JPS6346838U - - Google Patents
Info
- Publication number
- JPS6346838U JPS6346838U JP13931486U JP13931486U JPS6346838U JP S6346838 U JPS6346838 U JP S6346838U JP 13931486 U JP13931486 U JP 13931486U JP 13931486 U JP13931486 U JP 13931486U JP S6346838 U JPS6346838 U JP S6346838U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- orientation flat
- grounded
- electron beam
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009825 accumulation Methods 0.000 claims 1
- 238000000609 electron-beam lithography Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
- Elimination Of Static Electricity (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13931486U JPS6346838U (zh) | 1986-09-12 | 1986-09-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13931486U JPS6346838U (zh) | 1986-09-12 | 1986-09-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6346838U true JPS6346838U (zh) | 1988-03-30 |
Family
ID=31045105
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13931486U Pending JPS6346838U (zh) | 1986-09-12 | 1986-09-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6346838U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016535432A (ja) * | 2013-09-27 | 2016-11-10 | エルピーイー ソシエタ ペル アチオニ | 支持エレメントを有するサセプタ |
-
1986
- 1986-09-12 JP JP13931486U patent/JPS6346838U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016535432A (ja) * | 2013-09-27 | 2016-11-10 | エルピーイー ソシエタ ペル アチオニ | 支持エレメントを有するサセプタ |