JPS6362234A - Method and apparatus for removing adhering water on surface of article - Google Patents
Method and apparatus for removing adhering water on surface of articleInfo
- Publication number
- JPS6362234A JPS6362234A JP20723086A JP20723086A JPS6362234A JP S6362234 A JPS6362234 A JP S6362234A JP 20723086 A JP20723086 A JP 20723086A JP 20723086 A JP20723086 A JP 20723086A JP S6362234 A JPS6362234 A JP S6362234A
- Authority
- JP
- Japan
- Prior art keywords
- water
- washing liquid
- article
- dehydration
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 121
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 122
- 238000005406 washing Methods 0.000 claims abstract description 96
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 58
- 230000018044 dehydration Effects 0.000 claims abstract description 48
- 238000006297 dehydration reaction Methods 0.000 claims abstract description 48
- 238000001816 cooling Methods 0.000 claims abstract description 12
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- 239000000203 mixture Substances 0.000 claims abstract description 11
- 238000000926 separation method Methods 0.000 claims description 26
- 239000008346 aqueous phase Substances 0.000 claims description 7
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 claims description 4
- 239000012071 phase Substances 0.000 claims description 3
- 230000005484 gravity Effects 0.000 abstract description 7
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- IDGUHHHQCWSQLU-UHFFFAOYSA-N ethanol;hydrate Chemical compound O.CCO IDGUHHHQCWSQLU-UHFFFAOYSA-N 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000007864 aqueous solution Substances 0.000 description 9
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 8
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000000084 colloidal system Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 241000282693 Cercopithecidae Species 0.000 description 1
- 229920006361 Polyflon Polymers 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- -1 impropatol Chemical compound 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【発明の詳細な説明】
技術分野
本発明は、物品表面の付着水を除去するための方法およ
び装置に関する。DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD The present invention relates to a method and apparatus for removing adhering water from the surface of an article.
背景技術
各種めっき製品、光学レンズ、半導体材料等は、各種表
面処理の後に水洗し、これを迅速かつ完全に乾燥させる
必要がある。これらの付着水を保有する物品の乾燥のた
め物品を非水性液体に浸漬して水を除去する方法として
、いわゆる洗浄脱水′方法が知られている （たとえば
特開昭５５−７０３８２および特開昭５５−１３１６７
５）、前記非水性液体としてトリクロロトリフルオロエ
タン（以下、フロン１１３と略称することがある）に水
溶性液体を添加した洗液が用いられる。物品はまず水で
洗浄され、その物品の表面に水が付着している状態で洗
液に浸漬される。このように表面に水が付着している物
品を洗液に浸漬することによって、その付着水の大部分
は比重差で浮力を受け、浮かび上がり、この浮かび上が
った水を含む洗液を除去する。この洗液に浸漬されてい
る物品の表面には、洗液中の水の飽和溶解度または水の
飽和溶解度未満で含まれている水がエタノール水溶液と
して付着している。BACKGROUND ART Various plated products, optical lenses, semiconductor materials, etc. need to be washed with water after various surface treatments and then dried quickly and completely. A so-called washing/dehydration method is known as a method of removing water by immersing the article in a non-aqueous liquid to dry the article that has adhered water (for example, Japanese Patent Application Laid-open No. 55-70382 and Japanese Patent Laid-Open No. 70382). 55-13167
5) A washing liquid prepared by adding a water-soluble liquid to trichlorotrifluoroethane (hereinafter sometimes abbreviated as Freon 113) is used as the non-aqueous liquid. The article is first washed with water and then immersed in a washing liquid with water adhering to the surface of the article. When an item with water attached to its surface is immersed in the washing liquid, most of the adhering water receives buoyancy due to the difference in specific gravity and floats, and the washing liquid containing this floating water is removed. . Water contained at or below the saturated solubility of water in the washing liquid adheres to the surface of the article immersed in the washing liquid as an aqueous ethanol solution.
このエタノール水溶液の層は薄いので、通常は物品を洗
液から持ち上げて乾燥領域で洗液を蒸発させることによ
って、物品表面を清浄にすることができる。しかし、精
密洗浄を必要とするときには、物品表面に付着している
エタノール水溶液中の不純物、たとえばイオンおよびコ
ロイドなどが汚染物質として物品表面に残り、問題とな
る。Since this layer of aqueous ethanol is thin, the surface of the article can be cleaned, typically by lifting the article from the wash and allowing the wash to evaporate in a drying area. However, when precision cleaning is required, impurities in the ethanol aqueous solution adhering to the surface of the article, such as ions and colloids, remain on the surface of the article as contaminants, which poses a problem.
