JPS6341585A - Large-sized vacuum seal and its usage - Google Patents
Large-sized vacuum seal and its usageInfo
- Publication number
- JPS6341585A JPS6341585A JP18430686A JP18430686A JPS6341585A JP S6341585 A JPS6341585 A JP S6341585A JP 18430686 A JP18430686 A JP 18430686A JP 18430686 A JP18430686 A JP 18430686A JP S6341585 A JPS6341585 A JP S6341585A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum seal
- gas
- blanket
- gaskets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 15
- 239000012784 inorganic fiber Substances 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 7
- 239000011521 glass Substances 0.000 claims abstract description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 8
- 230000008929 regeneration Effects 0.000 claims description 7
- 238000011069 regeneration method Methods 0.000 claims description 7
- 150000002739 metals Chemical class 0.000 claims description 4
- 238000012958 reprocessing Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 24
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 239000007788 liquid Substances 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 101100345589 Mus musculus Mical1 gene Proteins 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 230000004927 fusion Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 244000025254 Cannabis sativa Species 0.000 description 1
- 235000012766 Cannabis sativa ssp. sativa var. sativa Nutrition 0.000 description 1
- 235000012765 Cannabis sativa ssp. sativa var. spontanea Nutrition 0.000 description 1
- 101000905241 Mus musculus Heart- and neural crest derivatives-expressed protein 1 Proteins 0.000 description 1
- 101100247316 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) ras-1 gene Proteins 0.000 description 1
- -1 Reramix Inorganic materials 0.000 description 1
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 235000009120 camo Nutrition 0.000 description 1
- 235000005607 chanvre indien Nutrition 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011487 hemp Substances 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 210000000538 tail Anatomy 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052722 tritium Inorganic materials 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Gasket Seals (AREA)
- Sealing Material Composition (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野１
本発明は大寸法の真空用シールお。１、びその使用方法
に関り゛るものぐある。[Detailed Description of the Invention] [Industrial Application Field 1] The present invention is directed to large-sized vacuum seals. 1. There are many things related to how to use it.
Ｅ従来の技術］
核融合炉を設訂する場合、三重水素との共存個、作動ガ
ス以外の不純物ガスの発生の点から−［ラストマガスケ
ットは使用できない。イのｊ、め、通常メートルの桁の
べ１法をもつ知！！Ｉｔ間の使用で保守交換を１Ｊる試
験モジノール、加熱装置−しジコール等の炉体内空容器
壁への数句りフランジ接合部、クライオポンプの再生時
に用いる遮断弁等のシール部月としてはリップ溶接また
は金属ガスケットが用いられている。E. Prior Art] When constructing a nuclear fusion reactor, a lastoma gasket cannot be used because of its coexistence with tritium and the generation of impurity gases other than the working gas. A, j, me, knowledge that usually has the number one method of the meter digit! ! The test modinol, heating device, which requires maintenance and replacement for 1J after use, several flange joints to the wall of the inner chamber of the furnace, seals of shutoff valves, etc. used during cryopump regeneration, etc. Welded or metal gaskets are used.
また数１０７４！／ｓ程度のタライオボンプ系を炉の真
空容器内に設置ザる設計では、再で１弁の３１法は数「
ｎと４Ｔす、弁のシールにはガスケットを用いヂ、金属
板の面接触だけで行なっている。Number 1074 again! In a design in which a Talaiobon pump system with a speed of about /s is installed in a vacuum vessel of a furnace, the 31 method with one valve is
Gaskets are used to seal the valves, and only surface contact between metal plates is used to seal the valves.
従来技術の例として添附図面の第４図には口径４００ｍ
１φのバットネ１ｖＩの弁を示し、第４図においてＡは
維二ｌ−ン部材、Ｉ３１．Ｌｍ−１−ン部祠、Ｃは紺雌
両コーン部材Δ、１３の間に挟持された金属製−にカル
ガスクツ１〜．１）は加圧室、「（３Ｌ雌」−ン部材］
３に装着されたメンブレーンで、メンブレ−ン用ばね部
材［と組合わされている。またＧｔよ加Ｊ１］室りへの
高圧ガス導入［１′ｃある。図示弁において閉じる際に
は高圧ガス導入ｒ−Ｉ Ｇを介して加ｊ［室１）へ高圧
ガスを導入することに、Ｊ、り雌−１−ン部材１３を押
し上げ、それにＪ、り金属製］ニカルガス／７ツトＣが
雄錦両］−ン部材△、Ｂの間て・押）トされ、真空シー
ルが１０られる。−・方、弁を開放する際には加圧室り
内から高圧ガスを扱くこと（こより、メンブレーン川ば
ね部材１：の作用で細二］−ン部祠１３が戻され、真空
シールが解かれる。As an example of the prior art, Figure 4 of the attached drawings shows a diameter of 400 m.
