JPS6341534A - Polysilane substituted with silyl group - Google Patents

Polysilane substituted with silyl group

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Publication number
JPS6341534A
JPS6341534A JP18453386A JP18453386A JPS6341534A JP S6341534 A JPS6341534 A JP S6341534A JP 18453386 A JP18453386 A JP 18453386A JP 18453386 A JP18453386 A JP 18453386A JP S6341534 A JPS6341534 A JP S6341534A
Authority
JP
Japan
Prior art keywords
polysilane
substituted
silyl
me3si
formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18453386A
Other languages
Japanese (ja)
Other versions
JPH0676495B2 (en
Inventor
Yoichiro Nagai
永井 洋一郎
Hideyuki Matsumoto
英之 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Priority to JP18453386A priority Critical patent/JPH0676495B2/en
Publication of JPS6341534A publication Critical patent/JPS6341534A/en
Publication of JPH0676495B2 publication Critical patent/JPH0676495B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To provide a polysilane having novel electronic and steric properties different from those of conventional silanes and produced by substituting the main chain of the polysilane with silicon group. CONSTITUTION:A silyl-substituted polysilane comprising repeating units of formula (R<1>-R<6> are lower alkyl) and having linear structure and a number- average molecular weight of 200-20,000. The polysilane is produced by polycondensing bistrimethylsilydichlorosilane [Me3Si)2SiCl2], bistrimethylsilyldibromosilane [(Me3Si)2SiBr2] or the like. Na, K or the like is used as a condensating agent for the polycondensation at an amount of 2-5 equivalent per equivalent of the halogen in the halosilane.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、シリル基の置換し友新規なポリシランであり
、ホトレジスト、セラミックス、半導体、光重合開始剤
等々に有用である。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention is a novel polysilane substituted with silyl groups, which is useful for photoresists, ceramics, semiconductors, photopolymerization initiators, and the like.

〔従来の技術〕[Conventional technology]

従来、ポリシラン化合物としては、メチル基の置換した
ポリメチルポリシランやメチル基、フェニル基の置換し
たポリシラスチレン〔米国特許! 、 3.2F 、 
10/ )等が知られている。
Conventionally, polysilane compounds include polymethylpolysilane substituted with a methyl group and polysilastyrene substituted with a methyl group or a phenyl group [US patent! , 3.2F,
10/) etc. are known.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかしこれらのポリシランはいづれも主鎖のポリシラン
に直接炭素が結合したものであり、ポリシランの特性を
十分に出し切れていない。
However, all of these polysilanes have carbon bonded directly to the main chain of polysilane, and do not fully exhibit the characteristics of polysilane.

本発明は主鎖のポリシランに珪素が結合にしたポリシラ
ン化合物を提供しようとするものである0 〔問題点を解決するための手段〕 本発明者らは、上記実情に鑑み鋭意検討した結果、主鎖
ポリシランにケイ素を置換した新規番 なシリル置換ポリシランを分成し、本発明に到達した。
The present invention aims to provide a polysilane compound in which silicon is bonded to polysilane in the main chain. The present invention was achieved by decomposing a new type of silyl-substituted polysilane in which silicon is substituted in a chain polysilane.

すなわち本発明の要旨は、 下記一般式(り Ha 〔式中 )(1〜R6は低級アルキル基を表わし、同一
でも異ってもよい〕 で示される繰返し単位からなり、線状で数平均分子i!
に200〜20,000  のシリル置換ポリシランに
存する。
That is, the gist of the present invention is to consist of repeating units represented by the following general formula: i!
200 to 20,000 silyl-substituted polysilanes.

以下、本発明の詳細な説明する。The present invention will be explained in detail below.

本発明のシリル置換ポリシランは一般式(「)R’ −
Si −H” z−sl−x         (II)F+4−  
Si −R’ 〔式中 H1〜R6は低級アルキル基を表わし。
The silyl-substituted polysilane of the present invention has the general formula (')R'-
Si −H”z−sl−x (II)F+4−
Si -R' [In the formula, H1 to R6 represent a lower alkyl group.

