JPS6352329B2 - - Google Patents
Info
- Publication number
- JPS6352329B2 JPS6352329B2 JP62209526A JP20952687A JPS6352329B2 JP S6352329 B2 JPS6352329 B2 JP S6352329B2 JP 62209526 A JP62209526 A JP 62209526A JP 20952687 A JP20952687 A JP 20952687A JP S6352329 B2 JPS6352329 B2 JP S6352329B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- fluorescent
- ray
- sample table
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 238000001514 detection method Methods 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Description
【発明の詳細な説明】
この発明は、螢光Ｘ線膜厚計における測定点検
出装置に関し、特にコリメータから照射されるＸ
線が照射される位置観察を容易に正確に行なうた
めの新規な改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a measurement point detection device in a fluorescent
The present invention relates to a new improvement for easily and accurately observing the position where a line is irradiated.
従来、用いられていたこの種の装置においては
螢光板のマークを設け、Ｘ線を照射した状態で螢
光板の発光点を目視で測定していたが、精度がと
れないと同時に、照射部と非照射部との境界が鮮
明でなかつたために、顕微鏡に印された十字目盛
とＸ線軸とを一致させることは困難であつた。 Previously used devices of this type had a mark on the fluorescent plate and visually measured the light-emitting point of the fluorescent plate under X-ray irradiation. Since the boundary with the non-irradiated area was not clear, it was difficult to align the cross scale marked on the microscope with the X-ray axis.
この発明は以上のような欠点をすみやかに除去
するための極めて効果的な手段を提供することを
目的とするもので、特に、XY試料台の上に一組
の異種金属を一体化した金属検出板を設け、一方
の金属からの螢光Ｘ線を検出してＸ線軸が各金属
の接合点である境界を検出し、Ｘ線軸を見分ける
ようにした構成である。 The purpose of this invention is to provide an extremely effective means for quickly eliminating the above-mentioned drawbacks, and in particular, it is a metal detection method that integrates a set of dissimilar metals on an XY sample stage. In this structure, a plate is provided to detect fluorescent X-rays from one of the metals to detect the boundary where the X-ray axis is the junction point of each metal, and to distinguish between the X-ray axes.
以下、図面と共にこの発明による螢光Ｘ線膜厚
計における測定点検出装置の好適な実施例につい
て詳細に説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a measurement point detection device in a fluorescent X-ray film thickness meter according to the present invention will be described in detail below with reference to the drawings.
図面において符号１で示されるものはＸ線源で
あり、このＸ線源１からのＸ線はシヤツタ２のコ
リメータ３を経てXY試料台４上の試料５に照射
されている。 In the drawings, reference numeral 1 indicates an X-ray source, and X-rays from this X-ray source 1 pass through a collimator 3 of a shutter 2 and are irradiated onto a sample 5 on an XY sample stage 4.
このXY試料台４は図面には示されていない
が、XY駆動機構によりＸおよびＹ方向に移動可
能に設けられており、このXY駆動機構を作動さ
せてXY試料台４を移動させ、試料５の任意の部
分にＸ線を照射することができる。 Although this XY sample stage 4 is not shown in the drawing, it is provided so that it can be moved in the X and Y directions by an XY drive mechanism.The XY drive mechanism is operated to move the XY sample stage 4, and the sample Any part of the body can be irradiated with X-rays.
前記シヤツタ２の一端には第５図のようにコリ
メータ３が一体に設けられていると共に、その他
端にはミラー６が設けられ、側部に配設された顕
微鏡７から見るとミラー６で反射された試料５の
面を見ることができる。又、試料５からの螢光Ｘ
線は検出器７ａで検出するものである。 A collimator 3 is integrally provided at one end of the shutter 2, as shown in FIG. You can see the surface of sample 5. In addition, fluorescence X from sample 5
The line is detected by the detector 7a.
さらに、第３図に示される構成では本発明によ
る測定点検出装置を示すもので、XYテーブル４
上には試料として第１および第２の金属８，９を
一体化した検出金属板１０が載置されており、こ
のXYテーブル４はマイクロヘツド１１の先端部
１２が結合していることにより矢印Ａの方向に微
少移動できる構成である。さらに、前記第１およ
び第２の金属は互いに異種金属より構成され、第
１金属８は螢光Ｘ線をほとんど発生しないアルミ
ニウム、第２金属は螢光Ｘ線を発生するシンチユ
ウから構成さている。従つて、コリメータ３を介
してＸ線ビームを検出金属板１０に照射した場
合、第４図に示すように螢光Ｘ線の最高強度の半
分の強度にあたる点、すなわちXYステージＸ方
向のX0（XYステージの送り量における）の位置
が第１および第２金属８，９の境界位置であり、
螢光Ｘ線の照射位置であることが分かるものであ
る。 Furthermore, the configuration shown in FIG. 3 shows the measurement point detection device according to the present invention, and the
A detection metal plate 10 that integrates first and second metals 8 and 9 as a sample is placed on top, and this XY table 4 is shaped like an arrow because the tips 12 of the microheads 11 are connected to each other. It has a configuration that allows slight movement in the direction of A. Furthermore, the first and second metals are made of different metals, the first metal 8 being aluminum which hardly generates fluorescent X-rays, and the second metal being made of aluminum which generates fluorescent X-rays. Therefore, when the detection metal plate 10 is irradiated with an X-ray beam via the collimator 3 , as shown in FIG. The position (in the feed amount of the XY stage) is the boundary position between the first and second metals 8 and 9,
It can be seen that this is the irradiation position of fluorescent X-rays.
