JPS6375707A - Preparation of film thickness distributed film - Google Patents
Preparation of film thickness distributed filmInfo
- Publication number
- JPS6375707A JPS6375707A JP21977286A JP21977286A JPS6375707A JP S6375707 A JPS6375707 A JP S6375707A JP 21977286 A JP21977286 A JP 21977286A JP 21977286 A JP21977286 A JP 21977286A JP S6375707 A JPS6375707 A JP S6375707A
- Authority
- JP
- Japan
- Prior art keywords
- film
- solvent
- light
- light reactive
- reactive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002904 solvent Substances 0.000 claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 5
- 239000000126 substance Substances 0.000 claims description 19
- 230000001678 irradiating effect Effects 0.000 claims description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical group C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 claims 2
- 229920000642 polymer Polymers 0.000 abstract description 7
- HVYWMOMLDIMFJA-DPAQBDIFSA-N cholesterol Chemical compound C1C=C2C[C@@H](O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2 HVYWMOMLDIMFJA-DPAQBDIFSA-N 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 6
- 229920003023 plastic Polymers 0.000 abstract description 5
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical compound [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 abstract description 5
- 238000006116 polymerization reaction Methods 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- 235000012000 cholesterol Nutrition 0.000 abstract description 3
- 229940114081 cinnamate Drugs 0.000 abstract description 3
- 238000007796 conventional method Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229930016911 cinnamic acid Natural products 0.000 description 2
- 235000013985 cinnamic acid Nutrition 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012719 thermal polymerization Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- WGXGKXTZIQFQFO-CMDGGOBGSA-N ethenyl (e)-3-phenylprop-2-enoate Chemical compound C=COC(=O)\C=C\C1=CC=CC=C1 WGXGKXTZIQFQFO-CMDGGOBGSA-N 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 238000011907 photodimerization Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
- G02B6/1245—Geodesic lenses
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
膜厚分布膜の作製方法であって、光反応性物質を含む膜
に溶媒を含ませ、光照射と同時に、または光照射後に膜
中より溶媒を除去することにより、膜厚分布膜を作製す
るために使用できる光反応性物質及びパインディング用
高分子の種類及び重合度の選択幅を広げることを可能と
する。[Detailed Description of the Invention] [Summary] A method for producing a thickness distribution film, which involves impregnating a film containing a photoreactive substance with a solvent, and removing the solvent from the film simultaneously with or after light irradiation. By doing so, it is possible to widen the selection range of types and degree of polymerization of photoreactive substances and binding polymers that can be used to produce a thickness distribution film.
本発明は膜厚分布膜の作製方法に関するもので、さらに
詳しく言えば、プラスチックマイクロレンズ、プラスチ
ック導波管、ホログラム等の作製方法に関するものであ
る。The present invention relates to a method for manufacturing a thickness distribution film, and more specifically, to a method for manufacturing a plastic microlens, a plastic waveguide, a hologram, and the like.
プラスチックレンズは、光フアイバ通信における光の分
岐、結合、合波、分波等への応用、光集積回路における
発光ダイオード集光や導波路レンズへの応用などアレイ
化及び微小化の要求が高まっている。このためアレイ化
が容易で安価なレンズアレイの製造方法が必要とされて
いる。Demand for plastic lenses to be arrayed and miniaturized is increasing for applications such as branching, coupling, multiplexing, and demultiplexing of light in optical fiber communications, as well as applications in light-emitting diode condensing and waveguide lenses in optical integrated circuits. There is. Therefore, there is a need for a method of manufacturing a lens array that is easy to form into an array and is inexpensive.
従来の膜Ｉ￥分布膜の作製方法は第２図ａに示すように
基板１の上に形成された光反応性物質を含む膜２に対し
マスク３を用いて局部的に光・１を照射することにより
第２図すのように光照射された部分に光反応生成物を生
成させて膜形状を変化させ、レンズ５等を形成していた
。The conventional method for producing a film I distribution film is to locally irradiate a film 2 containing a photoreactive substance formed on a substrate 1 with light 1 using a mask 3, as shown in FIG. 2a. As a result, as shown in FIG. 2, a photoreaction product is generated in the irradiated portion, changing the shape of the film, and forming a lens 5 and the like.
