JPS6328279A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPS6328279A JPS6328279A JP61168281A JP16828186A JPS6328279A JP S6328279 A JPS6328279 A JP S6328279A JP 61168281 A JP61168281 A JP 61168281A JP 16828186 A JP16828186 A JP 16828186A JP S6328279 A JPS6328279 A JP S6328279A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic motor
- piezoelectric
- voltage
- ring
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000010409 thin film Substances 0.000 claims abstract description 6
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 230000000750 progressive effect Effects 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 12
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
- 230000010287 polarization Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- -1 Afl Substances 0.000 description 1
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 241000257465 Echinoidea Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 229910010252 TiO3 Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000009377 nuclear transmutation Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
（技術分野〕
本発明は進行性振動波によって駆動される超音波モータ
、特にその振動体の構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to an ultrasonic motor driven by progressive vibration waves, and particularly to the structure of its vibrating body.
（従来技術）
超音波モータは、例えば汁電振動子に、電歪振動子等の
電気−機械変換素子群に周波電圧を印加した時に振動体
に生じる進行性振動波を駆動力として利用するもので、
従来の電磁、モータに比べて巻線を必要としない為、構
造が簡単で小型になり、低速回転時にも高トルクが得ら
れるという利点があり、近年注目されている。(Prior art) An ultrasonic motor uses, as a driving force, progressive vibration waves generated in a vibrating body when a frequency voltage is applied to a group of electro-mechanical conversion elements such as an electrostrictive vibrator or an electrostrictive vibrator. in,
Compared to conventional electromagnetic motors and motors, they do not require windings, so they have a simple and compact structure, and have the advantage of being able to obtain high torque even when rotating at low speeds, and have attracted attention in recent years.
そして、かかる超音波モータとしては特開昭５９−１２
２３８５号公報、特開昭５９−１７８９８’８号公報、
特開昭５９−２（１１６８５号公報等で種々の構造のも
のが提案されている。As such an ultrasonic motor, Japanese Patent Application Laid-Open No. 59-12
No. 2385, Japanese Unexamined Patent Publication No. 59-17898'8,
Various structures have been proposed in Japanese Unexamined Patent Publication No. 11685 (JP-A-59-2).
これら公報等で開示される超音波モータ本体は確かに小
型であるが、使用される電気−機械変換は前記素子への
印加電圧に対する素子の変位量、即ち、干−夕のトルク
に関連する量、Ｋは比例定数、ｄは素子の厚み、■は素
子の膜厚ノＪ向に印加する印加電圧である）の関係から
して所定のトルクを９！Ｉるためには印加電圧としては
数１０Ｖ以上の電圧か必要であった。Although the ultrasonic motor body disclosed in these publications is certainly small, the electro-mechanical conversion used is the amount of displacement of the element with respect to the voltage applied to the element, that is, the amount related to the torque of the drying process. , K is a proportionality constant, d is the thickness of the element, and ■ is the applied voltage applied in the J direction of the film thickness of the element), the predetermined torque is 9! In order to achieve this, it was necessary to apply an applied voltage of several tens of volts or more.
その為、使用電圧か数１０Ｖであることに起因する複雑
、大型な電気回路部分を含むモータ装置は差稈小型とな
り得ない問題かあった。For this reason, there is a problem that the motor device, which includes a complicated and large electric circuit portion due to the working voltage of several tens of volts, cannot be made smaller.
そこで従来の超音波モータでは干−夕装置全体を小望化
する為に可能な限り電気−ｍ核変換素子の厚みを例えは
０．５ｍｍ程度の薄いものにしていｔこ。Therefore, in conventional ultrasonic motors, the thickness of the electro-m nuclear transmutation element is made as thin as possible, for example, about 0.5 mm, in order to make the entire drying device small.
この様に素子の厚みを薄くした場合には素子に対する印
加電圧を低くすることかでき、結果的に干−夕装置全体
を小型化することかてぎて前述の問題は解決できるもの
のこの様な薄い素子を接着剤（例えは熱硬化＋′ｌ接着
剤）で振動体上に接着する際に、接着に際して素子に加
わる圧力て素子か（６損するという問題か生じていた。When the thickness of the element is reduced in this way, the voltage applied to the element can be lowered, and as a result, the entire drying device can be made smaller, which can solve the above-mentioned problem. When a thin element is bonded onto a vibrating body using an adhesive (for example, a thermosetting adhesive), a problem arises in that the pressure applied to the element during bonding causes loss of the element.
