JPS63311810A - Longitudinal crystal vibrator - Google Patents
Longitudinal crystal vibratorInfo
- Publication number
- JPS63311810A JPS63311810A JP14824887A JP14824887A JPS63311810A JP S63311810 A JPS63311810 A JP S63311810A JP 14824887 A JP14824887 A JP 14824887A JP 14824887 A JP14824887 A JP 14824887A JP S63311810 A JPS63311810 A JP S63311810A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- vibration
- vibrator
- supporting
- etching method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 25
- 238000005530 etching Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000013016 damping Methods 0.000 claims description 12
- 238000005452 bending Methods 0.000 abstract description 15
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005381 potential energy Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ＩＭＨｚ前後と中周波数を有する縦水晶振動
子に関する。特に、その振動子形状に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a vertical crystal resonator having frequencies around IMHz and medium frequencies. In particular, it concerns the shape of the vibrator.
本発明は、振動モレの非常に少ない縦水晶振動子を提供
することにある。水晶は物理的、化学的に大変に安定し
た物質であり、従って、これから形成される、いわゆる
水晶振動子は損失抵抗の小さい、高いＱ値を持った振動
子を得ることができる。An object of the present invention is to provide a vertical crystal resonator with very little vibration leakage. Quartz is a physically and chemically very stable substance, and therefore, a so-called crystal resonator formed from it can have a low loss resistance and a high Q value.
しかしながら、このように優れた特性が得られるのは、
振動モレの小さい振動子形状の設計がなされて初めて得
られるのである。本発明は振動部と支持部がエツチング
法によって一体に形成された縦水晶振動子の支持部の形
状を工夫することにより、振動部のエネルギーを振動部
内部に閉し込めることができる。即ち、振動モレの小さ
い縦水晶振動子を得ることにある。However, such excellent characteristics can be obtained by
This can only be achieved by designing a vibrator shape with minimal vibration leakage. In the present invention, the energy of the vibrating part can be confined within the vibrating part by devising the shape of the supporting part of a vertical quartz crystal resonator in which the vibrating part and the supporting part are integrally formed by an etching method. That is, the objective is to obtain a vertical crystal resonator with small vibration leakage.
振動部と支持部をエツチング法によって一体に形成され
た従来の縦水晶振動子は支持部のフレームの幅が一様、
且つ、同一方向に形成され、その端部でマウントされる
ため、振動部のエネルギーがマウント部まで伝わり、振
動モレの原因となっていた。そのために、損失抵抗Ｒ，
の小さい縦水晶振動子を得ることができなかった。In conventional vertical crystal oscillators, in which the vibrating part and the support part are integrally formed by etching, the width of the frame of the support part is uniform;
Moreover, since they are formed in the same direction and mounted at their ends, the energy of the vibrating part is transmitted to the mount part, causing vibration leakage. For this purpose, the loss resistance R,
It was not possible to obtain a small vertical crystal oscillator.
このために、ＩＣの増幅度を高める等して対応してきた
が消ｇ電流が多くなる等の欠点があり、ひどい時には、
機器に配置したときに、振動モレが大きく、発振停止す
るという大きな問題が生じていた。そこで、本発明は、
この振動モレの非常に小さい縦水晶振動子を提案するも
のである。Ｉ！ｌ′Ｉち、振動モレの非常に小さい形状
を提供するものである。This has been dealt with by increasing the amplification of the IC, but there are drawbacks such as increased extinction current, and in severe cases,
When placed in equipment, there was a major problem in that vibration leakage was large and oscillation stopped. Therefore, the present invention
We propose a vertical crystal oscillator with extremely small vibration leakage. I! First, it provides a shape with very little vibration leakage.
第１図は本発明の縦水晶振動子の原理を説明するための
簡略化した平面図である。振動子ｌは振動部２と支持部
３から成り、この支持部３は屈曲部４、ブリッジ部５と
減衰部６から構成されている。FIG. 1 is a simplified plan view for explaining the principle of the vertical crystal resonator of the present invention. The vibrator 1 is composed of a vibrating section 2 and a supporting section 3, and the supporting section 3 is composed of a bent section 4, a bridge section 5, and a damping section 6.
