JPS63281220A - Magnetic disk - Google Patents
Magnetic diskInfo
- Publication number
- JPS63281220A JPS63281220A JP11540487A JP11540487A JPS63281220A JP S63281220 A JPS63281220 A JP S63281220A JP 11540487 A JP11540487 A JP 11540487A JP 11540487 A JP11540487 A JP 11540487A JP S63281220 A JPS63281220 A JP S63281220A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin
- head
- magnetic
- magnetic disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims abstract description 36
- 239000010409 thin film Substances 0.000 claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 15
- 229940114930 potassium stearate Drugs 0.000 claims abstract description 9
- ANBFRLKBEIFNQU-UHFFFAOYSA-M potassium;octadecanoate Chemical compound [K+].CCCCCCCCCCCCCCCCCC([O-])=O ANBFRLKBEIFNQU-UHFFFAOYSA-M 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 6
- 239000011248 coating agent Substances 0.000 claims abstract description 5
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 5
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 5
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 3
- 239000000126 substance Substances 0.000 claims 1
- 239000000314 lubricant Substances 0.000 abstract description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052799 carbon Inorganic materials 0.000 abstract description 6
- 230000001681 protective effect Effects 0.000 abstract description 6
- 239000007787 solid Substances 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 229910052804 chromium Inorganic materials 0.000 abstract description 2
- 230000001050 lubricating effect Effects 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract description 2
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- 239000002131 composite material Substances 0.000 description 7
- 238000007598 dipping method Methods 0.000 description 5
- 235000014113 dietary fatty acids Nutrition 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229930195729 fatty acid Natural products 0.000 description 4
- 239000000194 fatty acid Substances 0.000 description 4
- 150000004665 fatty acids Chemical class 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical compound FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000013441 quality evaluation Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は固定式磁気ディスク装置に用いられる磁気的記
憶素子である磁気ディスクに関し、詳しくは、該磁気デ
ィ不りの金属磁性薄膜媒体上に形成される保護潤滑膜に
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic disk which is a magnetic storage element used in a fixed magnetic disk drive. This relates to the protective lubricant film formed.
金属磁性薄膜媒体を有する磁気ディスクにおい−ては、
記録再生ヘッド（以下磁気ヘラ・ドという）の繰り返し
の接触によって外観変化もなく表面の摩擦係数もある一
定値以下に維持されるように、潤滑性、耐摩耗性、耐衝
撃性が十分に確保された保護潤滑膜を設けることが必要
不可欠である。最近になり磁気ディスク装置の高記録密
度化が急テンポで進められる中で磁気ヘッドは、いわゆ
るミニモノリシックタイプ（Ｍ ｎ −Ｚ ｎ −７エ
ライト）から高記録密度化対応の４＝コンポジツトタイ
プや薄膜ヘッドが採用されはじめている。ところがミニ
コンポジットタイプや薄膜ヘッドはスライダー材（Ｏａ
ＴｉＯ，、Ａｔ、Ｏ，、Ｔｉ（！ ’）がかなりの高
硬度のためディスク側もダメージを受けやすくなってい
る。In a magnetic disk having a metal magnetic thin film medium,
Sufficient lubricity, abrasion resistance, and impact resistance are ensured so that the surface friction coefficient remains below a certain value without any change in appearance due to repeated contact with the recording/reproducing head (hereinafter referred to as magnetic head). It is essential to provide a protective lubricating film. Recently, with the rapid increase in the recording density of magnetic disk drives, magnetic heads have changed from the so-called mini-monolithic type (M n -Z n -7 elite) to the 4 = composite type that supports higher recording densities. Thin film heads are beginning to be adopted. However, mini composite type and thin film heads are made of slider material (Oa
Since TiO, At, O, Ti (!') has a considerably high hardness, the disk side is also susceptible to damage.
