JPS637427B2 - - Google Patents
Info
- Publication number
- JPS637427B2 JPS637427B2 JP55130171A JP13017180A JPS637427B2 JP S637427 B2 JPS637427 B2 JP S637427B2 JP 55130171 A JP55130171 A JP 55130171A JP 13017180 A JP13017180 A JP 13017180A JP S637427 B2 JPS637427 B2 JP S637427B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- microwave
- cavity
- discharge lamp
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005672 electromagnetic field Effects 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 239000003989 dielectric material Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
- H01J61/547—Igniting arrangements, e.g. promoting ionisation for starting using an auxiliary electrode outside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Description
【発明の詳細な説明】
この発明は、マイクロ波放電を利用したマイク
ロ波放電光源装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a microwave discharge light source device that utilizes microwave discharge.
最近、放電利用の光源装置として高周波放電、
高周波に特にマイクロ波を用いた光源装置が注目
されている。従来の有電極の光源装置では、ラン
プの寿命が電極の消耗により決定されていたが、
マイクロ波を用いた光源装置では、ランプを無電
極にできるため、ランプ寿命が長くなるという特
長がある。また、電極による熱損失がなく、放電
の初期状態と安定状態でインピーダンスの差が小
さいため、安定状態でインピーダンス整合させた
場合でも、初期状態での電力注入が容易であり、
さらに放電電力がランプ管壁に偏つている等のた
めに、最大出力到達までの時間が短くなるという
特長もある。 Recently, high-frequency discharge has been used as a light source device that uses discharge.
Light source devices that use high frequencies, particularly microwaves, are attracting attention. In conventional light source devices with electrodes, the lamp life was determined by the wear and tear of the electrodes.
Light source devices that use microwaves have the advantage of long lamp life because the lamp can be made electrodeless. In addition, there is no heat loss due to the electrodes, and the difference in impedance between the initial state of discharge and the stable state is small, so even if impedance matching is performed in the stable state, power injection in the initial state is easy.
Furthermore, since the discharge power is concentrated on the lamp tube wall, it also has the advantage that the time required to reach the maximum output is shortened.
第１図は、このような先行技術に係るマイクロ
波放電光源装置の構成を示す縦断面図で、１はマ
グネトロン、２はマグネトロンアンテナ、３は導
波管、４は内壁の形状を回転対称形に形成された
マイクロ波空胴、５は空胴４と導波管３の接合部
に設けられたマイクロ波給電口、６は球形に形成
された無電極放電灯、６ａは管体と一体に形成さ
れた支持用の突起、７はフアン、８は導波管３の
一部に設けられた通気口、９は空胴４の前面を覆
う金属メツシユ板、１０はマグネトロン１、導波
管３、空胴４等を覆う箱体、１１は支持用の突起
６ａに嵌合して放電灯６を支持する石英ガラス等
の低損失の誘電体で形成された支持部材である。 FIG. 1 is a longitudinal cross-sectional view showing the configuration of such a microwave discharge light source device according to the prior art, in which 1 is a magnetron, 2 is a magnetron antenna, 3 is a waveguide, and 4 is an inner wall whose shape is rotationally symmetrical. 5 is a microwave power supply port provided at the junction of the cavity 4 and the waveguide 3; 6 is a spherical electrodeless discharge lamp; 6a is integrally formed with the tube body; 7 is a fan, 8 is a vent provided in a part of the waveguide 3, 9 is a metal mesh plate covering the front surface of the cavity 4, 10 is the magnetron 1, and the waveguide 3 , a box body covering the cavity 4 and the like, and 11 a support member made of a low-loss dielectric material such as quartz glass that fits into the support protrusion 6a to support the discharge lamp 6.
