JPS63281408A - Slider for thin film magnetic head and manufacture thereof - Google Patents
Slider for thin film magnetic head and manufacture thereofInfo
- Publication number
- JPS63281408A JPS63281408A JP62114670A JP11467087A JPS63281408A JP S63281408 A JPS63281408 A JP S63281408A JP 62114670 A JP62114670 A JP 62114670A JP 11467087 A JP11467087 A JP 11467087A JP S63281408 A JPS63281408 A JP S63281408A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- slider
- volume
- whisker
- magnetic disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000000919 ceramic Substances 0.000 claims abstract description 51
- 239000000463 material Substances 0.000 claims abstract description 23
- 239000000843 powder Substances 0.000 claims abstract description 7
- 239000002245 particle Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 4
- 238000007731 hot pressing Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 239000011812 mixed powder Substances 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 238000005339 levitation Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910007948 ZrB2 Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Hard Magnetic Materials (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、磁気ディスク装置の薄膜磁気ヘッド用スライ
ダに関する。。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a slider for a thin film magnetic head of a magnetic disk device. .
近年、磁気ディスク装置の分野においては、増大する高
記録密度化の要請に応えるため、薄膜磁気ヘッドが急速
に普及しつつある。薄膜磁気ヘッドは、セラミックス製
スライダの後端面に磁気信号の記録・再生を行う薄膜素
子が形成された構造を有しており、スライダが磁気ディ
スクの高速回転（２０〜４０ ｍ ／ ｓ ）によって
発生する空気層流に乗って磁気ディスク面上にわずかに
浮上（０，２〜０．４μｍ）することを利用し、磁気デ
ィスクに対して記録の書込み、読み取りを行う機能を有
する。したがって、スライダは磁気ディスク回転の起動
、停止時には、十分な空気層流が得られないため、必ず
磁気ディスクと摺動し、いわゆるコンタクト・スタート
・ストッパ（ＣＳＳ）動作を行う。さらにスライダは、
定常浮上中であっても、振動や塵埃の介入などの外的要
因によって、浮上高さや浮上姿勢が乱れることが避けら
れない。In recent years, in the field of magnetic disk drives, thin-film magnetic heads are rapidly becoming popular in order to meet the increasing demand for higher recording densities. A thin-film magnetic head has a structure in which a thin-film element for recording and reproducing magnetic signals is formed on the rear end surface of a ceramic slider. It has the function of writing and reading information on a magnetic disk by using the slight floating (0.2 to 0.4 μm) above the surface of the magnetic disk on the laminar flow of air. Therefore, since a sufficient laminar air flow cannot be obtained when the magnetic disk rotation is started or stopped, the slider always slides against the magnetic disk and performs a so-called contact start/stop (CSS) operation. Furthermore, the slider
Even during steady levitation, it is inevitable that the levitation height and levitation posture will be disturbed due to external factors such as vibration and dust interference.
記録密度を大きくするために浮上高さは一層小さくなり
つつあるため、このような乱れによりスライダが高速回
転中の磁気ディスクと衝突する回数がますます増大して
きている。Since the flying height is becoming smaller in order to increase the recording density, the number of times the slider collides with the magnetic disk rotating at high speed due to such disturbances is increasing.
従来のスライダ材料としては、薄膜素子の形成性（密着
性）が良好な点からＡ ｎ ２０８系セラミツクが広く
知られており、改良提案も多い。例えば、特開昭６１−
１５８８６２．６０−２３１３０８．６０−１８３７０
９ 、および６０−１７９９２３号公報などに示された
ものがある。As a conventional slider material, A n 208 ceramic is widely known because of its good formability (adhesion) of thin film elements, and there are many proposals for improvement. For example, JP-A-61-
158862.60-231308.60-18370
9, and 60-179923.
これらはいずれも、Ａ ２２０８粒子を主とし、ＴｉＣ
粒子とその他の添加粒子から成っており、機械加工性が
よいという特徴をもっている。All of these are mainly composed of A 2208 particles and TiC
It consists of particles and other additive particles, and is characterized by good machinability.
