JPS63289413A - Shape measuring apparatus - Google Patents
Shape measuring apparatusInfo
- Publication number
- JPS63289413A JPS63289413A JP12422487A JP12422487A JPS63289413A JP S63289413 A JPS63289413 A JP S63289413A JP 12422487 A JP12422487 A JP 12422487A JP 12422487 A JP12422487 A JP 12422487A JP S63289413 A JPS63289413 A JP S63289413A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- spot
- elongated
- photodiode
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 238000006073 displacement reaction Methods 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 11
- 238000010586 diagram Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、物体の形状あるいは物体の変位を光学的に測
定する形状測定装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a shape measuring device that optically measures the shape of an object or the displacement of an object.
従来の技術
非接触測距法の周知なもののひとつとして三角測量方式
を利用したものがある。この構成は、第４図に示すよう
に、光源１から出射される光ビームを投光レンズ２で被
測定物３上に照射し、被測定物３上に生じた光点を受光
レンズ４で結像し、その像点位置を光位置検出素子７で
検出するものである。BACKGROUND OF THE INVENTION One of the well-known non-contact ranging methods uses a triangulation method. As shown in FIG. 4, in this configuration, a light beam emitted from a light source 1 is irradiated onto an object to be measured 3 using a light projecting lens 2, and a light spot generated on the object to be measured 3 is detected using a receiving lens 4. An image is formed and the position of the image point is detected by the optical position detection element 7.
被測定物３が光源１の光軸方向に移動したとき、光位置
検出素子１１上で光スポツト位置が変化するので、光ス
ポツト位置の変化量より被測定物３の変位が測定できる
。光位置検出素子１１としては、半導体装置検出素子（
ＰＳＤ）あるいは２分割フォトダイオードを使用する。When the object to be measured 3 moves in the direction of the optical axis of the light source 1, the position of the light spot changes on the optical position detection element 11, so the displacement of the object to be measured 3 can be measured from the amount of change in the position of the light spot. As the optical position detection element 11, a semiconductor device detection element (
PSD) or a two-split photodiode.
ＰＳＤは光スポットの重心位置に比例した光電流が得ら
れる。また２分割フォトダイオードは、第６図に示すよ
うに分割線が光スポツト上にあれば２素子の光起電流を
Ａ、Ｂとして、（Ａ−Ｂ）／（Ａ＋Ｂ）あるいは、Ａ
／ （Ａ ＋ Ｂ ）、Ｂ ／ （Ａ 十Ｂ ）が光ス
ポツト位置と相関がある。With PSD, a photocurrent proportional to the center of gravity of the light spot can be obtained. In addition, as shown in Fig. 6, in a two-split photodiode, if the dividing line is on the light spot, the photovoltaic currents of the two elements are A and B, and the photovoltaic current is (A-B)/(A+B) or A.
/ (A + B) and B / (A + B) are correlated with the light spot position.
発明が解決しようとする問題点
しかしながら上記のような構成では、光位置検出素子に
ＰＳＤを使用すると応答時間が約５μ友程度と遅く、高
速応答の形状測定装置とならない。Problems to be Solved by the Invention However, with the above configuration, when a PSD is used as the optical position detection element, the response time is as slow as about 5 μm, and a high-speed response shape measuring device cannot be obtained.
２分割フォトダイオードを使用すると応答時間は約１０
ｎＳｅＣ程度と高速であるが、光スポットが分３ ′
−
割線上にかかっている範囲でしか１１１ＩＩ定できず測
定可能範囲が狭く、また光スポットが円形であるため光
スポットの移動量と検出信号に比例関係がないという問
題点を有していた。When using a two-part photodiode, the response time is approximately 10
The speed is about nSeC, but the light spot is only 3'
- 111II can only be determined within the range that lies on the secant line, resulting in a narrow measurable range, and since the light spot is circular, there is a problem in that there is no proportional relationship between the amount of movement of the light spot and the detection signal.
本発明は上記問題点に鑑み、応答時間が高速で光スポツ
ト移動量と検出信号が広範囲にわたって比例関係にある
形状測定装置を提供するものである。SUMMARY OF THE INVENTION In view of the above problems, the present invention provides a shape measuring device with a fast response time and a proportional relationship between the amount of movement of a light spot and a detection signal over a wide range.
