JPS63316675A - Piezoelectric linear motor - Google Patents
Piezoelectric linear motorInfo
- Publication number
- JPS63316675A JPS63316675A JP62151324A JP15132487A JPS63316675A JP S63316675 A JPS63316675 A JP S63316675A JP 62151324 A JP62151324 A JP 62151324A JP 15132487 A JP15132487 A JP 15132487A JP S63316675 A JPS63316675 A JP S63316675A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- unit
- linear motor
- tip
- moving unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000033001 locomotion Effects 0.000 abstract description 8
- 230000000737 periodic effect Effects 0.000 abstract description 4
- 230000010355 oscillation Effects 0.000 abstract 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 230000000750 progressive effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000010287 polarization Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002783 friction material Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、圧電リニアモータに関し、もう少し詳しく
いうと、圧電振動子の振動によって、動体を摩擦駆動す
る圧電リニアモータに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a piezoelectric linear motor, and more specifically, to a piezoelectric linear motor that frictionally drives a moving object by the vibration of a piezoelectric vibrator.
第７図、第８図は、例えば特開昭６１−３９８７０号公
報に示された従来の圧電リニアモータを示し、これは進
行性振動波を利用した圧電リニアモータとして一般によ
く知られているものである。第７図において、レール（
１）に圧電振動子（２）が結合している。（３）は動体
である。また、第８図は第７図のものの動作原理を示す
図であり、（４）はＶ−ル（１）表面の質点の軌跡、（
５）は振動波の頂点を示している。7 and 8 show a conventional piezoelectric linear motor disclosed in, for example, Japanese Patent Application Laid-Open No. 61-39870, which is generally well known as a piezoelectric linear motor that utilizes progressive vibration waves. It is. In Figure 7, the rail (
A piezoelectric vibrator (2) is coupled to 1). (3) is a moving object. Moreover, FIG. 8 is a diagram showing the operating principle of the one shown in FIG.
5) shows the top of the vibration wave.
以上の構成になる圧電リニアモータにおいて、いずれか
一方の圧電振動子（２）を駆動してレール（１）を加振
すると、進行性の振動波がレール（１）を伝播していく
。レール（１）には動体（３）が加圧接触されているが
、レール（１）を進行性の振動波が伝播しているときの
レール表面と動体の接触部分を示したのが第８図である
。第８図かられかるように、レール（１）を進行性の振
動波が矢印Ｗで示す方向に伝播して行くと、レール表面
の質点は、楕円状の軌跡（４）を描いて運動する。その
結果、振動波の頂点（５）でレール（１）と加圧接触さ
れている動体（３）は、矢印Ｐで示す方向に摩擦力によ
り駆動される。また、第７図において、駆動されていな
い他方の圧電振動子は、進行性振動波が効率よくレール
（１）を伝播するためにインピーダンスの整合をとるよ
うに作用する。In the piezoelectric linear motor having the above configuration, when one of the piezoelectric vibrators (2) is driven to vibrate the rail (1), progressive vibration waves propagate through the rail (1). The moving body (3) is in pressurized contact with the rail (1), and Figure 8 shows the contact area between the rail surface and the moving body when a progressive vibration wave is propagating through the rail (1). It is a diagram. As can be seen from Figure 8, when a progressive vibration wave propagates through the rail (1) in the direction indicated by arrow W, the mass point on the rail surface moves along an elliptical trajectory (4). . As a result, the moving body (3) that is in pressure contact with the rail (1) at the peak (5) of the vibration wave is driven in the direction indicated by arrow P by the frictional force. Further, in FIG. 7, the other piezoelectric vibrator that is not driven acts to match impedance so that the progressive vibration wave can efficiently propagate through the rail (1).
従来の圧電リニアモータは、以上のように、進行性振動
波を用いるため、加据源と反対側の端部でインピーダン
ス整合をとりながら振動を吸収する圧電振動子を設ける
など、振動波の伝播の妨げにならない方法でレールを支
持する必要があり、実装上の制約が大きいという問題点
があった。また、振動波は伝播路となる弾性体の屈曲振
動などを利用するため、実用的な振動振幅を得るために
は、あまり振動波の波長を短くすることができず、その
ため動体（３）の長さが大きくなってしまって小形化で
きないという問題点もあった。As described above, conventional piezoelectric linear motors use progressive vibration waves, so the propagation of the vibration waves can be improved by installing a piezoelectric vibrator that absorbs vibrations while matching impedance at the end opposite to the force source. There was a problem in that the rails had to be supported in a way that did not interfere with the design, which placed significant restrictions on implementation. In addition, since vibration waves utilize bending vibration of an elastic body that serves as a propagation path, in order to obtain a practical vibration amplitude, it is not possible to shorten the wavelength of the vibration waves very much. There was also the problem that the length was too large to make it smaller.
