JPS6375032U - - Google Patents

Info

Publication number
JPS6375032U
JPS6375032U JP17001186U JP17001186U JPS6375032U JP S6375032 U JPS6375032 U JP S6375032U JP 17001186 U JP17001186 U JP 17001186U JP 17001186 U JP17001186 U JP 17001186U JP S6375032 U JPS6375032 U JP S6375032U
Authority
JP
Japan
Prior art keywords
internal space
protective cover
baking oven
shutters
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17001186U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17001186U priority Critical patent/JPS6375032U/ja
Publication of JPS6375032U publication Critical patent/JPS6375032U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す概略断面図、
第２図は他の実施例を示す概略断面図、第３図は
本考案が適用される一例としての感光材料塗布装
置を示す概略斜視図、第４図は従来のベーキング
炉を示す概略断面図である。 １０，２８……ホツトプレート、１２……保護
カバー、２２……基板、２４，２６……シヤツタ
、３８，４０……モータ、４２，４４，４６……
センサ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 内部空間を保護カバーで被い、入口と出口には
    前記内部空間を密閉できるシヤツタを設け、前記
    内部空間においては所定の膜が塗布された基板が
    載置される位置の上方及び下方にホツトプレート
    を設けたベーキング炉。
JP17001186U 1986-11-04 1986-11-04 Pending JPS6375032U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17001186U JPS6375032U (ja) 1986-11-04 1986-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17001186U JPS6375032U (ja) 1986-11-04 1986-11-04

Publications (1)

Publication Number Publication Date
JPS6375032U true JPS6375032U (ja) 1988-05-19

Family

ID=31104349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17001186U Pending JPS6375032U (ja) 1986-11-04 1986-11-04

Country Status (1)

Country Link
JP (1) JPS6375032U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01300519A (ja) * 1988-05-27 1989-12-05 Tokyo Electron Ltd 加熱方法及び処理装置及び処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01300519A (ja) * 1988-05-27 1989-12-05 Tokyo Electron Ltd 加熱方法及び処理装置及び処理方法

Similar Documents

Publication Publication Date Title
JPS6375032U (ja)
JPS61110081U (ja)
JPS621302U (ja)
JPH0261957U (ja)
JPS58176505U (ja) 閉鎖配電盤
JPS622038U (ja)
JPS6279081U (ja)
JPH0330242U (ja)
JPS61138944U (ja)
JPH0247206U (ja)
JPH038614U (ja)
JPH0339293U (ja)
JPH02136252U (ja)
JPH01168645U (ja)
JPS62117421U (ja)
JPS6177299U (ja)
JPH0367059U (ja)
JPS6158327U (ja)
JPS6287835U (ja)
JPS6141248U (ja) フイルムパツク用遮光シ−ト
JPS587005U (ja) スト−ブの外筒
JPS6166710U (ja)
JPS6263731U (ja)
JPS62164054U (ja)
JPS5993677U (ja) コ−タ−パン内塗料温度均一化装置