4 shows a 1φ batten 1vI valve, and in FIG. Lm-1- part shrine, C is made of metal sandwiched between both dark blue female cone members Δ, 13. 1) is a pressurized chamber, “(3L female”)-n member]
3, and is combined with a membrane spring member. There is also a high-pressure gas introduction [1'c] into the Gt chamber. When the illustrated valve is closed, high pressure gas is introduced into the chamber 1 through the high pressure gas inlet r-I. Nical gas/7 C is pressed between the male and female Nical gas members Δ and B, and a vacuum seal is made. On the other hand, when opening the valve, high-pressure gas must be used from inside the pressurized chamber. is solved.
また第５１％ｌ ｉ、は入きな負空容器内に設層された
クライオポンプの再生用弁のフｆ、Ｒ構の例庖示し、ａ
はクライオパネル、［）はクライオパネルＥ１の冷１４
１川液体ヘリウム通路、Ｃはシ１−ブ［］ンバッフルｒ
、中央部に冷却用の液体窒素通路（ｊを備えている。ま
／ｊ ｅ ｔよ熱バイパス用アルミ１１＼ＡイルＣある
。In addition, 51% l i, is an example of the f, R structure of the regeneration valve of a cryopump installed in a negative air vessel, and a
is cryopanel, [) is cryopanel E1 cold 14
1 River liquid helium passage, C is 1-river [ ] baffle r
In the center, there is a liquid nitrogen passage for cooling.There is also an aluminum 11\A passage for thermal bypass.
図示例て゛（４１水素ガスを凝縮排気する２ｍＸ旧ｎの
単１１′／タノイＡポンプのｒ１牛用遮断弁どして液体
窒素冷ＩＡシ１１［１ンバツフルＣの外側ルーバーｆを
閉じ−Ｃ気密どりる。０．５ｍｘ１ｍのクシイスパネル
の予備実験（Ｊ、Ｖａｃ、 Ｓｃｉ、Ｔｅｃｈｎｏｌ、
＾１１９８３ Ｐ、１３１５） ′Ｃ−【よ閉成時に小
さなシール力のもとで金属製ルーバーの接触だ（）で行
なっている。The illustrated example is ``(41) Condensing and exhausting hydrogen gas with a 2mX old n single 11'/ Tanoy A pump r1 using the cow shut-off valve and liquid nitrogen cooling IA Preliminary experiment of 0.5m x 1m Kushiisu panel (J, Vac, Sci, Technol,
^11983 P, 1315) 'C-[This is done by contacting the metal louvers under a small sealing force when closing ().
１発明が解決しようどする問題点１
どころで、第４図に示すような弁装置において（ま、弁
の１自径が１００ｃｍ程度に大きくなると、弁本体を構
成している雄コーン部ｕ、ｍ＝＋−ン部材および金属製
］ニカルガスケッ］への所要の機械的粘痘を出１ことは
困難になり、また円形以外の形状で【、１．実施不可能
である。1 Problem to be Solved by the Invention 1 By the way, in a valve device as shown in FIG. It becomes difficult to apply the necessary mechanical pressure to the m=+-n member and the metal nical gasket, and it is not possible to apply the necessary mechanical pressure to the m=+-n member and the metal nical gasket.
ま１．−第！′）図に示゛リ−Ｊ：うな大きな真空容器
内に設置ｅ？されＩ、：クラー（１１ポンプの従来の再
生用弁の弁構造では、長さ１ｍのルーバーを閉じて真空
室を形成Ｊる場合、充分な力の得られ（２い条ｆ１の下
で金属根の接触だ（］ぐは充分ｔｒ気密は得られず、通
常蓄積したガスの３０％稈度が再生時に排気空間に鋪れ
ている。1. -No. ') As shown in the figure, it is installed in a large vacuum container. In the conventional regeneration valve structure of the pump, sufficient force can be obtained when the louver with a length of 1 m is closed to form a vacuum chamber. When the roots come in contact with each other, sufficient airtightness cannot be obtained, and normally 30% of the accumulated gas is trapped in the exhaust space during regeneration.