従つて、同様の手段により、Ｙ方向についても
同様にＸ線の照射位置を知ることができ、実験の
結果によると、その精度は2/100mm以下におさえ
ることができる。 Therefore, by using similar means, the X-ray irradiation position can be found in the Y direction as well, and according to the results of experiments, the accuracy can be kept to 2/100 mm or less.
この発明による装置は以上のような構成と作用
とを備えているため、コリメータから照射される
Ｘ線の位置を正確に知ることができ、この位置に
顕微鏡の十字目盛板の十字目盛のＸおよびＹ線を
合わせればＸ線軸と光軸とを容易に一致させるこ
とができる。 Since the device according to the present invention has the above-described configuration and operation, it is possible to accurately determine the position of the X-rays irradiated from the collimator, and the By aligning the Y-rays, the X-ray axis and the optical axis can be easily aligned.
第１図は全体構成を示す構成図、第２図、第３
図は要部の側面図、第４図は特性図である。
１……Ｘ線源、２……シヤツタ、３……コリメ
ータ、４……XY試料台、５……試料、６……ミ
ラー、７……顕微鏡、７ａ……検出器、８，９…
…第１、第２の金属、１０……検出金属板、１１
……マイクロヘツド。
Figure 1 is a configuration diagram showing the overall configuration, Figures 2 and 3.
The figure is a side view of the main part, and FIG. 4 is a characteristic diagram. 1... X-ray source, 2... Shutter, 3... Collimator, 4... XY sample stage, 5... Sample, 6... Mirror, 7... Microscope, 7a... Detector, 8, 9...
...First and second metals, 10...Detection metal plate, 11
...Micro head.
Claims (1)
テーブル上に載置し、 前記試料表面にＸ線を照射し、前記試料の一方
の材質のみより発生する螢光Ｘ線強度を測定しな
がら、前記XY試料テーブルをＸ方向又はＹ方向
に移動させ、 前記XY試料テーブルを、前記螢光Ｘ線強度が
最大強度の半分の強度を示す位置に止め、前記位
置における前記境界線を光学的観察手段である顕
微鏡の十字目盛板の一方の線に合わせ、 更に、前記試料を前記XY試料テーブル上にて
略90゜回転して載置し、 前記試料表面にＸ線を照射し、前記試料の一方
の材質のみより発生する螢光Ｘ線強度を測定しな
がら、前記XY試料テーブルをＸ方向又はＹ方向
に移動させ、 前記XY試料テーブルを、前記螢光Ｘ線強度が
最大強度の半分の強度を示す位置に止め、前記位
置における前記境界線を光学的観察手段である顕
微鏡の十字目盛板の他方の線に合わせることを特
徴とする螢光Ｘ線膜厚計に於ける測定点調整方
法。[Claims] 1. In film thickness measurement using a fluorescent X-ray film thickness meter, a sample having a boundary line made of two types of materials is placed on an XY sample table, and the sample surface is irradiated with X-rays, While measuring the fluorescent X-ray intensity generated from only one material of the sample, move the XY sample table in the X direction or Y direction, and move the XY sample table until the fluorescent X-ray intensity reaches the maximum intensity. Stop the sample at a position showing half the intensity, align the boundary line at the position with one line of the cross scale plate of the microscope, which is an optical observation means, and then rotate the sample approximately 90 degrees on the XY sample table. irradiating the sample surface with X-rays and moving the XY sample table in the X direction or Y direction while measuring the fluorescence X-ray intensity generated from only one material of the sample, Stopping the XY sample table at a position where the fluorescent X-ray intensity is half of the maximum intensity, and aligning the boundary line at the position with the other line of the cross scale plate of the microscope, which is an optical observation means. A method for adjusting measurement points in a fluorescent X-ray film thickness meter, characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20952687A JPS6366407A (en) | 1987-08-24 | 1987-08-24 | Adjustment of measuring point in fluorescent x-ray film thickness gage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20952687A JPS6366407A (en) | 1987-08-24 | 1987-08-24 | Adjustment of measuring point in fluorescent x-ray film thickness gage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6366407A JPS6366407A (en) | 1988-03-25 |
| JPS6352329B2 true JPS6352329B2 (en) | 1988-10-18 |
Family
ID=16574250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20952687A Granted JPS6366407A (en) | 1987-08-24 | 1987-08-24 | Adjustment of measuring point in fluorescent x-ray film thickness gage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6366407A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2829454B2 (en) * | 1992-03-30 | 1998-11-25 | セイコーインスツルメンツ株式会社 | X-ray fluorescence film thickness measurement method |
| CN112044805B (en) * | 2020-09-28 | 2022-02-01 | 广东艾斯瑞仪器科技有限公司 | Metal detector |
-
1987
- 1987-08-24 JP JP20952687A patent/JPS6366407A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6366407A (en) | 1988-03-25 |
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