一方この問題を回避すべく慎重に作業を行った場合には
作業性か勇しく低下するという問題もあった。On the other hand, if the work was carried out carefully to avoid this problem, there was also the problem that the workability deteriorated dramatically.
更にこの破損、作業性の悪さという問題に加えて素子の
厚みか薄い従来のモータでは接着剤を用いる方式によっ
て生じる特有な問題、即ち接着剤層によって素子の振動
エネルギーが吸収され、厚いバルク圧電材を用いた場合
に比して効率が劣るという問題も生していた。Furthermore, in addition to this problem of damage and poor workability, conventional motors with thin elements have a unique problem caused by the method of using adhesive, namely, the vibration energy of the element is absorbed by the adhesive layer, There was also the problem that the efficiency was lower than when using .
（目 的）
本発明の目的は低電圧駆動が可能で、かつ薄い電気−機
械変換素子を用いたとしても前述の様な欠点、即ち素子
の破損、作業性の低下、効率の低下という欠点の牛しる
ことのない超音波モータを１是供せんとｉ−るもので、
その特徴とする処は電気−機械変換素子を蒸着法、スパ
ッタリング法等を主とする薄膜化技術をもって振動体上
に直接形成した点に存するものである。(Objective) The object of the present invention is to enable low-voltage driving and to avoid the above-mentioned drawbacks such as damage to the device, reduced workability, and reduced efficiency even when a thin electro-mechanical conversion element is used. We would like to provide you with an ultrasonic motor that will not cause any noise.
Its feature lies in the fact that the electro-mechanical transducer is directly formed on the vibrating body using thin film techniques such as vapor deposition and sputtering.
（実施例） 以下図面を参照して本発明の詳細な説明する。(Example) The present invention will be described in detail below with reference to the drawings.
第１図は、本発明を適用した超音波子−夕の一実施例の
断面Ｈにして、１は振動体を形成する弾性体リングで、
該リング１の表面ＩＡは移動体としての回転子３に加圧
接触している。４は負荷（不図示）に回転子３の回転力
を伝達する回転棒、５は弾性体リング１に後述の方法で
直接固着された電気−機械変換素子群を形成する圧電素
子で、該圧電素子５はフェルト等の吸振材７で支持され
ている。９は吸振材７を支持する固定体である。前述し
た圧電素子５は第３図に示す様に弾＋ｌ１体すングｌ上
に成膜された下部電極５Ａ、圧電材（イ＄４５ Ｂ、該
圧電性材料５Ｂ上に成膜された−１一部電極５Ｃにより
形成される。FIG. 1 shows a cross section H of an embodiment of an ultrasonic waveform to which the present invention is applied, and 1 is an elastic ring forming a vibrating body;
The surface IA of the ring 1 is in pressure contact with a rotor 3 as a moving body. 4 is a rotating rod that transmits the rotational force of the rotor 3 to a load (not shown); 5 is a piezoelectric element forming an electro-mechanical transducer group directly fixed to the elastic ring 1 by a method described later; The element 5 is supported by a vibration absorbing material 7 such as felt. 9 is a fixed body that supports the vibration absorbing material 7. As shown in FIG. 3, the piezoelectric element 5 described above includes a lower electrode 5A formed on the elastic body 5A, a piezoelectric material ($45B), and a -1 film formed on the piezoelectric material 5B. A portion is formed by the electrode 5C.
次に第３図を用いて原電素子５の製造方法について述べ
ると、弾性体リング１上にまず−Ｆ部電極５Ａを構成す
る透明電極であるＴＴＯ膜を電子ヒーム蒸看法で形成す
る。尚この下部電極５Ａとしては前記以外の透明電極で
あっても良いし、Ａｆｌ、Ｃｕ、Ａｕ−Ｃｒ等の金属材
料を真空基肴法、スパッタリング法によって形成しても
良い。Next, referring to FIG. 3, a method of manufacturing the electromagnetic element 5 will be described. First, a TTO film, which is a transparent electrode constituting the -F part electrode 5A, is formed on the elastic ring 1 by an electron beam evaporation method. Note that the lower electrode 5A may be a transparent electrode other than those described above, or may be formed of a metal material such as Afl, Cu, Au-Cr, etc. by a vacuum substrate method or a sputtering method.
