JPS6358119A - Measurement of light beam power distribution - Google Patents
Measurement of light beam power distributionInfo
- Publication number
- JPS6358119A JPS6358119A JP20257386A JP20257386A JPS6358119A JP S6358119 A JPS6358119 A JP S6358119A JP 20257386 A JP20257386 A JP 20257386A JP 20257386 A JP20257386 A JP 20257386A JP S6358119 A JPS6358119 A JP S6358119A
- Authority
- JP
- Japan
- Prior art keywords
- knife
- light beam
- power distribution
- light
- beam power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 21
- 230000003321 amplification Effects 0.000 claims abstract description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 6
- 238000000691 measurement method Methods 0.000 claims description 5
- 239000000700 radioactive tracer Substances 0.000 abstract description 4
- 230000004069 differentiation Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要〕
光ビームの光軸に垂直な断面の光ビームパワー分布の測
定法のうち、ナイフェツジ方式によって光ビームパワー
分布を算出する測定法において、ナイフに隣接してスリ
ットを配置することにより、測定される上記光ビームパ
ワー分布がナイフの移動方向に対して線対称でない場合
でも、或いはパワーの大小の波が短い空間周期を持つ場
合でも上記光ビームパワー分布を精度よく測定すること
ができるようにしたものである。[Detailed Description of the Invention] [Summary] Among the methods for measuring the optical beam power distribution in a cross section perpendicular to the optical axis of the optical beam, in the measuring method for calculating the optical beam power distribution by the knife method, a slit is placed adjacent to the knife. By placing a It is designed so that it can be measured.
本発明は光通信に用いられる光ビームのパワー分布の測
定に関する。The present invention relates to measuring the power distribution of a light beam used in optical communications.
光半導体素子の出力光を光ファイバに結合させる光学系
の設計、改良の際、その出力直後や光学系内、および透
過後の光ビームパワー分布データは重要な情報の一つで
あり、例えばレンズやプリズムなどを改良する場合に、
その正確な把握が強く要望されている。When designing and improving an optical system that couples the output light of an optical semiconductor element to an optical fiber, data on the optical beam power distribution immediately after the output, within the optical system, and after passing through the lens is important information. When improving a prism, etc.
Accurate understanding of this is strongly desired.
従来の光ビームパワー分布測定系を第４図の原理説明図
に示す。A conventional optical beam power distribution measuring system is shown in the principle explanatory diagram of FIG.
測定される光ビーム１１を受光素子１２に入射し、光ビ
ーム１１の光軸方向Ｚに垂直に定速駆動袋ｆｆ１３−１
付きのナイフ１３を配置する。The light beam 11 to be measured is incident on the light receiving element 12, and the constant speed drive bag ff13-1 is perpendicular to the optical axis direction Z of the light beam 11.
A knife 13 with a mark is placed.
このナイフ１３を定速駆動装置１３−１によってＸ方向
に移動させながら、光ビームを徐々に遮光して切円状の
光ビームを受光素子１２で受光する。While moving this knife 13 in the X direction by a constant speed drive device 13-1, the light beam is gradually blocked and a truncated circular light beam is received by the light receiving element 12.
この受光素子１２の受光出力りと、定速駆動装置１３−
１から構成される装置信号Ｅとを微分・増幅回路１５に
入力し、ナイフ１３の移動距離で微分し、増幅した出力
を光ビームパワー信号Ｆとしてカーブトレーサ１６に入
力し、パワー分布データを曲線で得る。The light receiving output of this light receiving element 12 and the constant speed drive device 13-
1 is input to the differentiator/amplifier circuit 15 and differentiated by the moving distance of the knife 13. The amplified output is input to the curve tracer 16 as the optical beam power signal F, and the power distribution data is converted into a curve. Get it.
第５図は、第１図における測定系をＺ方向から見た原理
説明図で、斜線のピンチの大小は光の明暗を示す。FIG. 5 is an explanatory diagram of the principle of the measurement system in FIG. 1 viewed from the Z direction, and the magnitude of the pinch indicated by diagonal lines indicates the brightness and darkness of the light.
第６図は、得られたＹ方向（縦軸）の所定位置ｙにおけ
る光ビームパワ一対Ｘ方向（横軸）の位Ｗｘの光ビーム
パワー分布曲線の一測定例を示し、Ｘ＝Ｏは光軸を示す
。FIG. 6 shows an example of a measured optical beam power distribution curve of the obtained optical beam power at a predetermined position y in the Y direction (vertical axis) versus position Wx in the X direction (horizontal axis), where X=O is the optical axis. shows.
しかしながら、このような上記測定法によれば、ナイフ
の移動するＸ方向に垂直なＹ方向に対しては、光ビーム
の分割がなされてなく、積分量のみを測定するため、光
ビームパワー分布がＸ方向に対して線対称になっていな
い光ビームや輪郭のぼけている光ビームにおいては、光
ビームパワー分布データの把握が正確にできないといっ
た問題があった。However, according to the above measurement method, the light beam is not divided in the Y direction perpendicular to the X direction in which the knife moves, and only the integral amount is measured, so the light beam power distribution is For light beams that are not line symmetrical with respect to the X direction or for light beams with blurred outlines, there is a problem in that the light beam power distribution data cannot be accurately grasped.
