JPS6350664Y2 - - Google Patents
Info
- Publication number
- JPS6350664Y2 JPS6350664Y2 JP1984080759U JP8075984U JPS6350664Y2 JP S6350664 Y2 JPS6350664 Y2 JP S6350664Y2 JP 1984080759 U JP1984080759 U JP 1984080759U JP 8075984 U JP8075984 U JP 8075984U JP S6350664 Y2 JPS6350664 Y2 JP S6350664Y2
- Authority
- JP
- Japan
- Prior art keywords
- photomask substrate
- glass
- coloring
- photomask
- plate body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 19
- 239000011521 glass Substances 0.000 claims description 18
- 238000004040 coloring Methods 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229940072033 potash Drugs 0.000 description 1
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Substances [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 1
- 235000015320 potassium carbonate Nutrition 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984080759U JPS60193550U (ja) | 1984-05-31 | 1984-05-31 | フオトマスク基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984080759U JPS60193550U (ja) | 1984-05-31 | 1984-05-31 | フオトマスク基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60193550U JPS60193550U (ja) | 1985-12-23 |
| JPS6350664Y2 true JPS6350664Y2 (ko) | 1988-12-27 |
Family
ID=30626913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984080759U Granted JPS60193550U (ja) | 1984-05-31 | 1984-05-31 | フオトマスク基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60193550U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60195036A (ja) * | 1984-03-16 | 1985-10-03 | Fujitsu Ltd | ガラス基板のマ−キング方法 |
-
1984
- 1984-05-31 JP JP1984080759U patent/JPS60193550U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60195036A (ja) * | 1984-03-16 | 1985-10-03 | Fujitsu Ltd | ガラス基板のマ−キング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60193550U (ja) | 1985-12-23 |
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