
しである。即ち、押上げブロック13は全体的には円柱
形状であり、−面の直径位置に軸29が凸段され、該軸
29と係合する満17か他面の同一直径位置に凹設され
、軸29を溝17に順次蟻溝式に連結するようにしてい
る。従って、各押上げブロック13は軸29と溝17と
の周方向の摺動を介し曲管路3の湾曲に沿って自在に揺
動し得る(折れ曲がる)。尚、押上げブロック13は上
記揺動の範囲を大きくとれるよう夫々連結側の両面には
テーパ面18が形成しである。Details of the push-up block 13 are shown in FIGS. 5 and 6. That is, the push-up block 13 has a cylindrical shape as a whole, and a shaft 29 is protruded at a diameter position on the negative face, and recessed at the same diameter position on the other face to engage with the shaft 29. The shaft 29 is sequentially connected to the groove 17 in a dovetail manner. Therefore, each push-up block 13 can freely swing (bend) along the curve of the curved pipe 3 through circumferential sliding between the shaft 29 and the groove 17. Incidentally, the push-up block 13 has tapered surfaces 18 formed on both surfaces of the connection side so that the above-mentioned swinging range can be widened.
斯かる構成としたペレット供給装置は、第7図に示すよ
うな金属蒸気発生装置に装着して使用する。同図におい
て、19は真空容器、20は該真空容器19内に設置さ
れた坩堝、21は該坩堝20内の溶融金属に電子ビーム
22を当てるよう真空容器19の一側上部に設置した電
子銃であり、坩堝20内へ原料を投下供給するためのシ
ュート23が坩堝20と真空容器19の他側部との間に
設けられ、該シュート23の上端部の下方に、ペレット
通路24を有する真空遮断弁25を介して本装置が取付
けである。尚、第2図において、26は原料7の押出し
出口であり、該出口2Bが真空遮断弁25の通路24と
連通する。The pellet feeding device having such a structure is used by being attached to a metal vapor generating device as shown in FIG. In the figure, 19 is a vacuum container, 20 is a crucible installed in the vacuum container 19, and 21 is an electron gun installed at the top of one side of the vacuum container 19 so as to apply an electron beam 22 to the molten metal in the crucible 20. A chute 23 for dropping and supplying raw materials into the crucible 20 is provided between the crucible 20 and the other side of the vacuum vessel 19, and a pellet passage 24 is provided below the upper end of the chute 23. The device is installed via the shutoff valve 25. In FIG. 2, 26 is an extrusion outlet for the raw material 7, and the outlet 2B communicates with the passage 24 of the vacuum cutoff valve 25.
今、モータ27を駆動してスプロケット15を矢印の方
向に回転すると、チェーン16と接続された操作杆14
がスリット5に沿い移動し各押上げブロック13が直管
路2から曲管路3側へ移動せしめられる。尚、各押上げ
ブロック13は揺動可能に連結されているため曲管路3
内でも円滑に滑動する。而して、移動方向先端の押上げ
ブロック13が曲管路3端に達したら、この位置で各ブ
ロック13を待機させておく。次に、モータ10を駆動
して原料7を積層収納しておいた各カセット8をテーブ
ル6上を周方向にスライドさせ、任意のカセット8を曲
管路3端面上に一致させる。カセット8内の原料7はテ
ーブル6上にある時はテーブル6の存在によって落下が
防止されているが、テーブル6は曲管路3と接する部分
に切欠きを設けであるため、テーブル6から外れて曲管
路3端面上に一致したカセット8内の原料7は、ここで
曲管路3内の先端の押上げブロック13上に載置支持さ
れることになる。Now, when the motor 27 is driven and the sprocket 15 is rotated in the direction of the arrow, the operating rod 14 connected to the chain 16
moves along the slit 5, and each push-up block 13 is moved from the straight pipe line 2 to the curved pipe line 3 side. In addition, since each push-up block 13 is connected so as to be swingable, the curved pipe line 3
It slides smoothly even inside. When the push-up block 13 at the leading end in the moving direction reaches the end of the curved pipe line 3, each block 13 is kept on standby at this position. Next, the motor 10 is driven to slide each cassette 8 containing the raw materials 7 in a stacked manner on the table 6 in the circumferential direction, so that any cassette 8 is aligned with the end surface of the curved pipe line 3 . When the raw material 7 in the cassette 8 is on the table 6, it is prevented from falling due to the presence of the table 6, but since the table 6 has a notch in the part where it contacts the curved pipe 3, it falls off the table 6. The raw material 7 in the cassette 8 that is aligned with the end surface of the curved pipe 3 is now placed and supported on the push-up block 13 at the tip of the curved pipe 3.
