JPS6361973A - Magnetic sensor and its manufacture - Google Patents
Magnetic sensor and its manufactureInfo
- Publication number
- JPS6361973A JPS6361973A JP61208499A JP20849986A JPS6361973A JP S6361973 A JPS6361973 A JP S6361973A JP 61208499 A JP61208499 A JP 61208499A JP 20849986 A JP20849986 A JP 20849986A JP S6361973 A JPS6361973 A JP S6361973A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- magnetic sensor
- insulating substrate
- detected
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 10
- 230000004907 flux Effects 0.000 claims description 2
- 238000001259 photo etching Methods 0.000 abstract description 4
- 239000004020 conductor Substances 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明は薄膜磁気抵抗効果素子の抵抗変化を利用して被
検出体の変位等を検出する磁気センサに関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Field of Application) The present invention relates to a magnetic sensor that detects the displacement of a detected object using a change in resistance of a thin film magnetoresistive element.
（従来の技術）
各種回転物体や移動物体等の位置、変位の検出を薄膜磁
気抵抗効果素子の抵抗変化を利用して行う磁気センサが
実用化されている。(Prior Art) Magnetic sensors have been put into practical use that detect the position and displacement of various rotating objects, moving objects, etc. by using resistance changes of thin film magnetoresistive elements.
このような磁気センサの従来例及び使用例を以下に説明
する。Conventional examples and usage examples of such magnetic sensors will be explained below.
第８図（ａ）、（ｂ）に示す従来の磁気センサ５０は、
ガラス板製等の絶縁基板５１上に、フォトエツチング等
の手法により薄膜磁気抵抗効果素子によるセンサ部５２
及び導電層５３．５４をこれらの形状が口字状となるよ
うに形成し、絶縁基板５１のセンサ部５２に近い側面部
５’ｌａ側を、第１０図に示すようにＮ、Ｓ磁極を有す
る回転ドラムの如き被検出体５５に近接させて使用する
ようにしたものである。The conventional magnetic sensor 50 shown in FIGS. 8(a) and 8(b) is
A sensor section 52 using a thin film magnetoresistive element is formed on an insulating substrate 51 made of a glass plate or the like by a method such as photo-etching.
and conductive layers 53 and 54 are formed so that these shapes are in the shape of a mouth, and N and S magnetic poles are formed on the side surface 5'la side of the insulating substrate 51 near the sensor section 52, as shown in FIG. It is designed to be used in close proximity to an object 55 to be detected, such as a rotating drum.
しかしながら、この磁気センサ５０は第９図に示すよう
に例えば前記絶縁基板５１の長さの約２倍の長さを有す
る絶縁基板５１′上に所定の間隔を隔てて２組のセンサ
部５２及び導電層５３゜５４を所定の間隔を隔てて形成
すると共に、雨センサ部５２．５２間の第９図に示す斜
線部分を外周が丸味を帯びた砥石等からなるカッタ５６
を用いて切断することにより製造するものであるため、
第８図（ａ）、（ｂ）に示すように前記側面部５１ａの
下端側がこの側面部５１ａよりも外法に例えば長ざｌだ
け突出した突出部５１ｂが形成されてしまう。この突出
部５１ｂができる理由はカッタ５６による絶縁基板５１
′の切り終り部分が、丸味を帯びたカッタ５６の外周形
状に対応した形状となることに基づくものである。However, as shown in FIG. 9, this magnetic sensor 50 has two sets of sensor sections 52 and 52 disposed at a predetermined distance on an insulating substrate 51' having a length approximately twice as long as the insulating substrate 51, for example. Conductive layers 53 and 54 are formed at predetermined intervals, and a cutter 56 made of a grindstone or the like with a rounded outer periphery is used to cover the shaded area shown in FIG.
Because it is manufactured by cutting using
As shown in FIGS. 8(a) and 8(b), a protruding portion 51b is formed on the lower end side of the side surface portion 51a, which protrudes outwardly from the side surface portion 51a by, for example, a length l. The reason why this protrusion 51b is formed is that the insulating substrate 51 is cut by the cutter 56.
This is based on the fact that the end portion of the cut has a shape corresponding to the rounded outer peripheral shape of the cutter 56.
この結果、第１０図に示すように磁気センサ５０の被検
出体５５に対する配置状態が若干水平位置よりも傾斜す
ると前記突出部５１ｂが被検出体５５の外周面に当接す
る等の弊害が生じ、磁気センサ５０の被検出体５５に対
する位置決めにおける余裕度がなくなるという問題があ
る。As a result, as shown in FIG. 10, if the arrangement of the magnetic sensor 50 with respect to the detected object 55 is slightly inclined from the horizontal position, problems such as the protrusion 51b coming into contact with the outer peripheral surface of the detected object 55 occur. There is a problem in that there is no margin for positioning the magnetic sensor 50 with respect to the detected object 55.