〔発明が解決し７ようとする問題点〕
光化学反応を利用して膜厚分布膜を作製する方法では、
（１）光反応性物質が膜中を拡散することと、（２）少
なくとも光反応性物質と光反応生成物の混合状態では液
性を有することが必要である。（１）は膜形状が変化す
るために必要であり、（２）は表面張力が働らいて曲面
ができるために必要である。従って前記従来の膜厚分布
膜の作製方法では溶媒を用いていないため、例えばけい
皮酸やけい皮酸コレステロールのような光反応性物質は
モノマが膜中を拡散しない。またモノマとダイマの混合
物は光照射温度で固体であるために使えない。また同様
に光反応性物質のモノマが拡散しないため重合度の大き
い高分子をバインダーとして使えない等の欠点があった
。[Problems that the invention attempts to solve] In the method of producing a thickness distribution film using a photochemical reaction,
(1) It is necessary that the photoreactive substance diffuses in the film, and (2) it is necessary that at least the mixed state of the photoreactive substance and the photoreaction product has liquid properties. (1) is necessary because the membrane shape changes, and (2) is necessary because surface tension acts to form a curved surface. Therefore, since a solvent is not used in the conventional method for producing a thickness distribution film, the monomer of a photoreactive substance such as cinnamic acid or cholesterol cinnamate does not diffuse through the film. Also, a mixture of monomer and dimer cannot be used because it is solid at the temperature of light irradiation. Similarly, since the monomer of the photoreactive substance does not diffuse, there are drawbacks such as the inability to use polymers with a high degree of polymerization as a binder.
本発明はこのような点に層みて創作されたもので、膜厚
分布膜を作製するために使用できる光反応性物質及びパ
インディング用高分子の種類及び重合度の選択幅の広い
膜厚分布膜の作製方法を従供することを目的としている
。The present invention was created in consideration of these points, and has a thickness distribution that allows for a wide selection of types and degree of polymerization of photoreactive substances and binding polymers that can be used to produce a thickness distribution film. The purpose is to provide a method for producing membranes.
このため本発明においては、少なくとも光反応性物質を
含む膜１１に局部的に光照射し膜厚分布膜を作製する方
法において、上記１１１に溶媒を含ませ、光照射と同時
に、または光照射後に膜中より溶媒が除去されることを
特徴としている。Therefore, in the present invention, in the method of fabricating a thickness distribution film by locally irradiating the film 11 containing at least a photoreactive substance with light, the above-mentioned 111 is impregnated with a solvent, and simultaneously with or after the light irradiation. The feature is that the solvent is removed from the membrane.
光反応性物質を含む膜１１に溶媒を含ませることにより
、光反応性物質が膜中を拡散することができ、また光反
応性物質と光反応生成物の混合状態で液性を有するため
、従来使えなかった光反応性物質やパインディング用高
分子を使用することが可能となる。By including a solvent in the film 11 containing the photoreactive substance, the photoreactive substance can be diffused in the film, and since the mixture of the photoreactive substance and the photoreaction product has liquid properties, It becomes possible to use photoreactive substances and binding polymers that were previously unavailable.
本実施例は先ず第１図ａに示すように、基板１０の上に
光反応性物質及び溶媒を含む膜１１を形成し、該膜１１
にマスク１２を用いて光１３を局部的に照射し、第１図
すの如く膜形状を変化させてレンズ１４等を形成し、溶
媒は光照射と同時にまたは光照射後に除去するのである
。In this embodiment, as shown in FIG. 1a, first, a film 11 containing a photoreactive substance and a solvent is formed on a substrate 10, and
Then, the light 13 is locally irradiated using a mask 12, and the film shape is changed as shown in FIG. 1 to form a lens 14, etc., and the solvent is removed at the same time or after the light irradiation.
溶媒としては、第１表に示す如きものを用いることがで
きる。As the solvent, those shown in Table 1 can be used.
第 １ 表
第１表は溶媒と共に光反応性物質及びバインダーを示し
ている。例１及び例２の溶媒は光照射後、アニールによ
り除去する。例３の溶媒であるけい皮酸ビニルは同時に
光二量化反応する物質であり、またビニル基をもってい
るため熱重合反応もするので後処理としてアニールによ
り熱重合を行ない安定化する。Table 1 Table 1 shows the photoreactive material and binder along with the solvent. The solvents in Examples 1 and 2 are removed by annealing after irradiation with light. Vinyl cinnamate, which is the solvent in Example 3, is a substance that simultaneously undergoes a photodimerization reaction, and since it has a vinyl group, it also undergoes a thermal polymerization reaction, so it is stabilized by performing thermal polymerization by annealing as a post-treatment.