従って、この状態から再びモータ27を駆動して操作杆
14に移動力を与えると、押上げブロック13がカセッ
ト8内に入り込み原料7を押上げる。押上げられた原料
7は順次ケーシングlの出口26、通路24を通って真
空容器19内のシュート23上端部に達する。原料7は
シュート23の上端部に達すると、外周位置を拘束して
いるものがなくなるためシュート23の傾斜に沿い坩堝
20内に落下供給される。このようにして原料7が次々
に押上げられ連続的に供給される。原料7がシュート2
3の上端部に達した時、必要に応じて押しロッド28を
用いて落下刃を付与するようにしてもよい。尚、操作杆
14が第1図の二点鎖線で示すようにカセット8のスリ
ット12上端位置に達した時に、先端の押上げブロック
13がシュート23上端の直下部に位置するよう押上げ
ブロック13の連結数を選定している。Therefore, when the motor 27 is driven again from this state to apply a moving force to the operating rod 14, the push-up block 13 enters the cassette 8 and pushes up the raw material 7. The pushed up raw material 7 sequentially passes through the outlet 26 of the casing 1 and the passage 24 and reaches the upper end of the chute 23 in the vacuum container 19. When the raw material 7 reaches the upper end of the chute 23, there is no longer anything restraining the outer circumferential position, so that the raw material 7 is supplied falling into the crucible 20 along the slope of the chute 23. In this way, the raw materials 7 are pushed up one after another and are continuously supplied. Raw material 7 is chute 2
When the upper end of 3 is reached, the push rod 28 may be used to apply a falling edge if necessary. The push-up block 13 is adjusted so that when the operating rod 14 reaches the upper end position of the slit 12 of the cassette 8 as shown by the two-dot chain line in FIG. The number of connections is selected.
1つ目のカセット8内の原料7が全部供給されたら、モ
ータ27を逆転し、先端の押上げブロック13が曲管路
3端に一致するまで操作杆14を引戻す。この状態でモ
ータ10を回転し、空になったカセット8をテーブル6
上に移動すると共に、原料7が収納された次のカセット
8を周方向にスライドさせて上記曲管路3端上に一致さ
せる。而して、前述の作動を繰返すことにより、原料7
が坩堝20内に連続的に供給される。When all the raw materials 7 in the first cassette 8 have been supplied, the motor 27 is reversed and the operating rod 14 is pulled back until the push-up block 13 at the tip coincides with the end of the curved pipe 3. In this state, the motor 10 is rotated and the empty cassette 8 is transferred to the table 6.
While moving upward, the next cassette 8 containing the raw material 7 is slid in the circumferential direction to match the end of the curved pipe 3. By repeating the above-mentioned operation, the raw material 7
is continuously supplied into the crucible 20.
尚、本発明は前記実施例にのみ限定されるものではなく
、金属蒸気発生装置以外の装置にも適用し得ること、そ
の池水発明の要旨を逸脱しない限り種々変更を加え得る
ことは勿論である。It goes without saying that the present invention is not limited to the above-mentioned embodiments, but can be applied to devices other than metal steam generators, and that various changes can be made without departing from the gist of the pond water invention. .
[発明の効果]
以上説明したように、本発明のペレット供給装置によれ
ば、カセット内に積層したペレットを押上げブロックの
移動により次々にケーシング外へ排出し得るので、例え
ば金属蒸気発生装置の原料供給用として使用することに
より、原料を連続的に供給することができ、又押上げブ
ロックの移動軌跡を単に直線的でなく直線と曲線とを組
合せたので、装置全高を低く抑えることができる、等の
優れた効果を奏し得る。[Effects of the Invention] As explained above, according to the pellet feeding device of the present invention, the pellets stacked in the cassette can be discharged out of the casing one after another by moving the push-up block. By using it for raw material supply, raw materials can be supplied continuously, and the overall height of the device can be kept low because the movement locus of the push-up block is not just a straight line but a combination of straight and curved lines. , and other excellent effects can be achieved.
第1図は本発明のペレット供給装置の概要を示す斜視図
、第2図は同上一部切断側面図、第3図は第2図の■−
■矢視図、第4図は第2図のIV−IV矢視図、第5図
は押上げブロックの説明図、第6図は押上げブロックの
連結状態を示す説明図、第7図は本発明のペレット供給
装置の使用状態説明図である。
■はケーシング、2は直管路、3は曲管路、4はガイド
筒、5はスリット、6はテーブル、7は原料、8はカセ
ット、9は連結材、10はモータ、11は軸、12はス
リット、13は押上げブロック、■′4は操作杆、15
はスプロケット、16はチェノ、27はモータを示す。Fig. 1 is a perspective view showing an outline of the pellet feeding device of the present invention, Fig. 2 is a partially cutaway side view of the same as above, and Fig. 3 is a -
■An arrow view, Fig. 4 is an IV-IV arrow view in Fig. 2, Fig. 5 is an explanatory diagram of the push-up block, Fig. 6 is an explanatory diagram showing the connected state of the push-up block, and Fig. 7 is an explanatory diagram of the push-up block. FIG. 2 is an explanatory diagram of the usage state of the pellet feeding device of the present invention. ■ is a casing, 2 is a straight pipe, 3 is a curved pipe, 4 is a guide tube, 5 is a slit, 6 is a table, 7 is a raw material, 8 is a cassette, 9 is a connecting material, 10 is a motor, 11 is a shaft, 12 is a slit, 13 is a push-up block, ■'4 is an operating rod, 15
16 represents a sprocket, 16 represents a chino, and 27 represents a motor.