本発明は上記問題点を解決するための光ビームパワー分
布測定法を提供するものである。The present invention provides a light beam power distribution measurement method for solving the above problems.
従来測定法における上記問題点は、Ｚ方向と垂直なＸ方
向に移動させる定速駆動装置３−１付きナイフ３に隣接
してＸ方向と垂直なＹ方向の所定位置に方形開口された
スリット４を配置する配置することによって解決される
。The above-mentioned problem with the conventional measurement method is that a slit 4 having a rectangular opening at a predetermined position in the Y direction perpendicular to the X direction is adjacent to the knife 3 with a constant speed drive device 3-1 that moves in the X direction perpendicular to the Z direction. Solved by placing .
方形開口したスリットによりナイフの移動面を通過する
光ビームが制限され、Ｙ方向に細分化された短冊状の光
ビームを受光できる。The rectangular slit restricts the light beam passing through the moving surface of the knife, and it is possible to receive a light beam segmented into strips in the Y direction.
以下図面に示す一実施例により本発明の要旨を具体的に
説明する。The gist of the present invention will be specifically explained below with reference to an embodiment shown in the drawings.
第１図の原理説明図に示すように、測定される光ビーム
１を受光素子２に入射し、光ビーム１の光軸方向Ｚに垂
直な定速駆動袋Ｗ３−１付きのナイフ３を配置し、この
ナイフ３に隣接してＹ方向の所定位Ｗｙに方形開口した
スリット４を配置する。As shown in the principle explanatory diagram of FIG. 1, a light beam 1 to be measured is incident on a light receiving element 2, and a knife 3 with a constant speed driving bag W3-1 is arranged perpendicular to the optical axis direction Z of the light beam 1. A slit 4 having a rectangular opening is arranged adjacent to this knife 3 at a predetermined position Wy in the Y direction.
このスリット４はＹ方向任意の位置に固定調節できる。This slit 4 can be fixed and adjusted to any position in the Y direction.
上記ナイフ３を定速駆動袋Ｗ３−１によってＸ方向に定
速度で移動させながら、所定位置ｙに置いたスリット４
を通過した短冊状の光ビームを徐々に遮光し、通過した
光ビームを受光素子２で受光する。While the knife 3 is moved at a constant speed in the X direction by the constant speed drive bag W3-1, the slit 4 is placed at a predetermined position y.
The rectangular light beam that has passed is gradually blocked, and the light beam that has passed is received by the light receiving element 2.
この受光素子２の受光出力Ａと、定速駆動装置３−１か
ら構成される装置信号Ｂとを微分・増幅回路５に入力し
、ナイフ３の移動距離で微分し、増幅した出力を光ビー
ムパワー信号Ｃとしてカーブトレーサ６に入力し、パワ
ー分布データを曲線で得る。The light-receiving output A of the light-receiving element 2 and the device signal B constituted by the constant-speed drive device 3-1 are input to the differentiation/amplification circuit 5, differentiated by the moving distance of the knife 3, and the amplified output is used as the light beam. It is input to the curve tracer 6 as a power signal C to obtain power distribution data in the form of a curve.
第２図は、第１図における測定系をＺ方向から見た原理
説明図で、斜線のピッチの大小は光の明暗を示す。FIG. 2 is a principle explanatory diagram of the measurement system in FIG. 1 viewed from the Z direction, and the pitch of the diagonal lines indicates the brightness and darkness of the light.
第３図は、得られたＹ方向（Ｎ軸）の所定位置ｙにおけ
る光ビームパワ一対Ｘ方向（横軸）の位置Ｘの光ビーム
パワー分布曲線の一測定例を示し、光ビームパワーは、
Ｘ方向の光軸Ｘ＝Ｏに対し非対称で、且つ位置Ｘによっ
て大小に変化している様子が正確に把握できる。FIG. 3 shows an example of the measurement of the obtained light beam power at a predetermined position y in the Y direction (N axis) versus the light beam power distribution curve at a position X in the X direction (horizontal axis), where the light beam power is
It is possible to accurately understand how the image is asymmetrical with respect to the optical axis X=O in the X direction and changes in size depending on the position X.
なお、ナイフに隣接するスリットは、ナイフの直前、直
後何れに置いても支障はない。Note that the slit adjacent to the knife may be placed either immediately before or immediately after the knife without any problem.
〔発明の効果〕
以上、詳述したように本発明によれば、ナイフの移動方
向Ｘに垂直な方向Ｙに関して通過する光ビームを制限で
きることにより、精度のよい正確な光ビームパワー分布
データが得られるといった実用上極めて有用な効果を発
揮する。[Effects of the Invention] As detailed above, according to the present invention, by being able to restrict the light beam passing in the direction Y perpendicular to the moving direction X of the knife, accurate light beam power distribution data can be obtained. It has extremely useful effects in practical terms.
