JPS6360577A - Silent discharge type gas laser device - Google Patents
Silent discharge type gas laser deviceInfo
- Publication number
- JPS6360577A JPS6360577A JP20538786A JP20538786A JPS6360577A JP S6360577 A JPS6360577 A JP S6360577A JP 20538786 A JP20538786 A JP 20538786A JP 20538786 A JP20538786 A JP 20538786A JP S6360577 A JPS6360577 A JP S6360577A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- low melting
- cover material
- laser device
- gas laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 25
- 239000011521 glass Substances 0.000 claims abstract description 13
- 239000002241 glass-ceramic Substances 0.000 claims abstract description 7
- 238000007599 discharging Methods 0.000 claims abstract 2
- 239000002184 metal Substances 0.000 claims description 19
- 230000008018 melting Effects 0.000 claims description 9
- 238000002844 melting Methods 0.000 claims description 9
- 229910010272 inorganic material Inorganic materials 0.000 abstract description 5
- 239000011147 inorganic material Substances 0.000 abstract description 5
- 238000011109 contamination Methods 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 208000028659 discharge Diseases 0.000 description 28
- 229920002050 silicone resin Polymers 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000006112 glass ceramic composition Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、一対の誘電体被覆金属電極を対向させ、そ
の間で放電によりレーザ光を得る無声放電式ガスレーザ
装置、特に各誘電体被覆金属？Ｔｉ極の放電部を除く外
面を覆う力／へ一材の改良に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a silent discharge gas laser device in which a pair of dielectric-coated metal electrodes are opposed to each other and a laser beam is generated by discharge between them, and in particular, each dielectric-coated metal electrode is placed opposite to each other. This invention relates to improvements in the force/heel material that covers the outer surface of the Ti electrode except for the discharge area.
第２図は、従来の無声放電式ガスレーザ体署ル示すもの
で、図中、（１）は外表面が誘電体（２）で被覆された
中空状の一対の金属電極で、内部に冷却水が通されて冷
却される。（３）は上記両金属電極（１）の間に形成さ
れる放電空間で、例えばＣＯ２を含むレーザ媒質が放電
方向と直交する方向に循環する。（４）は上記各金属電
極（１）の放電部を除く外面にモールドされたシリコン
樹脂製のカバー材である。Figure 2 shows the structure of a conventional silent discharge gas laser. is passed through and cooled. (3) is a discharge space formed between the two metal electrodes (1), in which a laser medium containing, for example, CO2 circulates in a direction perpendicular to the discharge direction. (4) is a cover material made of silicone resin molded on the outer surface of each of the metal electrodes (1) except for the discharge portion.
従来の無声放電式ガスレーザ装置は上記のように構成さ
れ、両金属電極（１）間に電圧を印加するとともに、放
電空間（３）にレーザ媒質を循環させ、放電空間（３）
における放電によりレーザ媒質を励起させる。これによ
り、放電方向およびレーザ媒質の流れ方向いずれも直交
する方向にレーザ光が出力される。A conventional silent discharge gas laser device is configured as described above, and a voltage is applied between both metal electrodes (1), and a laser medium is circulated in the discharge space (3).
The laser medium is excited by the discharge at. As a result, laser light is output in a direction perpendicular to both the discharge direction and the flow direction of the laser medium.
上記のような従来の無声放電式ガスレーザ装着では、各
金属電極（１）の放電部を除く外面を覆うカバー材（４
）としてシリコン樹脂を用いているため、充填性はよい
が放電劣化が生じてカバー材（０から有機成分がガスと
して放出され、レーザ媒質がこのガスにより汚染されて
レーザ出力特性が悪くなる等の問題があった。In the conventional silent discharge gas laser installation as described above, a cover material (4
), the filling properties are good, but discharge deterioration occurs and the organic components are released as gas from the cover material (0), and the laser medium is contaminated by this gas, resulting in poor laser output characteristics. There was a problem.