このようにメートルの村ｉの−１＞人をｂつ弁装置や７
ランジ接合においては金属製のガス々ツｌ−１；二、Ｊ
、る真空シールは、技術的に困ガである。In this way, the village i of meter -1 > person b valve device or 7
In lunge joints, metal gas fittings l-1;
Vacuum sealing is technically difficult.
そこで、本発明の［１的１１、Ｉ述の大径の）？′−装
置を大寸法のフランジ接合部のよう１．ｃ人＼１法のシ
ール１ｆ１１間に金属製ガスケラｌ〜に代λて用いるこ
とがぐき、小さなシール力で小さな］ンダクタンスを得
ることができしか１；）放出ガスの少２ｉい大寸法の真
空用シールおよびその使用方法を提供することにある。Therefore, the present invention [1-11, the large diameter described in I]? 1. It can be used in place of a metal gas scale between the seals 1f and 11 of the method, and it is possible to obtain a small inductance with a small sealing force. The object of the present invention is to provide a seal for use in the market and a method for using the same.
［問題点を解決寸−るための−ＨＱＩ
［−記の目的を達成するＩこめに、本発明にＪ、る大寸
法の真空用シールは、金属、セラミックス、炭素、ガラ
ス等の無機材質繊組を中休Ｃまたはイれらを複合してフ
ェルトまたはプランケット状【Ｊ構成したものから成る
ことを特徴としくいる。[To solve the problems - HQI [To achieve the objectives mentioned above, the large-sized vacuum seal according to the present invention is made of inorganic fibers such as metals, ceramics, carbon, and glass. It is characterized by being composed of a felt or plunket-like structure made by combining a group with a middle C or a combination of two.
また本発明によれば、この真空用シールは人Ｘ１払のク
ライオポンプの再ｌＦ用遮断弁のガスケットＪ３ Ｊ：
び真空装置にお【）るフランジ接合部の密封用）ｆスク
ットとじて使用される。Further, according to the present invention, this vacuum seal is a gasket J3 J of a re-IF shutoff valve of a cryopump that costs 1 person x 1.
It is used as a scut for sealing flange joints in vacuum equipment and vacuum equipment.
１作 川］
このように構成【ノた本発明の真空用シールを弁のカス
ケラ］・のように繰返し使用り−る場合には、市販され
ている繊維の太さは金属、カーボン、ガラスで、ぞれぞ
れ１０．７．１１１ＩＩｌであり、これを用い−（製作
されたプランケラ１〜板の有孔率（ｐｏｒｏｓ ｉ Ｉ
ｙ ）は８０％程痘であるが、これを有孔率（１０％稈
１αに［１縮して用いる時、Ｅ次元的に交差する繊維が
つくる空隙の特性長は繊維の太さｄ ＝ １０” ｃ＋
ｎ程度となる。例えば窒素ガスの場合、纏突ゞ）ｉ均自
山艮λｃｍはガスＩｔ力Ｆ）Ｔｏｒｒの時λ−５ｘ １
０’／ Ｉ）で・ある。λ＞ ０．２ｄで分子流ど４れ
ば、２！１Ｔｏｒｒ以１この圧力Ｃガスケットを通る流
れは分子流どなる。ガスケットの長ざｂＣＩＩ１１高さ
ｈｃｍ、幅１ｃｍど Ｊ る と 、 コ
ン ダ り タ ン ス は＝ｌ（ｌｃｌｂｈ
／ｌ Ｑｓ Ｐｕる。ｄ＝１０−”、ｈ−〇５、ｌ
＝１ｃｍの時、中位長さ当りの−」ンダクタンスはＣ
−５Ｘ １０’ｊｉ Ｓ ”Ｃ１１になる。If the vacuum seal of the present invention is to be used repeatedly as in the case of this configuration, the thickness of commercially available fibers is made of metal, carbon, and glass. , 10.7.111IIl, respectively.
y) is about 80% pox, but when it is used with the porosity (10% culm 1α [1) reduced, the characteristic length of the void created by the fibers intersecting in the E dimension is the fiber thickness d = 10”c+
It will be about n. For example, in the case of nitrogen gas, when the total force is λcm, the gas force is λ-5x 1 when the force is F) Torr.
