JPS633481A - Gas laser tube - Google Patents
Gas laser tubeInfo
- Publication number
- JPS633481A JPS633481A JP14850286A JP14850286A JPS633481A JP S633481 A JPS633481 A JP S633481A JP 14850286 A JP14850286 A JP 14850286A JP 14850286 A JP14850286 A JP 14850286A JP S633481 A JPS633481 A JP S633481A
- Authority
- JP
- Japan
- Prior art keywords
- gas laser
- lens
- lenses
- laser tube
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 abstract description 3
- 239000011521 glass Substances 0.000 description 4
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、機器の位置合わせ、計測等に使用されるガス
レーザ管に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a gas laser tube used for alignment, measurement, etc. of equipment.
従来、ガスレーザ管は、その応用範囲が広がるにつれ、
また半導体レーザとの競合上、年々小形化されて来てい
る。しかし−般にレーザ発振を行なう光共振器長（ガス
レーザの場合、向かい合うミラー間隔、半導体レーザの
場合、結晶のへき開面の間隔）が短かくなるにつれ出力
光ビームの広がり角（発散角）が大きくなることが知ら
れている。この顕着な例として、半導体レーザの場合、
小さな結晶内で発振が行なわれるためビーム塩がり角は
大きい、ガスレーザ管の様に数十センチから数メートル
の光共振器長であると広がり角は数ミリラジアン程度で
ある。第２図は従来のガスレーザ管の一部を示す図で、
ミラー支持体１にミラー２が低融点ガラスで固着されて
いる。反対側にも図示はしていないが先兵振器を構成す
るミラーが設けられている。かかるガスレーザ管におい
ても光共振器長が１０Ｃ１ａ程度のものを要求されるに
至っている。Traditionally, as the range of applications for gas laser tubes has expanded,
In addition, due to competition with semiconductor lasers, they are becoming smaller year by year. However, as the length of the optical cavity that performs laser oscillation (in the case of gas lasers, the distance between opposing mirrors, in the case of semiconductor lasers, the distance between the cleavage planes of the crystal) becomes shorter, the spread angle (divergence angle) of the output light beam increases. It is known that As an obvious example of this, in the case of a semiconductor laser,
Since the oscillation occurs within a small crystal, the beam angle is large.If the optical resonator length is several tens of centimeters to several meters, such as in a gas laser tube, the divergence angle is about several milliradians. Figure 2 shows a part of a conventional gas laser tube.
A mirror 2 is fixed to a mirror support 1 using low melting point glass. Although not shown, a mirror constituting a vanguard swinger is also provided on the opposite side. Even in such a gas laser tube, an optical resonator length of about 10C1a has come to be required.
上述した従来のガスレーザ管は、レーザ光が平行光線と
なる様出力側ミラーの曲率を決定していた。しかし、光
共振器長が短かくなるに従いビーム広がり角は大きくな
るためガスレーザ管より任意の位置で細く絞り込まれた
レーザ光が必要な場合、ガスレーザ管とは別に複数のレ
ンズから成るコリメータをガスレーザ管の前に置きその
焦点を任意の位置で合わせることが行なわれていた。し
かし、かかる構成においては、ガスレーザ管とコリメー
タの間隔及び光の中心軸の位置関係によりビームの方向
及びビーム径が異なり装置が大形化するという欠点があ
った。さらに、ガスレーザ管とコリメータとを同軸上に
配置するための機械的部品が必要となり高価となってい
た。本発明の目的は、かかる欠点を除き、小形安価で任
意の位置において細いビーム径を発生させるガサレーザ
管を提供することである。In the conventional gas laser tube described above, the curvature of the output side mirror is determined so that the laser beam becomes a parallel beam. However, as the optical resonator length becomes shorter, the beam divergence angle increases, so if a narrower laser beam is required at any position than the gas laser tube, a collimator consisting of multiple lenses is installed in the gas laser tube in addition to the gas laser tube. It was done by placing it in front of the camera and focusing it at any position. However, this configuration has the drawback that the beam direction and beam diameter vary depending on the distance between the gas laser tube and the collimator and the positional relationship of the central axis of the light, resulting in an increase in the size of the apparatus. Furthermore, mechanical parts for coaxially arranging the gas laser tube and the collimator are required, which is expensive. SUMMARY OF THE INVENTION An object of the present invention is to eliminate such drawbacks and provide a gas laser tube that is small, inexpensive, and generates a narrow beam diameter at any position.
本発明のガスレーザ管は、出力側ミラーのガスレーザ管
外囲器への固定及び光軸調整を目的とするミラー支持体
を有し、さらに複数のレンズとこのレンズの間隙を調整
する機構から成るコリメータミラー支持体と組み合せた
ことを特徴とする。The gas laser tube of the present invention has a mirror support for fixing the output side mirror to the gas laser tube envelope and adjusting the optical axis, and further includes a collimator comprising a plurality of lenses and a mechanism for adjusting the gap between the lenses. It is characterized by being combined with a mirror support.