この発明は、かかる問題点を解決するためになされたも
ので、レーザ媒質の汚染を大幅に抑制してレーザ出力特
性を安定させることができる無声放電式ガスレーザ装置
を得ることを目的とする。The present invention was made to solve these problems, and an object of the present invention is to provide a silent discharge gas laser device that can significantly suppress contamination of the laser medium and stabilize laser output characteristics.
この発明に係る無声放電式ガスレーザ装置は、カバー材
を、ガラスセラミックスで形成するとともに、このカバ
ー材と誘電体被覆金属電極との間に、低融点ガラスを流
し込み再焼成するようにしたものである。In the silent discharge type gas laser device according to the present invention, the cover material is formed of glass ceramics, and low melting point glass is poured between the cover material and the dielectric coated metal electrode and re-fired. .
この発明においては、カバー材を、機械加工が可能なガ
ラスセラミックスで形成するとともに、このカバー材と
誘電体被覆金属電極との間に、融合性がよい低融点ガラ
スを流し込み再焼成するようにしているので、誘電体被
覆金属電極を、すべて無機の材質でモールドすることが
できる。このため、有機成分が放出されてレーザ媒質が
汚染されるといった不具合が全くなく、レーザ出力特性
を安定させることが可能となる。In this invention, the cover material is formed of glass ceramic that can be machined, and a low melting point glass with good fusibility is poured between the cover material and the dielectric coated metal electrode and then refired. Therefore, the dielectric-coated metal electrode can be entirely molded with an inorganic material. Therefore, there is no problem of contamination of the laser medium due to release of organic components, and it is possible to stabilize the laser output characteristics.
第１図はこの発明の一実施例を示すもので、図中、第２
図と同一符号は同−又は相当部分を示す。この実施例で
は、外面に誘電体（２）が被覆された一対の各金属電極
（１）の放電部を除く外面を覆うカバー材（４）が、賦
形性がよく機械加工が可能なガラスセラミックスで形成
され、このカバー材（４）と金属電極（１）との間には
、シリコン樹脂に近似した融合性を有する低融点ガラス
（５）を流し込み再焼成されるようになっている。FIG. 1 shows an embodiment of the present invention.
The same reference numerals as in the figures indicate the same or corresponding parts. In this embodiment, the cover material (4) that covers the outer surface of each of the pair of metal electrodes (1), except for the discharge portion, whose outer surface is coated with a dielectric material (2) is made of glass that has good shapeability and can be machined. It is made of ceramics, and a low melting point glass (5) having a fusibility similar to that of silicone resin is poured between the cover material (4) and the metal electrode (1) and then refired.
上記のように構成された無声放電式ガスレーザ装置にお
いては、放電空間（３）にレーザ媒質を循環させるとと
もに、両金属電極（１）間に電圧を印加して放電を発生
させ、放電空間（３）のレーザ媒質を励起させることに
より、放電方向およびレーザ媒質の流れ方向いずれにも
直交する方向にレーザ光が出力される。In the silent discharge gas laser device configured as described above, the laser medium is circulated in the discharge space (3), and a voltage is applied between the two metal electrodes (1) to generate a discharge. ) by exciting the laser medium, laser light is output in a direction perpendicular to both the discharge direction and the flow direction of the laser medium.
ところで、各金属電極（１）は、放電部を除く外面がカ
バー材（４）および低融点ガラス（５）に覆われている
ので、放電領域が各金属電極（１）の対向面部分に制限
される。そしてカバー材（４）は耐放電性に優れ放電劣
化が生じない無機材質のガラスセラミックスで形成され
、またカバー材（４）と金属電極（１）との間に流し込
まれ再焼成される低融点ガラス（５）も無機材質である
ので、放電に伴なう有機成分の放出が全くなく、レーザ
媒質が汚染されることがない、このため、レーザ出力特
性を安定させることができる。また、低融点ガラス（５
）は、融合性がシリコン樹脂に近似しているで、カバー
材（４）としてガラスセラミックスを用いることに伴な
う不具合は全くない。By the way, since the outer surface of each metal electrode (1) except for the discharge part is covered with the cover material (4) and the low melting point glass (5), the discharge area is limited to the opposing surface of each metal electrode (1). be done. The cover material (4) is made of an inorganic glass ceramic material that has excellent discharge resistance and does not suffer from discharge deterioration, and has a low melting point that is poured between the cover material (4) and the metal electrode (1) and re-fired. Since the glass (5) is also an inorganic material, no organic components are released due to discharge, and the laser medium is not contaminated. Therefore, the laser output characteristics can be stabilized. In addition, low melting point glass (5
) has a fusibility similar to that of silicone resin, and there are no problems associated with using glass ceramics as the cover material (4).