Claims (1)
なるガイド筒を配置し、該ガイド筒の側壁部に、上記曲
管路端より直管路上端部に至るスリットを刻設し、上記
曲管路端を平面的に通る円軌跡上に、内部にペレットを
積層して収納し得るようにした複数の筒状カセットを上
記円軌跡に沿って移動し得るよう設けると共に、該各カ
セット内のペレットの下方への落下を防止するテーブル
を上記曲管路端上に位置するカセットを除く各カセット
の下部位置に配置し、又上記曲管路端上に位置したカセ
ット内のペレットを順次上方へ押上げてケーシング上部
の出口より排出する所要数の押上げブロックを、上記ガ
イド筒内に折曲げ自在に連結挿入して、直管路上端寄り
に位置する押上げブロックに、上記スリットを貫通して
外部へ突出する操作杆を固設し、更にガイド筒のスリッ
トと連通するスリットを各カセットの側壁部所定位置に
刻設し、上記操作杆が上記各スリットに沿って移動し得
るよう構成したことを特徴とするペレット供給装置。1) Inside the casing, a guide cylinder consisting of a straight pipe line and a curved pipe line connected to the lower part is arranged, and a slit is formed in the side wall of the guide cylinder from the end of the curved pipe line to the upper end of the straight pipe line. A plurality of cylindrical cassettes each having a plurality of cylindrical cassettes in which pellets can be stacked and housed are provided on a circular locus that passes through the end of the curved pipe in a plane so as to be movable along the circular locus. , a table for preventing pellets in each cassette from falling downward is arranged at a lower position of each cassette except for the cassette located on the end of the curved pipe, and a table is placed in the cassette located on the end of the curved pipe. The required number of push-up blocks that sequentially push up the pellets upward and discharge them from the outlet at the top of the casing are inserted into the guide cylinder in a bendable manner, and are inserted into the push-up blocks located near the top end of the straight pipe. , an operating rod that penetrates the slit and protrudes to the outside is fixed, and a slit that communicates with the slit of the guide cylinder is carved at a predetermined position on the side wall of each cassette, and the operating rod is inserted along each of the slits. A pellet feeding device characterized in that it is configured to be movable.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22016786A JPS6376863A (en) | 1986-09-18 | 1986-09-18 | Pellet supplying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22016786A JPS6376863A (en) | 1986-09-18 | 1986-09-18 | Pellet supplying device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6376863A true JPS6376863A (en) | 1988-04-07 |
Family
ID=16746933
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22016786A Pending JPS6376863A (en) | 1986-09-18 | 1986-09-18 | Pellet supplying device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6376863A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0390565A (en) * | 1989-08-31 | 1991-04-16 | Laser Noushiyuku Gijutsu Kenkyu Kumiai | Metallic raw material supplying device |
WO2004009864A1 (en) * | 2002-07-22 | 2004-01-29 | Cambridge Display Technology Limited | Pellet feeder |
JP2014234519A (en) * | 2013-05-30 | 2014-12-15 | 国立大学法人東京工業大学 | Film deposition apparatus |
US9389213B2 (en) | 2011-10-25 | 2016-07-12 | Pharmatron Ag | Tablet test station |
US9835533B2 (en) | 2011-10-25 | 2017-12-05 | Sotax Ag | Tablet testing device |
-
1986
- 1986-09-18 JP JP22016786A patent/JPS6376863A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0390565A (en) * | 1989-08-31 | 1991-04-16 | Laser Noushiyuku Gijutsu Kenkyu Kumiai | Metallic raw material supplying device |
WO2004009864A1 (en) * | 2002-07-22 | 2004-01-29 | Cambridge Display Technology Limited | Pellet feeder |
GB2406562A (en) * | 2002-07-22 | 2005-04-06 | Cambridge Display Tech Ltd | Pellet feeder |
GB2406562B (en) * | 2002-07-22 | 2005-12-28 | Cambridge Display Tech Ltd | Pellet feeder |
US9389213B2 (en) | 2011-10-25 | 2016-07-12 | Pharmatron Ag | Tablet test station |
US9835533B2 (en) | 2011-10-25 | 2017-12-05 | Sotax Ag | Tablet testing device |
JP2014234519A (en) * | 2013-05-30 | 2014-12-15 | 国立大学法人東京工業大学 | Film deposition apparatus |
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