この発明は上記のような問題点を解消するためになされ
たもので、進行性の振動波を用いることなく、振動体の
支持が容易で、動体の長さ寸法の小形化も容易な圧電リ
ニアモータを得ることを目的とする。This invention was made in order to solve the above-mentioned problems, and it is possible to easily support a vibrating body without using progressive vibration waves, and to easily reduce the length of the moving body. The purpose is to obtain a motor.
この発明に係る圧電リニアモータは、円弧状の往復撮動
と直線状の往復振動を合成して先端部に曲線閉路の運動
軌跡を発生する圧電振動子を、動体の移動経路に複数個
配置して動体を摩擦駆動するようにしたものである。The piezoelectric linear motor according to the present invention has a plurality of piezoelectric vibrators arranged in the movement path of a moving object, which generate a curved closed path motion locus at the tip by combining circular arc-shaped reciprocating motion and linear reciprocating vibration. The moving object is driven by friction.
この発明においては、圧電振動子の底面が基準面として
固定できるために圧電振動子を集めた振動体の固定が容
易となり、また、安定駆動するための動体の最小長さは
、移動経路に配置した圧電振動子の間隔で決められる。In this invention, since the bottom surface of the piezoelectric vibrator can be fixed as a reference surface, it is easy to fix the vibrating body that collects the piezoelectric vibrators, and the minimum length of the moving body for stable driving is It is determined by the spacing between the piezoelectric vibrators.
菓１図〜第４図はこの発明の一実施例を示し、第１図に
おいて、動体（６）の下面に摩擦材（７）が接着されて
いる。リニアモータの基体（８）上には複数個の圧電振
動子（９）が並設されている。圧電振動子（９）は、第
２図に示すように、動体（６）を摩擦駆動する振動子先
端部（１１）を有し圧電体（１２）により振動駆動され
る振動体（１０）でなり、圧電体（１２）は振動子先端
部（１１）に円弧状の往復振動を発生させる第１の圧電
、素子（１２ａ）と、振動子先端部（１１）に直線状の
往復振動を発生させる第２の圧ｌＩ！素子（１２ｂ”ｌ
とからなっており、かつ、電極（１３ａ）〜（１３ｄ）
、リード線（１４ａ）〜（１４Ｃ）を備えている。（１
５ａ）は第１の圧電素子（１２ａ）を振動駆動する交流
電源、（１５ｂ）は第２の圧電素子（１２ｂ）を振動駆
動する交流電源である。Figures 1 to 4 show an embodiment of the present invention. In Figure 1, a friction material (7) is bonded to the lower surface of a moving body (6). A plurality of piezoelectric vibrators (9) are arranged in parallel on the base (8) of the linear motor. As shown in FIG. 2, the piezoelectric vibrator (9) is a vibrating body (10) that has a vibrator tip (11) that frictionally drives the moving body (6) and is vibrated and driven by a piezoelectric body (12). The piezoelectric body (12) is a first piezoelectric element (12a) that generates an arcuate reciprocating vibration at the tip of the vibrator (11), and the piezoelectric element (12a) generates a linear reciprocating vibration at the tip of the vibrator (11). The second pressure lI! Element (12b”l
and electrodes (13a) to (13d)
, lead wires (14a) to (14C). (1
5a) is an AC power source that vibrates the first piezoelectric element (12a), and (15b) is an AC power source that vibrates the second piezoelectric element (12b).
次に、第１図に示した実施例の動作について説明する。Next, the operation of the embodiment shown in FIG. 1 will be explained.