発明が解決すべき問題点
本発明の目的は、洗ｉ′Ｆされるべき物品の表面を高度
に清浄にすることができるようにした物品表面の付着水
を除去するための方法および装置を提供することである
。Problems to be Solved by the Invention An object of the present invention is to provide a method and a device for removing adhering water from the surface of an article, which makes it possible to highly clean the surface of the article to be washed. It is to be.
問題点を解決するための手段
本発明は、トリクロロトリフルオロエタンと水溶性液体
との混合液から成る洗液に、物品を浸漬することにより
物品表面の付着水を除去する方法において、
加熱した前記洗液に物品を浸漬し、次に、物品よりｌ！
Ｌ１％した水を含む前記洗液を冷却し、水の溶解度を下
げることにより、前記水を含む洗液から水を分離除去し
た後、この冷却された洗液を加熱してもとの脱水に供す
ることを特徴とする物品表面の付着水を除去するための
方法である。Means for Solving the Problems The present invention provides a method for removing water adhering to the surface of an article by immersing the article in a cleaning solution consisting of a mixture of trichlorotrifluoroethane and a water-soluble liquid. Immerse the article in the washing solution, then remove l! from the article.
After cooling the washing liquid containing 1% water and lowering the solubility of water, water is separated and removed from the washing liquid containing water, and then the cooled washing liquid is heated to return to dehydration. A method for removing water adhering to the surface of an article.
好ましい実施態様では、前記水溶性液体はエタ／−ルで
あることを特徴とする。In a preferred embodiment, the water-soluble liquid is ethanol.
さらに好ましい実施態様では、冷却後の洗液を、多孔体
に通過させ、その後に加熱して脱水に供することを特徴
とする。A further preferred embodiment is characterized in that the cooled washing liquid is passed through a porous body and then heated for dehydration.
また本発明は、トリクロロトリプルオロエタンと水溶性
液体との混合液から成る洗液を貯留し、堰を有する脱水
槽と、
脱水槽内の洗液を加熱する手段と、
脱水槽の堰を溢流する液体を貯留する水分離槽と、
水分離槽内の洗液を冷却する手段と、
水分離槽の上部に浮上する水相を系外へ取出す排水口と
、
水分離槽で分離され洗液を脱水槽に戻して循環するため
の循環手段と、
脱水槽の上部空間を大気に連通する連通経路と、連通経
路に設けられ、連通経路の洗液蒸気を冷却液化して回収
する冷却器とを含むことを特徴とする物品表面の付着水
を除去するための装置である。The present invention also provides a dehydration tank for storing a washing liquid consisting of a mixture of trichlorotrioleoethane and a water-soluble liquid and having a weir, a means for heating the washing liquid in the dehydration tank, and a means for overflowing the weir of the dehydration tank. A water separation tank that stores the liquid to be flushed, a means for cooling the washing liquid in the water separation tank, a drain port that takes out the water phase that floats to the top of the water separation tank to the outside of the system, and a water phase separated by the water separation tank and washed. A circulation means for returning and circulating the liquid to the dehydration tank, a communication path that communicates the upper space of the dehydration tank with the atmosphere, and a cooler installed in the communication path to cool and liquefy the washing liquid vapor in the communication path and recover it. An apparatus for removing water adhered to the surface of an article, characterized in that it includes:
好ましい実施態様では、前記排水口から取出した水相が
ら水溶性液体を分離してこ性を回収する手段を有するこ
とを特徴とする。A preferred embodiment is characterized by having means for separating a water-soluble liquid from the aqueous phase taken out from the drain port and recovering this liquid.
