JPS6364377A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPS6364377A JPS6364377A JP20836386A JP20836386A JPS6364377A JP S6364377 A JPS6364377 A JP S6364377A JP 20836386 A JP20836386 A JP 20836386A JP 20836386 A JP20836386 A JP 20836386A JP S6364377 A JPS6364377 A JP S6364377A
- Authority
- JP
- Japan
- Prior art keywords
- reflecting mirror
- duct
- side flow
- laser
- cylindrical member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000000428 dust Substances 0.000 abstract description 9
- 230000014759 maintenance of location Effects 0.000 abstract 1
- 230000000087 stabilizing effect Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 8
- 210000000078 claw Anatomy 0.000 description 6
- 238000004891 communication Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 241000270295 Serpentes Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明はレーザ発振器に関し、特にガスレーザ発振器に
おける反射鏡の劣化防止を図ったレーザ発振器に関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser oscillator, and more particularly to a laser oscillator in which deterioration of a reflecting mirror in a gas laser oscillator is prevented.
［従来の技術］
先ずこの種のガスレーザ発振器について説明すると、こ
の装置は、真空筐体内に００２ガスなどから成るレーザ
媒質を封入して、筐体内部に配設された放電電極によっ
てグロー放電を発生させ、この放電エネルギーによって
レーザ媒質を励起させるようにしている。励起されたレ
ーザ媒質からはレーザ光が発生するが、この際筐体両側
に装着された１対の全反射鏡及び部分反射鏡によって反
射を繰り返す、この間放電空間を循環するレーザ媒質が
次々と励起されレーザ光の発生をもたらし、反射鏡間を
往復して所定のレーザ光が部分反射鏡から外部に射出さ
れて所定の加工に供されることになる。[Prior Art] First, this type of gas laser oscillator will be explained. In this device, a laser medium made of 002 gas or the like is sealed in a vacuum casing, and a glow discharge is generated by a discharge electrode arranged inside the casing. The discharge energy excites the laser medium. Laser light is generated from the excited laser medium, and at this time, it is repeatedly reflected by a pair of total reflection mirrors and partial reflection mirrors installed on both sides of the housing. During this time, the laser medium circulating in the discharge space is excited one after another. This results in the generation of laser light, which travels back and forth between the reflecting mirrors and is emitted from the partial reflecting mirror to the outside for use in a predetermined process.
然して、上記反射鏡の取付部を拡大して示したものが第
２図である。同図は部分反射鏡の取付部を示すものであ
り、反射鏡（１）は光学基台（２）に対して伸縮可能に
取付けた調整部材（３）にホルダ（４）を介して装着さ
れている。このホルダ（４）は反射鏡（１）を内側から
０リング（５）を介してその外周縁を固定支持する第１
ホルダ（４Ａ）とその外側からＯリング（６）を介して
固定支持する第２ホルダ（４Ｂ）とを備え、更に反射鏡
（１）外周には第１及び第２ホルダ（４Ａ） 、 （４
Ｂ）による空間が形成されてこの空間内に冷却水を供給
し、もって加熱された反射鏡（１）を冷却するようにし
ている。また、第１ホルダ（４Ａ）と第２ホルダ（４Ｂ
）とが接触する周面にはＯリング（７）が介装されて冷
却水をシールしてイル、また、反射鏡（１）を保持した
ホルダ（４）はフランジ（８）によって調整部材（３）
に固定されているが、これら両者の接触部には０リング
（９）が介装されるとともに、第１ホルダ（４Ａ）とフ
ランジ（８）との接触する周面にも０リング（１０）が
介装されてそれぞれ真空洩れを防止するようにしている
。However, FIG. 2 shows an enlarged view of the mounting portion of the reflecting mirror. The figure shows the mounting part of the partial reflector, in which the reflector (1) is attached via a holder (4) to an adjustment member (3) that is extendably attached to the optical base (2). ing. This holder (4) is a first holder that fixedly supports the outer peripheral edge of the reflecting mirror (1) from the inside via an O-ring (5).
It is equipped with a holder (4A) and a second holder (4B) fixedly supported from the outside via an O-ring (6), and furthermore, on the outer periphery of the reflecting mirror (1) are first and second holders (4A), (4).
A space B) is formed, and cooling water is supplied into this space to cool the heated reflecting mirror (1). In addition, the first holder (4A) and the second holder (4B
An O-ring (7) is interposed on the circumferential surface that contacts with the adjusting member (8) to seal the cooling water. 3)
However, an O-ring (9) is interposed in the contact portion between these two, and an O-ring (10) is also provided on the circumferential surface where the first holder (4A) and the flange (8) contact. are interposed to prevent vacuum leakage.