次に動作について説明する。マグネトロン１に
よつて発生したマイクロ波は、マグネトロンアン
テナ２を通じて導波管３中に放射される。このマ
イクロ波は、導波管３を伝幡し、給電口５を通し
て空胴４中に放射され、空胴４中にマイクロ波電
磁界を形成する。このマイクロ波電磁界により、
放電灯６中のガスが放電して放電灯の内壁が熱せ
られ、管内に封入された水銀等の金属が加熱され
て蒸発し、放電は金属ガスの放電に移行し、封入
金属の種類に応じた特定の発光スペクトルを持つ
光が放射される。この光を有効に利用するため、
空胴４の後面で反射面を形成させるとともに、前
面をマイクロ波は透過させないが、光は透過させ
る金属メツシユ板９で覆い、光を前方のみに投射
させている。放電灯６は球形であり、点光源に近
似できるので、空胴４の反射面の形状を回転対称
形とし、この形状を適宜設定することにより、円
形の面域内で所望の照度分布、例えば均一照度が
得られる。なお放電灯６は空胴内のマイクロ波電
磁界分布の変化の少ない位置に置くことができる
ので発光むらは少ないので、均一な照度分布をう
るうえで有利である。 Next, the operation will be explained. Microwaves generated by the magnetron 1 are radiated into a waveguide 3 through a magnetron antenna 2. This microwave propagates through the waveguide 3 and is radiated into the cavity 4 through the feed port 5, forming a microwave electromagnetic field within the cavity 4. This microwave electromagnetic field causes
The gas in the discharge lamp 6 is discharged and the inner wall of the discharge lamp is heated, and the metal such as mercury sealed in the tube is heated and evaporated, and the discharge shifts to a discharge of metal gas, depending on the type of sealed metal. Light with a specific emission spectrum is emitted. In order to make effective use of this light,
A reflective surface is formed on the rear surface of the cavity 4, and the front surface is covered with a metal mesh plate 9 that does not transmit microwaves but transmits light, so that light is projected only forward. Since the discharge lamp 6 is spherical and can be approximated to a point light source, by making the shape of the reflecting surface of the cavity 4 rotationally symmetrical and setting this shape appropriately, a desired illuminance distribution, for example, uniformity, can be achieved within a circular surface area. Provides illuminance. Note that since the discharge lamp 6 can be placed in a position within the cavity where the distribution of the microwave electromagnetic field is less likely to change, there is little unevenness in light emission, which is advantageous in obtaining a uniform illuminance distribution.
この先行技術によるマイクロ波放電光源装置の
空胴のマイクロ波インピーダンスは、放電灯の点
灯前と点灯後で異なるが、マイクロ波入力を有効
に放電エネルギーとして用いるため、点灯後、安
定放電状態でインピーダンス整合させる必要があ
る。このようにした場合、点灯前にはインピーダ
ンス不整合の状態になり、空胴内に形成される電
磁界が弱くなる。この電磁界が放電灯の放電開始
電磁界より弱ければ、放電灯は点灯しないので、
インピーダンス不整合の状態で、放電開始電磁界
強度を形成しうる大きなマイクロ波入力が必要
で、大出力のマイクロ波発生装置を必要とする欠
点があつた。 The microwave impedance of the cavity of the microwave discharge light source device according to this prior art is different before and after the discharge lamp is lit, but since the microwave input is effectively used as discharge energy, the impedance in the stable discharge state after lighting is It is necessary to harmonize. In this case, a state of impedance mismatch occurs before lighting, and the electromagnetic field formed within the cavity becomes weak. If this electromagnetic field is weaker than the discharge starting electromagnetic field of the discharge lamp, the discharge lamp will not light up.
In a state of impedance mismatch, a large microwave input capable of forming a discharge starting electromagnetic field strength is required, and a high output microwave generator is required.
この発明は、上記のような従来のものの欠点を
除去するためになされたもので、誘電体で覆れた
金属よりなり、空胴内の電界磁界を放電灯内に集
中させる放電始動補助体を、放電灯の放電領域の
外側に、上記放電灯と近接すると共に、マイクロ
波空胴の空胴壁と電気的に非接触に設けることに
より、点灯性を改善し、もつてマイクロ波発生装
置の小容量化、安定化を可能としたものである。 This invention was made in order to eliminate the drawbacks of the conventional ones as described above, and includes a discharge starting auxiliary body that is made of metal covered with a dielectric material and concentrates the electric field and magnetic field in the cavity into the discharge lamp. is provided outside the discharge area of the discharge lamp, in close proximity to the discharge lamp and without electrical contact with the cavity wall of the microwave cavity, thereby improving lighting performance and improving the efficiency of the microwave generator. This makes it possible to reduce the capacity and stabilize it.