作 用
本発明に従えば、加熱した洗液に物品を浸漬することに
よってその物品の表面に付着している水の大部分は比重
差で浮力を受けて浮上する。この物品から遊離した水を
含む洗液は次に、冷却される。この洗液が冷却されるこ
とによって、洗液の水溶解度が低下し、洗液中の水が水
滴として洗液から分離され浮上するので、これを除去す
る。そのため洗液中に含まれる水の量が低下する。Function According to the present invention, when an article is immersed in a heated washing liquid, most of the water adhering to the surface of the article floats to the surface due to the buoyant force due to the difference in specific gravity. The wash liquor containing water liberated from the article is then cooled. As the washing liquid is cooled, the water solubility of the washing liquid decreases, and the water in the washing liquid is separated from the washing liquid as water droplets and floats to the surface, which are then removed. Therefore, the amount of water contained in the washing liquid decreases.
こうして水の至が低下した洗液を再び加熱することによ
って、その加熱された洗液は水の溶解度が飽和していな
い状態となり、さらに水を溶解することが可能になる。By heating the washing liquid whose water content has decreased again, the heated washing liquid becomes in a state where the solubility of water is not saturated, and it becomes possible to further dissolve water.
物品の表面に残存している水は、水溶性液体、たとえば
エタノールの水溶液膜として物品の表面に付着すること
になるけれども、この水溶液膜中の水分は、水の不飽和
状態にある洗液に溶解して吸収されて洗液に溶は込んで
いく、これと同時に、残った水溶性液体は本末、トリク
ロロトリプルオロエタン （略称フロン１１３）に溶解
することができるものであるから、洗液の中に溶解する
。このようにして物品の表面には付着水が存在せず、ま
たその表面にエタノール水溶液の薄い膜が形成されない
。これによって物品に付着していた水に含まれる４ｔＫ
イオンおよびコロイドなどの汚染物質を、物品の表面か
ら完全に除去することが可能となる。The water remaining on the surface of the article will adhere to the surface of the article as a film of an aqueous solution of a water-soluble liquid, such as ethanol, but the water in this aqueous solution film will be absorbed by the washing liquid, which is in an unsaturated state. At the same time, the remaining water-soluble liquid can be dissolved in trichlorotrioleoethane (abbreviated as Freon 113), so it will be absorbed into the washing liquid. dissolve in In this way, there is no adhering water on the surface of the article, and no thin film of ethanol aqueous solution is formed on the surface. As a result, 4tK contained in the water attached to the item
Contaminants such as ions and colloids can be completely removed from the surface of the article.
さらにまた本発明では、脱水槽の堰を溢流した液体を水
分Ｒ′ＷＩに貯留し、ここで洗液を冷却する。Furthermore, in the present invention, the liquid overflowing the weir of the dehydration tank is stored in the water R'WI, and the washing liquid is cooled there.
この水分離槽の上部に形成される水相は自動的に系外へ
取出される。しかしこの水相には水溶性液体が含まれて
いるので、この水相は精留して水溶性液体を水と分離し
て回収することが好ましい。The aqueous phase formed at the top of this water separation tank is automatically taken out of the system. However, since this aqueous phase contains a water-soluble liquid, it is preferable to rectify the aqueous phase to separate the water-soluble liquid from the water and recover it.
また回収した水溶性液体は、もとの洗液に戻すことによ
って洗液の組成の変動を防ぐことができる。Further, by returning the recovered water-soluble liquid to the original washing liquid, fluctuations in the composition of the washing liquid can be prevented.
こうして水分離槽で分離された液体を脱水槽に戻して循
環しても、洗液の希望する組成を維持することができ、
物品表面の付着水を確実に除去することが可能となる。In this way, even if the liquid separated in the water separation tank is returned to the dehydration tank and circulated, the desired composition of the washing liquid can be maintained.
It becomes possible to reliably remove water adhering to the surface of the article.
実施例 ！＠１図は、本発明の一実施例の断面図である。Example ! @1 Figure is a sectional view of one embodiment of the present invention.
水で予め洗浄された被洗浄物品は、洗液を満たした脱水
槽１に浸漬され、物品表面の付着水は、洗液よりも比重
が小さいので浮上し、′ＷＩＩ！！１ａである堰を溢流
して水分離槽２に入る。この水分離槽２でもまた、洗液
中の水は比重差によって浮上し、槽上部に水相２ａが形
成される。この水相２ａの水は、開口３ａから排水管３
によって排水され、精留装置４に入り精留される。精留
装置４内では、排水に溶解しで含まれている水溶性液体
が水と分離され、管５から脱水槽１お上り水分離槽２の
上部空間またはこれら洗液中へ、蒸気としてまたは液体
で返３１される。精留！！置４において水溶性液体を除
去された水は、水取出管６から排出される。The article to be cleaned, which has been previously cleaned with water, is immersed in a dehydration tank 1 filled with a washing liquid, and the water adhering to the surface of the article floats to the surface because it has a lower specific gravity than the washing liquid, and 'WII! ! The water overflows the weir 1a and enters the water separation tank 2. Also in this water separation tank 2, water in the washing liquid floats to the surface due to the difference in specific gravity, and an aqueous phase 2a is formed in the upper part of the tank. The water in this aqueous phase 2a flows from the opening 3a to the drain pipe 3.