又、減衰部６は両端支持の境界条件を持つと考えること
ができ、支持部３は減衰部６を通して、両端で固定され
ていると考えることができる。更に、振動部２は長さし
３１幅Ｗ、厚みＴで表し、支持部３は長さＬ２．幅−２
で表すと、今、振動子１の振動部２は矢印Ａで示したよ
うに、伸びの変位をすると、支持部３の屈曲部４は当然
矢印Ｂで示すごとく内側に曲げのモーメントを発生する
。逆に、振動部２が縮めば、支持部３の屈曲部４は外側
に曲げのモーメントを発生する。即ち、本発明では、振
動部２の幅方向の変位を支持部３の屈曲モードに変換す
ることによって、振動子の自由振動を抑圧しないように
している。そして、実際には、振動を抑圧しない寸法が
ある。この形状寸法は振動部２の歪みエネルギーと屈曲
部４のポテンシャルエネルギーによって決まる。即ち、
振動部２の歪みエネルギーをＵｌ、屈曲部のポテンシャ
ルエネルギーをＵ２とすると、Ｕ、、 Ｕ、は次式で表
される。Further, the damping section 6 can be considered to have a boundary condition of being supported at both ends, and the supporting section 3 can be considered to be fixed at both ends through the damping section 6. Further, the vibrating part 2 is represented by a length 31, a width W, and a thickness T, and the supporting part 3 is represented by a length L2. Width -2
Now, when the vibrating part 2 of the vibrator 1 undergoes an elongated displacement as shown by arrow A, the bending part 4 of the support part 3 naturally generates a bending moment inward as shown by arrow B. . Conversely, when the vibrating part 2 contracts, the bending part 4 of the support part 3 generates a bending moment outward. That is, in the present invention, by converting the displacement of the vibrating part 2 in the width direction into the bending mode of the support part 3, the free vibration of the vibrator is not suppressed. In reality, there are dimensions that do not suppress vibrations. The shape and dimensions are determined by the strain energy of the vibrating section 2 and the potential energy of the bending section 4. That is,
Letting the strain energy of the vibrating part 2 be Ul and the potential energy of the bending part as U2, U,, U, are expressed by the following equation.
但し、応力Ｔ２．歪みＳ２．ヤング率Ｅ、断面２次モー
メントＩ、変位Ｖ１体積Ｖ、、 Ｖ、、座標Ｘを示す。However, stress T2. Distortion S2. Young's modulus E, second moment of area I, displacement V1 volume V,, V,, coordinate X are shown.
又、縦水晶振動子の振動を抑圧しない関係は弐（１）。Also, the relationship that does not suppress the vibration of the vertical crystal oscillator is 2 (1).
（２）より、次の関係が成り立つ。From (2), the following relationship holds true.
ＵＨ＞ＩＪｚ （３１これより、
屈曲部４の寸法り、、 Ｗ、が決定される。UH>IJz (31 From this,
The dimensions of the bent portion 4, W, are determined.