0'/I). If λ>0.2d and the molecular flow is 4, then the flow through this pressure C gasket will be the molecular flow at 2!1 Torr or higher. Gasket length bCII11 height hcm, width 1cm
The resistance is = l(lclbh
/l Qs Puru. d=10-”, h-〇5, l
= 1 cm, the -'' inductance per medium length is C
-5X 10'ji S "C11.
ｉｌ ／４：、フランジ接合部のガスケラ１へのＪ：う
に−・回の使用で交換する場合、１−ラス１〜ン−ガス
ケラ［・のシール月−力稈麻、１０Ｋｇ／Ｃｌ１１２で
１１′縮りる１、１、ガスケットは完全に潰れ、−」ン
タタタンス（３１（ン＝＝ ５ Ｘ １０−４１ ｓ−
’ｔ：…−１稈度とイ「る。il /4: When replacing the flange joint gaskera 1 after 1-times use, seal the 1-rath 1~n-gaskera [・month-force culm hemp, 10Kg/Cl112 at 11' 1, 1, the gasket is completely crushed, and the gasket is completely collapsed.
't:...-1 culm degree.
［実 施 例１
以下、添付図面を参照して本発明の実施例について説明
する。[Embodiment 1] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
第１図には、本発明による真空シールを大川法のクライ
オポンプの再生用連断弁としで実施しに二例を示（〕、
１はボンＪツノーシングー（゛、このボン−７′ケーシ
ング１の内部に液（本ヘリウムン令ハ１クライＡパネル
２および液体窒素冷ＩＪｌシＴブ（１ンバツノル３が示
されており、またポンプ１１−シング１の１一部には水
冷ルーパー４が設けられ、各水冷ルーパ−４には本発明
の真空シールを成り一無機繊麓ゾフンケットガスケツ１
へ５が取（ｊｌ ４−Ｊられ、クライオポンプの再生用
連断弁を構成している。第１図１；： １．１゜クライ
オポンプのＪＪＩ気時の水冷ルーパー４の状態を示１ノ
、また再生１１）の状態は第２図（、二示１ 。Figure 1 shows two examples of the vacuum seal according to the present invention being implemented as a regeneration connecting valve for a cryopump using the Okawa method.
1 is a bonjourn cooling system (゛, this bon-7' has a liquid inside the casing 1 (this helium pump 1 cry A panel 2 and a liquid nitrogen cooled IJl cylinder 3 are shown, and a pump 11 - One part of the thing 1 is provided with a water-cooled looper 4, and each water-cooled looper 4 is provided with a vacuum seal of the present invention.
5 is removed (jl 4-J) and constitutes a connection valve for regeneration of the cryopump. The state of playback 11) is shown in Figure 2 (, 2-1).
このように構成した図示実施例装置ｄの動作に゛つい（
説明りると、クライオポンプの再／Ｉ−１１￥ 、ボン
ゾ〜−シング１内の水先ガス圧力は高くてもｈ１人＋０
１’ｏｒｒ稈度ぐあり、５００Ｑ Ｓ−’（ｆ）実効排
気速庶テ゛山牛用＋ｊｌ気ポンプにＪ：り１気されると
する。無機繊組ブシンケツ１〜ガスケツ１〜５を弱い力
Ｃ押しで１）水冷ルーパー４の面に１４＜＜’ｔじみ、
ガスフット甲位 Ｋ １１ リ の −１ン
ダ り タ ン ス はｃ： −Ｆ５
Ｘ １０−３７！ Ｓ−”ｃｍ−１ぐある。無機繊組ブ
ランケツ１−ガス々ツ１〜５が全段５０Ｘ １０１０２
Ｃ！１ｏＩＴｌとＪるど、−ぞの１ンダククンスは２５
Ｑ Ｓ ”−ｅ ｒい）、ボンｆ勺−シング１外への漏
れ吊の割り合いｔ、１５％となり、小さい。Regarding the operation of the illustrated embodiment device d configured in this way, (
To explain, the cryopump re/I-11 yen, the pilot gas pressure in Bonzo~-Sing 1 is high, but h1 person + 0
Assume that the culm degree is 1'orr, and the effective pumping speed is 500Q S-' (f). Press the inorganic fiber bushings 1 to 1 to 5 with a weak force C. 1) 14
Gas foot instep position K11 -1 dance is c: -F5
X 10-37! S-" cm-1 size.Inorganic fiber blanket 1-gaskets 1 to 5 are all 50X 10102
C! 1oITl and Jrudo, -zo's 1ndakunsu is 25
The rate of leakage to the outside of the bonnet 1 is 15%, which is small.