The water is drained by the water, enters the rectifier 4, and is rectified. In the rectifier 4, the water-soluble liquid dissolved in the waste water is separated from water, and is passed from the pipe 5 into the upper space of the dehydration tank 1 and the water separation tank 2 or into these washing liquids as steam or The liquid is returned 31. Rectification! ! The water from which the water-soluble liquid has been removed in the step 4 is discharged from the water outlet pipe 6.
水分離槽２で水を分ａされた洗液は、貯槽７へ一旦蓄え
られるが、これはメンプロを介して循環管路９ｍ、９ｂ
によって脱水槽１に送られて循環される。The washing liquid from which the water has been separated in the water separation tank 2 is temporarily stored in the storage tank 7, but it is circulated through the circulation pipes 9m and 9b via the menpro.
is sent to the dehydration tank 1 and circulated.
脱水槽１には洗液に対する加熱手段１０が設けられてお
り、水分離槽２には冷却手段１１が設けられでいる。The dehydration tank 1 is provided with heating means 10 for washing liquid, and the water separation tank 2 is provided with cooling means 11.
貯槽７における水が分離された洗液の一部は、管路１７
から蒸発槽１Ｇに送られる。この蒸発槽１６には加熱手
段１５が設けられている。A portion of the washing liquid from which the water in the storage tank 7 has been separated is transferred to the pipe 17.
from there to evaporation tank 1G. This evaporation tank 16 is provided with heating means 15 .
脱水Ｗｊ１、水分離槽２お上り蒸発槽１６の上部は、連
通経路１４を介して大気開放される。ただし、水分離Ｗ
Ｊ２の上部は必ずしもこの連通経路１４に接続すること
を要するものではない、連通経路１４には、冷却手段１
２が設けられる。連通経路１４における洗液蒸気は、冷
却手段１２によって冷却され、液化される。液化された
洗液は管１３を経て脱水槽１または水分離ＷＩ２へ戻さ
れる。The upper part of the dehydration Wj1, water separation tank 2, and evaporation tank 16 is opened to the atmosphere via the communication path 14. However, water separation W
The upper part of J2 does not necessarily need to be connected to this communication path 14.
2 is provided. The washing liquid vapor in the communication path 14 is cooled and liquefied by the cooling means 12. The liquefied washing liquid is returned to the dehydration tank 1 or water separation WI2 via the pipe 13.
洗液は、７０ン１１３と水溶性液体としてのエタノール
との混合液から成り、その組成はたとえばフロン１１３
が９６重１％、エタノールが４重量％である。The washing liquid consists of a mixture of 70% fluorocarbon 113 and ethanol as a water-soluble liquid, and its composition is, for example, fluorocarbon 113.
is 96% by weight and ethanol is 4% by weight.
洗ｒＰされるべき物品は、脱水Ｗ１１に浸漬される前に
予め、水によって洗浄される。その物品の表面には水が
付着している。この状態で物品は脱水Ｗ１１に浸漬され
、前述のように付着水の大部分は比重差で浮力を受けで
浮上する。この分離された水は本質的には水溶性液体水
溶液であって、フロン１１３／エタノールから成る洗液
中エタノールの割合に応じて、第２図に示される平衡組
成を有している。The articles to be washed are previously washed with water before being immersed in the dehydration W11. Water is attached to the surface of the article. In this state, the article is immersed in the dehydrated water W11, and as described above, most of the attached water floats to the surface due to the buoyant force due to the difference in specific gravity. This separated water is essentially an aqueous solution of water-soluble liquid and has an equilibrium composition as shown in FIG. 2, depending on the proportion of ethanol in the washing solution consisting of Freon 113/ethanol.
