JPS6335398Y2 - - Google Patents
Info
- Publication number
- JPS6335398Y2 JPS6335398Y2 JP15707480U JP15707480U JPS6335398Y2 JP S6335398 Y2 JPS6335398 Y2 JP S6335398Y2 JP 15707480 U JP15707480 U JP 15707480U JP 15707480 U JP15707480 U JP 15707480U JP S6335398 Y2 JPS6335398 Y2 JP S6335398Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample piece
- pin
- block
- cooling block
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 15
- 239000002245 particle Substances 0.000 claims description 11
- 238000010292 electrical insulation Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 5
- 238000011068 loading method Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Description
【考案の詳細な説明】
この考案は材料の高温度下における物性を解析
するために真空内に置かれた試料片を加熱すると
同時に引張あるいは圧縮荷重応力をかけた状態
で、この試料片に荷電粒子線を照射し試料片から
発生する信号を検出して試料の観察や分析をする
Ｘ線マイクロアナライザ等の荷電粒子線照射型分
析装置（以下粒子線分析装置と記す）に関するも
のである。従来のこの種の装置では、試料片の加
熱法として加熱炉を用いる間接加熱を用いてい
る。そのためにこれに加えて圧縮引張等を同時に
するにはかなり複雑な構造を必要とするため、各
種の仕様が大巾に制限されていた。さらにこのよ
うな試料片を保持している部分の加熱による影響
を軽減させるような簡単な構成の装置が熱望され
ていた。すなわち加熱が試料片のみならず他の部
分にも影響が及ぶときには、照射する粒子線軸と
試料片との相対的位置関係が除々にずれ、分析位
置を一定させることができないからである。[Detailed explanation of the invention] This invention aims to analyze the physical properties of materials at high temperatures by heating a sample piece placed in a vacuum and at the same time applying a tensile or compressive load stress. This invention relates to a charged particle beam irradiation type analyzer (hereinafter referred to as a particle beam analyzer) such as an X-ray microanalyzer that observes and analyzes a sample by irradiating a particle beam and detecting a signal generated from a sample piece. Conventional devices of this type use indirect heating using a heating furnace as a heating method for the sample piece. Therefore, in addition to this, a fairly complex structure is required to simultaneously perform compression and tension, and various specifications have been severely limited. Furthermore, there has been a desire for a device with a simple structure that can reduce the effects of heating on the portion holding the sample piece. That is, when heating affects not only the sample piece but also other parts, the relative positional relationship between the irradiated particle beam axis and the sample piece gradually shifts, making it impossible to keep the analysis position constant.
この考案は上述した欠点を解消した装置を提供
しようとするものであり、その構成の要旨とする
ところは、冷却機構により常時冷却される冷却ブ
ロツクと、この冷却ブロツク上に密着して摺動自
在に載置され、試料片に設けられた第１のピン穴
に係合するピン部を有する摺動ピンブロツクと、
冷却ブロツク上に密着固定して載置され、試料片
に設けられた第２のピン穴に係合するピン部を有
する固定ピンブロツクと、この両ピンブロツクの
ピンと試料片の電気的絶縁を保持する絶縁部材
と、前記摺動ピンブロツクを冷却ブロツク上で摺
動させる摺動機構と、両ブロツク間の位置の変動
によつて試料片に加わる荷重を測定する荷重セン
サと試料片に直接通電して加熱する手段を粒子線
分析装置に設けたところにある。 This invention aims to provide a device that eliminates the above-mentioned drawbacks, and the gist of its configuration is a cooling block that is constantly cooled by a cooling mechanism, and a device that can freely slide in close contact with the cooling block. a sliding pin block that is placed on the sample piece and has a pin portion that engages with a first pin hole provided in the sample piece;
A fixed pin block that is placed tightly and fixed on the cooling block and has a pin portion that engages with a second pin hole provided in the sample piece, and an insulator that maintains electrical insulation between the pins of both pin blocks and the sample piece. A member, a sliding mechanism that slides the sliding pin block on the cooling block, a load sensor that measures the load applied to the sample piece due to changes in the position between both blocks, and a sample piece that is directly energized and heated. The means is provided in the particle beam analyzer.