しかしながらこれらのＡＱ２０ｓ系材料は、前述の如き
高速回転中の磁気ディスクとの衝突を反復すると、スラ
イダの衝突面に極微小な亀裂が無数に発生し、これらが
伸長し、ついにはスライダの表面が部分的に剥離するに
至るという問題があることがわかった。このことは、従
来の他のセラミック製スライダでも同様である。剥離が
生じたスライダは磁気ディスクを著しく傷つけてしまう
のである。However, when these AQ20s materials repeatedly collide with the magnetic disk rotating at high speed as described above, countless microscopic cracks occur on the collision surface of the slider, and these cracks extend, eventually causing the surface of the slider to crack. It was found that there was a problem in that it resulted in partial peeling. This also applies to other conventional ceramic sliders. A peeled slider can seriously damage the magnetic disk.
本発明の目的は、このような問題を改善したセラミック
製スライダ、特にＡＱｚＯａ系スライダを提供すること
にある。An object of the present invention is to provide a ceramic slider, particularly an AQzOa-based slider, which has improved the above-mentioned problems.
本発明の前記目的は以下の構成によって達成することが
できる。The above object of the present invention can be achieved by the following configuration.
１、母材セラミックス９５〜７０容量％、直径５μｍ以
下、アスペクト比５〜１００のセラミックスウィスカ５
〜３０容量％とから成ることを特徴とする薄膜磁気ヘッ
ド用スライダ。1. Ceramic whisker 5 with a base material ceramic of 95 to 70% by volume, a diameter of 5 μm or less, and an aspect ratio of 5 to 100.
30% by volume.
２、母材セラミックス９５〜７０容量％、直径５μｍ以
下、アスペクト比５〜１００で熱膨張率が上記母材セラ
ミックス熱膨張率以下であるセラミックスウィスカ５〜
３０容量％とから成ることを特徴とする薄膜磁気ヘッド
用スライダ。2. Ceramic whiskers 5 to 95 to 70% by volume of the base ceramic, a diameter of 5 μm or less, an aspect ratio of 5 to 100, and a coefficient of thermal expansion that is equal to or less than the coefficient of thermal expansion of the base ceramic.
30% by volume.
３、粒径５μｍ以下の母材セラミックス粉末９５〜７０
容量％に直径５μｍ以下、アスペクト比５〜１００で熱
膨張率が上記母材セラミックス熱膨張率以下で量るセラ
ミックスウィスカ５〜３０容量％を混合し、真空度１Ｏ
−８）−ル以下の減圧下の雰囲気中でホッドプレスし、
スライダ形状にすることを特徴とする薄膜磁気ヘッド用
スライダ製法。3. Base material ceramic powder with a particle size of 5 μm or less 95-70
Mix 5 to 30 volume % of ceramic whiskers with a diameter of 5 μm or less, an aspect ratio of 5 to 100, and a thermal expansion coefficient equal to or lower than that of the base material ceramic, and vacuum at 1 O.
-8) Hod press in an atmosphere under reduced pressure below -100 ml,
A method for manufacturing a slider for a thin film magnetic head, which is characterized by forming a slider shape.
４、また、前記母材セラミックスがＡｌ２Ｏ３４０容量
％以上含むセラミックスであり、前記セラミックスウィ
スカがＣ，５ｉｓＮａ、ＳｉＣ。4. Also, the base material ceramic is a ceramic containing 40% by volume or more of Al2O3, and the ceramic whisker is C, 5isNa, or SiC.
Ａｆ１２０ａの１種以上であることを特徴とする。It is characterized by being one or more types of Af120a.
前記セラミックスウィスカとしては、アスペクト比（長
さ／直径の比）が５以上であることが必要である。The ceramic whisker needs to have an aspect ratio (length/diameter ratio) of 5 or more.
また、アスペクト比が大きすぎると母材に均一分散が困
難となり、焼結しにくくなるので１００以下が良い。Furthermore, if the aspect ratio is too large, it will be difficult to uniformly disperse it in the base material, making it difficult to sinter, so it is preferably 100 or less.