この発明は以上説明したとおり、カバー材をガラスセラ
ミックスで形成するとともに、このカバー材と誘電体被
覆金属電極との間に、低融点ガラスを流し込み再焼成す
るようにしているので、誘電体被覆金属電極が、すべて
無機の材質でモールドされることになる。このため、レ
ーザ媒質の汚染を防止してレーザ出力特性を安定させる
ことができる等の効果がある。As explained above, in this invention, the cover material is formed of glass ceramics, and low melting point glass is poured between the cover material and the dielectric-coated metal electrode and re-fired. All electrodes will be molded with inorganic materials. Therefore, there are effects such as being able to prevent contamination of the laser medium and stabilize the laser output characteristics.
第１図はこの発明の一実施例を示す無声放電式ガスレー
ザ装置の要部断面図、第２図は従来の無声放電式ガスレ
ーザ装置を示す第１図相当図である。
（１）・・・金属電極、 （２）・・・誘電体、（３
）・・・放電空間、 （４）・・・カバー材、（５）
・・・低融点ガラス。
なお、図中、同一符号は同−又は相当部分を示す。FIG. 1 is a sectional view of a main part of a silent discharge type gas laser device showing an embodiment of the present invention, and FIG. 2 is a view corresponding to FIG. 1 showing a conventional silent discharge type gas laser device. (1)...metal electrode, (2)...dielectric, (3
)...Discharge space, (4)...Cover material, (5)
...Low melting point glass. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
て対向させ、上記放電空間での放電によりレーザ光を得
るとともに、上記各誘電体被覆金属電極の放電部を除く
外面をカバー材で覆った無声放電式ガスレーザ装置にお
いて、上記カバー材を、ガラスセラミックスで形成する
とともに、このカバー材と誘電体被覆金属電極との間に
、低融点ガラスを流し込み再焼成したことを特徴とする
無声放電式ガスレーザ装置。A pair of dielectric-coated metal electrodes are placed facing each other while maintaining a predetermined discharge space, and a laser beam is obtained by discharging in the discharge space, and the outer surface of each dielectric-coated metal electrode except for the discharge part is covered with a cover material. A covered silent discharge type gas laser device, characterized in that the cover material is formed of glass ceramics, and a low melting point glass is poured between the cover material and the dielectric coated metal electrode and re-fired. type gas laser device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20538786A JPS6360577A (en) | 1986-09-01 | 1986-09-01 | Silent discharge type gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20538786A JPS6360577A (en) | 1986-09-01 | 1986-09-01 | Silent discharge type gas laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6360577A true JPS6360577A (en) | 1988-03-16 |
Family
ID=16505976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20538786A Pending JPS6360577A (en) | 1986-09-01 | 1986-09-01 | Silent discharge type gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6360577A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0426993A2 (en) * | 1989-10-23 | 1991-05-15 | Hughes Aircraft Company | Improved preionization electrode for pulsed gas laser |
| US5172389A (en) * | 1989-02-07 | 1992-12-15 | Matsushita Electric Industrial Co., Ltd. | Gas laser apparatus |
-
1986
- 1986-09-01 JP JP20538786A patent/JPS6360577A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5172389A (en) * | 1989-02-07 | 1992-12-15 | Matsushita Electric Industrial Co., Ltd. | Gas laser apparatus |
| EP0426993A2 (en) * | 1989-10-23 | 1991-05-15 | Hughes Aircraft Company | Improved preionization electrode for pulsed gas laser |
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