第１図に示すように、リニアモータの基体（８）上には
動体（６）を駆動するための複数個の圧電振動子（９）
が接着、並置されている。動体（６）は、適宜の与圧機
構によって圧電振動子（９）の振動子先端部（１１）に
加圧接触しており、かつ、基体（８）に沿って可動とな
るように適宜のガイド機構によってガイドされる。圧電
振動子（９）は、第２図に示したような構造であるが、
振動子先端部（１１）に円弧状の往復撮動を発生させる
第１の圧電素子（１２ａ）と直線状の往復振動させる第
２の圧電素子（１２ｂ）に交流電源（１５ａ ） ＋
（１５ｂ ）より適当な周期電圧をそれぞれ印加すると
、圧電振動子（９）の先端部（１１）は曲線閉路の軌跡
を描いて運動する。例えば、電源（１５ａ）、（１５ｂ
’）の出力をそれぞれＥａ 、 Ｅｂとして、
Ｅａ＝±ＡＯ８ｉｎ （ωｏｊ）
Ｅｂ ＝ ＢＯ（Ｘ）Ｓ （ωｏｔ）
なる周期電圧を圧電素子（１２ａ）、（１２ｂ）にそれ
ぞれ印加すれば、圧電振動子の先端部（１１）は第３図
（ａ）に示すような楕円状軌跡上をＥａの符号に従って
所定の方向に運動する。As shown in Fig. 1, a plurality of piezoelectric vibrators (9) are mounted on the base (8) of the linear motor to drive the moving object (6).
are glued and juxtaposed. The movable body (6) is in pressurized contact with the vibrator tip (11) of the piezoelectric vibrator (9) by an appropriate pressurizing mechanism, and is also movable along the base body (8). guided by a guide mechanism. The piezoelectric vibrator (9) has a structure as shown in FIG.
An AC power source (15a) is connected to the first piezoelectric element (12a) that causes the tip of the vibrator (11) to generate arcuate reciprocating motion and the second piezoelectric element (12b) that causes linear reciprocating vibration.
(15b) When appropriate periodic voltages are applied, the tip (11) of the piezoelectric vibrator (9) moves along a curved locus. For example, power supplies (15a), (15b
') are respectively Ea and Eb, and if periodic voltages such as Ea = ±AO8in (ωoj) Eb = BO(X)S (ωot) are applied to the piezoelectric elements (12a) and (12b), respectively, the piezoelectric vibrator The tip (11) moves in a predetermined direction on an elliptical trajectory as shown in FIG. 3(a) according to the sign of Ea.
また、電源（１５ａ）、（１５ｂ）の出力Ｅａ、Ｅｂを
とすれば、圧電振動子（９）の先端部（１１）は、第３
図（ｂ）に示すような軌跡をＥａの符号に従って所定の
方向に運動する。Furthermore, if the outputs Ea and Eb of the power supplies (15a) and (15b) are the outputs Ea and Eb of the power supplies (15a) and (15b),
It moves in a predetermined direction according to the sign of Ea along a trajectory as shown in Figure (b).
第１図の実施例において、互いに隣接する圧電振動子（
９）の振動位相なπだけずらすと、複数個の振動子先端
部（１１）に加圧接触されている動体（６）は、第３図
の太線で示した部分の振動子先端部（１１）の運動によ
って同図Ｘ軸の正または負方向に摩擦駆動される。しか
しながら、実際の駆動状態では、振動周波数が十分高い
ため、軌跡の頂点位置を振動位相０として、第３図の太
線で示した振動位相の−ψ〜＋π／２の間で完全に振動
子先端部（１１）と物体（６）の駆動面が接触すること
はなく、軌跡の頂点付近の運動によって動体（６）は摩
擦駆動され、また、振動子先端部（１１）と動体（６）
の駆動面が接触している間は、振動子先端部（１１）は
動体（６）の駆動面に沿って第３図の線分ＫＬで示した
経路上を通る。In the embodiment of FIG. 1, adjacent piezoelectric vibrators (
9), the moving object (6) that is in pressure contact with the plurality of vibrator tips (11) will shift by π, which is the vibration phase of the vibrator tips (11 ) is frictionally driven in the positive or negative direction of the X-axis in the figure. However, in the actual driving state, the vibration frequency is sufficiently high, so if the apex position of the trajectory is set as the vibration phase 0, the tip of the vibrator is completely reached between -ψ and +π/2 of the vibration phase shown by the thick line in Figure 3. The driving surfaces of the part (11) and the object (6) do not come into contact with each other, and the moving object (6) is frictionally driven by the motion near the apex of the trajectory.
While the driving surfaces of the moving body (6) are in contact with each other, the vibrator tip (11) passes along the path shown by the line segment KL in FIG. 3 along the driving surface of the moving body (6).
動子（９）の振動位相をπだけずらすための駆動手段を
示している。第４図のように、圧電振動子は交流電源（
１５ａ）、（１５ｂ）により直接駆動される圧電振動子
（９ａ）と、これら交流電源（１５ａ ） ＋ （１５
ｂ ）の出力電圧を移相器（１６ａ）、（１６ｂ）を通
してπだけ振動位相をずらした周期電圧により駆動され
る圧電振動子（９ｂ）が、交互に配置されている。この
結果、互いに隣接した圧電振動子はπ位相だけ互いにず
れて振動する。A driving means for shifting the vibration phase of the mover (9) by π is shown. As shown in Figure 4, the piezoelectric vibrator is powered by an AC power supply (
15a) and (15b), and these AC power supplies (15a) + (15
Piezoelectric vibrators (9b) driven by a periodic voltage whose vibration phase is shifted by π through phase shifters (16a) and (16b) are arranged alternately. As a result, adjacent piezoelectric vibrators vibrate with a phase shift of π.
次に別の実施例を第５図に示す。これは第１図第６図に
は第５図の実施例の圧電振動子（９）の構造を示す。第
６図（ａ）は前記圧電振動子（９）の分解斜視図であり
、圧電体（１２）の部分の矢印は分極の方向を示してい
る。同図かられかるように、圧電振動子（９）の振動体
（１０）と圧電体（１２）は各々一体加工されている。Next, another embodiment is shown in FIG. This is shown in FIG. 1, FIG. 6, and the structure of the piezoelectric vibrator (9) of the embodiment shown in FIG. FIG. 6(a) is an exploded perspective view of the piezoelectric vibrator (9), and the arrow in the piezoelectric body (12) indicates the direction of polarization. As can be seen from the figure, the vibrating body (10) and piezoelectric body (12) of the piezoelectric vibrator (9) are each integrally processed.
（１７）は接地電極である。第６図（ｂｌ 、 （Ｃ）
には圧電１体（１２）の胃、極パターンを示す。(17) is a ground electrode. Figure 6 (bl, (C)
shows the stomach and pole pattern of one piezoelectric body (12).
第６図（ｂ）に示すのは第１の圧電素子（１２ａ）の片
側電極のパターンであり、第４図に示す前述の第一の実
施例の結線図のリード線（１４ａ）と（１４ａ’）によ
って結線されている電極を各々一体化して電。FIG. 6(b) shows the pattern of one side electrode of the first piezoelectric element (12a), and the lead wires (14a) and (14a) of the connection diagram of the first embodiment shown in FIG. ') to integrate the electrodes that are connected by wires.
極（１８ａ）、（１８ｂ）としたものである。笥６図（
Ｃ）に示すのは第２の圧電素子（１２ｂ）の片側電極の
パターンであり、先と同様に、第４図に示す実施例の結
線図のリード線（１４Ｃ）と（１４ｃ’）によって結線
されている電極を各々一体化して電極（１９ａ）、 （
１９ｂ）としたものである。この第５図の実施例の動作
は、先の第一の実施例の動作と同様であり説明を省略す
る。The poles are (18a) and (18b). 6 drawings of the bowl (
C) shows the pattern of one side electrode of the second piezoelectric element (12b), and as before, it is connected by the lead wires (14C) and (14c') of the wiring diagram of the embodiment shown in FIG. The electrodes (19a), (
19b). The operation of the embodiment shown in FIG. 5 is the same as that of the first embodiment described above, and the explanation thereof will be omitted.
以上、この発明の実施例について説明したが、圧電振動
子の動作がこれら実施例と同様であれば、圧電体の分極
方向や電極配置の差異をこの発明が特に問題、どじない
のは言うまでもない。The embodiments of this invention have been described above, but if the operation of the piezoelectric vibrator is similar to those of these embodiments, it goes without saying that this invention does not have any particular problem or trouble with differences in the polarization direction of the piezoelectric body or the electrode arrangement. .