上記セラミックス母材へのセラミックスウィスカの添加
量は５〜３０容量％がよい。５容量％より少ないと焼結
体の亀裂防止効果が充分発揮されないし、また、３０容
量％を超えると焼結体の気孔が多くなるので好ましくな
い。The amount of ceramic whiskers added to the ceramic base material is preferably 5 to 30% by volume. If it is less than 5% by volume, the effect of preventing cracks in the sintered body will not be sufficiently exhibited, and if it exceeds 30% by volume, the sintered body will have many pores, which is not preferable.
磁気ディスクの摩耗をより小さくするためには。To reduce wear on magnetic disks.
上記ウィスカの熱膨張率が母材セラミックスの熱膨張率
以下のものがよい。スライダは、高速（周速２０〜４０
ｍ ／ ｓ ）で回転する磁気ディスクとの摺動によ
り、その温度が局部的に数百度になる。It is preferable that the coefficient of thermal expansion of the whisker is equal to or lower than that of the ceramic base material. The slider has high speed (peripheral speed 20-40
The temperature locally increases to several hundred degrees due to the sliding movement with the magnetic disk, which rotates at a speed of m/s.
その結果該焼結体スライダの摺動面に露出したウィスカ
が、熱膨張によって母材セラミックスから突出すると、
磁気ディスクの記録面を著しく損傷する。母材セラミッ
クスの熱膨張率以下のウィスカであればこうしたことは
ない。As a result, when the whiskers exposed on the sliding surface of the sintered slider protrude from the base ceramic due to thermal expansion,
This will seriously damage the recording surface of the magnetic disk. This will not happen if the whisker has a thermal expansion coefficient lower than that of the base ceramic.
例えば、母材がＡ ｆｌ ｘ○３であればＣ，Ａｆ１２
０３゜Ｓ、ｉＣ，５ｊａＮ４のウィスカの組合がよい。For example, if the base material is A fl x○3, C, Af12
A good combination of whiskers is 03°S, iC, and 5jaN4.
前記母材セラミックスとしてはＡ Ｑ ２０ ａ、 Ｍ
ｇＯ＋ＺｒＢ２．ＴｉＯ２，Ｌ ａ Ｂｅ、 Ｖ Ｂ２
． Ｓ ｉ ３Ｎａ。The base material ceramics include A Q 20 a, M
gO+ZrB2. TiO2, L a Be, V B2
．． S i 3Na.
ＡＱＮ、ＴｉＮ、ＳｉＣ，ＴｉＣ，ＺｒＣ等の酸１化物
、はう化物、窒化物、炭化物を用い乞ことができる。Oxide monorides, ferrides, nitrides, and carbides such as AQN, TiN, SiC, TiC, and ZrC can be used.
薄膜素子の形成性（密着性）の点から母材には、ＡＱ２
０ａが４０容量％以上含まれていることが望ましい。From the viewpoint of formability (adhesion) of thin film elements, AQ2 is used as the base material.
It is desirable that 40% by volume or more of 0a is contained.
更にまた、焼結後の機械加工時の被切削性を向上させる
ためには、ＳｉＣ，ＴｉＣ，ＺｒＣを混合して用いるの
がよい。Furthermore, in order to improve machinability during machining after sintering, it is preferable to use a mixture of SiC, TiC, and ZrC.
セラミックスウィスカは、長い円柱状で、これが母材セ
ラミックス中に焼結固定されたとき、ウィスカの長さ方
向に対して直交する方向の亀裂の伸長を食い止める効果
がある。従ってウィスカが焼結体中に均一分散されたも
のは、あらゆる方向の亀裂の伸長をくい止めるものと考
える。Ceramic whiskers have a long cylindrical shape, and when they are sintered and fixed into a ceramic base material, they have the effect of stopping the growth of cracks in a direction perpendicular to the longitudinal direction of the whiskers. Therefore, it is believed that uniformly dispersed whiskers in a sintered body will prevent cracks from growing in all directions.