然して、反射鏡（１）を装着した調整部材（３）は蛇腹
（１１）を介して光学基台（２）に伸縮可能に取付けら
れているが、蛇Ｈ（１１）と調整部材（３）及び光学基
台（２）間にはそれぞれ継手（１２）、（１３）にょっ
て固定されている。勿論これら継手（１２）、（１３）
と調整部材（３）及び光学基台（２）間にＯリング（２
４）、（１５）が介装され真空洩れを防止している。However, the adjustment member (3) equipped with the reflector (1) is extendably attached to the optical base (2) via the bellows (11), but the adjustment member (3) with the snake H (11) and the optical base (2) are fixed by joints (12) and (13), respectively. Of course these joints (12), (13)
between the adjustment member (3) and the optical base (2).
4) and (15) are interposed to prevent vacuum leakage.
一方、光学基台（２）にはレーザ光の通過する孔（２Ａ
）が形成され、この孔（２Ａ）には反射鏡（１）近傍の
滞留ガスに流れを起こすサイドクローを案内するダク）
（１８）が遊嵌され、ダク） （ＩＥｉ）先端は反射
鏡（１）近傍にまで延設され、その基端には光学基台（
２）内側に配設したサイドフローダクト（１７）とダク
） （１Ｇ）とを連通ずる連通部材（１８）が取付けら
れている。このサイドフローとなるガス圧は放電空間に
おけるガス圧よりも高圧になっているため、サイドフロ
ーはサイドフローダクト（１７）、連通部材（１８）及
びタフ）（Ｉ８）外周面を通り反射鏡（１）における滞
留ガスに流れを生じさせてダクト（１Ｂ）内を通過して
放電空間へと循環する・このような循環流を必要とする
のは、以下の理由による。レーザ発振器の作動下にあっ
てもガス媒質は放電空間を強制循環するのみで、反射鏡
（１）近傍のガス媒質は滞留することになる。滞留する
とこの部分の温度が上昇してレーザ出力が逓減し安定し
た出力を維持することが困難である。On the other hand, the optical base (2) has a hole (2A
) is formed in this hole (2A), and in this hole (2A) there is a duct (duct) that guides the side claw that causes the gas remaining near the reflector (1) to flow.
(18) is loosely fitted, and the tip of the duct (IEi) extends to the vicinity of the reflector (1), and the optical base (
2) A communication member (18) is attached that communicates the side flow duct (17) disposed on the inside with the duct (1G). Since the gas pressure that forms this side flow is higher than the gas pressure in the discharge space, the side flow passes through the side flow duct (17), the communication member (18), and the outer peripheral surface of the tough (I8) reflector ( A flow is generated in the accumulated gas in step 1) to pass through the duct (1B) and circulate to the discharge space.The reason why such a circulating flow is required is as follows. Even when the laser oscillator is in operation, the gas medium is only forced to circulate in the discharge space, and the gas medium near the reflecting mirror (1) remains. If the laser stays there, the temperature of this part will rise and the laser output will gradually decrease, making it difficult to maintain a stable output.
そのためにこのような温度上昇を防止するようサイドク
ローを流すのである。For this reason, a side claw is used to prevent this temperature rise.
［発明が解決しようとする問題点１
発振器のレーザ出力確保のために上述したようなサイド
クローを流すのであるが、レーザ媒質中には装置の定期
点検時、部品取替え時等に僅かではあるが粉塵が混入す
ることを避は得す、これがサイドクローに随伴して反射
鏡（１）に達してこれに付着することがある。すると付
着した粉塵がレーザ光によって燃焼し反射鏡（１）を損
傷させてレーザ出力の逓減をもたらし、あるいはビーム
モードが変形するなどしてレーザ光による加工品質を低
下させるという問題点を有していた。[Problem to be solved by the invention 1: In order to secure the laser output of the oscillator, the above-mentioned side claw is flowed, but a small amount of water may be present in the laser medium during regular inspections of the device, when replacing parts, etc. It is unavoidable that dust should be mixed in, which may accompany the side claws and reach the reflecting mirror (1) and adhere to it. Then, the attached dust is burned by the laser beam, damaging the reflecting mirror (1) and causing a decrease in the laser output, or deforming the beam mode, which deteriorates the quality of processing by the laser beam. Ta.
本発明は以上の問題点を鑑みてなされたもので、サイド
フローによる粉塵が反射鏡に付着する度合を少なくして
性能的に安定したレーザ発振器を提案するものである。The present invention has been made in view of the above problems, and it is an object of the present invention to propose a laser oscillator that has stable performance by reducing the degree to which dust due to side flow adheres to a reflecting mirror.
