JPS634507B2 - - Google Patents

Info

Publication number: JPS634507B2
Authority: JP; Japan
Prior art keywords: layer; film; thin film; refractive index; high refractive
Prior art date: 1981-04-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP56063400A

Other languages

English (en)

Japanese (ja)

Other versions

JPS57193357A (en

Inventor

Kazutomi Suzuki

Yoshinori Nose

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Teijin Ltd

Original Assignee

Teijin Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-04-28

Filing date

1981-04-28

Publication date

1988-01-29

1981-04-28 Application filed by Teijin Ltd filed Critical Teijin Ltd

1981-04-28 Priority to JP56063400A priority Critical patent/JPS57193357A/ja

1982-11-27 Publication of JPS57193357A publication Critical patent/JPS57193357A/ja

1988-01-29 Publication of JPS634507B2 publication Critical patent/JPS634507B2/ja

Status Granted legal-status Critical Current

Links

239000010408 film Substances 0.000 claims description 44
239000010409 thin film Substances 0.000 claims description 34
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 30
230000004888 barrier function Effects 0.000 claims description 30
229910052751 metal Inorganic materials 0.000 claims description 29
239000002184 metal Substances 0.000 claims description 29
239000000758 substrate Substances 0.000 claims description 22
229910052786 argon Inorganic materials 0.000 claims description 16
238000000992 sputter etching Methods 0.000 claims description 12
238000010030 laminating Methods 0.000 claims description 4
230000001747 exhibiting effect Effects 0.000 claims 1
238000005530 etching Methods 0.000 description 16
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 13
229910052709 silver Inorganic materials 0.000 description 13
239000004332 silver Substances 0.000 description 13
-1 polyethylene terephthalate Polymers 0.000 description 10
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
239000010949 copper Substances 0.000 description 9
238000002834 transmittance Methods 0.000 description 9
238000000034 method Methods 0.000 description 8
229910000881 Cu alloy Inorganic materials 0.000 description 7
230000000052 comparative effect Effects 0.000 description 7
229910052802 copper Inorganic materials 0.000 description 7
RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 7
229920005989 resin Polymers 0.000 description 7
239000011347 resin Substances 0.000 description 7
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 7
229910001928 zirconium oxide Inorganic materials 0.000 description 7
KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
229910045601 alloy Inorganic materials 0.000 description 6
239000000956 alloy Substances 0.000 description 6
239000010931 gold Substances 0.000 description 6
239000004065 semiconductor Substances 0.000 description 6
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
NEIHULKJZQTQKJ-UHFFFAOYSA-N [Cu].[Ag] Chemical compound [Cu].[Ag] NEIHULKJZQTQKJ-UHFFFAOYSA-N 0.000 description 5
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
229910052737 gold Inorganic materials 0.000 description 5
238000004544 sputter deposition Methods 0.000 description 5
230000006866 deterioration Effects 0.000 description 4
230000007613 environmental effect Effects 0.000 description 4
229910003437 indium oxide Inorganic materials 0.000 description 4
PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
239000000463 material Substances 0.000 description 4
239000010936 titanium Substances 0.000 description 4
229910010413 TiO 2 Inorganic materials 0.000 description 3
238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 3
150000001875 compounds Chemical class 0.000 description 3
239000007789 gas Substances 0.000 description 3
229910052738 indium Inorganic materials 0.000 description 3
APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
239000012528 membrane Substances 0.000 description 3
239000000203 mixture Substances 0.000 description 3
229910052763 palladium Inorganic materials 0.000 description 3
229920000139 polyethylene terephthalate Polymers 0.000 description 3
239000005020 polyethylene terephthalate Substances 0.000 description 3
229910001316 Ag alloy Inorganic materials 0.000 description 2
229910015902 Bi 2 O 3 Inorganic materials 0.000 description 2
229910052684 Cerium Inorganic materials 0.000 description 2
CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 2
238000000576 coating method Methods 0.000 description 2
230000007423 decrease Effects 0.000 description 2
239000011521 glass Substances 0.000 description 2
229910052735 hafnium Inorganic materials 0.000 description 2
VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
238000005259 measurement Methods 0.000 description 2
229910044991 metal oxide Inorganic materials 0.000 description 2
150000004706 metal oxides Chemical class 0.000 description 2
150000002739 metals Chemical class 0.000 description 2
230000003647 oxidation Effects 0.000 description 2
238000007254 oxidation reaction Methods 0.000 description 2
229910052715 tantalum Inorganic materials 0.000 description 2
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
229910052718 tin Inorganic materials 0.000 description 2
XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