（発明が解決しようとする問題点）
本発明は上記事情に鑑みて成されたものであり、被検出
体に対する位置決めの余裕度を有する磁気センサ及びこ
の磁気センサを製造する方法を提供することを目的とす
るものである。(Problems to be Solved by the Invention) The present invention has been made in view of the above circumstances, and aims to provide a magnetic sensor having a margin of positioning relative to a detected object and a method for manufacturing the magnetic sensor. This is the purpose.
［発明の構成］
（問題点を解決するための手段）
本発明の磁気センサは、絶縁基板上に薄膜磁気抵抗効果
素子によるセンサ部を有し、このセンサ部に生じる被検
出体からの磁束変化に基づく磁気抵抗の変化を利用して
被検出体の検出を行う磁気センサにおいて、前記絶縁基
板の被検出体に対面する側面部に、下端に至るにしたが
い被検出体から離隔する湾曲部を有して構成される。[Structure of the Invention] (Means for Solving the Problems) The magnetic sensor of the present invention has a sensor portion formed by a thin film magnetoresistive element on an insulating substrate, and the magnetic flux change from the detected object that occurs in the sensor portion In a magnetic sensor that detects an object to be detected using a change in magnetic resistance based on It is composed of
また、本発明の磁気センサの製造方法は、絶縁基板上に
複数の薄膜磁気抵抗効果素子によるセンサ部を所定の間
隔を隔てて形成する工程と、前記各センサ部を形成した
面とは反対側の絶縁基板面で、かつ、前記各センサ部間
の間隔よりも狭範囲に亘る弧状の凹部を形成する工程と
、この凹部の中央部を境として絶縁基板を切断する工程
とを含んで構成される。The method for manufacturing a magnetic sensor of the present invention also includes the steps of: forming sensor parts each having a plurality of thin film magnetoresistive elements at predetermined intervals on an insulating substrate; forming an arcuate recess on the surface of the insulating substrate and having a narrower range than the distance between the sensor parts; and cutting the insulating substrate at the center of the recess. Ru.
（作 用）
上記構成の磁気センサは、センサ部を形成した絶縁基板
における被検出体と対面する側面部に、下端に至るほど
被検出体から離隔する湾曲部が形成されているので、従
来の磁気センナの場合と異なりこの湾曲部側が被検出体
に接近するように磁気センサを傾けて配置してもなお被
検出体との間に空隙を保持することができ、これにより
、磁気センサの位置決めの余裕度をもたせることができ
る。(Function) The magnetic sensor having the above configuration has a curved part that is separated from the detected object toward the lower end on the side surface of the insulating substrate on which the sensor part is formed, which faces the detected object, and is therefore different from the conventional one. Unlike the case of a magnetic sensor, even if the magnetic sensor is tilted so that the curved side approaches the detected object, an air gap can still be maintained between it and the detected object, which makes positioning of the magnetic sensor easier. It is possible to have a margin of
また、本発明の磁気センサの製造方法によれば、複数の
センサ部を所定の間隔を隔てて形成した絶縁基板におけ
る前記両センサ部とは反対側の面で、かつ、前記両セン
サ部に対応する領域に弧状の凹部を形成し、この凹部の
中央部を境として切断しこれにより得られる切断面を側
面部として、また、この切断面に連なる凹部を湾曲部と
して用いるものでおるから、前記機能を発揮し得る磁気
センサの製造方法を提供することができる
（実施例）
以下に本発明の磁気センサの実施例を第１図（ａ）、（
ｂ）を参照して説明する。Further, according to the method of manufacturing a magnetic sensor of the present invention, the surface of the insulating substrate on which the plurality of sensor parts are formed at predetermined intervals is opposite to both the sensor parts, and corresponds to both the sensor parts. An arc-shaped recess is formed in the area where the recess is formed, and the cut surface obtained by cutting the center of the recess as a boundary is used as the side surface, and the recess connected to this cut surface is used as the curved portion. A method for manufacturing a magnetic sensor capable of exhibiting its functions can be provided (Example) Examples of the magnetic sensor of the present invention are shown in FIGS. 1(a) and 1(a).
This will be explained with reference to b).