第３図には、真空壁に大形部品を取付（Ｊるフランジ接
合部に本発明を使用した例を承Ｊ０第３図においＵ、６
は真空容器の゛フランジで、このフランジ６が人形部品
枠体７に密封接合されている。８．９は排気溝て、フラ
ンジ０に設ｃＪられに１気１１１０．１１をイれぞれ介
］ノで図示し′（ない差動ＩＪＩ気川本川ポンプ通して
いる。１２はＴ−ラスｉ・マーガスケット、１３．１４
は本発明の真空シールを成す無機繊組ブランケットガス
ケツ］・である。Figure 3 shows an example in which the present invention is used for a flange joint where a large part is attached to a vacuum wall.
is a flange of the vacuum container, and this flange 6 is hermetically joined to the doll parts frame 7. 8.9 is the exhaust groove installed in the flange 0 and the 1 air 1110. i.Margasket, 13.14
is an inorganic fiber blanket gasket that forms the vacuum seal of the present invention.
■ラストマーガスクツＬ・１２ど無機ＩＩ Ｍ ７ラン
ゲツトガスケツト１３．１４どをイ１１川し、各ガスケ
ラ１−間を、排気口１０．１１を介し【°差動排気する
ことにより、不純物ガスの放出量の少ない真空シールが
得られる。無機綴紐ブランケットガス１１ツｊ・１３．
１４の単位長当りの二１ンダクタンスをｃ −＝ ５
ｘｌｏ”’ｌ１５−１ｃｍ−１トｔ ルト、例えば内径
１ｍに相当する３ｘ１０２ｃｎ＋のガスケットの長さに
対する］ンダクタンスｔよ０．１５Ｑ ｓ−１となる。■ Lastmer gaskets L, 12, inorganic II M, 7 range gaskets 13, 14, etc. are pumped through I 11, and impurities are removed by differential pumping between each gas scaler 1 and 1 through exhaust ports 10 and 11. A vacuum seal with a small amount of gas released can be obtained. Inorganic Stitch Blanket Gas 11/13.
21 inductance per unit length of 14 c −= 5
For example, the inductance t for a gasket length of 3x102cn+ corresponding to an inner diameter of 1 m is 0.15Q s-1.
従って、差動排気の速度を１．５１！Ｓ−１とし、図示
したように二段に無ａｍ雑ブランクットガスケット１３
．１４を設けることにより、丁ラス１〜マーガスノノツ
１−１２の放出ガスが真空容器に入り込む開は１／１０
２となる。Therefore, the speed of differential pumping is 1.51! S-1, as shown in the figure, a non-am miscellaneous blank gasket 13 is installed in two stages.
．． By providing 14, the opening of the released gas from the 1-1 to 1-12 gases into the vacuum container is reduced to 1/10.
It becomes 2.
本発明の他の実施例としては核融合炉体内に真空隔壁を
組み立てる場合や丁ラスト・マーガスｌ）ットを用いた
通常の真空容器内にｌｆＵ高貞空領域を作る場合を挙げ
ることができる。Other embodiments of the present invention include assembling a vacuum partition inside a fusion reactor body and creating an lfU high-vacuum region in a normal vacuum vessel using a fusion reactor.
前者の場合、人気を隔てる炉の真空壁内には超電導−コ
イル系、放射線シールド系おＪ：び１４ｍｅＶ中１’ｌ
′ｆの熱化と玉中水素の生産を行なうブラン））ツ１−
・系があり、これらの系には給電、冷却、６１測、制御
１１１川のリービス配管が多数設けられている。In the former case, the superconducting coil system, radiation shield system, and
'F thermalization and production of Tamanaka hydrogen)）tsu1-
- There are systems, and these systems are equipped with a large number of Reavis piping for power supply, cooling, 61 measurement, and control 111 rivers.