［問題点を解決するための手段］
本発明に係るレーザ発振器は、反射鏡内側に筒状部材を
配設し、この筒状部材のダクト側先端とこれに対向する
ダクト先端間には上記レーザガイの流通路を形成する隙
間を設けたものである。[Means for Solving the Problems] The laser oscillator according to the present invention includes a cylindrical member disposed inside the reflecting mirror, and the laser guide is disposed between the duct-side tip of the cylindrical member and the opposing duct tip. A gap is provided to form a flow path.
［作用］
本発明によれば、サイドフローは光学基台に遊嵌したダ
クト外周面に沿って流れ、次いでこのダクトと筒状部材
間の隙間に流入して放電側に循環し、反射鏡に至るサイ
ドフローは僅かなものとなる。[Operation] According to the present invention, the side flow flows along the outer circumferential surface of the duct that is loosely fitted into the optical base, then flows into the gap between the duct and the cylindrical member, circulates to the discharge side, and reaches the reflecting mirror. The resulting side flow will be slight.
［実施例］
以下、従来と同−又は相当部分には同一符号を付して示
す第１図の実施例に基づき本発明を説明する０図からも
明らかなように１本実施例装首では、反射鏡（１）内側
に位置させて筒状部材（１９）を第１ホルダ（４Ａ）内
端に固設した点に特徴を有している。このように筒状部
材（１８）をダク）（１Ｂ）の先端側に装着したことか
らダクト（１６）の長手方向の寸法を従来よりも短小に
形成し、ダク） （１Ｂ）先端と筒状部材（１９）先端
間にサイドフローをダクト（１６）内に案内する隙間（
δ）を形成している。したがってサイドフローダクト（
１７）、連通部材（１８）及びダク） （１Ｂ）外周面
を流れたサイドフローは隙間（δ）に案内されてダク）
（１Ｂ）内側を通り放電側へと循環する。このとき隙間
（δ）から流入したサイドフローの殆どは放電側に循環
して、反射鏡（１）側には僅かしか到達しない。このよ
うに僅かではあるが、サイドフローの一部によって反射
鏡（１）近傍にあるガスの滞留をなくしこのガス温度の
上昇を防止している。しかも反射鏡（１）に至るサイド
フローは僅かであることから、このサイドクローに随伴
した粉塵は無視し得る量となり、粉塵の反射鏡への付着
を従来に比べ大巾に減少させることができる。そのため
反射鏡（１）の損傷を大巾に軽減することができてレー
ザ発振器の性能を安定させることができる。[Example] Hereinafter, the present invention will be explained based on the embodiment of FIG. 1, in which the same or equivalent parts as the conventional ones are given the same reference numerals.As is clear from FIG. , is characterized in that the cylindrical member (19) is located inside the reflecting mirror (1) and fixed to the inner end of the first holder (4A). Since the cylindrical member (18) is attached to the tip side of the duct (1B) in this way, the longitudinal dimension of the duct (16) is made shorter and smaller than before, and the duct (1B) tip and cylindrical A gap (
δ). Therefore the side flow duct (
17), communication member (18) and duct) (1B) The side flow flowing on the outer peripheral surface is guided by the gap (δ) and duct)
(1B) It passes through the inside and circulates to the discharge side. At this time, most of the side flow flowing in from the gap (δ) circulates to the discharge side, and only a small amount reaches the reflecting mirror (1) side. In this way, although it is small, a part of the side flow eliminates the accumulation of gas near the reflecting mirror (1) and prevents the temperature of this gas from rising. Moreover, since the side flow reaching the reflector (1) is small, the amount of dust accompanying this side claw is negligible, and the amount of dust adhering to the reflector can be greatly reduced compared to conventional methods. . Therefore, damage to the reflecting mirror (1) can be greatly reduced, and the performance of the laser oscillator can be stabilized.
なお、上記実施例では部分反射鏡（１）についてのみ説
明したが、これと対を成す全反射鏡についても同様の対
策を施すことは言うまでもない。In the above embodiment, only the partial reflecting mirror (1) has been described, but it goes without saying that similar measures can be taken for the total reflecting mirror that is paired with it.
［発明の効果］
以上本発明によれば、反射鏡内側に筒状部材を設け、か
つこの筒状部材先端とこの筒状部材の延長上に位置した
ダクト先端間に隙間を設けたことから、この隙間から流
入するサイドクローの殆どは放電側に循環するために、
反射鏡に対する粉塵の付若量を大巾に減少させることが
できて反射鏡の損傷を大巾に軽減することができる。し
たがって、レーザ発振器の性能を安定化することができ
る。[Effects of the Invention] According to the present invention, a cylindrical member is provided inside the reflecting mirror, and a gap is provided between the tip of the cylindrical member and the tip of the duct located on an extension of the cylindrical member. Most of the side claws that flow in through this gap circulate to the discharge side, so
The amount of dust attached to the reflecting mirror can be greatly reduced, and damage to the reflecting mirror can be greatly reduced. Therefore, the performance of the laser oscillator can be stabilized.