同図に示す磁気センサ１は、ガラス仮装等の絶縁基板２
と、この絶縁基板２の一方の面２ａ上にフォトエツチン
グ等の手法により全体としてコ状とするように形成され
た薄膜磁気抵抗効果素子によるセンサ部３及びこのセン
サ部３に通電するための導電層４ａ、４ｂと、絶縁基板
２の一方の側面部２Ｃにおいてこの側面部２Ｃの肉厚方
向中間部から絶縁基板２の他方の面２ｂに至るにしたが
いこの側面部２Ｃから離隔する湾曲部２ｄとを有して構
成されている。The magnetic sensor 1 shown in the figure has an insulating substrate 2 such as a glass mask.
A sensor section 3 made of a thin film magnetoresistive element formed in a U-shape as a whole by a method such as photoetching on one surface 2a of the insulating substrate 2, and a conductor for supplying electricity to the sensor section 3. layers 4a, 4b, and a curved portion 2d that is spaced apart from one side surface 2C of the insulating substrate 2 from an intermediate portion in the thickness direction of the side surface 2C to the other surface 2b of the insulating substrate 2; It is configured with
次に上記構成の磁気センサ１の製造方法を第３図乃至第
７図を参照して説明する。Next, a method of manufacturing the magnetic sensor 1 having the above structure will be explained with reference to FIGS. 3 to 7.
まず第３図に示すように、前記絶縁基板２の長ざＬの２
倍より若干大きい長さＬ′を有する絶縁基板２′を用意
し、この絶縁基板２′の一方の而２ａ上にフォトエツチ
ング等の手法により薄膜磁気抵抗効果素子によるセンサ
部３及び導電層４ａ。First, as shown in FIG. 3, 2 of the length L of the insulating substrate 2 is
An insulating substrate 2' having a length L' slightly larger than twice that of the insulating substrate 2' is prepared, and a sensor section 3 and a conductive layer 4a made of a thin film magnetoresistive element are formed on one side 2a of the insulating substrate 2' by a method such as photo-etching.
４ｂを２相互いにセンサ部３同士が所定の間隔を有し、
かつ、それぞれの形状がコ状となるように形成する。4b, the sensor parts 3 have a predetermined interval from each other,
In addition, each of them is formed to have a U-shape.
次に、第４図に示すように絶縁基板２′の他方の面２ｂ
の中央部で、かつ、前記両センサ部３゜３に対応する領
域よりも内側に弧状の凹部５を形成する。Next, as shown in FIG. 4, the other surface 2b of the insulating substrate 2'
An arcuate recess 5 is formed at the center of the sensor portion 3 and inside the area corresponding to both the sensor portions 3°3.
次に、第５図に示すようにこの凹部５の最深部から同図
に示す斜線部６に沿って外周が丸味を帯びたカッタ７に
よりこの絶縁基板２′を切断する。Next, as shown in FIG. 5, the insulating substrate 2' is cut from the deepest part of the recess 5 along the diagonal line 6 shown in the figure using a cutter 7 having a rounded outer periphery.
これにより、第６図に示すようにそれぞれ長ざＬを有す
る２個の磁気センサ１，１を一方の面２ａをいずれも下
側に向けた状態で製造することができる。Thereby, as shown in FIG. 6, two magnetic sensors 1, 1 each having a length L can be manufactured with one surface 2a facing downward.
そして、第７図に示すように両磁気センザ１゜１を上下
反転する。これにより、カッタ７による切断面を前記側
面部２ｃとし、また、この切断面に連なる凹部５の部分
を前記湾曲部２ｄとする第１図（ａ）、（ｂ）に示すよ
うな磁気センサ１を２個製造することができる。Then, as shown in FIG. 7, both magnetic sensors 1°1 are turned upside down. Thereby, the magnetic sensor 1 as shown in FIGS. 1(a) and 1(b), in which the cut surface by the cutter 7 is the side surface portion 2c, and the portion of the recess 5 continuous to this cut surface is the curved portion 2d. Two pieces can be manufactured.
次に、上述のようにして１ｑられる磁気センサの使用例
を第２図を参照して説明する。Next, an example of the use of the magnetic sensor 1q as described above will be explained with reference to FIG.
尚、被検出体５５は第１０図に示すものと同様な構成を
有するものを用いるものとする。It is assumed that the detected object 55 has a configuration similar to that shown in FIG. 10.