第２図はこの発明の一実施例の要部の拡大断面
図で、１２は放電灯６の外壁面に放電灯６の管体
と同質の材料、例えば石英ガラスで一体に形成さ
れた突起、１３は突起１２の内部に埋設された金
属線などで形成された放電始動補助体である。こ
の補助体１３を設けると、点灯前の空胴内に生じ
る電磁界が弱い場合でも、放電始動補助体１３が
電磁界に対しアンテナの働きをし、両端で電界Ｅ
で示すように電磁界の集中が起こつて電磁界強度
が高まり、放電灯内部の電磁界強度を放電開始電
磁界強度よりも高くすることができ、確実に点灯
させることができるので、点灯のためにマイクロ
波入力を大きくすることが不要となる。 FIG. 2 is an enlarged sectional view of a main part of an embodiment of the present invention, in which 12 is a protrusion integrally formed on the outer wall surface of the discharge lamp 6 with the same material as the tube body of the discharge lamp 6, for example, quartz glass; Reference numeral 13 denotes a discharge starting auxiliary body formed of a metal wire or the like buried inside the projection 12. By providing this auxiliary body 13, even if the electromagnetic field generated in the cavity before lighting is weak, the discharge starting auxiliary body 13 acts as an antenna for the electromagnetic field, and the electric field E
As shown in , concentration of the electromagnetic field occurs and the electromagnetic field strength increases, making it possible to make the electromagnetic field strength inside the discharge lamp higher than the electromagnetic field strength at the start of the discharge, ensuring reliable lighting. It becomes unnecessary to increase the microwave input.
なお、この例のように放電始動補助体１３が石
英ガラスのような誘電体の内部に埋め込まれてい
るので誘電体の絶縁破壊電界は気中よりかなり大
きいため、放電灯外部で気中スパーク等の放電を
起こす危険が少なくなる。また、補助体１３は放
電灯内部の放電にも直接さらされていないので金
属のスパツタリングがなく、放電ガスの劣化も少
ない。さらに、放電灯の点灯前の状態、すなわち
インピーダンス整合のとれていない状態では空胴
内の電磁界分布は、給電口５に近い部分で強く、
給電口５より離れるに従つて弱くなる傾向にあ
る。よつて、放電始動補助体１３の一端がマイク
ロ波給電口５の近傍に位置するように配設すれ
ば、放電灯内部の電磁界をより強めることがで
き、放電開始をより容易にすることができる。 In addition, as in this example, the discharge starting auxiliary body 13 is embedded inside a dielectric material such as quartz glass, and the dielectric breakdown electric field of the dielectric material is considerably larger than that in the air, so that air sparks etc. may occur outside the discharge lamp. The risk of causing a discharge is reduced. Furthermore, since the auxiliary body 13 is not directly exposed to the discharge inside the discharge lamp, there is no metal sputtering and there is little deterioration of the discharge gas. Furthermore, in the state before the discharge lamp is lit, that is, in the state where impedance matching is not achieved, the electromagnetic field distribution inside the cavity is strong in the part near the power supply port 5,
It tends to become weaker as the distance from the power supply port 5 increases. Therefore, if one end of the discharge starting auxiliary body 13 is located near the microwave power supply port 5, the electromagnetic field inside the discharge lamp can be further strengthened, and the discharge can be started more easily. can.
なお、放電始動補助体１３は放電灯の安定放電
状態では、放電灯のインピーダンスに比べて無視
できる程度のインピーダンスになるので、放電灯
の安定状態に影響を及ぼすことはない。 The discharge starting auxiliary body 13 has an impedance that is negligible compared to the impedance of the discharge lamp when the discharge lamp is in a stable discharge state, so that it does not affect the stable state of the discharge lamp.
以上のように、この発明は、マイクロ波放電光
源装置において、マイクロ波電磁界を形成するマ
イクロ波空胴、上記空胴内に配設された放電灯、
この放電灯の放電領域の外側に、上記放電灯と近
接すると共に、マイクロ波空胴の空胴壁と電気的
に非接触に配設され、誘電体で覆われた金属より
なる放電始動補助体を備えたので、安定で、点灯
性の良い装置を提供するものである。 As described above, the present invention provides a microwave discharge light source device including a microwave cavity that forms a microwave electromagnetic field, a discharge lamp disposed within the cavity,
A discharge starting auxiliary body made of a metal covered with a dielectric material is disposed outside the discharge area of the discharge lamp in close proximity to the discharge lamp and in electrically non-contact with the cavity wall of the microwave cavity. This provides a device that is stable and has good lighting performance.
