JPS6349232U - - Google Patents
Info
- Publication number
- JPS6349232U JPS6349232U JP14298586U JP14298586U JPS6349232U JP S6349232 U JPS6349232 U JP S6349232U JP 14298586 U JP14298586 U JP 14298586U JP 14298586 U JP14298586 U JP 14298586U JP S6349232 U JPS6349232 U JP S6349232U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating brush
- wafer cleaning
- rotating
- reciprocating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図ａ，ｂおよびｃは本考案の一実施例を示
す平面図、正面図および側面図である。
１……ブラシ、２……ウエハ。
FIGS. 1a, 1b and 1c are a plan view, a front view and a side view showing an embodiment of the present invention. 1...Brush, 2...Wafer.
Claims (1)
上記回転ブラシを、被洗浄ウエハに接触させた状
態で、当該回転ブラシの回転軸を含む平面内で往
復運動させる機構を設けたことを特徴とするウエ
ハ洗浄装置。 In wafer cleaning equipment equipped with rotating brushes,
A wafer cleaning apparatus comprising a mechanism for reciprocating the rotating brush within a plane including a rotation axis of the rotating brush while in contact with a wafer to be cleaned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14298586U JPS6349232U (en) | 1986-09-17 | 1986-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14298586U JPS6349232U (en) | 1986-09-17 | 1986-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6349232U true JPS6349232U (en) | 1988-04-04 |
Family
ID=31052241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14298586U Pending JPS6349232U (en) | 1986-09-17 | 1986-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6349232U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216163A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Waste removal method |
| JPS59121939A (en) * | 1982-12-28 | 1984-07-14 | Fujitsu Ltd | Brushing of wafer |
-
1986
- 1986-09-17 JP JP14298586U patent/JPS6349232U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216163A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Waste removal method |
| JPS59121939A (en) * | 1982-12-28 | 1984-07-14 | Fujitsu Ltd | Brushing of wafer |