水分離槽２においで洗液が冷却手段１１によって冷却さ
れる。フロン１１３が９６重１％およびエタノールが４
重１％である混合液から成る洗液の水溶解度は温度によ
って変化し、その状態は、第３図に示されている。いま
、脱水槽１がら溢流した洗液がたとえば３０℃であると
して、水分離槽２において冷却手段１１によってたとえ
ば１０℃に冷却されると、第３図に従って、それぞれ３
０℃と１０℃とにおける水溶解度（それぞれ約０゜２７
％と約０．２３％）に相当する水が洗液から分離され、
その分、洗液は脱水される。この脱水された洗液が貯槽
７からポンプ８および循環管路９ａ、９ｂを経て脱水槽
１に導かれ、加熱手段１２によってたとえば３０℃にま
で加熱されると、その洗液の水溶解度は第３図から約０
．２７％であるが、実際には水分は１０℃における水の
溶解度に相当する０、２３％ しか含まれていないから
、脱水槽１内の洗液はなお水を溶解する能力を持ってい
ることになる。この状態で脱水槽１内に物品が浸漬され
ると、その物品表面に残存しているエタノール水溶液の
水分は洗液に吸収されて溶解していく。これと同時に残
るエタノールは、７０ン１１３と自由に溶は合う性質を
持っているからフロン１１３から主としで成る洗液に溶
解する。したがって物品の表面には、エタノール水溶液
の膜が形成されなくなる。そのため物品表面に付着して
いた水に含まれる汚染物質を、その物品の表面から完全
に除去することが可能となり、高度の精密洗浄を行なう
ことができる。The washing liquid in the water separation tank 2 is cooled by a cooling means 11. Freon 113 is 96% by weight and ethanol is 4%.
The water solubility of the wash solution, which consists of a 1% by weight mixed solution, changes with temperature, and the situation is shown in FIG. Now, assuming that the washing liquid overflowing from the dehydration tank 1 is, for example, 30°C, and is cooled to, for example, 10°C by the cooling means 11 in the water separation tank 2, the washing liquid that overflows from the dehydration tank 1 is cooled to, for example, 10°C.
Water solubility at 0°C and 10°C (approximately 0°27
% and approximately 0.23%) is separated from the washing liquid,
The washing liquid is dehydrated accordingly. When this dehydrated washing liquid is led from the storage tank 7 to the dehydration tank 1 via the pump 8 and circulation pipes 9a and 9b and heated to, for example, 30°C by the heating means 12, the water solubility of the washing liquid is Approximately 0 from Figure 3
．． 27%, but in reality the water content is only 0.23%, which corresponds to the solubility of water at 10°C, so the washing liquid in the dehydration tank 1 still has the ability to dissolve water. become. When the article is immersed in the dehydration tank 1 in this state, the water in the ethanol aqueous solution remaining on the surface of the article is absorbed by the washing liquid and dissolved. At the same time, the remaining ethanol has a property of being freely soluble with fluorocarbon 113, so it dissolves in the washing liquid mainly consisting of fluorocarbon 113. Therefore, a film of the ethanol aqueous solution is no longer formed on the surface of the article. Therefore, it becomes possible to completely remove contaminants contained in water adhering to the surface of the article from the surface of the article, and a high degree of precision cleaning can be performed.
水分離Ｗ１２と貯槽７どの間には、多孔体１８が介在さ
れる。したがって水分離ＷＩ２において冷却された洗液
は、多孔体１８を通過した後、脱水槽１に循環される。A porous body 18 is interposed between the water separation W12 and the storage tank 7. Therefore, the washing liquid cooled in the water separation WI2 is circulated to the dehydration tank 1 after passing through the porous body 18.
この多孔体１８は、シリコン樹脂、ポリオレフィン樹脂
またはフッ素樹脂製などであるが、この内、フッ素樹脂
が特に好ましい。This porous body 18 is made of silicone resin, polyolefin resin, or fluororesin, among which fluororesin is particularly preferred.