以下この考案を第１図および第２図を参照しな
がら詳述する。第１図はこの考案のものに使用さ
れる試料片の１例の説明用平面図で、図において
１は試料片、３，３′はそれぞれ電線接続用の端
子穴、２，２′はそれぞれ後述のピンブロツクの
ピンと嵌合して、ピンブロツクの摺動により２，
２′間の距離を変化させて試料片に引張あるいは
圧縮荷重をかけるための第１、第２のピン穴であ
る。４はこの試料片１の加熱部分で、図のように
両側からＶ字状に切欠き、あるいは両側から刃物
による切込みをいれて断面積を少さくしてある。
この試料片１を作成する場合には穴２，２′の中
心間の線上に断面の中心が一致することが好まし
く、この条件に適合すれば切欠きや切込みは必ず
しも両側からなされる必要はなく、片側のみでも
差支えない。 This invention will be explained in detail below with reference to FIGS. 1 and 2. Figure 1 is an explanatory plan view of one example of a sample piece used in this invention. In the figure, 1 is a sample piece, 3 and 3' are terminal holes for connecting electric wires, and 2 and 2' are respectively It fits with the pin of the pin block described later, and the pin block slides 2.
These are the first and second pin holes for applying a tensile or compressive load to the sample piece by changing the distance between them. Reference numeral 4 denotes a heated portion of this sample piece 1, which has a V-shaped notch on both sides as shown in the figure, or a cut with a knife on both sides to reduce its cross-sectional area.
When creating this sample piece 1, it is preferable that the center of the cross section coincide with the line between the centers of the holes 2 and 2', and if this condition is met, the notch or notch does not necessarily have to be made from both sides. , there is no problem even if it is only on one side.
このように加熱部位を試料片１中の加熱電流の
流路上の一部に他に比べて極端に電流密度の高
い、すなわち電気抵抗値の高い部分を断面積を小
さくすることによつて所望の場所に設けることが
できる。 In this way, by reducing the cross-sectional area of the part of the heating current flow path in the sample piece 1 where the current density is extremely high compared to other parts, that is, the part where the electrical resistance value is high, the heating part is heated as desired. It can be placed at any location.
第２図は第１図の試料片１に引張・圧縮荷重を
加えるための試料ステージの説明用断面図で、こ
の荷電粒子線分析装置の真空槽内に設けられる。
５は実際の観察に供される試料片である。 FIG. 2 is an explanatory cross-sectional view of a sample stage for applying a tensile/compressive load to the sample piece 1 of FIG. 1, which is provided in a vacuum chamber of this charged particle beam analyzer.
5 is a sample piece used for actual observation.
試料ホルダ７は電気と熱の絶縁部材で試料片５
に供給される電流のバイパスを防ぐとともに試料
片５の加熱部分が他の金属部分に接触することを
防止する。６，６′は給電端子で外部の電源に接
続して試料片に電流を流す。 The sample holder 7 is an electrical and thermal insulating member that holds the sample piece 5.
This prevents bypass of the current supplied to the sample piece 5 and also prevents the heated portion of the sample piece 5 from coming into contact with other metal portions. 6 and 6' are power supply terminals connected to an external power source to flow current through the sample piece.
なおまた図示されているように試料ホルダ７は
図の中央部分８で左右方向に分離されてピン９，
９′の移動を妨げないようにしてある。１０，１
０′はそれぞれ試料片５に設けられたピン穴に係
合するピン９，９′を有するピンブロツクで、１
０′側は固定されており、図の水平軸方向の荷重
は荷重センサ１２，１２′により検出される。ブ
ロツク１０にはねじ軸１１が螺合しており、駆動
機構１４によりねじ軸１１が回転するとピンブロ
ツク１０が水平方向に移動し、ピン９，９′間の
距離が変化して試料片５に荷重を加える。１３は
冷却ブロツクで、内部を冷媒が循環し、良熱伝導
体のブロツク１０，１０′は冷却ブロツク１３に
接触し、冷却されつつ水平方向に移動可能に載置
され、試料片５の加熱部からの熱の影響を防止
し、高精度の引張・圧縮を可能にしている。上記
の実施例のものはねじ軸による荷重方法を用いた
が例えば油圧その他の荷重方法を用いても同様の
機能がえられるのでねじ軸による方式のものに限
定されない。 Furthermore, as shown in the figure, the sample holder 7 is separated in the left and right direction at the center part 8 of the figure, and has pins 9,
9' so as not to impede movement. 10,1
0' is a pin block having pins 9 and 9' that respectively engage with pin holes provided in the sample piece 5;
The 0' side is fixed, and the load in the horizontal axis direction in the figure is detected by load sensors 12, 12'. A screw shaft 11 is screwed into the block 10, and when the screw shaft 11 is rotated by the drive mechanism 14, the pin block 10 moves in the horizontal direction, and the distance between the pins 9 and 9' changes to apply a load to the sample piece 5. Add. Reference numeral 13 denotes a cooling block, in which a refrigerant circulates, and blocks 10 and 10' made of good heat conductors are placed in contact with the cooling block 13 so as to be able to move horizontally while being cooled, and are placed in the heating section of the sample piece 5. This prevents the influence of heat from the air and enables high-precision tension and compression. Although the above-mentioned embodiment uses a loading method using a screw shaft, the same function can be obtained by using, for example, hydraulic pressure or other loading methods, so it is not limited to the method using a screw shaft.