次に下部電極５Ａ十に圧電竹材料５Ｂを成膜する。この
圧電（’ｌｌ材上してはＰＺＴ（チタン酸ジルコン酸鉛
）を用い、かつ高周波反応性マグネ１〜ロンスパッタ法
を用い、酸素とアルゴンの混合雰囲気中でＰＺＴの粉末
焼結体ターゲラ］・をスパッタして成膜した。尚該実施
例では前述の高周波反応性マグネトリンスバッタ法を用
いたが、ＰＺＴの製イ去としてイオンブレーテイングン
１、ＣＶＤ法、電子ビーム蒸着法等を用いることができ
る。Next, a film of piezoelectric bamboo material 5B is formed on the lower electrode 5A. This piezoelectric material (PZT (lead zirconate titanate) was used as the material, and the PZT powder sintered body Targela was produced in a mixed atmosphere of oxygen and argon using the high-frequency reactive magnetron sputtering method) The film was formed by sputtering.Although the above-mentioned high-frequency reactive magnetron sputtering method was used in this example, ion blating 1, CVD method, electron beam evaporation method, etc. were used to remove the PZT. be able to.
前述のＰＺＴの成膜時の基板温度、熱処理条件としては
種々温度、種々の条件が適用可能であるが該実施例の場
合は３００℃であり、該成膜後は大気中で６００℃の条
件下で２時間熱処理を行なった。Various temperatures and various conditions can be applied as the substrate temperature and heat treatment conditions during the above-mentioned PZT film formation, but in the case of this example, the temperature was 300°C, and after the film formation, the temperature was 600°C in the atmosphere. Heat treatment was carried out for 2 hours under the condition.
かかる工程の後に原電材料５Ｂ上に上部電極５Ｃとして
のＡｎを真空蒸着を用いた成膜する。After this step, an An film as the upper electrode 5C is formed on the raw electrical material 5B using vacuum evaporation.
上述の様にして圧電素子５を弾性体リング１に薄膜化技
術によって直接固着した後に第２図に示す様に分極処理
を行なう。この電極は、弾性体リングｌの表面に生ずる
進行性振動波（尚この振動波か生ずる理論については前
述の公報等で既に知られた事であるのでここでは省略す
る）の波長をλと−４−るど、その坏のビッヂて第２図
示の様に５Ｂａ、５Ｂｂ、５Ｂｃ、５Ｂｄ、５Ｂｅ、
５Ｂｆ５Ｂｇ、５Ｂｈと形成される。干−全１ｉｊ４
Φハ峙には５ Ｂ ａ 、 ５ Ｂ ｃ 、 ５
Ｂ ｃ 、 ５ Ｂ ｄの電極？＋Ｔには周波′市月
−曲１１から所定の周波数の１ｉｌｊ動′市丹か印加さ
４）、また５Ｂｅ、５Ｂｆ、５８ｇ、５Ｂｈの電棒君ｆ
には周波電圧舌！１１から出力さオ］る周波電圧の周波
Ｗから９０°イ☆相のず第１た周Ｑｉｌ数の高周波′１
七１Ｆを出力する′電圧源１３からの１（μφ）ｊ電圧
か印加さｊする。前述の分極は１［モ成さ４した電極の
５Ｂａ。After the piezoelectric element 5 is directly fixed to the elastic ring 1 by the thin film technique as described above, a polarization process is performed as shown in FIG. This electrode has a wavelength of λ and − 4- As shown in the second diagram, the bits are 5Ba, 5Bb, 5Bc, 5Bd, 5Be,
Formed as 5Bf5Bg and 5Bh. Dried - total 1ij4
ΦHa faces 5 B a , 5 B c , 5
B c , 5 B d electrode? To +T, a predetermined frequency of 1ilj motion from 11 is applied to +T4), and electric bokunf of 5Be, 5Bf, 58g, and 5Bh is applied.
There is a frequency voltage tongue! 90 degrees from the frequency W of the frequency voltage output from 11
A voltage of 1 (μφ)j from the voltage source 13 which outputs 71F is applied. The polarization mentioned above is 1 [5Ba of the 4 electrode.