７７′Ｓ樹脂多孔体としては発泡体、繊維状粉末から抄
造される紙状体などを使用することができ、その内、後
者はたとえばポリフロンペーパーシート（商品名）とし
て商業的に入手可能である。このような多孔体１８を洗
液が通過することによって、その洗液にｔまれでいる微
粒子状の水はいわゆる造粒され粒径が大きくなって浮上
することができるようになって、洗液から分離すること
ができる。As the 77'S resin porous body, a foam, a paper-like body made from fibrous powder, etc. can be used, and the latter is commercially available, for example, as Polyflon Paper Sheet (trade name). be. When the washing liquid passes through such a porous body 18, the fine particles of water that are present in the washing liquid are granulated and become larger in particle size and can float to the surface. can be separated from
水分離槽２において冷却手段１１によって洗液が冷却さ
れると、一部の水は微粒子状となり、したがって比重差
による分離が困難である。この上うな冷却された洗液に
含まれている微粒子状の水を多孔体１７に通すことによ
って分離すると、脱水槽１に戻って循環する洗液中の水
の量をさらに低下することがでさる。When the washing liquid is cooled by the cooling means 11 in the water separation tank 2, some of the water becomes particulate, making it difficult to separate due to the difference in specific gravity. Furthermore, if the particulate water contained in the cooled washing liquid is separated by passing it through the porous body 17, the amount of water in the washing liquid circulating back to the dehydration tank 1 can be further reduced. Monkey.
排水とともに損失するエタノールは、その損失の量に応
じて洗液に常に補充する必要があり、その補充量は損失
量に正確に見合う量でなければならないが、高いエタノ
ール濃度の洗液を補充しつつ物品の洗浄を継続する場合
は、脱水槽１の洗液エタノール濃度がどんどん高じてい
くのを防ぐために、この実施例では、前述の蒸発槽１Ｇ
が設けられている。蒸発槽１６から蒸発する洗液蒸気の
エタノール濃度は洗液液相のエタノール濃度に対応する
気液平衡曲線によって決まり、たとえば蒸発槽１６の液
相のエタノール濃度が５０％まで上昇しても、発生する
蒸気のエタノール濃度は約７゜８％に過ぎず、脱水′Ｗ
１１に供給される洗液は、この蒸気が冷却液化したもの
であるから、エタノール濃度は同じ７．８％ と低い、
したがって補充される洗液の濃度を多少高（しても、脱
水槽１のエタノール濃度が異常に高くなることはないゆ
第４図は、本発明の他の実施例の断面図である。Ethanol lost with drainage must be constantly replenished into the wash liquor according to the amount lost, and the amount of replenishment must be exactly commensurate with the amount lost, but it is not recommended to replenish the wash liquor with a high ethanol concentration. In order to prevent the ethanol concentration of the washing liquid in the dehydration tank 1 from increasing rapidly, in this embodiment, the evaporation tank 1G is
is provided. The ethanol concentration of the washing liquid vapor evaporated from the evaporation tank 16 is determined by the vapor-liquid equilibrium curve corresponding to the ethanol concentration of the washing liquid phase. For example, even if the ethanol concentration of the liquid phase of the evaporation tank 16 rises to 50%, no The ethanol concentration of the steam produced is only about 7.8%, and the dehydration
The washing liquid supplied to No. 11 is the vapor that has been cooled and liquefied, so the ethanol concentration is as low as 7.8%.
Therefore, even if the concentration of the washing liquid to be replenished is increased to some extent, the ethanol concentration in the dehydration tank 1 will not become abnormally high. FIG. 4 is a sectional view of another embodiment of the present invention.
この実施例は前述の実施例に類叙し、対応する部分には
同一の参照符を付す。この実施例では、脱水槽１と水分
離槽２とは離間して構成され、脱水′Ｗ１１の堰を構成
する槽壁１ａを溢流する洗液と、脱水槽１と大気との連
通経路１４において冷却子Ｆｊ、１２によって冷却液化
された洗液とは、管路１８を経て、水分離槽２に送られ
る。その他の構成は前述の実施例と同様である。This embodiment is analogous to the previous embodiment, and corresponding parts are given the same reference numerals. In this embodiment, the dehydration tank 1 and the water separation tank 2 are configured to be separated from each other, and the washing liquid overflowing the tank wall 1a forming the weir of the dehydration tank 11 and the communication path 14 between the dehydration tank 1 and the atmosphere are The washing liquid cooled and liquefied by the cooler Fj, 12 is sent to the water separation tank 2 via the pipe line 18. The other configurations are similar to those of the previous embodiment.