229910001887 tin oxide Inorganic materials 0.000 description 2
229910052719 titanium Inorganic materials 0.000 description 2
238000001771 vacuum deposition Methods 0.000 description 2
229910052727 yttrium Inorganic materials 0.000 description 2
VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
229910052725 zinc Inorganic materials 0.000 description 2
239000011701 zinc Substances 0.000 description 2
229910052726 zirconium Inorganic materials 0.000 description 2
229920000178 Acrylic resin Polymers 0.000 description 1
239000004925 Acrylic resin Substances 0.000 description 1
JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
229910052691 Erbium Inorganic materials 0.000 description 1
229930182556 Polyacetal Natural products 0.000 description 1
239000004952 Polyamide Substances 0.000 description 1
239000004743 Polypropylene Substances 0.000 description 1
239000004372 Polyvinyl alcohol Substances 0.000 description 1
CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
229920001807 Urea-formaldehyde Polymers 0.000 description 1
HTWCLRQKVPERIM-UHFFFAOYSA-N [Er].[Zr] Chemical compound [Er].[Zr] HTWCLRQKVPERIM-UHFFFAOYSA-N 0.000 description 1
238000010521 absorption reaction Methods 0.000 description 1
230000001133 acceleration Effects 0.000 description 1
229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
238000004458 analytical method Methods 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
239000005388 borosilicate glass Substances 0.000 description 1
YHWCPXVTRSHPNY-UHFFFAOYSA-N butan-1-olate;titanium(4+) Chemical compound [Ti+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] YHWCPXVTRSHPNY-UHFFFAOYSA-N 0.000 description 1
BSDOQSMQCZQLDV-UHFFFAOYSA-N butan-1-olate;zirconium(4+) Chemical compound [Zr+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] BSDOQSMQCZQLDV-UHFFFAOYSA-N 0.000 description 1
235000020971 citrus fruits Nutrition 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
239000004020 conductor Substances 0.000 description 1
229920001577 copolymer Polymers 0.000 description 1
GBRBMTNGQBKBQE-UHFFFAOYSA-L copper;diiodide Chemical compound I[Cu]I GBRBMTNGQBKBQE-UHFFFAOYSA-L 0.000 description 1
QOGLYAWBNATGQE-UHFFFAOYSA-N copper;gold;silver Chemical compound [Cu].[Au][Ag] QOGLYAWBNATGQE-UHFFFAOYSA-N 0.000 description 1
238000000151 deposition Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
235000013399 edible fruits Nutrition 0.000 description 1
230000000694 effects Effects 0.000 description 1
239000003822 epoxy resin Substances 0.000 description 1
UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
238000001704 evaporation Methods 0.000 description 1
230000008020 evaporation Effects 0.000 description 1
230000002349 favourable effect Effects 0.000 description 1
229910052732 germanium Inorganic materials 0.000 description 1
GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
229920001519 homopolymer Polymers 0.000 description 1
230000010354 integration Effects 0.000 description 1
238000007733 ion plating Methods 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
239000000395 magnesium oxide Substances 0.000 description 1
238000000691 measurement method Methods 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
238000001579 optical reflectometry Methods 0.000 description 1
125000000962 organic group Chemical group 0.000 description 1
229920001568 phenolic resin Polymers 0.000 description 1
239000005011 phenolic resin Substances 0.000 description 1
229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
229920002239 polyacrylonitrile Polymers 0.000 description 1
229920002647 polyamide Polymers 0.000 description 1
229920006122 polyamide resin Polymers 0.000 description 1
229920005668 polycarbonate resin Polymers 0.000 description 1
239000004431 polycarbonate resin Substances 0.000 description 1
229920000647 polyepoxide Polymers 0.000 description 1
239000011112 polyethylene naphthalate Substances 0.000 description 1
229920013716 polyethylene resin Polymers 0.000 description 1
229920001721 polyimide Polymers 0.000 description 1
239000009719 polyimide resin Substances 0.000 description 1
229920006324 polyoxymethylene Polymers 0.000 description 1
229920001155 polypropylene Polymers 0.000 description 1
229920005990 polystyrene resin Polymers 0.000 description 1
229920002635 polyurethane Polymers 0.000 description 1
239000004814 polyurethane Substances 0.000 description 1
229920002451 polyvinyl alcohol Polymers 0.000 description 1
238000010248 power generation Methods 0.000 description 1
230000005855 radiation Effects 0.000 description 1
238000001552 radio frequency sputter deposition Methods 0.000 description 1
239000005368 silicate glass Substances 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
230000008685 targeting Effects 0.000 description 1
229920005992 thermoplastic resin Polymers 0.000 description 1
229920001187 thermosetting polymer Polymers 0.000 description 1
150000003609 titanium compounds Chemical class 0.000 description 1
238000007738 vacuum evaporation Methods 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1
235000013311 vegetables Nutrition 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
150000003755 zirconium compounds Chemical class 0.000 description 1