例えば、本発明の周波数ＩＭＨｚのときの振動部の寸法
は長さＬ １＝ ２ 、６ 曹ｗｓ １Ｉ４ｚ ＝ ８
０μｍ、 Ｔ ＝ １６０μ−のとき、支持部の屈曲部
の寸法比Ｗｚ／Ｌｘは０．１６以下であれば良い。この
ように寸法を決めることにより、損失抵抗の小さい、且
つ、高いＱ（ａを持つ縦水晶振動子を得ることができる
。次に、振動モレについて述べる。第１図の簡略化した
平面図から分かるように、振動部２の振動エネルギーは
振動部２と支持部３を接続するブリッジ部５を介して支
持部３へ伝達される。従って、支持部３でのエネルギー
損失を小さくすれば良い訳で、支持部３のモードは屈曲
モードに変換され、且つ、ブリッジ部５を介して減衰部
６に伝わるため、エネルギー閉し込めが行われ、更に、
減衰部６を無限の質量を持つ固定部に両端で固定するこ
とにより、支持部３のエネルギーはモレないことになる
。即ち、本発明は、振動部２から伝わる支持部３の屈曲
モードに変換する形状−ｔ ／ Ｌ ｚを選択すること
により、振動部の振動を自由にし、且つ、支持部に屈曲
モード部と減衰部を設け、減衰部と接続する部分のｆｆ
ｆｆ１を大きくすることによって、本発明の目的を達成
するものである。For example, the dimensions of the vibrating part when the frequency of the present invention is IMHz are length L 1 = 2, 6 cm = 8
When T = 160 μm and T = 160 μm, the dimension ratio Wz/Lx of the bent portion of the support portion may be 0.16 or less. By determining the dimensions in this way, it is possible to obtain a vertical crystal resonator with low loss resistance and high Q(a.Next, we will discuss vibration leakage.From the simplified plan view in Fig. 1, As can be seen, the vibration energy of the vibrating part 2 is transmitted to the supporting part 3 via the bridge part 5 that connects the vibrating part 2 and the supporting part 3. Therefore, it is better to reduce the energy loss in the supporting part 3. Then, the mode of the support section 3 is converted to a bending mode and is transmitted to the damping section 6 via the bridge section 5, so that energy is confined, and furthermore,
By fixing the damping section 6 at both ends to a fixed section having infinite mass, the energy of the supporting section 3 will not leak. That is, the present invention makes the vibration of the vibrating part free by selecting the shape -t/Lz that converts into the bending mode of the support part 3 transmitted from the vibrating part 2, and also allows the support part to have a bending mode part and damping. ff of the part connected to the damping part
The object of the present invention is achieved by increasing ff1.
このように本発明は、振動部と支持部から構成される、
エツチング法によって形成される縦水晶振動子の支持部
の形状を改善することにより、損失抵抗の小さい、且つ
、高いＱ値を有する縦水晶振動子を得ることができる。In this way, the present invention is composed of a vibrating section and a supporting section.
By improving the shape of the support portion of a vertical crystal resonator formed by an etching method, a vertical crystal resonator with low loss resistance and a high Q value can be obtained.
同時に、支持部の振動モードを解析することにより、振
動モレの小さい縦水晶振動子が得られる。At the same time, by analyzing the vibration mode of the support part, a vertical quartz crystal resonator with small vibration leakage can be obtained.
次に、本発明にて得られた結果を具体的に述べる。 Next, the results obtained with the present invention will be specifically described.
第２図は本発明の縦水晶振動子の一実施例で、振動子ｌ
は振動部２と支持部３から構成されていて、エツチング
法によって一体に形成されている。振動部２は外部から
の電界駆動（図示されていない）にて、長手方向に伸縮
運動をするが、それと同時に、その垂直方向にも同様の
振動をする。この時に、まず、振動部２の長手方向の振
動を自由に励振するには、垂直方向の振動を十分に自由
にすることが大切で、そのために、本発明では支持部３
の屈曲部４の長さしと幅Ｗの比によって、即ち、周波数
が１ＭＨｚの場合、Ｗ／Ｌが０．１６以下であれば、長
手方向の振動の抑圧を防止することができる。次に、振
動モレは、振動部２からブリフシ部を介して屈曲部４へ
と一体にエツチング法によって形成され、その端部はさ
らにブリッジ部５を介して減衰部６に接続される。この
とき屈曲部４は屈曲モードで振動するが、両端が減衰部
６に接続され、マウント部で固定されるので、マウント
部７の質量を大きくすると支持部３にエネルギーを閉じ
込めることができるので、マウント部７で固定しても、
全く振動モレのない縦水晶振動子が得られる。Figure 2 shows an embodiment of the vertical crystal oscillator of the present invention.
is composed of a vibrating section 2 and a supporting section 3, which are integrally formed by etching. The vibrating section 2 is driven by an external electric field (not shown) to expand and contract in the longitudinal direction, but at the same time, it also vibrates in the vertical direction. At this time, first, in order to freely excite vibrations in the longitudinal direction of the vibrating part 2, it is important to make the vibrations in the vertical direction sufficiently free.