以下に本発明を実施例によりさらに具体的に説明するが
、本発明はこれら実施例に限定されない。EXAMPLES The present invention will be explained in more detail below using Examples, but the present invention is not limited to these Examples.
実施例１
１粒径が０．５μｍ のＡ Ｑ ｘ○８粉と１７ｚｍの
ＴｉＣ粉を用い、ＴｉＣが３０容量％となる割合でボー
ルミルにより均一に混合した。これに対して、直径が０
．５〜５μｍと異なり、長さが十分に長いＡＱ２０ｓ、
ＳｉＣ，５ｉｓＮａ、Ｃの各ウィスカを、第１表に記載
の体積比で各々添加し、ボールミルでさらに混合した。Example 1 A Q x 8 powder with a particle diameter of 0.5 μm and TiC powder with a particle size of 17 zm were uniformly mixed in a ball mill at a ratio of TiC of 30% by volume. On the other hand, the diameter is 0
．． AQ20s, which is different from 5 to 5 μm and has a sufficiently long length;
SiC, 5isNa, and C whiskers were added at the volume ratios listed in Table 1, and further mixed using a ball mill.
ウィスカの長さはボールミルによる粉砕効果で短くなっ
た。得られた混合粉末におけるウィスカのアスペクト比
（長さ／直径の比）は第１表に示した。The whisker length was shortened due to the milling effect of the ball mill. The aspect ratio (length/diameter ratio) of whiskers in the obtained mixed powder is shown in Table 1.
各混合粉末は金型で圧粉成形した後、真空ふん囲気中で
１６５０°Ｃ，３０分ホッドプレスした。Each mixed powder was compacted in a mold and then hot pressed at 1650°C for 30 minutes in a vacuum atmosphere.
ホッドプレス圧力は３００ ｋｇｆ ／ ０ｍ２とした
。The hot press pressure was 300 kgf/0m2.
得られた各焼結体をスライダ形状に加工した後次の方法
により、磁気ディスクとの耐衝突性を調べた。After each of the obtained sintered bodies was processed into a slider shape, its resistance to collision with a magnetic disk was examined by the following method.
まず、スライダをジンバルバネに接着した後、スライダ
摺動面を磁気ディスクの表面にのせ、バネの位置を固定
した。次いで、磁気ディスクを周速４０ ｍ ／ ｓで
回転させ、スライダをｏ、３μｍ浮上させた。この状態
で、ジンバルバネに５０Ｈｚの周期で微小振動を与え、
スライダを磁気ディスクに連続的に衝突させた。衝突の
大きさは、スライダの振動の最大加速度が４０００ｍ／
ｓ２となるように調節した。振動を３０分間与え続けた
後、試験を停止した。試験後の磁気ディスクの摩耗の深
さを表面粗さ計で測定し、また、スライダの衝突面を顕
微鏡で観察した。First, after bonding the slider to the gimbal spring, the slider sliding surface was placed on the surface of the magnetic disk, and the position of the spring was fixed. Next, the magnetic disk was rotated at a circumferential speed of 40 m/s, and the slider was levitated by 3 μm. In this state, give the gimbal spring a minute vibration at a frequency of 50Hz,
The slider was made to continuously collide with the magnetic disk. The magnitude of the collision is that the maximum acceleration of the slider vibration is 4000m/
It was adjusted to be s2. After continuing to apply vibrations for 30 minutes, the test was stopped. The depth of wear on the magnetic disk after the test was measured using a surface roughness meter, and the collision surface of the slider was observed using a microscope.
測定結果を第１表に示す。磁気ディスクの摩耗の深さは
、Ａ Ｑ ２０ｓ、 Ｓ ｉ Ｃ，Ｓ １ｓＮ４． Ｃ
のウィスカを混合した場合は小さかった。また、これら
のスライダ衝突面には亀裂がほとんど見られなかった。The measurement results are shown in Table 1. The depth of wear of the magnetic disk is A Q 20s, S i C, S 1sN4. C
The whiskers were smaller when mixed. Moreover, almost no cracks were observed on the collision surfaces of these sliders.