Landscapes

Laminated Bodies (AREA)

JP56063400A 1981-04-28 1981-04-28 Laminate Granted JPS57193357A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP56063400A JPS57193357A (en)	1981-04-28	1981-04-28	Laminate

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP56063400A JPS57193357A (en)	1981-04-28	1981-04-28	Laminate

Publications (2)

Publication Number	Publication Date
JPS57193357A JPS57193357A (en)	1982-11-27
JPS634507B2 true JPS634507B2 (de)	1988-01-29

Family

ID=13228211

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP56063400A Granted JPS57193357A (en)	1981-04-28	1981-04-28	Laminate

Country Status (1)

Country	Link
JP (1)	JPS57193357A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4621028A (en) *	1983-04-01	1986-11-04	Beale Harry A	Glass having controllable infrared transmission
US6440211B1 (en) *	1997-09-02	2002-08-27	Ut-Battelle, Llc	Method of depositing buffer layers on biaxially textured metal substrates

1981
- 1981-04-28 JP JP56063400A patent/JPS57193357A/ja active Granted

Also Published As

Publication number	Publication date
JPS57193357A (en)	1982-11-27

Publication	Publication Date	Title
US4413877A (en)	1983-11-08	Selectively light-transmitting laminated structure
EP0049083B1 (de)	1985-01-02	Laminierter Film
EP0007224B1 (de)	1982-07-21	Wärmereflektierende oder elektrisch leitende Schichtstruktur
US4320169A (en)	1982-03-16	Heat wave-reflective or electrically conductive laminated structure
WO2004042435A1 (en)	2004-05-21	An infra-red reflecting layered structure
GB2031498A (en)	1980-04-23	Multi-pane window structure
CN1019319B (zh)	1992-12-02	耐久的高透光率低辐射率溅射薄膜制品
CN112194383A (zh)	2021-01-08	一种低辐射玻璃及其制备方法
KR20020045484A (ko)	2002-06-19	내열 반사층, 반사층이 형성된 적층체 및 이 반사층 또는적층체를 구비한 액정 디스플레이 장치
JPS6226308B2 (de)	1987-06-08
JPS6250294B2 (de)	1987-10-23
CN112225469A (zh)	2021-01-15	一种单银低辐射玻璃及其制备方法
JPS634507B2 (de)	1988-01-29
JPS635263B2 (de)	1988-02-02
JPS6151762B2 (de)	1986-11-10
JPS6134384B2 (de)	1986-08-07
CN214457645U (zh)	2021-10-22	一种单银低辐射玻璃
JPH0116671B2 (de)	1989-03-27
US11500257B2 (en)	2022-11-15	Inorganic solid-state electrochromic module containing inorganic transparent conductive film
JPS6226310B2 (de)	1987-06-08
JPS6362846B2 (de)	1988-12-05
JPS626495B2 (de)	1987-02-12
JPS6238432B2 (de)	1987-08-18
JPH0764598B2 (ja)	1995-07-12	赤外線遮断ガラス
JPS626497B2 (de)	1987-02-12