Suppression of vibration in the longitudinal direction can be prevented by the ratio of the length and width W of the bent portion 4, that is, if W/L is 0.16 or less when the frequency is 1 MHz. Next, the vibration leakage is integrally formed from the vibrating part 2 to the bending part 4 via the bridging part by an etching method, and the end thereof is further connected to the damping part 6 via the bridge part 5. At this time, the bending part 4 vibrates in the bending mode, but both ends are connected to the damping part 6 and fixed by the mount part, so if the mass of the mount part 7 is increased, energy can be confined in the support part 3. Even if it is fixed with the mount part 7,
A vertical crystal resonator with no vibration leakage can be obtained.
以上述べたように、本発明は振動部と支持部をエツチン
グ法によって一体に形成する縦水晶振動子に於いて、新
形状の縦水晶振動子を提案することにより、次の著しい
効果を有する。As described above, the present invention has the following remarkable effects by proposing a vertical crystal resonator with a new shape in a vertical crystal resonator in which the vibrating part and the supporting part are integrally formed by an etching method.
■支持部の形状寸法を改善することにより、振動を自由
にさせることができるので、損失抵抗が小さくなる。(2) By improving the shape and dimensions of the support part, vibration can be made free, so loss resistance is reduced.
■支持部に屈曲部と減衰部を設けることにより、振動モ
レが小さくなる。■By providing a bending part and a damping part in the support part, vibration leakage is reduced.
■両端部で支持するので、耐衝撃性に優れる。■Since it is supported at both ends, it has excellent impact resistance.
■エツチング法にて形成されるので、安価、且つ小型化
が可能である。(2) Since it is formed by an etching method, it is inexpensive and can be made smaller.
第１図は本発明の縦水晶振動子の原理を説明するための
筒略化した平面図である。
第２図は本発明の縦水晶振動子形状寸法の一実施例を示
す平面図である。
１・・・振動子 ６・・・減衰部２・・・振動部
７・・・マウント部３・・・支持部 Ｉ
７・・・屈曲部の長さ４・・・屈曲部 Ｗ・・・
屈曲部の幅５・・・ブリッジ部 Ｔ・・・厚 み以上
出願人 セイコー電子部品株式会社 −７，１FIG. 1 is a simplified plan view for explaining the principle of the vertical crystal resonator of the present invention. FIG. 2 is a plan view showing an embodiment of the shape and dimensions of the vertical crystal resonator of the present invention. 1... Vibrator 6... Damping part 2... Vibration part 7... Mount part 3... Support part I
7... Length of bent part 4... Bent part W...
