JPS6361140U - - Google Patents
Info
- Publication number
- JPS6361140U JPS6361140U JP1986155963U JP15596386U JPS6361140U JP S6361140 U JPS6361140 U JP S6361140U JP 1986155963 U JP1986155963 U JP 1986155963U JP 15596386 U JP15596386 U JP 15596386U JP S6361140 U JPS6361140 U JP S6361140U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- plate
- moving part
- disposed
- carriage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 230000032258 transport Effects 0.000 claims 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
- Y10S414/138—Wafers positioned vertically within cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Description
図は本考案の一実施例を示し、第1図は搬送装
置の外側カバーを外した状態の正面図、第2図は
同平面図、第3図は同右側面図、第4図は第1図
のA−A断面図、第5図は第1図の中央部縦断面
図、第6図は水平移動部の拡大水平断面図、第7
図は同水平移動部の拡大縦断面図、第8図は搬送
装置の平面配置図、第9図は同装置の正面配置図
、第10図は作動状態を示す装置上部の正面図、
第11図はカセツト用アームの動作を示す正面図
である。 2……底板、3……上板、4……ガイド棒、5
……可動板、7……筒体、8……ねじ付シヤフト
、14……水平移動部、27……キヤリツジ、3
2……回動アーム、32a……ウエーハ用アーム
、32b……カセツト用アーム、33……プーリ
、34……ワイヤ。
置の外側カバーを外した状態の正面図、第2図は
同平面図、第3図は同右側面図、第4図は第1図
のA−A断面図、第5図は第1図の中央部縦断面
図、第6図は水平移動部の拡大水平断面図、第7
図は同水平移動部の拡大縦断面図、第8図は搬送
装置の平面配置図、第9図は同装置の正面配置図
、第10図は作動状態を示す装置上部の正面図、
第11図はカセツト用アームの動作を示す正面図
である。 2……底板、3……上板、4……ガイド棒、5
……可動板、7……筒体、8……ねじ付シヤフト
、14……水平移動部、27……キヤリツジ、3
2……回動アーム、32a……ウエーハ用アーム
、32b……カセツト用アーム、33……プーリ
、34……ワイヤ。
Claims (1)
- シリコンウエーハ又はシリコンウエーハを収納
したカセツトをアーム上に載せて任意の位置に搬
送する搬送装置であつて、複数のガイド棒で上下
に連結された上板と底板の間にねじ付シヤフトが
回転駆動可能に立設され、該上板と底板の間に可
動板が前記ガイド棒により上下摺動可能にガイド
され且つ前記ねじ付シヤフトの回転により上下動
するように配設され、該可動板上には前記上板を
貫通して上方に突出する筒体が回転駆動可能に立
設され、該筒体の上端に水平移動部が固定され、
該水平移動部上には回動アームを設けたキヤリツ
ジが水平移動可能に配設され、該水平移動部内に
軸支したプーリにかけ渡した駆動用のワイヤが該
キヤリツジに係止され、前記回動アームはウエー
ハ用アームとカセツト用アームを直角位置に有し
前記キヤリツジ上で上下に約90度の範囲で回動
可能に枢支されたことを特徴とするシリコンウエ
ーハ用搬送装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986155963U JPS6361140U (ja) | 1986-10-11 | 1986-10-11 | |
US07/063,956 US4778331A (en) | 1986-10-11 | 1987-06-19 | Carrier system for silicon wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986155963U JPS6361140U (ja) | 1986-10-11 | 1986-10-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6361140U true JPS6361140U (ja) | 1988-04-22 |
Family
ID=15617363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986155963U Pending JPS6361140U (ja) | 1986-10-11 | 1986-10-11 |
Country Status (2)
Country | Link |
---|---|
US (1) | US4778331A (ja) |
JP (1) | JPS6361140U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06188304A (ja) * | 1992-12-17 | 1994-07-08 | Furukawa Electric Co Ltd:The | リングフレーム自動洗浄装置 |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3637880C2 (de) * | 1986-11-06 | 1994-09-01 | Meissner & Wurst | Transportierbares Behältnis zur Handhabung von Halbleiterelementen während ihrer Herstellung sowie Verfahren zur partikelfreien Übergabe von Produkten |
EP0302542B1 (en) * | 1987-07-14 | 1994-01-26 | Koninklijke Philips Electronics N.V. | Apparatus for the transport of carriers from and to a positioning device, and selection device for use in such an apparatus |
KR0133676B1 (ko) * | 1987-12-07 | 1998-04-23 | 후세 노보루 | 웨이퍼 이동 교체 장치 및 방법 |
US5112205A (en) * | 1989-05-15 | 1992-05-12 | Sony Corporation | Optical-disk manufacturing apparatus |
US5154730A (en) * | 1991-05-17 | 1992-10-13 | Materials Research Corporation | Semiconductor wafer processing module having an inclined rotating wafer handling turret and a method of using the module |
US6473157B2 (en) * | 1992-02-07 | 2002-10-29 | Nikon Corporation | Method of manufacturing exposure apparatus and method for exposing a pattern on a mask onto a substrate |
