JPS6355361U - - Google Patents
Info
- Publication number
- JPS6355361U JPS6355361U JP14939786U JP14939786U JPS6355361U JP S6355361 U JPS6355361 U JP S6355361U JP 14939786 U JP14939786 U JP 14939786U JP 14939786 U JP14939786 U JP 14939786U JP S6355361 U JPS6355361 U JP S6355361U
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- nozzle
- inductively coupled
- coupled plasma
- generate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims description 2
- 230000001154 acute effect Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14939786U JPS6355361U (de) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14939786U JPS6355361U (de) | 1986-09-29 | 1986-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355361U true JPS6355361U (de) | 1988-04-13 |
Family
ID=31064565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14939786U Pending JPS6355361U (de) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355361U (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59105257A (ja) * | 1982-12-08 | 1984-06-18 | エムデイ−エス・ヘルス・グル−プ・リミテツド | プラズマのサンプリング装置および方法 |
-
1986
- 1986-09-29 JP JP14939786U patent/JPS6355361U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59105257A (ja) * | 1982-12-08 | 1984-06-18 | エムデイ−エス・ヘルス・グル−プ・リミテツド | プラズマのサンプリング装置および方法 |