５ Ｂ ｃ 、 ５ Ｂ ｆ 、 ５ Ｂ ｈと５
８ １） 、 ５ Ｂ ｄ 、 ５ Ｂｅ、５８ｇ
の芥’Ｆｉｉ ４→！ Ｉｉ丁に夫々逆向きの電圧を印
加し、Ｉｉいに隣り合う堕域の分極−１ｊ向か逆向きと
なる杆（、′処理する。尚この実施例の分極処理条件は
（気中で２００℃の温度下で３０ｖ〜１００Ｖの曲流電
圧（この電圧は圧電材料５８のｒｐ、ｉ、厚にＬｉ’、
シて変ｆｉｌさｌｔ：）を３０５ト印加したもσ）′
１１１ある。前述の′市４４ｉ Ｊ！Ｔ ５ Ｂ ａ
〜５ Ｂ ｄと５ Ｂ ｅ 〜５ Ｂ ｈの各々Ｉｆ’
ｉｊ！ ３７１″１振動波４発１１さυる為に第２図
示の様にλ５′４すらしＩＣ配置さねている。5 B c , 5 B f , 5 B h and 5
8 1), 5 B d, 5 Be, 58g
'Fii' 4→! Apply voltages in opposite directions to Ii and process the rods (,') so that the polarization of the fallen region adjacent to Ii is in the -1j direction or in the opposite direction.The polarization treatment conditions in this example are (200 A bending voltage of 30v to 100V at a temperature of
Even if 305 bits of filt:) were applied, σ)'
There are 111. The aforementioned 'City 44i J! T 5 B a
~5 B d and 5 B e ~5 B h, respectively If'
ij! 371'' In order to generate 11 vibrations of four vibration waves, even λ5'4 is arranged as shown in the second diagram.
前述した様に第１図乃￥第３図示実施例におりる超音波
モータの動作理論は前記の公開公報等で既知の事である
ので詳述しないか、′電圧源１１゜１３に前述の如ぎ周
波数の周知電圧を印加することによりバー電素子５か振
動し、弾性体リング１の表面上に進行＋’を振動波か発
生し、弾１１Ｉ体リング１に加Ｈ−接触した回転子か摩
擦駆動され、回転子３か回転するものである。As mentioned above, the operating theory of the ultrasonic motor shown in the embodiment shown in FIGS. By applying a known voltage with a certain frequency, the bar electric element 5 vibrates and generates a vibration wave traveling +' on the surface of the elastic ring 1. The rotor 3 is driven by friction, and the rotor 3 rotates.
木実ＪノＮ例にお＋Ｊる圧電材料５Ｂの膜Ｊゾと電圧源
Ｉ＋、！３からの駆動型１■との関係は第４図に示す通
りである。第４１ン１から判る様に駆動電圧３ｖ〜ＩＯ
Ｖという低重′月ていす才］のモータも正常、かつ良り
ｆに動作し、た。また各モータの駆動トルクは夫々１０
〜１．２Ｋｇ−ｃｍの範囲であって、回転数は約５００
ｒｐｍである。前述した千−夕の駆動電圧はＩＣ化さ
れた駆動回路の駆動電圧に合致しｌご、例えは５■稈度
か望ましい。For example, the membrane of the piezoelectric material 5B and the voltage source I+,! The relationship between drive type 1 and drive type 3 is as shown in FIG. As you can see from No. 41 No. 1, the driving voltage is 3V to IO
The motor of the low-heavy motor called V was also operating normally and in good condition. Also, the driving torque of each motor is 10
~1.2Kg-cm, and the rotational speed is approximately 500
rpm. The driving voltage of the above-mentioned Chi-Yu corresponds to the driving voltage of the IC-based driving circuit, and is preferably about 1, for example, 5cm.
１；Ｊ、 ｌの事等からして圧電４Ａ１５Ｂの膜厚１０
０μｍ以下、好ましくは１０〜５０ ｐ ｍ程度である
。1; Considering J, l, etc., the film thickness of piezoelectric 4A15B is 10
It is 0 μm or less, preferably about 10 to 50 pm.