第２図に示すように、この磁気センサ１の被検出体５５
に対する配置状態が水平ラインＸＯよりもおる角度θだ
け傾斜したラインＸ１となっても、絶縁基板２の側面部
２Ｃの下側に前記湾曲部２ｄを設けているため、従来の
磁気センサ５０の場合と異なり以前として被検出体５５
との間に空隙が保持され、この結果、磁気センサ１の被
検出体５５に対する位置決めの際の余裕度をもたせるこ
とができる。As shown in FIG. 2, the detected object 55 of this magnetic sensor 1
Even if the line X1 is inclined by an angle θ from the horizontal line XO, since the curved portion 2d is provided below the side surface portion 2C of the insulating substrate 2, in the case of the conventional magnetic sensor 50. Unlike before, the detected object 55
A gap is maintained between the magnetic sensor 1 and the detected object 55, and as a result, a margin can be provided when positioning the magnetic sensor 1 with respect to the detected object 55.
本発明は上述した実施例に限定されるものではなく、そ
の要旨の範囲内で種々の変形が可能であることはいうま
でもない。It goes without saying that the present invention is not limited to the embodiments described above, and that various modifications can be made within the scope of the invention.
［発明の効果］
以上詳述した本発明によれば、被検出体に対する位置決
めの余裕度を有する磁気センサ及びこのような機能を発
揮し得る磁気センサの製造方法を提供することができる
。[Effects of the Invention] According to the present invention described in detail above, it is possible to provide a magnetic sensor that has a margin for positioning with respect to a detected object, and a method for manufacturing a magnetic sensor that can exhibit such a function.
第１図（ａ）は本発明の磁気センサの実施例を示す平面
図、第１図（ｂ）は同上の側面図、第２図は前記磁気セ
ンサの使用例を示す側面図、第３図乃至第７図はそれぞ
れ本発明方法の実施例を示す工程説明図、第８図（ａ）
は従来の磁気センサの平面図、第８図（ｂ）は同上の側
面図、第９図は従来の磁気センサの製造工程を示す説明
図、第１０図は従来の磁気センサの使用例を示す側面図
である。
１・・・磁気センサ、２・・・絶縁基板、２Ｃ・・・側
面部、２ｄ・・・湾曲部、３・・・センサ部。
第９図
第１０図FIG. 1(a) is a plan view showing an embodiment of the magnetic sensor of the present invention, FIG. 1(b) is a side view of the same, FIG. 2 is a side view showing an example of use of the magnetic sensor, and FIG. 7 to 7 are process explanatory diagrams showing examples of the method of the present invention, and FIG. 8(a)
is a plan view of the conventional magnetic sensor, FIG. 8(b) is a side view of the same as above, FIG. 9 is an explanatory diagram showing the manufacturing process of the conventional magnetic sensor, and FIG. 10 is an example of use of the conventional magnetic sensor. FIG. DESCRIPTION OF SYMBOLS 1... Magnetic sensor, 2... Insulating substrate, 2C... Side part, 2d... Curved part, 3... Sensor part. Figure 9 Figure 10
Claims (2)
部を有し、このセンサ部に生じる被検出体からの磁束変
化に基づく磁気抵抗の変化を利用して被検出体の検出を
行う磁気センサにおいて、前記絶縁基板の被検出体に対
面する側面部に、下端に至るにしたがい被検出体から離
隔する湾曲部を設けたことを特徴とする磁気センサ。(1) A magnetic sensor that has a sensor section using a thin film magnetoresistive element on an insulating substrate, and detects an object by using changes in magnetic resistance based on changes in magnetic flux from the object generated in the sensor section. A magnetic sensor characterized in that a curved portion is provided on a side surface of the insulating substrate facing the detected object, the curved portion separating away from the detected object toward the lower end.
センサ部を所定の間隔を隔てて形成する工程と、前記各
センサ部を形成した面とは反対側の絶縁基板面で、かつ
、前記各センサ部間の間隔よりも狭範囲に亘る弧状の凹
部を形成する工程と、この凹部の中央部を境として絶縁
基板を切断する工程とを含むことを特徴とする磁気セン
サの製造方法。(2) a step of forming a plurality of thin film magnetoresistive elements on an insulating substrate at predetermined intervals; A method for manufacturing a magnetic sensor, comprising the steps of: forming an arcuate recess extending over a range narrower than the interval between each sensor part; and cutting an insulating substrate with the center of the recess as a boundary.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61208499A JPS6361973A (en) | 1986-09-03 | 1986-09-03 | Magnetic sensor and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61208499A JPS6361973A (en) | 1986-09-03 | 1986-09-03 | Magnetic sensor and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6361973A true JPS6361973A (en) | 1988-03-18 |
Family
ID=16557167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61208499A Pending JPS6361973A (en) | 1986-09-03 | 1986-09-03 | Magnetic sensor and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361973A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005003477A (en) * | 2003-06-11 | 2005-01-06 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
-
1986
- 1986-09-03 JP JP61208499A patent/JPS6361973A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005003477A (en) * | 2003-06-11 | 2005-01-06 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
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