洗液をＪＡ ｔ、する水溶性液体としては、エタノール
の他に、メタノール、インプロパツールおよ１アセトン
などを用いることができる。In addition to ethanol, methanol, impropatol, acetone, and the like can be used as the water-soluble liquid for cleaning the washing liquid.
上述の実施例では、脱水槽１に加熱手段１０が設けられ
たけれども、本発明の他の実施例として脱水槽１に加熱
手段１０を設ける代わりに、冷却して水を分離除去した
後の洗液を、たとえば貯槽７、または循環管路９ａ、９
ｂの途中に設けた加熱手段によって加熱し、こうして加
熱された状態にある洗液を脱水ｍｌに導（ようにしても
よい、同様に水分離槽２内の冷却手段１１も必ずしもこ
の槽内に設ける必要はなく、たとえば脱水槽１から溢流
した洗液を冷却したのち脱水槽１へ導入する手ａ等を採
用することもできる。In the above embodiment, the heating means 10 is provided in the dehydration tank 1, but in another embodiment of the present invention, instead of providing the heating means 10 in the dehydration tank 1, washing after cooling and separating and removing water is performed. The liquid is stored in, for example, the storage tank 7 or the circulation pipes 9a, 9.
It is also possible to heat the washing liquid in a heated state by a heating means provided in the middle of step b, and to introduce the heated washing liquid into the dehydrated ml. It is not necessary to provide this, and it is also possible to adopt, for example, a method in which the washing liquid overflowing from the dehydration tank 1 is cooled and then introduced into the dehydration tank 1.
効 果
以上のように本発明によれば、洗液を一旦冷却して洗液
による水の溶解度を下げて水を分離除去し、その後、洗
液を加熱して脱水のために使用するようにしたので、物
品表面に残っている水溶性液体の水分が洗液に吸収され
て溶解し、これとともに水溶性液体がフロン１１３に溶
解していく。Effects As described above, according to the present invention, the washing liquid is once cooled to lower the solubility of water in the washing liquid to separate and remove water, and then the washing liquid is heated and used for dehydration. Therefore, the water in the water-soluble liquid remaining on the surface of the article is absorbed and dissolved in the washing liquid, and the water-soluble liquid is dissolved into the flon 113 along with this.
したがって物品表面には水溶性液体水溶液の薄膜が形成
されな（なる、したがって物品表面に付着している水に
含まれる金属イオンお上Ｖコロイドなどの汚染物質を、
物品表面から完全に除去することが可能となり、高度の
精密洗浄を行なうことができる。Therefore, a thin film of water-soluble liquid aqueous solution is not formed on the surface of the product (therefore, contaminants such as metal ions and colloids contained in the water adhering to the surface of the product are removed).
It is now possible to completely remove it from the surface of the article, allowing for highly precise cleaning.
第１図は本発明の一実施例の断面図、ｔｌｔＪ２図は洗
液のエタノール濃度に対応する分離されたエタノール水
溶液中各成分の平衡組成を示すグラフ、第３図は洗液の
水溶解度を示すグラフ、第４図は本発明の他の実施例の
断面図である。
１・・・脱水槽、１ａ・・・槽壁、２・・・水分離槽、
４・・・精留装置、７・・・貯槽、８・・・ポンプ、９
ａ、９１＋・−・斬環管路、１０．１５・・・加熱手段
、１１．１２・・・冷却手段、１４・・・連通経路、１
６・・・蒸発槽代理人 弁理士 画数 圭一部
箪 ３ 馨
０．２８＋
潰Ｉ″Ｊ−（”ｃ）Figure 1 is a cross-sectional view of an embodiment of the present invention, Figure tltJ2 is a graph showing the equilibrium composition of each component in the separated ethanol aqueous solution corresponding to the ethanol concentration of the washing liquid, and Figure 3 is a graph showing the water solubility of the washing liquid. The graph shown in FIG. 4 is a cross-sectional view of another embodiment of the present invention. 1... Dehydration tank, 1a... Tank wall, 2... Water separation tank,
4... Rectifier, 7... Storage tank, 8... Pump, 9
a, 91+... Cut ring pipe, 10.15... Heating means, 11.12... Cooling means, 14... Communication path, 1
6...Evaporator tank agent Patent attorney Number of strokes Keiichi Kan 3 Kaoru 0.28+ Kurush I"J-("c)
Claims (5)
混合液から成る洗液に、物品を浸漬することにより物品
表面の付着水を除去する方法において、加熱した前記洗
液に物品を浸漬し、次に、物品より遊離した水を含む前
記洗液を冷却し、水の溶解度を下げることにより、前記
水を含む洗液から水を分離除去した後、この冷却された
洗液を加熱してもとの脱水に供することを特徴とする物
品表面の付着水を除去するための方法。(1) In a method of removing water adhering to the surface of an article by immersing the article in a washing solution consisting of a mixture of trichlorotrifluoroethane and a water-soluble liquid, the article is immersed in the heated washing solution, and then After cooling the washing liquid containing water liberated from the article and lowering the solubility of the water, water is separated and removed from the washing liquid containing water, and then the cooled washing liquid is heated. A method for removing water adhered to the surface of an article, the method comprising subjecting the article to dehydration.