US5498118A (en) * | 1992-02-07 | 1996-03-12 | Nikon Corporation | Apparatus for and method of carrying a substrate |
TW245823B (ja) * | 1992-10-05 | 1995-04-21 | Tokyo Electron Co Ltd | |
US5295777A (en) * | 1992-12-23 | 1994-03-22 | Materials Research Corporation | Wafer transport module with rotatable and horizontally extendable wafer holder |
JPH08288355A (ja) * | 1995-04-12 | 1996-11-01 | Nikon Corp | 基板搬送装置 |
US5615988A (en) * | 1995-07-07 | 1997-04-01 | Pri Automation, Inc. | Wafer transfer system having rotational capability |
US5741109A (en) * | 1995-07-07 | 1998-04-21 | Pri Automation, Inc. | Wafer transfer system having vertical lifting capability |
US5647718A (en) * | 1995-07-07 | 1997-07-15 | Pri Automation, Inc. | Straight line wafer transfer system |
US5746565A (en) * | 1996-01-22 | 1998-05-05 | Integrated Solutions, Inc. | Robotic wafer handler |
US6036426A (en) * | 1996-01-26 | 2000-03-14 | Creative Design Corporation | Wafer handling method and apparatus |
US6139245A (en) * | 1997-07-11 | 2000-10-31 | Brooks Automation Inc. | Robot arm relocation system |
US5915910A (en) * | 1997-08-29 | 1999-06-29 | Daitron, Inc. | Semiconductor wafer transfer method and apparatus |
US6183186B1 (en) * | 1997-08-29 | 2001-02-06 | Daitron, Inc. | Wafer handling system and method |
US20050008467A1 (en) * | 2003-07-11 | 2005-01-13 | Rich Huang | Load port transfer device |
JP4342928B2 (ja) * | 2003-12-25 | 2009-10-14 | 株式会社森精機製作所 | 工作機械の工具交換装置 |
US20070231108A1 (en) * | 2006-04-04 | 2007-10-04 | Applied Materials, Inc. | Method and apparatus for transferring wafers |
CN104260077A (zh) * | 2014-09-19 | 2015-01-07 | 常熟市惠一机电有限公司 | 一种横行伺服单截机械手 |
WO2016187075A1 (en) * | 2015-05-19 | 2016-11-24 | Verselus, Llc | Paddle assembly for holding an object |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3750804A (en) * | 1969-03-07 | 1973-08-07 | Triax Co | Load handling mechanism and automatic storage system |
US3825245A (en) * | 1972-04-24 | 1974-07-23 | Kearney & Trecker Corp | Workpiece changer mechanism for a machine tool |
US3854605A (en) * | 1974-02-25 | 1974-12-17 | Ibm | Article conveying |
JPS5918194B2 (ja) * | 1978-01-31 | 1984-04-25 | ファナック株式会社 | 工業用ロボット制御方法 |
JPS571116Y2 (ja) * | 1978-01-31 | 1982-01-08 | ||
JPS5548598A (en) * | 1978-09-29 | 1980-04-07 | Fujitsu Fanuc Ltd | Load reducing device of industrial robot |
US4419039A (en) * | 1981-03-04 | 1983-12-06 | Bengtsson Bengt A | Apparatus for loading objects |
FR2501563B1 (fr) * | 1981-03-10 | 1986-07-18 | Sormel Sa | Manipulateur automatique |
US4507044A (en) * | 1981-12-08 | 1985-03-26 | Zymark Corporation | Robot and control system |
JPS58149189A (ja) * | 1982-03-01 | 1983-09-05 | セイコーインスツルメンツ株式会社 | 工業用ロボツトの旋回昇降機構 |
US4654955A (en) * | 1982-09-07 | 1987-04-07 | The Valeron Corporation | Tool changer mechanism for machining centers |
US4651863A (en) * | 1983-08-31 | 1987-03-24 | Westinghouse Electric Corp. | System for assembling electronic component kits |
JPS61279522A (ja) * | 1985-06-05 | 1986-12-10 | Ichikou Eng Kk | 取出機用昇降装置 |
-
1986
- 1986-10-11 JP JP1986155963U patent/JPS6361140U/ja active Pending
-
1987
- 1987-06-19 US US07/063,956 patent/US4778331A/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06188304A (ja) * | 1992-12-17 | 1994-07-08 | Furukawa Electric Co Ltd:The | リングフレーム自動洗浄装置 |
Also Published As
Publication number | Publication date |
---|---|
US4778331A (en) | 1988-10-18 |
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