JPS6348723U - - Google Patents

Info

Publication number
JPS6348723U
JPS6348723U JP14051286U JP14051286U JPS6348723U JP S6348723 U JPS6348723 U JP S6348723U JP 14051286 U JP14051286 U JP 14051286U JP 14051286 U JP14051286 U JP 14051286U JP S6348723 U JPS6348723 U JP S6348723U
Authority
JP
Japan
Prior art keywords
conveyance
conveyor
drive mechanism
chamber
swing arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14051286U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14051286U priority Critical patent/JPS6348723U/ja
Publication of JPS6348723U publication Critical patent/JPS6348723U/ja
Pending legal-status Critical Current

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  • Intermediate Stations On Conveyors (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案装置の一実施例を示す縦断面図
、第２図は第１図のＡ―Ａ線断面図である。 １……搬送室、２……コンベア、３……上下機
構、４……駆動機構、６……スイングアーム、７
……スイングアーム、８……ベルト、９……アイ
ドラプーリ、１０……ストツパ、１１……ウエハ
。 FIG. 1 is a longitudinal cross-sectional view showing one embodiment of the device of the present invention, and FIG. 2 is a cross-sectional view taken along the line AA in FIG. 1... Transfer chamber, 2... Conveyor, 3... Vertical mechanism, 4... Drive mechanism, 6... Swing arm, 7
... Swing arm, 8 ... Belt, 9 ... Idler pulley, 10 ... Stopper, 11 ... Wafer.

Claims (1)

【実用新案登録請求の範囲】 １ 搬送レベルの相違する装置間に設けた搬送室
と、その内部に設けた搬送用のコンベア及びコン
ベアを駆動する駆動機構より成る搬送装置におい
て、コンベアの上下機構を設けたことを特徴とす
る搬送装置。 ２ 前記コンベアと前記駆動機構間にアイドラプ
ーリとスイングアームを設けた実用新案登録請求
の範囲第１項記載の搬送装置。[Scope of Claim for Utility Model Registration] 1. In a conveyance device consisting of a conveyance chamber provided between devices with different conveyance levels, a conveyor for conveyance provided inside the chamber, and a drive mechanism for driving the conveyor, the vertical mechanism of the conveyor is A conveying device characterized by being provided with. 2. The conveyance device according to claim 1, wherein an idler pulley and a swing arm are provided between the conveyor and the drive mechanism.
JP14051286U 1986-09-16 1986-09-16 Pending JPS6348723U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14051286U JPS6348723U (en) 1986-09-16 1986-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14051286U JPS6348723U (en) 1986-09-16 1986-09-16

Publications (1)

Publication Number Publication Date
JPS6348723U true JPS6348723U (en) 1988-04-02

Family

ID=31047427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14051286U Pending JPS6348723U (en) 1986-09-16 1986-09-16

Country Status (1)

Country Link
JP (1) JPS6348723U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03162316A (en) * 1989-11-20 1991-07-12 Heiwa Corp Lifting/lowering device incorporated in inspection process for pachinko (japanese pinball) machine
KR100479494B1 (en) * 2002-09-18 2005-03-30 삼성전자주식회사 Board conveyance robot

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03162316A (en) * 1989-11-20 1991-07-12 Heiwa Corp Lifting/lowering device incorporated in inspection process for pachinko (japanese pinball) machine
KR100479494B1 (en) * 2002-09-18 2005-03-30 삼성전자주식회사 Board conveyance robot

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