これらの各配管系からの漏れが想定でき、これが不純物
ガスど」ノて反応プラズマに入り込み、温石をトげるこ
とになる。上記各県の雰囲気を１Ｏ−５Ｔｏｒｒ稈庶に
保ら、反応プラズマを十記各系ど分【ｊる負空隔壁内に
苦く時、隔壁の漏れの１ンダクタンスが１０２４！ｓ−
１あるとしてｆ）、無機１維ブランケットガスリットを
隔壁の組みずｌでに用いることにより漏れ積は１０
Ｔｏｒｒｊ！ ｓ−１どなり、反応プラズマを紺持する
ための燃利注へ吊、
数１０Ｔｏｒ＋Ｊ ｓ に比べて１０４分の１以十ど
なる。It is assumed that there will be leakage from each of these piping systems, and this will cause impurity gases to enter the reaction plasma and overthrow the hot stones. When the atmosphere in each of the above regions is maintained at 10-5 Torr, and the reaction plasma is distributed in each of the ten systems, the inductance of the leakage of the partition wall is 1024! s-
f), by using an inorganic 1-fiber blanket gas slit in the partition wall assembly, the leakage product can be reduced to 10
Torrj! s-1 roars, and the fuel used to sustain the reaction plasma is 1/104 times louder than several 10 Tor+J s.
＝１
−１−ラス１−マーガスケラ１〜を用いた通常の真空容
よ）内に超高真空領域を作る後右の場合、１０’Ｔｏｒ
ｒ稈１ａの真空容器内に真空隔壁を作り、その内に１０
’１ｏｒｒ稈１αの真空領域を作る際、その組み立てに
烈＋Ｍ ｌｉ Ｉｆｆ ７ランゲツトガスケツトを用い
る。用いＩ）れるフランジは、Ｊ Ｉ Ｓ規格７ランジ
（゛あり、＝ １０−
４００°Ｃ前後のベーキングができる。無機織ＩＩＩ
−１ランケツトガスクツ［への良さを５ ｍと（」るど
、ぞの」ンダクタンス（ま０．２！ｉ Ｒｓ−’−ｅあ
り、漏れ１丁１ハ２．５ｘｌＯ’ｒｏｒｒｊ ｓ−１ど
ｒ； ル、１従つＣ１刊気）！ｆｆｌ １０００ ｅ
／ Ｓのボン１ｒ １Ｏ−８ｒｏｒｒ台の１１力が１！
１られる。= 1 - 1 - Ras 1 - After creating an ultra-high vacuum region in the normal vacuum volume using Margusquera 1 ~), in the case on the right, 10'Tor
Create a vacuum partition inside the vacuum container of r culm 1a, and place 10
When creating a vacuum region of 1 orr culm 1α, a 7 range gasket is used for assembly. I) The flanges used are JIS standard 7 langes (there is one, which can be baked at around 10-400°C. Inorganic woven III
The inductance of -1 rank gas shoes is 5 m and the inductance is 0.2! Dor; le, 1 follow C1 publication)!ffl 1000 e
/ S's Bon 1r 1O-8rorr level 11 power is 1!
1 will be given.
１発明 の効宋ｌ
以ト説明してきたように本発明にＪ：る真空シールは金
属、レラミックス、炭素、ガフス等の無機材質繊維を単
体ぐまたはぞれらを複合しくフｌ−ル１〜またはブ）ン
ケット状に構成しＩｃものから成っているので、４００
°ＣＲ１ＩＩｉの高温に１１１１／ｌシか０小ざなシー
ル力のもとて漏れの］ンダクウンスが小さく、Ｌｔ−〕
−（機機械精精の低い人Ｘ１法のシール面に特に有利に
用いることができ、また族０４線σ）彰轡を受けず、放
出ガスＭも少なく、種々の大型装置のシール面間のガス
ケラ１〜として有用なものτ・ある。1 Effects of the Invention As explained above, the vacuum seal according to the present invention can be made of inorganic fibers such as metal, Reramix, carbon, or gaffs, or by combining them into a composite material. ~or) It is configured in a bunket shape and is made of Ic, so 400
1111/l at the high temperature of °CR1IIi, the leakage is small due to the small sealing force, Lt-]
- (It can be particularly advantageously used for the sealing surface of the X1 method for people with low mechanical precision, and the group 04 line σ) does not receive awards, has little released gas M, and can be used between the sealing surfaces of various large equipment There is something useful as Gaskera 1~.