同一でも異ってもよい。Xは・・ロゲンを表わす。〕で
示されるハロゲン化シラン化合物の縮合重合によって合
成される。
May be the same or different. X represents... Rogen. ] Synthesized by condensation polymerization of halogenated silane compounds.

一般式(n)中、R1−R6の低級アルキル基としては
炭素数/−,1のアルキル基が好t L、 < 、特に
はメチル基が好ましい。゛また% Xとしては、塩素、
臭素、フッ素等が挙げられ、中でも好ましいのは塩素、
臭素である。
In the general formula (n), the lower alkyl group represented by R1 to R6 is preferably an alkyl group having a carbon number of /-, 1, and a methyl group is particularly preferred.゛Also, %X is chlorine,
Examples include bromine, fluorine, etc. Among them, chlorine,
It is bromine.

一般式(II)で示されるハロゲン化シランのうち、特
に好ましい化合物は、ビストリメチルシリルジクロルシ
ラン(M8.Si )2Sill寓、ビストリメチルシ
リルジブロモシラン(MesSl)s 5iBrl  
等カ挙げられる。
Among the halogenated silanes represented by the general formula (II), particularly preferred compounds are bistrimethylsilyldichlorosilane (M8.Si), bistrimethylsilyldibromosilane (MesSl), and bistrimethylsilyldibromosilane (MesSl).
etc. can be mentioned.

これらのハロゲン化シラン化合物は1例えば次の反応式
で表わされる方法により合成できる。
These halogenated silane compounds can be synthesized, for example, by a method represented by the following reaction formula.

2Mθ181C!1 +n、s1.o:+鵞−Me3S
iSiOzSilJθ。
2Mθ181C! 1 +n, s1. o: + Goose-Me3S
iSiOzSilJθ.

g なお、本明細書1でMθ はメチル基を、yはフェニル
基を示す。
g In this Specification 1, Mθ represents a methyl group, and y represents a phenyl group.

ハロゲン化シランの縮合重合は縮合剤の存在下、要すれ
ば適当な溶媒を用いて行なわれる。
Condensation polymerization of halogenated silanes is carried out in the presence of a condensing agent, using a suitable solvent if necessary.

縮合剤としてはナトリウム、カリウム又はナトリウム/
カリウム合金が挙げられ、好ましくけナトリウムが用い
られる。
As a condensing agent, sodium, potassium or sodium/
Potassium alloys are mentioned, and sodium chloride is preferably used.

縮合剤の使用吋ニノ・ロダン化シラン中のノ・ロゲン原
子に対してλから5当量用いられる。好ましくはコから
3当量用いられる。
Use of condensing agent: 5 equivalents are used from λ to the rhogen atoms in the rhodanized silane. Preferably, 3 to 3 equivalents are used.

重合反応においては溶媒の使用は任意であるが好適には
ベンゼン、トルエン、キシレン、ヘベタン、オクタン等
の炭化水素類あるいはテトラヒドロフラン等が使用され
る。溶媒の使用量は、ハロゲン化シラン/f当り、l−
からt。
In the polymerization reaction, any solvent may be used, but hydrocarbons such as benzene, toluene, xylene, hebetane, and octane, or tetrahydrofuran are preferably used. The amount of solvent used is l- per halogenated silane/f.
From t.

−好ましくはj−20贋eである。- Preferably it is j-20 fake.

反応温度は0℃からl夕O℃好1しくはjO℃から12
0℃である。
The reaction temperature is from 0°C to 10°C, preferably from 10°C to 12°C.
It is 0°C.

重合操作は、チッ素、アルゴン等の不活性ガス雰囲気中
で行なうことが好ましい。
The polymerization operation is preferably carried out in an atmosphere of an inert gas such as nitrogen or argon.