第１図は先行技術に係るマイクロ波放電光源装
置の構成を示す縦断面図、第２図はこの発明の一
実施例の要部拡大断面図である。
図において、１はマグネトロン、２はアンテ
ナ、３は導波管、４はマイクロ波空胴、５は給電
口、６は放電灯、６ａは支持用突起、９は金属メ
ツシユ板、１１は支持部材、１３は放電始動補助
体である。なお、図中、同一符号はそれぞれ同
一、又は相当部分を示す。
FIG. 1 is a longitudinal sectional view showing the configuration of a microwave discharge light source device according to the prior art, and FIG. 2 is an enlarged sectional view of a main part of an embodiment of the present invention. In the figure, 1 is a magnetron, 2 is an antenna, 3 is a waveguide, 4 is a microwave cavity, 5 is a power feed port, 6 is a discharge lamp, 6a is a support projection, 9 is a metal mesh plate, and 11 is a support member , 13 is a discharge starting auxiliary body. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
胴、上記空胴内に配設された放電灯、およびこの
放電灯の放電領域の外側に、上記放電灯と近接す
ると共に上記マイクロ波空胴の空胴壁と電気的に
非接触に配設され、誘電体で覆われた金属よりな
る放電始動補助体を備えたマイクロ波放電光源装
置。 ２ 放電始動補助体の一端がマイクロ波給電口の
近傍に位置するように配設したことを特徴とする
特許請求の範囲第１項記載のマイクロ波放電光源
装置。 ３ 放電灯の管壁に突起を設け、この突起内に放
電始動補助体を埋設したことを特徴とする特許請
求の範囲第１項又は第２項記載のマイクロ波放電
光源装置。[Scope of Claims] 1. A microwave cavity that forms a microwave electromagnetic field, a discharge lamp disposed within the cavity, and a discharge lamp located outside the discharge area of the discharge lamp, adjacent to the discharge lamp, and A microwave discharge light source device comprising a discharge starting auxiliary body made of a metal covered with a dielectric and disposed in a non-electrical contact with the cavity wall of a microwave cavity. 2. The microwave discharge light source device according to claim 1, wherein one end of the discharge starting auxiliary body is located near the microwave power supply port. 3. The microwave discharge light source device according to claim 1 or 2, characterized in that a projection is provided on the tube wall of the discharge lamp, and a discharge starting aid is embedded within the projection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13017180A JPS5755057A (en) | 1980-09-19 | 1980-09-19 | Microwave discharge light source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13017180A JPS5755057A (en) | 1980-09-19 | 1980-09-19 | Microwave discharge light source |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP155886A Division JPS61179054A (en) | 1986-01-08 | 1986-01-08 | Microwave discharge light source device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5755057A JPS5755057A (en) | 1982-04-01 |
| JPS637427B2 true JPS637427B2 (en) | 1988-02-16 |
Family
ID=15027718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13017180A Granted JPS5755057A (en) | 1980-09-19 | 1980-09-19 | Microwave discharge light source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5755057A (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0195462A (en) * | 1987-10-05 | 1989-04-13 | Matsushita Electric Works Ltd | Electrodeless discharge lamp |
| JPH0416865U (en) * | 1990-05-31 | 1992-02-12 | ||
| JPH0438659U (en) * | 1990-07-28 | 1992-03-31 | ||
| CN1436362A (en) | 2000-04-26 | 2003-08-13 | 康奈尔研究基金会股份有限公司 | Lamp utilizing fibre for enhanced starting field |
| KR100425725B1 (en) * | 2001-07-20 | 2004-04-03 | 엘지전자 주식회사 | Microwave lighting system |
| US6897615B2 (en) | 2001-11-01 | 2005-05-24 | Axcelis Technologies, Inc. | Plasma process and apparatus |
| JP2009532823A (en) * | 2006-01-04 | 2009-09-10 | ラクシム コーポレーション | Plasma lamp with electric field concentration antenna |
| JP4872454B2 (en) * | 2006-05-23 | 2012-02-08 | ウシオ電機株式会社 | Electromagnetic excitation light source device |
| JP4254853B2 (en) | 2006-12-14 | 2009-04-15 | セイコーエプソン株式会社 | Lamp, light emitting device and projector |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5079976A (en) * | 1973-11-15 | 1975-06-28 | ||
| JPS5231059B2 (en) * | 1972-08-09 | 1977-08-12 | ||
| JPS5482876A (en) * | 1977-12-15 | 1979-07-02 | Mitsubishi Electric Corp | Fluorescent lamp without electrode |
| JPS56102169A (en) * | 1980-01-18 | 1981-08-15 | Matsushita Electric Ind Co Ltd | Solid image pickup device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5616760Y2 (en) * | 1975-08-26 | 1981-04-18 |
-
1980
- 1980-09-19 JP JP13017180A patent/JPS5755057A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231059B2 (en) * | 1972-08-09 | 1977-08-12 | ||
| JPS5079976A (en) * | 1973-11-15 | 1975-06-28 | ||
| JPS5482876A (en) * | 1977-12-15 | 1979-07-02 | Mitsubishi Electric Corp | Fluorescent lamp without electrode |
| JPS56102169A (en) * | 1980-01-18 | 1981-08-15 | Matsushita Electric Ind Co Ltd | Solid image pickup device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5755057A (en) | 1982-04-01 |
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