〔実施例〕
次に本発明を図面により説明する。第１図は、本発明の
一実施例を示す一部断面斜視図である。[Example] Next, the present invention will be explained with reference to the drawings. FIG. 1 is a partially sectional perspective view showing an embodiment of the present invention.
第１図において、ミラー支持体１は、ガスレーザ管の外
囲器を構成するガラスと同じ熱膨張率をもつ金属材料、
−般的にコバー合金が使用されている。このミラー支持
体１は外囲器に一方を封着すると同時に、出力側ミラー
２が低融点ガラス３により封着される。さらに本発明の
ガスレーザ管では、ミラー支持部１を従来のものより長
く、この中に凹レンズ５．凸レンズ８の２枚と、スペー
サ４およびバネ６を挿入しレンズ固定用ネジ７で固定し
てコリメータを形成している。この構造において、出力
側ミラー２よろ出力されるレーザ光は、凹レンズ５の曲
率によってビーム径は広げられ、さらに凸レンズ８の曲
率により絞り込まれる。これらレンズの曲率及び２枚の
レンズ間の距Ｎ（バネ６が挿入されている間隔）は、所
要の焦点位置と集来ビーム径によって決定される。ここ
で問題となるのがレンズの曲率である。これは設計段階
において決定されるが製造によるバラツキによって各６
焦点位置が異なって来るため２枚のレンズ間にバネ６を
挿入し固定ネジ７により２枚のレンズ間隔を調整する。In FIG. 1, the mirror support 1 is made of a metal material having the same coefficient of thermal expansion as the glass constituting the envelope of the gas laser tube.
-Commonly Kovar alloys are used. One side of the mirror support 1 is sealed to the envelope, and at the same time, the output side mirror 2 is sealed with a low melting point glass 3. Furthermore, in the gas laser tube of the present invention, the mirror support part 1 is longer than the conventional one, and the concave lens 5 is inserted into the mirror support part 1. Two convex lenses 8, a spacer 4 and a spring 6 are inserted and fixed with lens fixing screws 7 to form a collimator. In this structure, the beam diameter of the laser beam output from the output side mirror 2 is expanded by the curvature of the concave lens 5, and further narrowed down by the curvature of the convex lens 8. The curvatures of these lenses and the distance N between the two lenses (the distance at which the spring 6 is inserted) are determined by the required focal position and focused beam diameter. The problem here is the curvature of the lens. This is determined at the design stage, but due to manufacturing variations, each
Since the focal positions are different, a spring 6 is inserted between the two lenses, and a fixing screw 7 is used to adjust the distance between the two lenses.
尚、本実施例では、出力側ミラーを通常のミラーで構成
したが出力側ミラーを凹レンズ構造にし次に凸レンズを
持って来る事により、より小形のガスレーザ管を構成す
る事も可能である。In this embodiment, the output side mirror is constructed of a normal mirror, but it is also possible to construct a smaller gas laser tube by making the output side mirror have a concave lens structure and then adding a convex lens.
以上説明した様に本発明は、出力側ミラー支持体のコリ
メータを一体化することにより、小形安価で任意の位置
及びビーム径を得ることが出来る効果がある。As explained above, the present invention has the advantage that by integrating the collimator of the output side mirror support, it is possible to obtain an arbitrary position and beam diameter at a small size and at low cost.
第１図は、本発明の一実施例の部分断面図、第２図は従
来のガスレーザ管の部分断面図である。
１・・・ミラー支持体、２・・・出力ミラー、３・・・
低融点ガラス、４・・・スペーサ、５．８・・・レンズ
、６・・・バゐ
Ｊ。
し〉六゛
第１１図FIG. 1 is a partial sectional view of an embodiment of the present invention, and FIG. 2 is a partial sectional view of a conventional gas laser tube. 1...Mirror support body, 2...Output mirror, 3...
Low melting point glass, 4... Spacer, 5.8... Lens, 6... By J. 〉6゛Figure 11
Claims (1)
軸調整を目的とするミラー支持体を有するガスレーザ管
において、光出力側ミラー支持体中に、複数のレンズと
これらレンズ間隙を調整する機構を有するコリメータを
備えたことを特徴とするガスレーザIn a gas laser tube having a mirror support for fixing the mirror and adjusting the optical axis of the mirror at the end of the gas laser tube envelope, a mechanism for adjusting a plurality of lenses and the gap between the lenses in the mirror support on the light output side. A gas laser characterized by being equipped with a collimator having
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14850286A JPS633481A (en) | 1986-06-24 | 1986-06-24 | Gas laser tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14850286A JPS633481A (en) | 1986-06-24 | 1986-06-24 | Gas laser tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633481A true JPS633481A (en) | 1988-01-08 |
Family
ID=15454193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14850286A Pending JPS633481A (en) | 1986-06-24 | 1986-06-24 | Gas laser tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633481A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006041405A (en) * | 2004-07-30 | 2006-02-09 | Matsushita Electric Ind Co Ltd | Laser heating equipment |
-
1986
- 1986-06-24 JP JP14850286A patent/JPS633481A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006041405A (en) * | 2004-07-30 | 2006-02-09 | Matsushita Electric Ind Co Ltd | Laser heating equipment |
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