例えば、前記のビストリメチルシリルジクロルシランを
原料にして重合した場合、以下の反−番 一 応により本発明の目的とするケイ素置換ポリシラン及び
環状化合物(Ill)が生成する。
For example, when the above-mentioned bistrimethylsilyldichlorosilane is used as a raw material for polymerization, the silicon-substituted polysilane and the cyclic compound (Ill) targeted by the present invention are produced by the following reaction.

(1)      ([) 重合反応終了後は、n−へキサンのような環状化合物(
III)の貧溶媒に注ぎ、溶媒の一部を留去して、上記
式(U)のび員環化合物を析出させ、口過分離後、残り
の溶媒を留去して目的とするシリル置換ポリシラン(1
)を得る。あるいは、l員環化合物を析出させ1口過分
離後、口液をメタノール中に注ぎ、シリル置換ポリシラ
ン(I)を沈殿させて得ることも出来る。
(1) ([) After the polymerization reaction is completed, a cyclic compound such as n-hexane (
III), and part of the solvent is distilled off to precipitate the long-membered ring compound of the above formula (U). After separation, the remaining solvent is distilled off to obtain the desired silyl-substituted polysilane. (1
). Alternatively, the l-membered ring compound can be precipitated and separated in one mouth, followed by pouring the mouth liquid into methanol to precipitate the silyl-substituted polysilane (I).

このようにして、数平均分子量200〜λo、ooo穆
度の本発明のシリル置換ポリシランを得ることができる
In this way, the silyl-substituted polysilane of the present invention having a number average molecular weight of 200 to λo and a degree of smoothness of ooo can be obtained.

〔実施例〕〔Example〕

次に本発明を実施例により更に具体的に説明するが1本
発明はその要旨を越えない限り、以下の実施例に限定さ
れるものではない。
Next, the present invention will be explained in more detail with reference to examples, but the present invention is not limited to the following examples unless it exceeds the gist thereof.

参考例1 会構塩化水素ガス導入管、かくはん機、還流冷却器を備
えた/1三つロフラスコにビス(トリメチルシリル)ジ
フェニルシラン(rtiy。
Reference Example 1 Bis(trimethylsilyl)diphenylsilane (rtiy) was placed in a three-hole flask equipped with a hydrogen chloride gas inlet tube, a stirrer, and a reflux condenser.

0、/ 7 mol ) 、塩化アルミニウム(t、2
f。
0,/7 mol), aluminum chloride (t, 2
f.

0.04t j mol )、ベンゼy (J’ 00
 ml )を仕込み、これに室温にて7時間塩化水素を
通じた。
0.04t j mol), benzene y (J' 00
ml) and hydrogen chloride was passed through it at room temperature for 7 hours.

次いで反応混合物にヘキサンをjoom加え、塩化アル
ミニウムを析出させf別した。アセトンl−を加え、F
液を蒸留し収量33f(収率rθ%)で目的物を得た。
Next, hexane was added to the reaction mixture, and aluminum chloride was precipitated and separated. Add acetone l-, F
The liquid was distilled to obtain the desired product in a yield of 33f (yield rθ%).

生成物の物性は次の通りである。bp 4 j ℃/!
 mmHg 0、HNMR(0014)δ:0.27 
ppm(s、BiMe)IR(neat);  /、2
tO(s)(SiMe)、/J4’jm  ’(vs)
(SiMe) n普0/、4!100(文献値n、  /、4#00)
参考例コ 合成 it三ツロフラスコにビス(トリメチルシリル)ジフェ
ニルシラン(toxy、0,3λmol)。
The physical properties of the product are as follows. bp 4 j ℃/!
mmHg 0, HNMR (0014) δ: 0.27
ppm(s, BiMe)IR(neat); /, 2
tO(s) (SiMe), /J4'jm' (vs)
(SiMe) nP0/, 4!100 (Literature value n, /, 4#00)
Reference Example Co-synthesis: Bis(trimethylsilyl)diphenylsilane (toxy, 0.3λmol) was placed in a three-way flask.