第１図は本発明に係るレーザ発振器の一実施例の要部を
拡大して示す断面図、第２図は従来装置を示す第１図相
当図である。
図において
（１）は反射鏡、
（２）は光学基台（真空筐体）、
（２Ａ）は孔（レーザ光通過孔）、
（３）は調整部材、 （１Ｂ）はダクト、（１８）
は筒状部材、 （δ）は隙間。
なお、各図中、同一符号は同−又は相当部分を示す。
代 理 人 大 岩 増 雄第１図
Ｓ：′Ｐｉ閏FIG. 1 is an enlarged cross-sectional view showing a main part of an embodiment of a laser oscillator according to the present invention, and FIG. 2 is a view corresponding to FIG. 1 showing a conventional device. In the figure, (1) is a reflecting mirror, (2) is an optical base (vacuum housing), (2A) is a hole (laser light passage hole), (3) is an adjustment member, (1B) is a duct, (18)
is the cylindrical member, and (δ) is the gap. In each figure, the same reference numerals indicate the same or corresponding parts. Agent Masuo Oiwa Figure 1 S: 'Pi leap
Claims (1)
ガスからのレーザ光を共振させる１対の反射鏡を備える
とともに、該反射鏡を上記筐体に対し伸縮調整可能な部
材に装着し、かつ上記筐体のレーザ光通過孔にダクトを
遊嵌し、該ダクト外周面に沿って上記レーザガスを導き
上記反射鏡近傍に達した該レーザガスを上記ダクト延設
端からダクト内に循環させて成るレーザ発振器において
、上記反射鏡内側に筒状部材を配設し、該筒状部材の上
記ダクト側先端とダクト先端間には上記レーザガイの流
通路を形成する隙間を設けたことを特徴とするレーザ発
振器。(1) A pair of reflecting mirrors that resonate laser light from a laser gas excited by electric discharge in a vacuum casing are provided, and the reflecting mirrors are attached to a member that can be expanded and contracted with respect to the casing, and the casing is In a laser oscillator, a duct is loosely fitted into a laser beam passage hole, the laser gas is guided along the outer peripheral surface of the duct, and the laser gas that reaches the vicinity of the reflecting mirror is circulated into the duct from the extending end of the duct, A laser oscillator characterized in that a cylindrical member is disposed inside the reflecting mirror, and a gap is provided between the duct side tip of the cylindrical member and the duct tip to form a flow path of the laser guy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20836386A JPS6364377A (en) | 1986-09-04 | 1986-09-04 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20836386A JPS6364377A (en) | 1986-09-04 | 1986-09-04 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364377A true JPS6364377A (en) | 1988-03-22 |
Family
ID=16555050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20836386A Pending JPS6364377A (en) | 1986-09-04 | 1986-09-04 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364377A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0595335A1 (en) * | 1992-10-28 | 1994-05-04 | Mitsubishi Denki Kabushiki Kaisha | Laser oscillator |
| WO1994011931A1 (en) * | 1992-11-12 | 1994-05-26 | Cymer Laser Technologies | Apparatus for, and method of, maintaining a clean window in a laser |
| JPH0710374A (en) * | 1993-06-25 | 1995-01-13 | Kansai Denki Kensetsu Kk | Driving shaft of cable drum |
| EP0641050A1 (en) * | 1993-08-26 | 1995-03-01 | Matsushita Electric Industrial Co., Ltd. | Gas laser oscillator |
-
1986
- 1986-09-04 JP JP20836386A patent/JPS6364377A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0595335A1 (en) * | 1992-10-28 | 1994-05-04 | Mitsubishi Denki Kabushiki Kaisha | Laser oscillator |
| JPH06140692A (en) * | 1992-10-28 | 1994-05-20 | Mitsubishi Electric Corp | Laser oscillator |
| US5416791A (en) * | 1992-10-28 | 1995-05-16 | Mitsubishi Denki Kabushiki Kaisha | Laser oscillator |
| WO1994011931A1 (en) * | 1992-11-12 | 1994-05-26 | Cymer Laser Technologies | Apparatus for, and method of, maintaining a clean window in a laser |
| JPH0710374A (en) * | 1993-06-25 | 1995-01-13 | Kansai Denki Kensetsu Kk | Driving shaft of cable drum |
| EP0641050A1 (en) * | 1993-08-26 | 1995-03-01 | Matsushita Electric Industrial Co., Ltd. | Gas laser oscillator |
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| JPH0677563A (en) | Solid laser |