１２お、本実施例では圧？ｔｔ材料５ＢとしてＰＺＴを
用いたか、かかる４４旧に限定されるものではノ、二く
、ＰＬＺＴ、ＢＴＯ，Ｐｌ）ＴｉＯ３，Ｐｌ）（Ｉ、ａ
、Ｔｉ）０３等圧？ｉｔ＋’ｌを示すものならば何でも
よく各々について結晶性の良い膜を得る作製条イ！］、
熱処理条件又は成膜法等を適宜選定することによって手
記実施例と同様の効果を期待Ｌ２うるものである。12 Oh, pressure in this example? PZT was used as the tt material 5B, or PLZT, BTO, Pl) TiO3, Pl) (I, a
, Ti)03 isobaric? Any film that exhibits it+'l can be used to produce a film with good crystallinity. ],
By appropriately selecting the heat treatment conditions, film forming method, etc., it is expected that the same effects as in the example described above can be obtained L2.
また圧電素子の代りに電歪素子を用いｋものても同様な
効果を得ることが可能て、電歪４４Ｔ」のハ〜ＩＰ、！
化によＶ）低電圧駆動化が即行てぎることは言うまても
ない。It is also possible to obtain the same effect by using an electrostrictive element instead of a piezoelectric element, and the electrostrictive 44T' IP!
It goes without saying that V) low-voltage driving will be achieved immediately.
また、（（実施例ては、第１図に示すことく、弾（’［
休、回転子としてリング状のものを用いて回転させる干
−タを開示したが、弾（’１体、移動体の形状はこオｌ
に限定されるものではなく、たとえは、第５図Ｖ承すＪ
二うに楕円形状とし、弾１′１体１の周一１に前記実施
例の場合と同様ｌざブＪ法て形成した圧電素子（不図示
）により進行＋１振動ｄシを発生させ、この周ト、ない
しは周上の一区間Ｒを移動ｉｉ）能な移動子３を設ける
様にしてもよい。In addition, ((In the example, as shown in FIG. 1, bullets ('[
Kyuu disclosed a rotor that rotates using a ring-shaped rotor, but the shape of the moving body is
For example, but not limited to, Figure 5
A piezoelectric element (not shown) formed on the circumference 1 of the bullet 1'1 by the l-shaped J method as in the case of the previous embodiment generates a traveling +1 vibration d. , or may be provided with a mover 3 capable of moving in one section R on the circumference.
また、第６図に示ずｊ：うに、弾性体１を平板状とし、
平板状弾性体１の表面に前記第１実施例の場合と同様な
方法で形成した圧電素子５により進行（’Ｉ振動波を発
生させ、この圧電素子５に対向する（ｉ７置に移動７−
３を設けたりニアモータとしても良い。In addition, as shown in FIG. 6, the elastic body 1 is in the form of a flat plate,
A traveling ('I) vibration wave is generated by a piezoelectric element 5 formed on the surface of the flat elastic body 1 in the same manner as in the first embodiment, and is opposed to this piezoelectric element 5 (moved to position i7).
3 may be provided or a near motor may be used.
更に第７図に示すＪ：うに弾１１体１を棒状とし、棒状
・押（’１体１の表面上に進行性振動波を発生させ、移
動子３を駆動するりニアモータ状のものでもよい。Furthermore, the J: sea urchin bullet 11 body 1 shown in FIG. .
いずわの形態乃至これから類推しつる形態の超音波モー
タにおいても、圧電オΔ旧又（Ｊ電歪４（旧を薄膜化技
術により直接弾１１体上に形成することにより前記第１
実施例同扛、低電圧駆動可能な超音７皮千−夕か得られ
る。Even in the ultrasonic motor of the current form or the form that can be inferred from this, the first
By using the same method as in the embodiment, an ultrasonic seven-skin which can be driven at low voltage is obtained.
（発明の効果）
ＩＪ＋本発明に係る超音波モータは、薄膜化技術に」；
り圧電素子を振動体としての弾性体上に直接形成したこ
とにより、以下の効果か生しるものてある。(Effect of the invention) IJ+The ultrasonic motor according to the present invention is applicable to thin film technology.
By forming the piezoelectric element directly on the elastic body serving as the vibrating body, the following effects are produced.
（１１電気−機械変１秦素子を仰（’Ｉ体上手接着する
Ｔ程かなくなったのて、電気−機械変換素子の破損事故
はなくなり、また作業＋＋１も層しく向上し、モータを
安価に提供できるという効果も生し・るものである。(11 Electrical-mechanical change 1 Look up the Qin element ('I) Since the T-bond on the upper part of the body has disappeared, there have been no accidents of damage to the electro-mechanical converting element, and work ++1 has also been further improved, making motors cheaper. It also has the effect of being able to provide services.