Width of bent part 5... Bridge part T... Thickness or more Applicant Seiko Electronic Components Co., Ltd. -7,1
Claims (1)
た縦水晶振動子に於いて、振動部と接続される屈曲部は
前記振動子を囲むと同時に、減衰部に接続されているこ
とを特徴とする縦水晶振動子。In a vertical crystal resonator in which a vibrating part and a supporting part are integrally formed by an etching method, a bent part connected to the vibrating part surrounds the vibrating part and is also connected to a damping part. vertical crystal oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14824887A JPS63311810A (en) | 1987-06-15 | 1987-06-15 | Longitudinal crystal vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14824887A JPS63311810A (en) | 1987-06-15 | 1987-06-15 | Longitudinal crystal vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63311810A true JPS63311810A (en) | 1988-12-20 |
Family
ID=15448546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14824887A Pending JPS63311810A (en) | 1987-06-15 | 1987-06-15 | Longitudinal crystal vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63311810A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5331242A (en) * | 1992-11-18 | 1994-07-19 | Alliedsignal Inc. | Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode |
| US5541467A (en) * | 1992-07-03 | 1996-07-30 | Murata Manufacturing Co., Ltd. | Vibrating unit |
| US5541469A (en) * | 1993-04-14 | 1996-07-30 | Murata Manufacturing Co., Ltd. | Resonator utilizing width expansion mode |
| US5548179A (en) * | 1994-10-17 | 1996-08-20 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
| US5621263A (en) * | 1993-08-09 | 1997-04-15 | Murata Manufacturing Co., Ltd. | Piezoelectric resonance component |
| US5635882A (en) * | 1993-08-17 | 1997-06-03 | Murata Manufacturing Co., Ltd. | Laterally coupled piezo-resonator ladder-type filter with at least one bending mode piezo-resonator |
| US5644274A (en) * | 1993-08-17 | 1997-07-01 | Murata Manufacturing Co., Ltd. | Stacked piezoelectric resonator ladder-type filter with at least one bending mode resonator |
| US5701048A (en) * | 1993-05-31 | 1997-12-23 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
| WO2007046869A2 (en) * | 2005-07-15 | 2007-04-26 | Robert Bosch Gmbh | In-plane mechanically coupled microelectromechanical tuning fork resonators |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58159014A (en) * | 1982-03-16 | 1983-09-21 | Seiko Instr & Electronics Ltd | Coupling crystal oscillator |
| JPS60226205A (en) * | 1984-04-25 | 1985-11-11 | Kinseki Kk | Long side longitudinal vibrator |
-
1987
- 1987-06-15 JP JP14824887A patent/JPS63311810A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58159014A (en) * | 1982-03-16 | 1983-09-21 | Seiko Instr & Electronics Ltd | Coupling crystal oscillator |
| JPS60226205A (en) * | 1984-04-25 | 1985-11-11 | Kinseki Kk | Long side longitudinal vibrator |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5541467A (en) * | 1992-07-03 | 1996-07-30 | Murata Manufacturing Co., Ltd. | Vibrating unit |
| US5331242A (en) * | 1992-11-18 | 1994-07-19 | Alliedsignal Inc. | Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode |
| US5541469A (en) * | 1993-04-14 | 1996-07-30 | Murata Manufacturing Co., Ltd. | Resonator utilizing width expansion mode |
| US5701048A (en) * | 1993-05-31 | 1997-12-23 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
| US5621263A (en) * | 1993-08-09 | 1997-04-15 | Murata Manufacturing Co., Ltd. | Piezoelectric resonance component |
| US5689220A (en) * | 1993-08-17 | 1997-11-18 | Murata Manufacturing Co., Ltd. | Laterally coupled piezoelectric resonator ladder-type filter with at least one width expansion mode resonator |
| US5644274A (en) * | 1993-08-17 | 1997-07-01 | Murata Manufacturing Co., Ltd. | Stacked piezoelectric resonator ladder-type filter with at least one bending mode resonator |
| US5648746A (en) * | 1993-08-17 | 1997-07-15 | Murata Manufacturing Co., Ltd. | Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator |
| US5684436A (en) * | 1993-08-17 | 1997-11-04 | Murata Manufacturing Co., Ltd. | Ladder-type filter with laterally coupled piezoelectric resonators |
| US5635882A (en) * | 1993-08-17 | 1997-06-03 | Murata Manufacturing Co., Ltd. | Laterally coupled piezo-resonator ladder-type filter with at least one bending mode piezo-resonator |
| US5696472A (en) * | 1993-08-17 | 1997-12-09 | Murata Manufacturing Co., Ltd. | Stacked ladder-type filter utilizing at least one shear mode piezoelectric resonator |
| US5548179A (en) * | 1994-10-17 | 1996-08-20 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
| WO2007046869A2 (en) * | 2005-07-15 | 2007-04-26 | Robert Bosch Gmbh | In-plane mechanically coupled microelectromechanical tuning fork resonators |
| WO2007046869A3 (en) * | 2005-07-15 | 2007-12-21 | Bosch Gmbh Robert | In-plane mechanically coupled microelectromechanical tuning fork resonators |
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