問題点を解決するだめの手段
上記ｒＪＪ題点を解決するために本発明の形状測定装置
は、光源と、被測定物からの反射光を受光する少なくと
も２素子から成る多分割フォトダイオードと、上記多分
割フォトダイオード上で反射光を細長にする光学素子と
、上記多分割フォトダイオードの隣同士の光量関係から
変位を算出する演算処理部とから成るものである。Means for Solving the Problems In order to solve the above rJJ problems, the shape measuring device of the present invention includes a light source, a multi-segment photodiode comprising at least two elements for receiving reflected light from an object to be measured, and the above-mentioned It consists of an optical element that makes the reflected light elongate on the multi-divided photodiode, and an arithmetic processing section that calculates displacement from the light amount relationship between adjacent multi-divided photodiodes.
作 用
本発明は上記した構成によって、被測定物よりの反則光
を細長とし、多分割素子の隣同士の光量関係を演算処理
し変位を算出するので、細長スポ、トが移動したときの
分割素子間の光量変化は比例関係となり、従って算出さ
れた変位も比例関係となる。すなわち広範囲にわたって
比例関係の検出特性をもつ高速応答の形状測定装置とな
る。Function: With the above-described configuration, the present invention makes the repulsed light from the object to be measured elongated, and calculates the displacement by calculating the light amount relationship between adjacent multi-divided elements, so that the splitting when the elongated spot moves The light amount changes between the elements are proportional, and therefore the calculated displacement is also proportional. In other words, it becomes a high-speed response shape measuring device that has a proportional relationship detection characteristic over a wide range.
実施例 以下、本発明の一実施例を図面にもとづいて説明する。Example Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１図において、光源１から出射される光ビームを投光
レンズ２で被測定物３上に照射する。被測定物３上に生
じた光点を受光レンズ４及びシリンドリカルレンズ６で
細長ビームに集光し、その位置を多分割フォトダイオー
ドｉで検出する。In FIG. 1, a light beam emitted from a light source 1 is irradiated onto an object to be measured 3 using a projection lens 2. As shown in FIG. A light spot generated on the object to be measured 3 is focused into an elongated beam by a light receiving lens 4 and a cylindrical lens 6, and its position is detected by a multi-segment photodiode i.
被測定物３が光源の光軸方向に移動したとき、その移動
量に比例して多分割フォトダイオード５上で細長スポッ
ト７が移動する。従って細長スポット７の移動量を検出
することにより被測定物３の変位が測定できる。When the object to be measured 3 moves in the optical axis direction of the light source, the elongated spot 7 moves on the multi-segment photodiode 5 in proportion to the amount of movement. Therefore, by detecting the amount of movement of the elongated spot 7, the displacement of the object to be measured 3 can be measured.
次に、第２図にもとづいて細長スポット７の移動量の検
出方法について述べる。細長スポット７の長手方向の寸
法は各分割素子の幅よりわずかに長くなるよ′）Ｋ光学
系の定数を決定する。各分割５ ／・−ノ
素子の光量検出信号をそれぞれＡ、Ｂ、Ｃ・・・・・と
すると、演算処理部８では、（Ａ −Ｂ ） ／ （Ａ
＋Ｂ）。Next, a method for detecting the amount of movement of the elongated spot 7 will be described based on FIG. The longitudinal dimension of the elongated spot 7 is slightly longer than the width of each dividing element.') Determine the constants of the K optical system. Assuming that the light amount detection signals of the divided 5/- elements are respectively A, B, C, etc., the arithmetic processing unit 8 calculates (A - B) / (A
+B).
ＣＢ−Ｃ）／（Ｅ＋Ｃ）、（Ｃ−Ｄ）／（Ｃ＋Ｄ）・・
・・・・の演算を行ない、これらの信号を切り替えて変
位信号を出力する。信号の切り替えはＡ＋Ｂ。CB-C)/(E+C), (CD)/(C+D)...
. . . are calculated, these signals are switched, and a displacement signal is output. Signal switching is A+B.
１３＋Ｃ，Ｃ＋Ｄ、・・四のうち最大のものを出方する
ことで行なう。13+C, C+D... Do this by choosing the largest number out of four.
演算処理信号はよ記のもの以外にもＡ ／ （Ａ ＋
Ｂ） 。In addition to the above-mentioned arithmetic processing signals, A / (A +
B).
Ｂ／（Ｂ＋Ｃ）、Ｃ／（Ｃ＋Ｄ）・・・−・でも同等の
結果が得られる。Equivalent results can also be obtained with B/(B+C), C/(C+D), etc.
また、多分割フォトダイオード５の聴受光量が一定とな
るように光源１の光量を制御すれば、Ａ−Ｂ 、 Ｂ−
Ｃ、Ｃ−Ｄ 、、・、−ヤＡ 、 Ｂ 、 Ｃ−・−＝
・の信号を用いることができる。Furthermore, if the light amount of the light source 1 is controlled so that the amount of light heard and received by the multi-division photodiode 5 is constant, A-B, B-
C, CD,..., -ya A, B, C-...-=
・can be used.