これら実施例では溶媒が膜中に存在することによって光
反応性物質は膜中を拡散でき、表面張力が働いて曲面が
形成でき、レンズや光導波路などの膜厚分布膜を作製す
ることができる。In these examples, the presence of a solvent in the film allows the photoreactive substance to diffuse through the film, and surface tension acts to form a curved surface, making it possible to fabricate thickness distribution films such as lenses and optical waveguides. .
以上述べてきたように、本発明によれば、膜に溶媒が含
まれないときには膜厚分布膜の作製に使えなかったけい
皮酸やけい皮酸コレステロール等の光反応性物質やパイ
ンディング高分子を溶媒を含ませることにより使用する
ことができ、実用的には極めて有用である。As described above, according to the present invention, photoreactive substances such as cinnamic acid and cholesterol cinnamate, and binding polymers, which could not be used to prepare a thickness distribution film when the film does not contain a solvent, can be used. can be used by including a solvent, and is extremely useful in practice.
第１図は本発明の詳細な説明するための閣、第２図は従
来の膜厚分布膜の作製方法を説明するための図である。
第１図において、
１０は基板、
１１は光反応性物質及び溶媒を含む膜、１２はマスク、
１３は光、
１４はレンズである。FIG. 1 is a diagram for explaining the present invention in detail, and FIG. 2 is a diagram for explaining a conventional method for manufacturing a thickness distribution film. In FIG. 1, 10 is a substrate, 11 is a film containing a photoreactive substance and a solvent, 12 is a mask, 13 is a light, and 14 is a lens.
Claims (1)
に光照射し膜厚分布膜を作製する方法において、 上記膜（１１）に溶媒を含み、光照射と同時に、または
光照射後に膜中より溶媒が除去されることを特徴とする
膜厚分布膜の作製方法。 ２、上記溶媒が１，４−ジオキサンまたは１，４−ジオ
キサンより光照射温度での蒸気圧が低い溶媒であること
を特徴とする特許請求の範囲第１項記載の膜厚分布膜の
作製方法。[Claims] 1. In a method of producing a thickness distribution film by locally irradiating a film (11) containing at least a photoreactive substance with light, the film (11) contains a solvent, and simultaneously with the light irradiation. , or a method for producing a thickness distribution film, characterized in that a solvent is removed from the film after light irradiation. 2. The method for producing a thickness distribution film according to claim 1, wherein the solvent is 1,4-dioxane or a solvent having a lower vapor pressure at the light irradiation temperature than 1,4-dioxane. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61219772A JP2530626B2 (en) | 1986-09-19 | 1986-09-19 | Method of producing film thickness distribution film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61219772A JP2530626B2 (en) | 1986-09-19 | 1986-09-19 | Method of producing film thickness distribution film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6375707A true JPS6375707A (en) | 1988-04-06 |
| JP2530626B2 JP2530626B2 (en) | 1996-09-04 |
Family
ID=16740765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61219772A Expired - Fee Related JP2530626B2 (en) | 1986-09-19 | 1986-09-19 | Method of producing film thickness distribution film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2530626B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100425511B1 (en) * | 2000-08-23 | 2004-03-30 | 양근창 | Apparatus and Method for Manufacturing light guide plate for plane light source unit |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597362A (en) * | 1982-06-25 | 1984-01-14 | ミネソタ・マイニング・アンド・マニユフアクチユアリング・コンパニ− | Photothermographic sensitive laminate |
-
1986
- 1986-09-19 JP JP61219772A patent/JP2530626B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597362A (en) * | 1982-06-25 | 1984-01-14 | ミネソタ・マイニング・アンド・マニユフアクチユアリング・コンパニ− | Photothermographic sensitive laminate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100425511B1 (en) * | 2000-08-23 | 2004-03-30 | 양근창 | Apparatus and Method for Manufacturing light guide plate for plane light source unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2530626B2 (en) | 1996-09-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |