JPS63313114A - Scanning optical system - Google Patents
Scanning optical systemInfo
- Publication number
- JPS63313114A JPS63313114A JP14920487A JP14920487A JPS63313114A JP S63313114 A JPS63313114 A JP S63313114A JP 14920487 A JP14920487 A JP 14920487A JP 14920487 A JP14920487 A JP 14920487A JP S63313114 A JPS63313114 A JP S63313114A
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- deflector
- lens
- refractive power
- refracting power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 47
- 238000003384 imaging method Methods 0.000 claims description 30
- 230000010287 polarization Effects 0.000 claims 1
- 230000004907 flux Effects 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 3
- 230000004304 visual acuity Effects 0.000 abstract 1
- 201000009310 astigmatism Diseases 0.000 description 11
- 230000004075 alteration Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000226585 Antennaria plantaginifolia Species 0.000 description 1
- 241000016649 Copaifera officinalis Species 0.000 description 1
- 239000004859 Copal Substances 0.000 description 1
- 241000238631 Hexapoda Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Lenses (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、走査線のピッチむらを除去した走査光学系に
関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a scanning optical system that eliminates pitch irregularities in scanning lines.
（従来の技術〕
従来から回転多面鏡型偏光器を用いた光ビーム走査装置
に於いて、偏向反射面の倒れにより偏向走査された光ビ
ームの進行方向が偏向面に垂直な面内で゛変化しても被
走査面上での走査線のピッチむらが生じないような走査
光学系が提案されている。その−例として特ｎ＠５Ｂ−
３６６２２がある。それは、被走査媒体と偏向器の間に
配置された所ｍｆθレンズ系の最後部に位置するレンズ
の少なくとも１面にトーリック面を用いてレンズ系をコ
ンパクトに構成している。しかしトーリック面をもつレ
ンズは、製造が容易ではない王に、通常回折限界に近い
結像性能が要求される光ビーム走査系にこれを用いるに
は、該トーリック面の縦横母線相互及びレンズ外形に対
する高精度の偏芯公差が要求され、比較的単純な加工原
理によって実現されるシリンドリカルレンズ面加：［に
比べて２倍〜３倍程度のコスト上昇となる。(Prior art) Conventionally, in a light beam scanning device using a rotating polygonal mirror type polarizer, the traveling direction of the deflected and scanned light beam changes within a plane perpendicular to the deflection surface due to the inclination of the deflection reflection surface. A scanning optical system has been proposed that does not cause pitch unevenness of scanning lines on the surface to be scanned even when the scanning surface is scanned.
There are 36622. The lens system is compactly constructed by using a toric surface on at least one surface of the rearmost lens of the mfθ lens system, which is disposed between the scanned medium and the deflector. However, lenses with toric surfaces are not easy to manufacture, and in order to use them in optical beam scanning systems that require imaging performance close to the diffraction limit, it is necessary to Cylindrical lens surface machining, which requires high-precision eccentricity tolerance and is realized by a relatively simple processing principle: The cost increases by about 2 to 3 times compared to [.
（発明が解決しようとする内題点）
本発明は倒れ補正機能を有するチθレンズ系を球面レン
ズ及びシリンドリカルレンズのみにて構成し、各球面レ
ンズの屈折力配置及びそれとの国保においてシリンドリ
カルレンズを用いた倒れ補正ｉ能を有するチθ走査光学
系の中では比較的コンパクトな構成になし得て製造コス
トが低廉で且、印字精度６０００Ｐ Ｉにも達する高性
能の走査光学系を得ることを目的とするものである。(Internal problems to be solved by the invention) The present invention consists of a chi-theta lens system having a tilt correction function only with spherical lenses and cylindrical lenses, and uses the cylindrical lens in the refractive power arrangement of each spherical lens and in the national insurance. The purpose of this invention is to obtain a high-performance scanning optical system that has a relatively compact structure among the chi-theta scanning optical systems that have the ability to correct for tilt, has a low manufacturing cost, and can reach a printing accuracy of 6000 PI. It is something to do.
（問題点を解決するための手段）
本発明は、上記の目的を達成するために従来定説であっ
た特開昭５３−１３７６３に開示されているチθレンズ
の如き構成配置である部内器側に負の屈折力群を又被走
査面側に正の屈折力群をおいたものを逆転させた構成配
置としたことを特徴とする。即ち光１１部から発生する
光束を直線状に結像する第１の結像光学系と、該第１の
結像光学系による直線像の近傍にその偏向反射面を有す
る回転多面鏡型偏向器と、該偏向器で偏向された光束に
より走査を受ける被走査媒体と、該被走査媒体と偏向器
の間に配置された第２の結像光学系とを備えたもので、
該第２の結像光学系を従来例とは逆に部内器側から順に
正の屈折力を有する球面レンズよりなる前群と、正の屈
折力を有するシリンドリカルレンズ部分と、負の屈折力
を有する複数の球面レンズよりなる後群とより構成した
走査光学系゛である。(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention utilizes an internal device side that has a configuration such as the chi-theta lens disclosed in Japanese Patent Application Laid-Open No. 53-13763, which has been a conventional theory. It is characterized by an arrangement in which the negative refractive power group is placed on the surface to be scanned and the positive refractive power group is placed on the side to be scanned. That is, a first imaging optical system that forms a linear image of the light beam generated from the 11 portions of light, and a rotating polygonal mirror deflector that has a deflection reflection surface near the linear image formed by the first imaging optical system. a scanning medium that is scanned by a light beam deflected by the deflector; and a second imaging optical system disposed between the scanning medium and the deflector.
Contrary to the conventional example, the second imaging optical system includes, in order from the internal device side, a front group consisting of a spherical lens having positive refractive power, a cylindrical lens portion having positive refractive power, and a negative refractive power. This is a scanning optical system consisting of a rear group consisting of a plurality of spherical lenses.
このように第２の結像レンズの構成配置として、部内器
側に先ず正の屈折力の前群を配置すると一偏向器によっ
て走査半角θだけ偏向を受ける光ビームは、該前群を通
過後光軸に対する傾きを著しく減じ略々光軸に平行に近
い傾きとなってシリンドリカルレンズに射入する構成と
なる２、そして該シリンドリカルレンズの直後に配置さ
れる負の屈折力を有する後群は、この略々光軸に平行に
近い光ビームの走査角を回復し、且ｆθ走査特性を生起
させチθレンズ系全体として各種結像収差をまとめる役
割を果している。したがってこの負の屈折力を有する後
群は、複数の球面レンズを用いる必要が生じ、本発明で
目的とする６００ＤＰＩクラスの印字精度を実現するた
めに後の実施例の如く２枚乃至３枚の球面レンズで構成
するのが適当である。As described above, in the configuration of the second imaging lens, if the front group with positive refractive power is placed on the internal unit side, the light beam that is deflected by the scanning half angle θ by one deflector will be deflected by the scanning half angle θ after passing through the front group. 2, which has a structure in which the inclination with respect to the optical axis is significantly reduced and the inclination is almost parallel to the optical axis and enters the cylindrical lens, and a rear group having negative refractive power disposed immediately after the cylindrical lens, It plays the role of restoring the scanning angle of the light beam that is approximately parallel to the optical axis, generating fθ scanning characteristics, and consolidating various imaging aberrations for the entire chiθ lens system. Therefore, it becomes necessary to use a plurality of spherical lenses in the rear group having negative refractive power, and in order to achieve the 600 DPI class printing accuracy that is the objective of the present invention, two or three lenses are used as in the later embodiments. It is appropriate to use a spherical lens.
シリンドリカルレンズは、ビームが光軸に傾き０゛で入
射した場合と、光軸に傾ぎθ゛で入射した場合とでθく
３０°のａｌ！囲では略々θ２に比例して非点収差が増
加する性質がある。The cylindrical lens has an al of θ of 30° when the beam is incident on the optical axis at an angle of 0° and when the beam is incident on the optical axis at an angle of θ°. In the range θ2, astigmatism increases approximately in proportion to θ2.
一方、本発明の走査光学系のように、光１１部から発生
する光束を第１の結像光学系（シリンドリカルレンズを
含む）により偏向器反射面近傍に直線状の線像つまり一
定値に固定された非点収差をもつ像を形成し、この線像
を第２の結像光学系（チθレンズ系）により最終走査面
上にほぼ円形に近く且つ出来る限り全走査面幅に亘って
一定寸法のスポット像を形成させねばならぬ光学系にお
いては、上記第２の結像光学系（チθレンズ系）内に配
置されたシリンドリカルレンズに射入するビームを走査
角θによらず出来る限り常に光軸に平行に保って有害な
非点収差のθによる差の発生を最少限に留めることが肝
要となる。On the other hand, as in the scanning optical system of the present invention, the light flux generated from the 11 portion of light is fixed to a linear image, that is, a constant value, near the reflecting surface of the deflector by the first imaging optical system (including a cylindrical lens). An image with astigmatism is formed, and this line image is formed on the final scanning surface by a second imaging optical system (chi theta lens system) in a nearly circular shape and as constant over the entire scanning surface width as possible. In an optical system that must form a spot image of the same size, the beam incident on the cylindrical lens disposed in the second imaging optical system (theta lens system) is adjusted as much as possible regardless of the scanning angle θ. It is important to always keep the lens parallel to the optical axis to minimize the difference caused by harmful astigmatism θ.
これらの理由から条件（１）、（＋＋）を満足すること
が好ましい。For these reasons, it is preferable to satisfy conditions (1) and (++).
０．４Ｆ≦ チＴ ≦０．７Ｆ （＋）１、０
Ｆ≦｜ｆＯ｜≦４．０Ｆ≦１チｏ１≦４．０Ｆ
ｌ）尚、チＴ・・・前群の焦点距離チ０・・・後群９焦
点距離
Ｆ ・・・第２の結像光学系全系の焦点距離条件（＋）
は、光ビームを前群を射出した時にθによらず光軸に平
行に近くする為の条件であると同時に主として第２の結
像レンズ（ｆθレンズ系）全体の走査直線性を確保する
為の条件である。0.4F≦ChiT≦0.7F (+)1,0
F≦｜fO｜≦4.0F≦1chio1≦4.0F
l) In addition, T... Focal length of front group Chi0... Rear group 9 focal length F... Focal length condition of the entire second imaging optical system (+)
is a condition for making the light beam nearly parallel to the optical axis regardless of θ when exiting the front group, and at the same time mainly to ensure the scanning linearity of the entire second imaging lens (fθ lens system). This is the condition.
回転多面鏡偏向器を介在させその回転に因るビーム反射
点の移動を考慮した場合、この条件の下限０．４Ｆ以下
になると走査直線性の残存収差が所謂“タル型”になり
その量が無視出来ない程度に達する。条件の上ｆｉｏ、
７Ｆを超えると所ＷＩ″糸巻型″残存収差が無視出来な
い程度に達する。When a rotating polygonal mirror deflector is interposed and the movement of the beam reflection point due to its rotation is taken into account, when the lower limit of this condition is 0.4F or less, the residual aberration of scanning linearity becomes so-called "barrel-shaped" and its amount decreases. It reaches a point where it cannot be ignored. fio on condition,
When the value exceeds 7F, the WI "pincushion" residual aberration reaches a level that cannot be ignored.
条件（ＩＩ）は主として第２の結像レンズ（ｆθレンズ
系）全体のＩａｉｆｉ湾西を修正し且第２の結像レンズ
（ｆθレンズ系）中のシリンドリカルレンズによる非点
隔差の新規発生弁を含めて第２の結像レンズ（ｆθレン
ズ系）全体の非点隔差を修正する為の条件である。Condition (II) mainly corrects the Iaifi bay west of the entire second imaging lens (fθ lens system) and also corrects the new generation valve of astigmatism difference due to the cylindrical lens in the second imaging lens (fθ lens system). This is a condition for correcting the astigmatism difference of the entire second imaging lens (fθ lens system).
回転多ｉｉｉ！ｉ偏向器を介在させそれによるビーム反
射点の移動を考慮した場合条件（１１）下限１．０Ｆ≦
｜ｆＯ｜≦４．０Ｆ以下になると第２の結像レンズ（ｆ
θレンズ系）全系の像面湾曲が著しく修正過剰になり走
査幅仝幅（亘っでのスポットサイズの均一性がもはや無
視出、来ない程度にまで悪化する。条件（１１）の上限
４．０Ｆ≦｜ｆＯ｜≦４．０Ｆを超えると第２の結像レ
ンズ（ｆθレンズ系）全系の非点収差が修正不足の傾向
が著しく増加しやはりスポットサイズの全走査幅に亘っ
ての均一性が著しく損われ走査の途中で楕円形スポット
形状の長軸方向と短軸方向が逆転する現象が生起し印字
品質を著しく低下させる原因となる。Lots of rotation iii! Condition (11) Lower limit 1.0F≦ When considering the movement of the beam reflection point by intervening an i-deflector
When |fO|≦4.0F or less, the second imaging lens (f
The field curvature of the entire system (theta lens system) is significantly overcorrected, and the uniformity of the spot size across the scanning width (theta lens system) deteriorates to the point where it can no longer be ignored.The upper limit of condition (11) 4. When 0F≦|fO|≦4.0F is exceeded, the astigmatism of the entire second imaging lens (fθ lens system) tends to be insufficiently corrected, and the spot size becomes uniform over the entire scanning width. This causes a phenomenon in which the long axis direction and short axis direction of the elliptical spot shape are reversed during scanning, resulting in a significant deterioration in print quality.
又第２の結像光学系を構成するシリンドリカルレンズは
正の屈折力を有する前群の光軸を含み偏向面と垂直な断
面内に於いて正の屈折力を有している。これは、第１の
結像光学系によって偏向器反射面上に結ばれた線状の光
源実像を再び被走査面上に実像として結像させる機能を
はたしている。The cylindrical lens constituting the second imaging optical system has positive refractive power in a cross section that includes the optical axis of the front group and is perpendicular to the deflection plane. This has the function of forming the linear real image of the light source formed on the reflective surface of the deflector by the first imaging optical system on the surface to be scanned again as a real image.
（実施例〕 本発明の走査光学系の各実施例のデーターを示す。。(Example〕 The data of each example of the scanning optical system of the present invention is shown. .
第１実施例のデーター
Ｆ−３０８，８
第２実施例のデーター
Ｆ−３３０，４
第３実施例のデーター
第４実施例のデーター
第５実施例のデーター
Ｆ−２７５，０
第６実施例のデーター
Ｆ−２７５，１
これら実施例の断面図（第１結像レンズを含む）は夫々
第１図へ・第６図に示す。図中（Ａ）は主走査方向であ
るＸ−Ｚ載面（θ上載面）、（Ｂ）は副走査方向である
Ｙ−Ｚｆ１面（θ〃）である。Data of the first embodiment - F-308, 8 Data of the second embodiment - F-330, 4 Data of the third embodiment - Data of the fourth embodiment - Data of the fifth embodiment - F-275, 0 of the sixth embodiment Data F-275,1 Cross-sectional views of these embodiments (including the first imaging lens) are shown in FIG. 1 and FIG. 6, respectively. In the figure, (A) is the X-Z mounting surface (θ upper surface) in the main scanning direction, and (B) is the Y-Zf1 surface (θ〃) in the sub-scanning direction.
尚実施例１〜３はポリゴンスキャナーを介在させた場合
のデーター、実施例４へ・６は、ポリゴンスキャナーを
介在させず単に走査角Ｏ°の場合に於ける入射ビームど
ｆθレンズ光軸の切合い点にポリゴンスキャナー反射面
が静止して存在し、且その反射面が位♂を変えない侭θ
だけ光束の射出方向を変えるよう傾いたとして計篩した
データーである。又各実施例の収差図（第７図〜第１２
図は半導体レーザコリメーターレンズや第１の結像レン
ズを含めたもので第１結像レンズよりも光源側のデータ
ーは下記の通り。Examples 1 to 3 are the data when a polygon scanner is used, and Examples 4 and 6 are data on the cutting of the optical axis of the incident beam fθ lens in the case where the polygon scanner is not used and the scanning angle is 0°. The polygon scanner reflection surface is stationary at the matching point, and the reflection surface does not change its position θ.
This data was calculated based on the assumption that the beam was tilted to change the emission direction of the light beam. Also, aberration diagrams of each example (Figures 7 to 12)
The figure includes the semiconductor laser collimator lens and the first imaging lens, and the data on the light source side of the first imaging lens is as follows.
データー中、面番号８，９のデーターは、半導体レープ
がもっている非点収差分を考慮して収差図を示すための
もので、この非点収差に等価の非点収差を発生する仮想
レンズのデーターである。またＴＨ中の負の符号の部分
（−０，００１）は、この仮想レンズの厚さ分を補正す
るために加えた。Among the data, the data for surface numbers 8 and 9 is for showing an aberration diagram taking into account the astigmatism difference that the semiconductor laser has, and is based on a virtual lens that produces an astigmatism equivalent to this astigmatism. It is data. Moreover, the negative sign part (-0,001) in TH was added to correct the thickness of this virtual lens.
本発明は、第２の結像レンズ（ｆθレンズ系）が球面レ
ンズとシリンドリカルレンズでしかも簡単な構成で倒れ
補正機能を有する＾解像力の走査光学系である。The present invention is a scanning optical system in which the second imaging lens (fθ lens system) has a spherical lens and a cylindrical lens, has a simple configuration, and has a tilt correction function, and has high resolution.
第１図〜第６図は第１実施例〜第６実施例の断面図、第
７図〜第１２図は第１実施例〜第６実施例の収差図であ
る。
特許出願人 コパル電子株式会社
代 理 人 大 城 重 信
第７図 第８図
非点収差 趙勤輌 非、点収差 七Ｈｍ虫第９図
第１０図
非点収差
第
非点収差
１１図
走査亘埠／１屯
１２図1 to 6 are cross-sectional views of the first to sixth embodiments, and FIGS. 7 to 12 are aberration diagrams of the first to sixth embodiments. Patent Applicant Copal Electronics Co., Ltd. Agent Shigenobu Oshiro Figure 7 Figure 8 Astigmatism Cho Qin'an Non-point aberration 7Hm insect Figure 9
Figure 10 Astigmatism Figure 11 Scanning Wabu / 1 Tun Figure 12
Claims (1)
結像する第１の結像光学系と、該第１の結像光学系によ
る直線像の近傍にその偏向反射面を有する回転多面鏡型
偏向器と、該偏向器で偏向された光束により走査を受け
る被走査媒体と、該被走査媒体と偏向器の間に配された
第２の結像光学系を備え、該第２の結像光学系は部内器
側から順に正の屈折力を有する球面レンズよりなる前群
と、正の屈折力を有するシリンドリカルレンズ部分と、
負の屈折力を有する複数の球面レンズよりなる後群とよ
り構成されていることを特徴とする倒れ補正機能を有す
る走査光学系。 （２）上記第２の結像光学系を構成するシリンドリカル
レンズ部分は、上記正の屈折力を有する前群の光軸を含
み且つ偏光面と垂直な断面内において正の屈折力を有す
る特許請求の範囲第１項記載の走査光学系。 （３）上記第２の結像光学系を構成する正の屈折力を有
する前群レンズの焦点距離をｆ＿Ｔ、負の屈折力を有す
る後群レンズの焦点距離をｆ＿Ｏ、第２０結像光学系の
全系の焦点距離をＦとするとき次の条件 ０．４Ｆ≦ｆ＿Ｔ≦０．７Ｆ １．０Ｆ≦｜ｆ＿Ｏ｜≦４．０Ｆ を満足する特許請求の範囲第２項記載の走査光学系。[Scope of Claims] (1) A light source section, a first imaging optical system that forms a linear image of the light beam generated from the light source section, and a light source near the linear image formed by the first imaging optical system. a rotating polygonal mirror deflector having a deflection reflecting surface; a scanned medium that is scanned by a light beam deflected by the deflector; and a second imaging optical system disposed between the scanned medium and the deflector. The second imaging optical system includes, in order from the internal device side, a front group consisting of a spherical lens having a positive refractive power, a cylindrical lens portion having a positive refractive power,
1. A scanning optical system having a tilt correction function, characterized in that it is comprised of a rear group made up of a plurality of spherical lenses having negative refractive power. (2) A patent claim in which the cylindrical lens portion constituting the second imaging optical system has positive refractive power in a cross section that includes the optical axis of the front group having positive refractive power and is perpendicular to the plane of polarization. The scanning optical system according to item 1. (3) The focal length of the front group lens having positive refractive power constituting the second imaging optical system is f_T, the focal length of the rear group lens having negative refractive power is f_O, and the 20th imaging optical system The scanning optical system according to claim 2, which satisfies the following conditions: 0.4F≦f_T≦0.7F 1.0F≦|f_O|≦4.0F, where F is the focal length of the entire system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14920487A JPS63313114A (en) | 1987-06-17 | 1987-06-17 | Scanning optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14920487A JPS63313114A (en) | 1987-06-17 | 1987-06-17 | Scanning optical system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63313114A true JPS63313114A (en) | 1988-12-21 |
Family
ID=15470100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14920487A Pending JPS63313114A (en) | 1987-06-17 | 1987-06-17 | Scanning optical system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63313114A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5764399A (en) * | 1995-07-07 | 1998-06-09 | Asahi Kogaku Kogyo Kabushiki Kaisha | Scanning lens |
| EP2851726A1 (en) * | 2013-08-29 | 2015-03-25 | Fujifilm Corporation | Scanning optical system, optical scanning apparatus, and radiation image readout apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56135815A (en) * | 1980-03-26 | 1981-10-23 | Minolta Camera Co Ltd | Lens for optical scanning |
| JPS61286810A (en) * | 1985-06-14 | 1986-12-17 | Konishiroku Photo Ind Co Ltd | Lens for optical scanning system |
| JPS6265011A (en) * | 1985-09-17 | 1987-03-24 | Fuji Photo Film Co Ltd | Light-beam scanning optical system |
-
1987
- 1987-06-17 JP JP14920487A patent/JPS63313114A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56135815A (en) * | 1980-03-26 | 1981-10-23 | Minolta Camera Co Ltd | Lens for optical scanning |
| JPS61286810A (en) * | 1985-06-14 | 1986-12-17 | Konishiroku Photo Ind Co Ltd | Lens for optical scanning system |
| JPS6265011A (en) * | 1985-09-17 | 1987-03-24 | Fuji Photo Film Co Ltd | Light-beam scanning optical system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5764399A (en) * | 1995-07-07 | 1998-06-09 | Asahi Kogaku Kogyo Kabushiki Kaisha | Scanning lens |
| EP2851726A1 (en) * | 2013-08-29 | 2015-03-25 | Fujifilm Corporation | Scanning optical system, optical scanning apparatus, and radiation image readout apparatus |
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