以上のように、この発明によれば、円弧状および直線状
の往復運動が合成される圧電撮動子の底面を基体に固定
して動体を駆動するようにしだので、リニアモータの支
持が容易で実装上の制約が極めて少なく、また、動体を
安定駆動するための最小の動体長さは、振動位相にずれ
をもった一部の圧電振動子の全長の２倍になり、例えば
π位相だけずれた圧電振動子を交互に配置したものでは
、圧電振動子４個分の長さになり、圧電撮動子を高密度
に集積すれば極めて小さな動体を駆動することができる
効果がある。As described above, according to the present invention, the bottom surface of the piezoelectric sensor, where arcuate and linear reciprocating motions are combined, is fixed to the base to drive the moving object, making it easy to support the linear motor. There are very few restrictions on implementation, and the minimum length of the moving body to stably drive the moving body is twice the total length of some piezoelectric vibrators that have a deviation in the vibration phase, for example, only in the π phase. In the case where piezoelectric vibrators are arranged alternately, the length becomes the length of four piezoelectric vibrators, and if the piezoelectric vibrators are integrated at high density, it is possible to drive an extremely small moving object.
第１図はこの発明の一実施例の斜視図、菓２図は第１図
のものに用いる圧電振動子の分解斜視図、第３図は第２
図の圧電振動子の先端の運動軌跡を示す線図、第４図は
第１図のものの圧電振動子の電極の結線図、第５図は他
の実施例の斜視図、第６図は第５図のものの圧電振動子
の構造を示す詳細図、第７図は従来の王道リニアモータ
の概略側面図、第８図は第７図のものの駆動原理を示す
一部斜視図である。
（６）・・動体、（８）・・基体、（９）・・圧電撮動
子、（１１）・・振動子先端部、（１２）・・圧電体、
（１５ａ”ｌ、（１５ｂ） ” ”交流電源。
なお、各図中、同一符号は同−又は相当部分を示す。
第１図
６゛動体
８ ゛基１本
９、圧電板Φ７１−）
第２図
３ｃ
第３図
（ａ） ＜ｂ’）第５図
第 ６ 因
手続補正書
昭和６２年１１月６日Fig. 1 is a perspective view of an embodiment of the present invention, Fig. 2 is an exploded perspective view of a piezoelectric vibrator used in the one shown in Fig.
Figure 4 is a diagram showing the movement trajectory of the tip of the piezoelectric vibrator in Figure 1, Figure 4 is a wiring diagram of the electrodes of the piezoelectric vibrator of Figure 1, Figure 5 is a perspective view of another embodiment, Figure 6 is the FIG. 5 is a detailed view showing the structure of a piezoelectric vibrator, FIG. 7 is a schematic side view of a conventional linear motor, and FIG. 8 is a partial perspective view showing the driving principle of the motor shown in FIG. (6)...Moving object, (8)...Base, (9)...Piezoelectric sensor, (11)...Tip of vibrator, (12)...Piezoelectric body,
(15a"l, (15b) "" AC power supply. In each figure, the same reference numerals indicate the same or corresponding parts. Fig. 1 6 "Moving body 8" 1 base 9, piezoelectric plate Φ71-) 2nd Figure 3c Figure 3 (a) <b') Figure 5 6. Written amendment of cause proceedings November 6, 1988
Claims (5)
先端部に曲線閉路の運動軌跡を発生する圧電振動子を動
体の移動経路に複数個配置して前記先端部に圧接した前
記動体を駆動する圧電リニアモータ。(1) A plurality of piezoelectric vibrators are arranged along the moving path of the moving body and are pressed against the tip, which combine circular arc-shaped reciprocating vibration and linear reciprocating vibration to generate a curved closed path at the tip. A piezoelectric linear motor that drives moving objects.
の範囲第１項記載の圧電リニアモータ。(2) A piezoelectric linear motor according to claim 1, comprising a plurality of integrated piezoelectric vibrators.
複数個の圧電振動子を備えた特許請求の範囲第１項記載
の圧電リニアモータ。(3) A piezoelectric linear motor according to claim 1, comprising a plurality of piezoelectric vibrators whose vibration phases are shifted at approximately equal intervals between 0 and 2π.
等間隔にずれた圧電振動子の一群の長さの２倍以上にし
た特許請求の範囲第３項記載の圧電リニアモータ。(4) The piezoelectric linear motor according to claim 3, wherein the length of the moving body is at least twice the length of a group of piezoelectric vibrators whose vibration phases are shifted from 0 to 2π at approximately equal intervals. .