臭化アルミニウム(II、Or、 0.0 / j m
ol )、ベンゼン(/l)を入れ、かくはんしながら
、室温にてこれに臭化水素を4時間通じた。次いで反応
混合物に11のヘキサンを加え f−1過し、析出した
アルミニウム塩を除いた。アセトン/mlを加えF液を
蒸留して収量r、ry (収率7り%)で目的物を得た
。その物性は以下の通りであった。bp 100℃/I
ItrnrnHgl HNMR(0014)δ;θ、J
Oppm (s、SiMe)IR(neat); /λ
60(s)(SiMe)μ2弘j(vs)(SiMe)
、ff4’、2>  ’(vs)元素分析値 0@H4
@Br1Si3として−グ − 実施例1 かくはん機、滴下漏斗、還流冷却器を備えた/1三つロ
フラスコにナトリウム(’y、t y ro、34tm
ol )  とトルエ:y (3j 0w1)を入れ、
I10’Cまで加熱した。これにビス(トリメチルシリ
ル)ジブc1そシラ7(!0.Of、0./!m01)
のトルエン(100wl)溶液を1時間かけて、かくは
んしながら滴下した。反応混合物を2時間加熱還流後冷
却し、ヘキサン(100荒e)を加え析出した塩をP別
した。エタノール(/ rrtl )を加えてから溶媒
の一部を留去し、析出したシクロテトラシランをf別し
た。更に溶媒を留去しポリ(ビストリメチルシリルシリ
レン)を得た。収量/コf(収率J4t%)で、その物
性値は以下の通りであった。
Aluminum bromide (II, Or, 0.0/j m
ol) and benzene (/l) were added thereto, and hydrogen bromide was passed therein for 4 hours at room temperature while stirring. Next, 11 hexane was added to the reaction mixture, and the mixture was filtered f-1 to remove the precipitated aluminum salt. Acetone/ml was added and solution F was distilled to obtain the desired product in yields r and ry (yield 7%). Its physical properties were as follows. bp 100℃/I
ItrnrnHgl HNMR (0014) δ; θ, J
Oppm (s, SiMe)IR(neat); /λ
60 (s) (SiMe) μ2 Hiroj (vs) (SiMe)
, ff4', 2>' (vs) elemental analysis value 0@H4
As @Br1Si3 - Example 1 Sodium ('y, tyro, 34tm
ol) and Torue:y (3j 0w1),
Heated to I10'C. To this, bis(trimethylsilyl) dib c1 sosila 7 (!0.Of, 0./!m01)
A toluene (100 wl) solution of was added dropwise over 1 hour while stirring. The reaction mixture was heated under reflux for 2 hours, then cooled, and hexane (100 ml) was added to separate the precipitated salt. After adding ethanol (/rrtl), a portion of the solvent was distilled off, and the precipitated cyclotetrasilane was separated. Further, the solvent was distilled off to obtain poly(bistrimethylsilylsilylene). The physical property values in terms of yield/cof (yield J4t%) were as follows.

I R(neat) ;コタ!0(ve)、 、2rr
O(ve)’ HNMR(OO’14)δ;  O,/
l(s、JH,SiMe)0.2jppm(m、tLt
、tH,SiMe)数平均分子量 700 実施例コ かくはん機1滴下漏斗、還流冷却器を備えた100W1
1三つロフラスコにナトリウム(/、39゜! j m
mol )  と) ルエン(J Owl )を入れ。
I R (neat) ; Kota! 0(ve), ,2rr
O(ve)'HNMR(OO'14)δ; O,/
l(s, JH, SiMe) 0.2jppm(m, tLt
, tH, SiMe) Number average molecular weight 700 Example co-stirrer 1 dropping funnel, 100W1 with reflux condenser
Sodium (/, 39°! j m
mol) and) luene (J Owl).