一方、ウィスカを含まない場合には、スライダ衝突面に
亀裂が多く見られ、部分的に剥離も見られた。また、磁
気ディスクの摩耗が大きかった。On the other hand, when whiskers were not included, many cracks were observed on the slider collision surface, and some peeling was also observed. In addition, the magnetic disk suffered a lot of wear.
第１表
これらの結果は、ＴｉＣ粒子を含まない場合、及び、Ｔ
１０粒子の代りにＳｉＣ粒子を混合した場合でも、同様
であった。Table 1 These results are for the case without TiC particles and for T
The same result was obtained when SiC particles were mixed instead of 10 particles.
本実施例によれば、直径０．５〜５ μｍ、アスペクト
比５〜１００のウィスカの混合により、Ａ Ｑ ２０３
系スライダの衝突による磁気ディスクの摩耗を小さくす
る効果があることがわかる。According to this example, by mixing whiskers with a diameter of 0.5 to 5 μm and an aspect ratio of 5 to 100, A Q 203
It can be seen that this has the effect of reducing wear on the magnetic disk due to collisions of the system sliders.
実施例２
実施例１と同様に、Ａｆ１２０３．ＴｉＣ粉末を用いて
、ＴｉＣが３０容量％の割合で混合した後、直径が１μ
ｍで長さが３００μｍ以上のＳｉＣウィスカを２．５，
１０，１５，２０，２５，３０゜３５．４０および４５
容量％と割合を変えて添加した。各混合物は、さらに時
間を変えてボールミル混合することにより、ウィスカの
長さが各々１５０〜２００．．５０〜１００．１５〜３
０，５〜１０，１〜３μｍと異なる範囲内に入るように
調節した。これらのウィスカ混合粉末を、実施例１と同
様の方法で焼結した。Example 2 Similar to Example 1, Af1203. Using TiC powder, after mixing TiC at a ratio of 30% by volume, the diameter is 1 μm.
SiC whiskers with a length of 300 μm or more in 2.5 m,
10, 15, 20, 25, 30°35.40 and 45
They were added in varying volume % and proportions. Each mixture was further mixed in a ball mill for different times to obtain a whisker length of 150 to 200. ．． 50-100.15-3
It was adjusted to fall within different ranges of 0.5 to 10 and 1 to 3 μm. These whisker mixed powders were sintered in the same manner as in Example 1.
得られた焼結体の磁気ディスクとの耐衝突性を実施例１
と同様の方法で調べた。測定結果は第１図に示す。The collision resistance of the obtained sintered body with a magnetic disk was evaluated in Example 1.
was investigated using the same method. The measurement results are shown in Figure 1.
アスペクト比が１〜３と小さいか、１５０〜２００と大
きい場合には、磁気ディスクの摩耗が大きく、また、ア
スペクト比１〜３μｍの場合にはスライダ衝突面に亀裂
が多数見られた。これに対し、アスペクト比が５〜１０
０で、混合量が５〜３０容量％において、スライダ衝突
面の亀裂がほとんど見られず、磁気ディスクの摩耗が、
他の１／３に減少した。When the aspect ratio was as small as 1 to 3 or as large as 150 to 200, the wear of the magnetic disk was large, and when the aspect ratio was 1 to 3 μm, many cracks were observed on the slider collision surface. On the other hand, the aspect ratio is 5 to 10.
0 and the mixture amount is 5 to 30% by volume, there are almost no cracks on the slider collision surface, and the wear of the magnetic disk is low.
It decreased to 1/3 of the other one.
これらの結果は、ＴｉＣ粒子を含まない場合、及びＴｉ
Ｃ粒子に代えてＳｉＣ粒子を混合した場合でも同様であ
った。また、ＳｉＣウィスカに代えて、ＡＱｚＱａ、５
ｉ３Ｎｔ、Ｃのウィスカを用いた場合も同様であった。These results are valid for the case without TiC particles and for the case where TiC particles are not included.