第１図は本発明による一実施例の原理説明図、第２図は
第１図における測定系をＺ方向から見た原理説明図、
第３図は本実施例による光ビームパワー分布曲線の一測
定例、
第４図は従来技術による原理説明図、
第５図は第４図における測定系をＺ方向から見た原理説
明図、
第６図は従来測定法による光ビームパワー分布曲線の一
測定例である。
図において、
１は光ビーム、
２は受光素子、
３はナイフ、
３−１は定速駆動装置、
４はスリット、
５は微分・増幅回路、
６はカーブトレーサ、
Ａは受光出力、
ＢはＸ位置信号
Ｃは光ビームパワー信号、
を示す。FIG. 1 is a diagram explaining the principle of an embodiment of the present invention, FIG. 2 is a diagram explaining the principle of the measurement system shown in FIG. 1 viewed from the Z direction, and FIG. Measurement example: Figure 4 is a diagram explaining the principle according to the conventional technique. Figure 5 is a diagram explaining the principle of the measurement system in Figure 4 viewed from the Z direction. Figure 6 is a measurement of the light beam power distribution curve using the conventional measurement method. This is an example. In the figure, 1 is a light beam, 2 is a light receiving element, 3 is a knife, 3-1 is a constant speed drive device, 4 is a slit, 5 is a differentiation/amplification circuit, 6 is a curve tracer, A is a light receiving output, and B is X The position signal C represents a light beam power signal.
Claims (1)
に垂直な断面の光ビームパワー分布の測定法のうち、ナ
イフエッジ方式によって該光ビームパワー分布を算出す
る測定法において、 上記Ｚ方向と垂直なＸ方向に移動させる定速駆動装置（
３−１）付きナイフ（３）に隣接して、Ｘ方向と垂直な
Ｙ方向の所定位置に方形開口されたスリット（４）を配
置し、 上記ナイフ（３）を定速度で移動させ、遮光しながら通
過した光ビーム（１）を上記受光素子（２）で受光し、
受光出力（Ａ）を上記ナイフ（３）の移動距離で微分、
増幅して測定することを特徴とする光ビームパワー分布
測定法。[Claims] Optical axis direction Z of the light beam (1) incident on the light receiving element (2)
Among the methods for measuring the optical beam power distribution in a cross section perpendicular to , in the measuring method for calculating the optical beam power distribution by a knife edge method, a constant speed drive device (
A slit (4) with a rectangular opening is arranged at a predetermined position in the Y direction perpendicular to the X direction, adjacent to the knife (3) with 3-1), and the knife (3) is moved at a constant speed to block light. The light beam (1) that has passed through is received by the light receiving element (2),
Differentiate the received light output (A) with the moving distance of the knife (3),
A light beam power distribution measurement method characterized by amplification and measurement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20257386A JPS6358119A (en) | 1986-08-27 | 1986-08-27 | Measurement of light beam power distribution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20257386A JPS6358119A (en) | 1986-08-27 | 1986-08-27 | Measurement of light beam power distribution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6358119A true JPS6358119A (en) | 1988-03-12 |
Family
ID=16459731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20257386A Pending JPS6358119A (en) | 1986-08-27 | 1986-08-27 | Measurement of light beam power distribution |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6358119A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5078491A (en) * | 1990-04-26 | 1992-01-07 | Coherent, Inc. | Apparatus for measuring the mode quality of a laser beam |
| US5499094A (en) * | 1994-12-21 | 1996-03-12 | Eastman Kodak Company | Apparatus and method for measuring the length and width of a spot of light utilizing two different masks |
| WO2011148138A1 (en) * | 2010-05-28 | 2011-12-01 | Nightingale - Eos Ltd | Apparatus and method for locating the centre of a beam profile |
| US9041939B2 (en) | 2010-05-28 | 2015-05-26 | Nightingale-Eos Ltd | Apparatus and method for compensating for sample misalignment |
-
1986
- 1986-08-27 JP JP20257386A patent/JPS6358119A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5078491A (en) * | 1990-04-26 | 1992-01-07 | Coherent, Inc. | Apparatus for measuring the mode quality of a laser beam |
| US5499094A (en) * | 1994-12-21 | 1996-03-12 | Eastman Kodak Company | Apparatus and method for measuring the length and width of a spot of light utilizing two different masks |
| WO2011148138A1 (en) * | 2010-05-28 | 2011-12-01 | Nightingale - Eos Ltd | Apparatus and method for locating the centre of a beam profile |
| US9041939B2 (en) | 2010-05-28 | 2015-05-26 | Nightingale-Eos Ltd | Apparatus and method for compensating for sample misalignment |
| US9091633B2 (en) | 2010-05-28 | 2015-07-28 | Nightingale—EOS Ltd. | Apparatus and method for locating the centre of a beam profile |
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