（２）電気−機械変換素子か薄膜化することにより極め
て低い′市１１にＪ：り干−タを回転できる為にモータ
の駆動回路等の電気回路か小型、軽量化し１、千−タ装
置全体か小望化し、超音波モータの用途のより一層の拡
大か回持てきる。(2) By making the electro-mechanical conversion element thinner, the electric circuit such as the motor drive circuit can be made smaller and lighter in order to be able to rotate the dryer. The overall size can be made smaller and the applications of the ultrasonic motor can be further expanded.
（ａ） （’Ｉ成途ｌ−の分棒処岬か低電圧て、し、か
も絶縁イ（（１を用いることなく大気中て行ｔ４″１こ
とかてき、作業・＋’ｔか向Ｉする等産業上々ｆましい
効果か！Ｉ−Ｌ、るものである。(a) ('I will be able to perform the work in the atmosphere without using t4''1, and the work and +'t direction will be I-L is a very good effect on the industry.
第１図は（、発明の超音波千−夕の一実施例の断面図、
第２図は第１図示モータの圧電素子の電極配置図、
第３図は圧電素子の構成図、
第４図は圧電材料の膜厚と駆動電圧の関係図、第５図乃
至第７図は本発明の他の実施例にかかる超音波モータ要
部構成図である。
図において、１−振動体、３−移動体、５−圧電素子、
５Ａ−下部電極、５Ｂ−圧電材料、５Ｃ−土部電極を示
す。Fig. 1 is a sectional view of an embodiment of the ultrasonic wave according to the invention; Fig. 2 is a diagram of the electrode arrangement of the piezoelectric element of the motor shown in Fig. 1; Fig. 3 is a configuration diagram of the piezoelectric element; 5 is a diagram showing the relationship between the film thickness of the piezoelectric material and the drive voltage, and FIGS. 5 to 7 are configuration diagrams of main parts of an ultrasonic motor according to other embodiments of the present invention. In the figures, 1 - a vibrating body, 3 - moving body, 5-piezoelectric element;
5A-lower electrode, 5B-piezoelectric material, 5C-soil electrode.
Claims (3)
変換手段と、 所定の位相差をもって配置された前記手段が蒸着、スパ
ッタリング法等の薄膜化技術により直接固着され、前記
手段に基因する振動に応答して進行性振動波を発生する
振動体と、該振動波に応答して摩擦駆動される移動体と
を具備することを特徴とする超音波モータ。(1) Electromechanical conversion means to which a frequency voltage with a phase difference is applied, and the means arranged with a predetermined phase difference are directly fixed by thin film technology such as vapor deposition or sputtering, and the 1. An ultrasonic motor comprising: a vibrating body that generates progressive vibration waves in response to vibrations; and a moving body that is frictionally driven in response to the vibration waves.
れたことを特徴とする特許請求の範囲第（１）項記載の
超音波モータ。(2) The ultrasonic motor according to claim (1), wherein the means is directly fixed to the vibrating body by a vapor deposition method.
直接固着されたことを特徴とする特許請求の範囲第（１
）項記載の超音波モータ。(3) The means is directly fixed to the vibrating body by a sputtering method.
Ultrasonic motor described in ).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61168281A JPS6328279A (en) | 1986-07-17 | 1986-07-17 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61168281A JPS6328279A (en) | 1986-07-17 | 1986-07-17 | Ultrasonic motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6328279A true JPS6328279A (en) | 1988-02-05 |
Family
ID=15865106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61168281A Pending JPS6328279A (en) | 1986-07-17 | 1986-07-17 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328279A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5293094A (en) * | 1989-09-08 | 1994-03-08 | Massachusetts Institute Of Technology | Miniature actuator |
| US5336958A (en) * | 1990-12-19 | 1994-08-09 | Nikon Corporation | Ultrasonic motor unit |
-
1986
- 1986-07-17 JP JP61168281A patent/JPS6328279A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5293094A (en) * | 1989-09-08 | 1994-03-08 | Massachusetts Institute Of Technology | Miniature actuator |
| US5336958A (en) * | 1990-12-19 | 1994-08-09 | Nikon Corporation | Ultrasonic motor unit |
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