する特許請求の範囲第１項記載の物品表面の付着水を除
去するための方法。(2) The method for removing water adhering to the surface of an article according to claim 1, wherein the water-soluble liquid is ethanol.
熱して脱水に供することを特徴とする特許請求の範囲第
１項記載の物品表面の付着水を除去するための方法。(3) A method for removing water adhering to the surface of an article according to claim 1, characterized in that the cooled washing liquid is passed through a porous body and then heated for dehydration.
混合液から成る洗液を貯留し、堰を有する脱水槽と、 脱水槽内の洗液を加熱する手段と、 脱水槽の堰を溢流する液体を貯留する水分離槽と、 水分離槽内の洗液を冷却する手段と、 水分離槽の上部に浮上する水相を系外へ取出す排水口と
、 水分離槽で分離された洗液を脱水槽に戻して循環するた
めの循環手段と、 脱水槽の上部空間を大気に連通する連通経路と、連通経
路に設けられ、連通経路の洗液蒸気を冷却液化して回収
する冷却器とを含むことを特徴とする物品表面の付着水
を除去するための装置。(4) A dehydration tank for storing a washing liquid consisting of a mixture of trichlorotrifluoroethane and a water-soluble liquid and having a weir, a means for heating the washing liquid in the dehydration tank, and overflowing the weir of the dehydration tank. A water separation tank for storing liquid, a means for cooling the washing liquid in the water separation tank, a drain port for taking out the water phase floating at the top of the water separation tank out of the system, and a washing liquid separated in the water separation tank. a circulation means for returning and circulating the washing liquid to the dehydration tank; a communication path that communicates the upper space of the dehydration tank with the atmosphere; and a cooler provided in the communication path that cools and liquefies the washing liquid vapor in the communication path and recovers it. An apparatus for removing water adhered to the surface of an article, comprising:
離してこれを回収する手段を有することを特徴とする特
許請求の範囲第４項記載の装置。(5) The apparatus according to claim 4, further comprising means for separating and recovering a water-soluble liquid from the aqueous phase taken out from the drain port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20723086A JPS6362234A (en) | 1986-09-02 | 1986-09-02 | Method and apparatus for removing adhering water on surface of article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20723086A JPS6362234A (en) | 1986-09-02 | 1986-09-02 | Method and apparatus for removing adhering water on surface of article |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6362234A true JPS6362234A (en) | 1988-03-18 |
Family
ID=16536391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20723086A Pending JPS6362234A (en) | 1986-09-02 | 1986-09-02 | Method and apparatus for removing adhering water on surface of article |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6362234A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02111011A (en) * | 1988-10-20 | 1990-04-24 | Yosuke Yamada | Drainage of water and apparatus therefor |
| CN110404897A (en) * | 2019-07-05 | 2019-11-05 | 北京无线电计量测试研究所 | A kind of Hydrogen Atom Frequency Standard ionization bubble aging method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5939162A (en) * | 1982-08-28 | 1984-03-03 | Canon Inc | Latent image readout device |
-
1986
- 1986-09-02 JP JP20723086A patent/JPS6362234A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5939162A (en) * | 1982-08-28 | 1984-03-03 | Canon Inc | Latent image readout device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02111011A (en) * | 1988-10-20 | 1990-04-24 | Yosuke Yamada | Drainage of water and apparatus therefor |
| CN110404897A (en) * | 2019-07-05 | 2019-11-05 | 北京无线电计量测试研究所 | A kind of Hydrogen Atom Frequency Standard ionization bubble aging method |
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