The same result was obtained when SiC particles were mixed instead of C particles. Also, instead of SiC whiskers, AQzQa, 5
The same result was obtained when i3Nt,C whiskers were used.
さらに、ウィスカの直径を０．５ ．５μｍと変えても
同様であった。Furthermore, the diameter of the whisker was set to 0.5. The same result was obtained even when the thickness was changed to 5 μm.
本実施例によれば、アスペクト比５〜１００のウィスカ
を５〜３０容量％混合することによりＡ Ｑ ２０３系
スライダの衝突による磁気ディスクの摩耗を小さくする
効果があることがわかる。According to this example, it can be seen that by mixing 5 to 30% by volume of whiskers with an aspect ratio of 5 to 100, it is effective to reduce wear on the magnetic disk due to collisions of the AQ 203 series slider.
実施例３
実施例１と同様にＡ Ｑ ２０３．ＴｉＣ粉末を用いて
ＴｉＣ３０容量％の比で混合した。この混合粉に対して
直径１μｍ、長さ１００μｍ以上のＣ１ＳｉＣ，５ｉａ
Ｎａ、ＡＱｚＱａ、ＴｉＮ、Ｌａｗ○３のウィスカを各
々２０容量％添加し、ボールミルによりさらに混合した
。ボールミル混合の時間を変えることにより得られた各
混合物におけるウィスカの長さが、いずれも２０〜４０
μｍとなるように調節した。これらのウィスカ混合粉末
を実施例１に記載と同様の方法で焼結した。Example 3 Same as Example 1 A Q 203. TiC powder was used and mixed at a TiC ratio of 30% by volume. For this mixed powder, C1SiC, 5ia with a diameter of 1 μm and a length of 100 μm or more
Whiskers of Na, AQzQa, TiN, and Law○3 were added in an amount of 20% by volume, and further mixed using a ball mill. The whisker length in each mixture obtained by changing the ball mill mixing time was 20 to 40.
It was adjusted so that it was μm. These whisker mixed powders were sintered in the same manner as described in Example 1.
得られた焼結体は実際のスライダ形状に加工した後、実
施例１，２と同様に磁気ディスク装置に組み込んだ後、
磁気ディスクの回転の起動・停止をくり返し、コンタク
ト・スタート・ストップ（Ｃ８Ｓ）動作を反復させた。The obtained sintered body was processed into an actual slider shape, and then incorporated into a magnetic disk device in the same manner as in Examples 1 and 2.
The rotation of the magnetic disk was repeatedly started and stopped, and the contact start/stop (C8S) operation was repeated.
ＣＳ Ｓ １０，０００回後の磁気ディスクの摩耗深さ
を調べた。結果を第２表に示す。熱膨張係数がＡ Ｑ
ｘ○３以下のＣ９Ｓ ｉ ａＮ４． Ｓ ｉ Ｃ、Ａ
Ｑ ２０ｓウイスカ添加では磁気ディスクの摩耗は小さ
かった。これに対し、熱膨張係数がＡＱ２０ｓより大き
いＴ ｉ Ｎ、 Ｔ−ａｘｏｓのウィスカ添加では、磁
気ディスクの摩耗は７〜１１倍大きかった。この結果は
、ＴｉＣ粒子を含まない場合、及びＴｉＣ粒子に代えて
ＳｉＣ粒子を混合した場合でも同様であった。The wear depth of the magnetic disk after 10,000 CS S cycles was investigated. The results are shown in Table 2. The coefficient of thermal expansion is AQ
x○3 or less C9S i aN4. S i C, A
Q: With the addition of 20s whiskers, the wear of the magnetic disk was small. On the other hand, when whiskers were added to TiN and T-axos, which have a coefficient of thermal expansion larger than that of AQ20s, the wear of the magnetic disk was 7 to 11 times greater. This result was the same even when TiC particles were not included and when SiC particles were mixed instead of TiC particles.