以上のようにこの考案の実施例のものは試料片
の一部に荷重応力の集中と、集中加熱点とを一致
させ、加熱を効果的にすると共に、試料ホルダに
より熱的電気的の両絶縁を簡単な構成で効果的に
おこない、さらに試料片の加熱に伴う引張・圧縮
荷重機構に対する熱的影響も防止する冷却機構が
設けられているのである。 As described above, in the embodiment of this invention, the concentration of load stress coincides with the concentrated heating point on a part of the sample piece, making heating effective, and providing both thermal and electrical insulation using the sample holder. This is done effectively with a simple configuration, and a cooling mechanism is also provided to prevent thermal effects on the tensile/compressive loading mechanism due to heating of the sample piece.
この考案の効果は以上詳述したように極めて簡
単な構成により試料片を加熱したままで試料に引
張あるいは圧縮荷重を加えながら荷電粒子線によ
る分析をする装置が実現でき、しかも試料保持部
への加熱による悪影響が防止できる荷電粒子線分
析装置を実現するものであり、この考案の効果は
極めて顕著である。 As explained in detail above, the effects of this invention are that it is possible to realize an apparatus that performs analysis using a charged particle beam while applying a tensile or compressive load to the sample while keeping it heated, with an extremely simple configuration; This invention realizes a charged particle beam analyzer that can prevent the adverse effects of heating, and the effects of this invention are extremely significant.
第１図はこの考案のものに使用される試料片の
例の説明用平面図、第２図はこの考案の一実施例
の荷電粒子線分析装置の要部説明断面図である。
３，３′：端子穴、４：加熱部分、５：試料片、
６，６′：供電端子、７：試料ホルダ、９，９′：
ピン、１３：冷却ブロツク。
FIG. 1 is an explanatory plan view of an example of a sample piece used in this invention, and FIG. 2 is an explanatory cross-sectional view of a main part of a charged particle beam analyzer according to an embodiment of this invention. 3, 3': terminal hole, 4: heating part, 5: sample piece,
6, 6': Power supply terminal, 7: Sample holder, 9, 9':
Pin, 13: Cooling block.
Claims (1)
試料片から発生する信号を検出して試料の分析を
おこなう装置において、冷却機構により常時冷却
される冷却ブロツクと、この冷却ブロツク上に密
着して、摺動自在に載置され、試料片に設けられ
た第１のピン穴に係合するピン部を有する摺動ピ
ンブロツクと、冷却ブロツク上に密着固定して載
置され、試料片に設けられた第２のピン穴に係合
するピン部を有する固定ピンブロツクと、この両
ピンブロツクのピンと試料片の電気的絶縁を保持
する絶縁部材と、前記摺動ピンブロツクを冷却ブ
ロツク上で摺動させる摺動機構と、両ピンブロツ
ク間の位置の変動によつて試料片に加わる荷重を
測定する荷重センサと、直接通電して加熱する手
段を設けたことを特徴とする荷電粒子線照射型分
析装置。 In a device that analyzes a sample by irradiating a sample piece placed in a vacuum with a charged particle beam and detecting the signal generated from the sample piece, there is a cooling block that is constantly cooled by a cooling mechanism, and a device that is placed tightly on top of this cooling block. A sliding pin block is placed in a slidable manner and has a pin portion that engages with a first pin hole provided in the sample piece, and a cooling block is placed in close contact with the cooling block and is placed on the sample piece. A fixed pin block having a pin portion that engages with a provided second pin hole, an insulating member that maintains electrical insulation between the pins of both pin blocks and the sample piece, and the sliding pin block are slid on a cooling block. A charged particle beam irradiation analyzer characterized by being provided with a sliding mechanism, a load sensor that measures the load applied to a sample piece due to positional fluctuations between both pin blocks, and means for directly applying electricity to heat the sample piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15707480U JPS6335398Y2 (en) | 1980-10-31 | 1980-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15707480U JPS6335398Y2 (en) | 1980-10-31 | 1980-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5779759U JPS5779759U (en) | 1982-05-17 |
| JPS6335398Y2 true JPS6335398Y2 (en) | 1988-09-20 |
Family
ID=29516203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15707480U Expired JPS6335398Y2 (en) | 1980-10-31 | 1980-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6335398Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5088929B2 (en) * | 2006-11-29 | 2012-12-05 | 高周波熱錬株式会社 | Electric heating method |
-
1980
- 1980-10-31 JP JP15707480U patent/JPS6335398Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5779759U (en) | 1982-05-17 |
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