さらに上記実施例では、細長ス’ｊ”ｙトの作成のため
に受光レンズ４とシリンドリカルレンズ６を使用したが
、Ｍ３図に示すように、これらを一体とした複合レンズ
に置きかえることができる。この複合レンズは片面が凸
面９でもう一面がシリントリルカル面１ｏである。この
シリンドリカル面６ ・＼ ２
は凸面でも凹面でも良い。第１図のシリンドリカルレン
ズ６も同様に凸面でも凹面でも良い。Furthermore, in the above embodiment, the light-receiving lens 4 and the cylindrical lens 6 were used to create the elongated strip, but as shown in Figure M3, these can be replaced with an integrated compound lens. This compound lens has a convex surface 9 on one side and a cylindrical surface 1o on the other side.The cylindrical surfaces 6 and \2 may be either convex or concave.Similarly, the cylindrical lens 6 in FIG.
発明の効果
以上のように本発明は、少なくとも２素子から成る多分
割フォトダイオード士で受光スポットを細長としている
ため、広範囲にわたって直線性良く、高速応答の形状測
定装置を提供できる。Effects of the Invention As described above, the present invention uses a multi-division photodiode composed of at least two elements to make the light receiving spot elongated, so that it is possible to provide a shape measuring device with good linearity over a wide range and high speed response.
第１図は本発明の実施例における形状測定装置の構成図
、第２図はその受光部と演算処理部の説明図、第３図は
検出光学系を一体にした複合レンズの説明図、第４図は
従来の形状測定装置の構成図、第６図はその説明図であ
る。
１・・・ 光源、３・・・・・・被測定物、４・・・・
・・受光レンズ、６・・・・・・多分割フォトダイオー
ド、６・・・・・・シリンドリカルレンズ、７・・・・
・・細長スポット、８・・・・・・演算処理部。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名ｌ−
１源
３−厳沖１定卯
６−−−シソンｙツカルレンズ
δ−消算処理辞
ＡＢＣＤＥ−−。
第５図FIG. 1 is a configuration diagram of a shape measuring device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of its light receiving section and arithmetic processing section, FIG. 3 is an explanatory diagram of a compound lens integrating a detection optical system, and FIG. FIG. 4 is a block diagram of a conventional shape measuring device, and FIG. 6 is an explanatory diagram thereof. 1... Light source, 3... Measured object, 4...
...Light receiving lens, 6...Multi-segment photodiode, 6...Cylindrical lens, 7...
...Elongated spot, 8... Arithmetic processing unit. Name of agent: Patent attorney Toshio Nakao and one other person
1 source 3-gon-okki 1 fixed u6--Sison ytsukar lens δ-cancellation processing word ABCDE--. Figure 5
Claims (1)
素子から成る多分割フォトダイオードと、上記多分割フ
ォトダイオード上で反射光を細長にする光学素子と、上
記多分割フォトダイオードの隣同士の光量関係から変位
を算出する演算処理部とを有する形状測定装置。a light source and at least two receiving reflected light from the object to be measured;
A shape measurement device comprising: a multi-division photodiode consisting of a multi-division photodiode, an optical element that elongates reflected light on the multi-division photodiode, and an arithmetic processing unit that calculates a displacement from the light amount relationship between adjacent multi-division photodiodes. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12422487A JPS63289413A (en) | 1987-05-21 | 1987-05-21 | Shape measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12422487A JPS63289413A (en) | 1987-05-21 | 1987-05-21 | Shape measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63289413A true JPS63289413A (en) | 1988-11-25 |
Family
ID=14880063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12422487A Pending JPS63289413A (en) | 1987-05-21 | 1987-05-21 | Shape measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63289413A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02154108A (en) * | 1988-12-06 | 1990-06-13 | Mitsubishi Electric Corp | Distance measuring instrument |
| JP2002162595A (en) * | 2000-11-24 | 2002-06-07 | Olympus Optical Co Ltd | Galvano mirror |
-
1987
- 1987-05-21 JP JP12422487A patent/JPS63289413A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02154108A (en) * | 1988-12-06 | 1990-06-13 | Mitsubishi Electric Corp | Distance measuring instrument |
| JP2002162595A (en) * | 2000-11-24 | 2002-06-07 | Olympus Optical Co Ltd | Galvano mirror |
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