本実施例によれば、熱膨張係数がＡｆｆ２０ｇよりも小
さいウィスカを混合することにより、ＡＱ２０ｓ系スラ
イダの摺動による磁気ディスクの摩耗を小さくする効果
があることがわかる。According to this example, it can be seen that mixing whiskers with a coefficient of thermal expansion smaller than Aff20g has the effect of reducing wear on the magnetic disk due to sliding of the AQ20s slider.
第２表
磁気ディスクの記録密度を増々大きくするためには、磁
気ヘッドの浮上量を一層小さくする必要がある。この浮
上量はスライダの形状寸法によって決定される。したが
って、スライダの加工精度は増々厳しくなる。新しいス
ライダ形状としては、例えば第２図に示すものが考えら
れる。このスライダは浮上量を小さくするために、浮上
面の巾が狭くなっており、なおかつ、後部端面には薄膜
素子を形成するためのスペースが確保されている。Table 2 In order to increase the recording density of magnetic disks, it is necessary to further reduce the flying height of the magnetic head. This flying height is determined by the shape and dimensions of the slider. Therefore, the machining accuracy of the slider becomes increasingly strict. As a new slider shape, for example, the one shown in FIG. 2 can be considered. In order to reduce the flying height of this slider, the width of the flying surface is narrowed, and a space for forming a thin film element is secured on the rear end surface.
本発明によるスライダ材は、ウィスカの混合により、靭
性が向上されているので、このようなスライダの高精度
の加工作製に適している。Since the slider material according to the present invention has improved toughness due to the whisker mixture, it is suitable for highly accurate machining and manufacturing of such sliders.
本発明によれば、高速での衝突、摺動による磁気ディス
クの摩耗を小さくするセラミックススライダ、特にＡｆ
ｌｚＯａ系スライダが得られるので、スライダの浮上高
さを小さくして、かつ、磁気ディスクの寿命を長くする
効果がある。According to the present invention, a ceramic slider that reduces wear on a magnetic disk due to high-speed collisions and sliding, especially Af
Since an lzOa-based slider can be obtained, the flying height of the slider can be reduced and the life of the magnetic disk can be extended.
第１図は本発明の一実施例を示すものであり、Ａｆｌｘ
ｏａ−３０ｖｏＱ％ＴｉＣセラミックへのアスペクト比
が異なるＳｉＣウィスカの混合量と、このセラミックス
スライダによる磁気ディスクの衝突摩耗の深さの関係を
示す曲線図、第２図は本発明によるスライダのディスク
との摺動面側がらみた斜視図である。
荊１図
ウィスカジ昆合童（容量別
來２図
１ λ １FIG. 1 shows an embodiment of the present invention, in which Aflx
A curve diagram showing the relationship between the amount of SiC whiskers with different aspect ratios mixed into the oa-30voQ%TiC ceramic and the depth of collision wear of the magnetic disk caused by this ceramic slider. It is a perspective view seen from the sliding surface side.荊 1 fig.
Claims (1)
下、アスペクト比５〜１００のセラミックスウイスカ５
〜３０容量％とから成ることを特徴とする薄膜磁気ヘッ
ド用スライダ。 ２、前記母材セラミックスがＡｌ＿２Ｏ＿３４０容量％
以上含むセラミックスであり、前記セラミックスウイス
カがＣ、Ｓｉ＿３Ｎ＿４、ＳｉＣ、Ａｌ＿２Ｏ＿３の１
種以上であることを特徴とする特許請求の範囲第１項記
載の薄膜磁気ヘッド用スライダ。 ３、母材セラミックス９５〜７０容量％、直径５μｍ以
下、アスペクト比５〜１００で熱膨張率が上記母材セラ
ミックス熱膨張率以下であるセラミックスウイスカ５〜
３０容量％とから成ることを特徴とする薄膜磁気ヘッド
用スライダ。 ４、前記母材セラミックスがＡｌ＿２Ｏ＿３４０容量％
以上含むセラミックスであり、前記セラミックスウイス
カがＣ、Ｓｉ＿３Ｎ＿４、ＳｉＣ、Ａｌ＿２Ｏ＿３の１
種以上であることを特徴とする特許請求の範囲第３項記
載の薄膜磁気ヘッド用スライダ。 ５、粒径５μｍ以下の母材セラミックス粉末９５〜７０
容量％に直径５μｍ以下、アスペクト比５〜１００で熱
膨張率が上記母材セラミックス熱膨張率以下であるセラ
ミックスウイスカ５〜３０容量％を混合し、真空度１０
＾−＾３トル以下の減圧下の雰囲気中でホッドプレスし
、スライダ形状にすることを特徴とする薄膜磁気ヘッド
用スライダの製法。 ６、前記母材セラミックスがＡｌ＿２Ｏ＿３４０容量％
以上含むセラミックスであり、前記セラミックスウイス
カがＣ、Ｓｉ＿３Ｎ＿４、ＳｉＣ、Ａｌ＿２Ｏ＿３の１
種以上であることを特徴とする特許請求の範囲第５項記
載の薄膜磁気ヘッド用スライダ。[Claims] 1. Ceramic whisker 5 having a base material ceramic of 95 to 70% by volume, a diameter of 5 μm or less, and an aspect ratio of 5 to 100.