第１図は本発明による真空シールの一実施例を小・Ｊ装
置の一部の概略断面図、第２図は第１図の装置の−・部
の拡大図、第３図は本発明にＪ、る真空シールの別の実
施例を示す装置の一部の概略断面図、第４図はるＹ来の
人］−１径の弁菰冒の一例を小づ概略断面図、第５図（
よ（Ｋ来σ）クフィＡポン１の内生用弁の弁機構を承り
概略図である。
図 中
１：ボンブクーシング、２：液体水素冷却クライＡパン
ル、３：液体窒索冷ＩＪ１シーＬブ［１ンバツノル、４
：水冷ルーバー、５：無機械肺プシン々ットガス／ノツ
］−８
＝ １２−
十１図
十？図
十″！ 図
＝Ｊ−４図Fig. 1 is a schematic sectional view of a part of a small J device showing an embodiment of the vacuum seal according to the present invention, Fig. 2 is an enlarged view of the - section of the device shown in Fig. J, a schematic sectional view of a part of the device showing another embodiment of the vacuum seal, FIG. 4; (
This is a schematic diagram of the valve mechanism of the internal valve of Kufi Apon 1. Figure Middle 1: Bomb Cousing, 2: Liquid Hydrogen Cooling Cry A Panl, 3: Liquid Nitrogen Cable Cooling IJ1 Sea Lbu [1 Nbatunol, 4
: Water-cooled louver, 5: Non-mechanical lung gas/nots] -8 = 12- 11 Figure 10? Figure 1″! Figure = Figure J-4
Claims (1)
維を単体でまたはそれらを複合してフェルトまたはブラ
ンケット状に構成したものから成ることを特徴とする大
寸法の真空用シール。 ２、金属、セラミックス、炭素、ガラス等の無機材質繊
維を単体でまたはそれらを複合してフェルトまたはブラ
ンケット状に構成したものから成る真空用シールを、大
寸法のクライオポンプの再生用遮断弁のガスケットとし
て使用することを特徴とする大寸法の真空用シールの使
用方法。 ３、金属、セラミックス、炭素、ガラス等の無機材質繊
維を単体でまたはそれらを複合してフェルトまたはブラ
ンケット状に構成したものから成る真空用シールを、真
空装置におけるフランジ接合部の密封用ガスケットとし
て使用することを特徴とする大寸法の真空用シールの使
用方法。[Claims] 1. A large-sized vacuum seal characterized by being made of inorganic fibers such as metals, ceramics, carbon, glass, etc. alone or in combination in the form of felt or blanket. . 2. Vacuum seals made of felt or blanket-like inorganic fibers such as metals, ceramics, carbon, and glass, either alone or in combination, can be used as gaskets for regeneration shutoff valves of large-sized cryopumps. A method of using a large-sized vacuum seal characterized by being used as a vacuum seal. 3. Vacuum seals made of felt or blanket-like inorganic fibers such as metals, ceramics, carbon, and glass, either singly or in combination, are used as gaskets for sealing flange joints in vacuum equipment. A method of using a large-sized vacuum seal characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18430686A JPS6341585A (en) | 1986-08-07 | 1986-08-07 | Large-sized vacuum seal and its usage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18430686A JPS6341585A (en) | 1986-08-07 | 1986-08-07 | Large-sized vacuum seal and its usage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6341585A true JPS6341585A (en) | 1988-02-22 |
Family
ID=16151025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18430686A Pending JPS6341585A (en) | 1986-08-07 | 1986-08-07 | Large-sized vacuum seal and its usage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6341585A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006233899A (en) * | 2005-02-25 | 2006-09-07 | Mitsubishi Heavy Ind Ltd | Centrifugal compressor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49132372A (en) * | 1972-05-01 | 1974-12-19 | ||
| JPS6060174A (en) * | 1983-09-13 | 1985-04-06 | Nichias Corp | Graphite composite sheet material for packing and production thereof |
| JPS6154548B2 (en) * | 1979-11-16 | 1986-11-22 | Kanematsu Deyuo Fuasuto Kk |
-
1986
- 1986-08-07 JP JP18430686A patent/JPS6341585A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49132372A (en) * | 1972-05-01 | 1974-12-19 | ||
| JPS6154548B2 (en) * | 1979-11-16 | 1986-11-22 | Kanematsu Deyuo Fuasuto Kk | |
| JPS6060174A (en) * | 1983-09-13 | 1985-04-06 | Nichias Corp | Graphite composite sheet material for packing and production thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006233899A (en) * | 2005-02-25 | 2006-09-07 | Mitsubishi Heavy Ind Ltd | Centrifugal compressor |
| JP4658639B2 (en) * | 2005-02-25 | 2011-03-23 | 三菱重工コンプレッサ株式会社 | Centrifugal compressor |
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