つ組み合わせた特許請求の範囲第３項記載の圧電リニア
モータ。(5) A piezoelectric linear motor according to claim 3, in which approximately the same number of piezoelectric vibrators whose vibration phases are shifted by approximately π are combined.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62151324A JPS63316675A (en) | 1987-06-19 | 1987-06-19 | Piezoelectric linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62151324A JPS63316675A (en) | 1987-06-19 | 1987-06-19 | Piezoelectric linear motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63316675A true JPS63316675A (en) | 1988-12-23 |
Family
ID=15516127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62151324A Pending JPS63316675A (en) | 1987-06-19 | 1987-06-19 | Piezoelectric linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63316675A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0380693U (en) * | 1989-12-05 | 1991-08-19 | ||
| WO1996026551A1 (en) * | 1995-02-23 | 1996-08-29 | Robert Bosch Gmbh | Ultrasonic driving element |
| EP1267478A3 (en) * | 2001-06-12 | 2005-09-28 | Physik Instrumente (PI) GmbH & Co. KG | Piezoelectric linear motor comprising a group of piezostack actuators and its method of operation |
| JP2006006021A (en) * | 2004-06-17 | 2006-01-05 | Taiheiyo Cement Corp | Piezoelectric actuator and driving device |
| US7408289B2 (en) * | 2005-09-27 | 2008-08-05 | Samsung Techwin Co., Ltd. | Piezoelectric actuator, and apparatus and method for actuating the same |
| US8269948B2 (en) | 2006-08-25 | 2012-09-18 | Carl Zeiss Smt Gmbh | Projection exposure apparatus and optical system |
| DE102013107154A1 (en) * | 2013-07-08 | 2015-01-22 | Physik Instrumente (Pi) Gmbh & Co. Kg | driving device |
| US11290031B2 (en) | 2019-05-31 | 2022-03-29 | Canon Kabushiki Kaisha | Vibration-type actuator with vibration body and contact body relatively moving, apparatus, multi-axis stage unit, and articulated robot |
| WO2022092253A1 (en) | 2020-11-02 | 2022-05-05 | キヤノン株式会社 | Vibration-type actuator capable of reducing variation in force generated between contact body and vibration body, multiaxial stage, multi-joint robot, and device |
| US11469688B2 (en) | 2019-06-19 | 2022-10-11 | Canon Kabushiki Kaisha | Vibration actuator, and drive device, multi-axis stage unit, and articulated robot that use vibration actuator |
-
1987
- 1987-06-19 JP JP62151324A patent/JPS63316675A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0380693U (en) * | 1989-12-05 | 1991-08-19 | ||
| WO1996026551A1 (en) * | 1995-02-23 | 1996-08-29 | Robert Bosch Gmbh | Ultrasonic driving element |
| EP1267478A3 (en) * | 2001-06-12 | 2005-09-28 | Physik Instrumente (PI) GmbH & Co. KG | Piezoelectric linear motor comprising a group of piezostack actuators and its method of operation |
| JP2006006021A (en) * | 2004-06-17 | 2006-01-05 | Taiheiyo Cement Corp | Piezoelectric actuator and driving device |
| US7408289B2 (en) * | 2005-09-27 | 2008-08-05 | Samsung Techwin Co., Ltd. | Piezoelectric actuator, and apparatus and method for actuating the same |
| US8269948B2 (en) | 2006-08-25 | 2012-09-18 | Carl Zeiss Smt Gmbh | Projection exposure apparatus and optical system |
| US9110388B2 (en) | 2006-08-25 | 2015-08-18 | Carl Zeiss Smt Gmbh | Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method |
| DE102013107154A1 (en) * | 2013-07-08 | 2015-01-22 | Physik Instrumente (Pi) Gmbh & Co. Kg | driving device |
| DE102013107154B4 (en) * | 2013-07-08 | 2020-09-10 | Physik Instrumente (Pi) Gmbh & Co. Kg | Drive device |
| US11290031B2 (en) | 2019-05-31 | 2022-03-29 | Canon Kabushiki Kaisha | Vibration-type actuator with vibration body and contact body relatively moving, apparatus, multi-axis stage unit, and articulated robot |
| US11469688B2 (en) | 2019-06-19 | 2022-10-11 | Canon Kabushiki Kaisha | Vibration actuator, and drive device, multi-axis stage unit, and articulated robot that use vibration actuator |
| WO2022092253A1 (en) | 2020-11-02 | 2022-05-05 | キヤノン株式会社 | Vibration-type actuator capable of reducing variation in force generated between contact body and vibration body, multiaxial stage, multi-joint robot, and device |
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