30% by volume. 2. The base material ceramic is Al_2O_340% by volume
A ceramic containing the above, wherein the ceramic whisker is 1 of C, Si_3N_4, SiC, Al_2O_3.
2. The slider for a thin film magnetic head according to claim 1, wherein the slider is of at least one type. 3. Ceramic whisker 5 to 95 to 70% by volume of base ceramic, diameter of 5 μm or less, aspect ratio of 5 to 100, and a coefficient of thermal expansion equal to or lower than that of the base ceramic
30% by volume. 4. The base material ceramic is Al_2O_340% by volume
A ceramic containing the above, wherein the ceramic whisker is 1 of C, Si_3N_4, SiC, Al_2O_3.
4. The slider for a thin film magnetic head according to claim 3, wherein the slider is of a type or more. 5. Base material ceramic powder with a particle size of 5 μm or less 95-70
5 to 30 volume % of ceramic whiskers having a diameter of 5 μm or less, an aspect ratio of 5 to 100, and a thermal expansion coefficient lower than that of the above-mentioned base material ceramic are mixed with the volume %, and a vacuum degree of 10 is mixed.
^-^ A method for manufacturing a slider for a thin film magnetic head, characterized by hot pressing in an atmosphere under reduced pressure of 3 torr or less to form a slider. 6. The base material ceramic is Al_2O_340% by volume
A ceramic containing the above, wherein the ceramic whisker is 1 of C, Si_3N_4, SiC, Al_2O_3.
6. The slider for a thin-film magnetic head according to claim 5, wherein the slider is of at least one type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62114670A JPS63281408A (en) | 1987-05-13 | 1987-05-13 | Slider for thin film magnetic head and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62114670A JPS63281408A (en) | 1987-05-13 | 1987-05-13 | Slider for thin film magnetic head and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63281408A true JPS63281408A (en) | 1988-11-17 |
Family
ID=14643661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62114670A Pending JPS63281408A (en) | 1987-05-13 | 1987-05-13 | Slider for thin film magnetic head and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63281408A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139918A (en) * | 1984-07-31 | 1986-02-26 | Hitachi Ltd | Slider for thin magnetic head |
| JPS61236654A (en) * | 1985-04-10 | 1986-10-21 | 株式会社日立製作所 | High toughness silicon nitride sintered body and manufacture |
| JPS6212671A (en) * | 1985-07-10 | 1987-01-21 | 株式会社日立製作所 | Fiber reinforced ceramics |
-
1987
- 1987-05-13 JP JP62114670A patent/JPS63281408A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139918A (en) * | 1984-07-31 | 1986-02-26 | Hitachi Ltd | Slider for thin magnetic head |
| JPS61236654A (en) * | 1985-04-10 | 1986-10-21 | 株式会社日立製作所 | High toughness silicon nitride sintered body and manufacture |
| JPS6212671A (en) * | 1985-07-10 | 1987-01-21 | 株式会社日立製作所 | Fiber reinforced ceramics |
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