JPS6357449U - - Google Patents
Info
- Publication number
- JPS6357449U JPS6357449U JP15229386U JP15229386U JPS6357449U JP S6357449 U JPS6357449 U JP S6357449U JP 15229386 U JP15229386 U JP 15229386U JP 15229386 U JP15229386 U JP 15229386U JP S6357449 U JPS6357449 U JP S6357449U
- Authority
- JP
- Japan
- Prior art keywords
- view
- ceiling surface
- main part
- periphery
- ceiling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
Description
第1図乃至第5図は、本考案の実施例で、第1
図は、一例の構成説明図、第2図は、同例の天井
の下面図、第3図は、第2図の要部拡大図、第4
図は、同例の要部截断側面図、第5図は、他の例
の要部截断側面図、第6図乃至第8図は、実施例
を示し、第6図は、一例の天井の要部拡大下面図
、第7図は、同例の要部截断側面図、第8図は、
他の例の要部截断側面図である。
A……壁、1……天井フレーム、4……クリー
ンユニツト、5……リターン口、6……垂れ壁、
6′……エアカーテン手段、7……グレーチング
またはパンチングメタル、8……天井チヤンバ、
9……リターンチヤンバ、10……ダクト、41
……ケーシング、42……高性能フイルタ、43
……フアン、2……高性能フイルタ、3……パン
チングメタル。
Figures 1 to 5 show embodiments of the present invention.
The figure is an explanatory view of the configuration of an example, Figure 2 is a bottom view of the ceiling of the same example, Figure 3 is an enlarged view of the main part of Figure 2, and Figure 4
The figure is a cut-away side view of the main part of the same example, FIG. 5 is a cut-away side view of the main part of another example, FIGS. 6 to 8 show examples, and FIG. An enlarged bottom view of the main part, FIG. 7 is a cutaway side view of the main part of the same example, and FIG.
FIG. 7 is a cross-sectional side view of a main part of another example. A... Wall, 1... Ceiling frame, 4... Clean unit, 5... Return port, 6... Hanging wall,
6'...Air curtain means, 7...Grating or punching metal, 8...Ceiling chamber,
9... Return chamber, 10... Duct, 41
...Casing, 42...High performance filter, 43
...Fan, 2...High performance filter, 3...Punching metal.
Claims (1)
た、天井面の周縁部にリターン口5を周設したこ
とを特徴とする全面層流クリーンルーム。 A full laminar flow clean room characterized by having clean units 4 arranged on the ceiling surface and return ports 5 provided around the periphery of the ceiling surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986152293U JPH0416098Y2 (en) | 1986-10-02 | 1986-10-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986152293U JPH0416098Y2 (en) | 1986-10-02 | 1986-10-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6357449U true JPS6357449U (en) | 1988-04-16 |
JPH0416098Y2 JPH0416098Y2 (en) | 1992-04-10 |
Family
ID=31070139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986152293U Expired JPH0416098Y2 (en) | 1986-10-02 | 1986-10-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0416098Y2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61168735A (en) * | 1985-01-21 | 1986-07-30 | Hitachi Ltd | Clean room |
-
1986
- 1986-10-02 JP JP1986152293U patent/JPH0416098Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61168735A (en) * | 1985-01-21 | 1986-07-30 | Hitachi Ltd | Clean room |
Also Published As
Publication number | Publication date |
---|---|
JPH0416098Y2 (en) | 1992-04-10 |