iio″Ctで加熱した。こ、れに、ビス(トリメチル
シリル)ジクロロシラン(6,69、λ7mmol )
  のトルエン(total)溶液をかくけんしながら
1時間かけて滴下した。反応混合物を23時間加熱還流
させて冷却した。ヘキサン(200,1)を加え、生成
した塩を析出させr別した。エタノール1w、lを加え
た後、P液を水洗し、無水硫酸マグネシウムで乾燥した
。溶媒の一部を留去し析出したオクタキス(トリメチル
シリル)シクロテトラシランをf別技、溶媒を留去し、
ポリ(ビストリメチルシリルシリレン)を得た。収量0
.j / f (収率//%)〔発明の効果〕 本発明のシリル置換ポリシランは主鎖ポリシランのケイ
素に直接ケイ素原子が置換しており、従来のケイ素原子
に直接炭素原子が置換したポリシランに比し電子的、立
体的特性の異なる新しい性質のポリシランとして期待さ
れる。
Heated at iio''Ct. To this, bis(trimethylsilyl)dichlorosilane (6,69, λ7 mmol)
A toluene (total) solution of was added dropwise over 1 hour with stirring. The reaction mixture was heated to reflux for 23 hours and cooled. Hexane (200,1) was added, and the resulting salt was precipitated and separated. After adding 1 w, 1 of ethanol, the P solution was washed with water and dried over anhydrous magnesium sulfate. Part of the solvent was distilled off, and the precipitated octakis(trimethylsilyl)cyclotetrasilane was separated by a separate technique, and the solvent was distilled off.
Poly(bistrimethylsilylsilylene) was obtained. Yield 0
.. j/f (yield//%) [Effect of the invention] The silyl-substituted polysilane of the present invention has a silicon atom directly substituted on the silicon of the main chain polysilane, and is different from the conventional polysilane in which a silicon atom is directly substituted with a carbon atom. It is expected to be a polysilane with new properties with different electronic and steric properties.

Claims (1)

【特許請求の範囲】[Claims] (1)下記一般式( I ) ▲数式、化学式、表等があります▼ (式中、R^1〜R^6は低級アルキル基を表わし、同
一でも異つてもよい) で示される繰返し単位からなり、線状で数平均分子量2
00〜20,000のシクル置換ポリシラン。
(1) From the repeating unit represented by the following general formula (I) ▲There are mathematical formulas, chemical formulas, tables, etc.▼ (In the formula, R^1 to R^6 represent lower alkyl groups and may be the same or different.) It is linear and has a number average molecular weight of 2.
00-20,000 cycle substituted polysilane.
JP18453386A 1986-08-06 1986-08-06 Silyl-substituted polysilane Expired - Lifetime JPH0676495B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18453386A JPH0676495B2 (en) 1986-08-06 1986-08-06 Silyl-substituted polysilane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18453386A JPH0676495B2 (en) 1986-08-06 1986-08-06 Silyl-substituted polysilane

Publications (2)

Publication Number Publication Date
JPS6341534A true JPS6341534A (en) 1988-02-22
JPH0676495B2 JPH0676495B2 (en) 1994-09-28

Family

ID=16154863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18453386A Expired - Lifetime JPH0676495B2 (en) 1986-08-06 1986-08-06 Silyl-substituted polysilane

Country Status (1)

Country Link
JP (1) JPH0676495B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5039593A (en) * 1986-10-31 1991-08-13 Zeigler John K Poly(silyl silane) homo and copolymers
JP2007106894A (en) * 2005-10-13 2007-04-26 Nippon Soda Co Ltd Method for producing polysilane

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5039593A (en) * 1986-10-31 1991-08-13 Zeigler John K Poly(silyl silane) homo and copolymers
JP2007106894A (en) * 2005-10-13 2007-04-26 Nippon Soda Co Ltd Method for producing polysilane

Also Published As

Publication number Publication date
JPH0676495B2 (en) 1994-09-28

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