従来より公知の技術として知られているグラファイトや
アモルファス性の炭素質膜からなる保護潤滑膜は、ある
程度の自己潤滑性および優れた耐衝撃性はあるものの、
磁気ディスクの回転、停止に伴う磁気ヘッドの離陸、浮
上１着陸の一連の動作すなわちＱＳＳ（コンタクト・ス
タート・ストップ）の繰り返しに対して摩耗し易くミニ
モノリシックタイプヘッドでも長期的な使用に耐えられ
ない、また、炭素質膜に７ツ素系の液体潤滑剤を塗布す
ることも試みられているが、液体潤滑剤の場合５０〜９
０℃程度で揮散してしまう場合が多く、また磁気ディス
クの回転に伴い外周部にマイグレーシ１ンを起こすため
、良好な結果が得られない、また、若干分子構造を変化
し、炭素質膜に吸着性を持つようにしたフッ素系液体潤
滑剤も最近発表されているが、ミニコンポジットヘッド
や薄膜ヘッドなどのスライダー材質が高硬度の磁気ヘッ
ドに対しては削り取られやすく、はとんど摩擦係数改善
の効果がなく、一方で塗布量をかなり多くすると多少の
効果は認められるものの磁気ヘッドの吸着現象（″Ａテ
ィツキング）を起こし易くなるという欠点をもつ。Protective lubricant films made of graphite or amorphous carbon films, which have been known as conventional technologies, have a certain degree of self-lubricating property and excellent impact resistance, but
Even a mini-monolithic type head cannot withstand long-term use because it is easily worn out by the repetition of QSS (contact start-stop), which is a series of operations such as take-off and levitation and landing of the magnetic head as the magnetic disk rotates and stops. ,Also, attempts have been made to apply a heptadium-based liquid lubricant to a carbonaceous film, but in the case of a liquid lubricant, the
In many cases, it evaporates at around 0℃, and as the magnetic disk rotates, migration occurs on the outer periphery, making it difficult to obtain good results.Moreover, the molecular structure changes slightly, causing the carbonaceous film to deteriorate. Fluorine-based liquid lubricants that have adsorption properties have recently been announced, but slider materials such as mini composite heads and thin film heads are easily scraped off by highly hard magnetic heads, and the coefficient of friction is low. There is no improvement effect, and on the other hand, if the coating amount is considerably increased, although some effect is observed, it has the disadvantage that it tends to cause magnetic head attraction phenomenon (``A-ticking'').
一方、高級アルコール系の固体潤滑剤も提案されている
が、炭素質膜上に塗布してもやはり、ミニコンポジット
ヘッドや薄膜ヘッドに対してはＣＳＳ回数の増加に伴い
摩擦係数の増加が顕著であり効果がなかった。また、固
体潤滑剤である脂肪酸はかなり摩擦係数の低レベル維持
の効果が認められたが、一般に融点が低く、５０℃以上
の環境下では徐々に液体状になり、磁気ヘッドの吸着現
象が起こり易くなるという欠点をもつ。On the other hand, higher alcohol-based solid lubricants have been proposed, but even when applied to carbonaceous films, the coefficient of friction increases significantly for mini composite heads and thin film heads as the number of CSS increases. Yes, it had no effect. In addition, fatty acids, which are solid lubricants, have been found to be effective in maintaining the coefficient of friction at a fairly low level, but they generally have a low melting point and gradually turn into a liquid state in an environment of 50°C or higher, which can cause magnetic head attraction. It has the disadvantage of being easier.
上述のように従来の技術では少くとも高記録密度化に必
須のミニコンポジットタイプヘッドや薄膜ヘッドに対し
て金属磁性薄膜媒体を有する磁気ディスクの機械的信頼
性（潤滑性、耐摩耗性、耐衝撃性）を十分に確保できな
いという問題点を有していた。As mentioned above, with conventional technology, at least the mechanical reliability (lubricity, abrasion resistance, shock resistance, The problem was that it was not possible to ensure sufficient quality.
そこで本発明はこのような問題点を解決するためのもの
で、その目的とするところは、金属磁性薄膜媒体上にＣ
ｒ、Ｔｉ、Ｔａ、Ｎｂの有無において炭素質膜を形成し
、さらに該炭素質膜上に脂肪酸の金属塩であるステアリ
ン酸カリウム（融点３５３℃）を塗布することにより、
磁気ディスク装置のより一層の高記録密度化に必須のミ
ニコンｌジットタイプヘッドや薄膜ヘッドの使用を可能
にした金属磁性薄膜媒体を有する磁気ディスクを提供す
ることにある。Therefore, the present invention is intended to solve these problems, and its purpose is to deposit C on a metal magnetic thin film medium.
By forming a carbonaceous film in the presence or absence of r, Ti, Ta, and Nb, and further coating potassium stearate (melting point 353°C), which is a metal salt of fatty acid, on the carbonaceous film,
It is an object of the present invention to provide a magnetic disk having a metal magnetic thin film medium that enables the use of mini conduit type heads and thin film heads, which are essential for further increasing the recording density of magnetic disk devices.
本発明の磁気ディスクは基体上に金属磁性薄膜媒体を形
成した後、Ｃｒ、Ｔｉ、Ｔａ、Ｗｂから選ばれる少なく
とも一種の金属の有無において、スパッタリング等によ
り炭素質膜を形成し、続いてステアリン酸カリウムを塗
布することを特徴とする。In the magnetic disk of the present invention, after forming a metal magnetic thin film medium on a substrate, a carbonaceous film is formed by sputtering or the like in the presence or absence of at least one metal selected from Cr, Ti, Ta, and Wb, and then a stearic acid film is formed. Characterized by applying potassium.
一般に炭素質膜は前述のようにある程度の自己潤滑性を
持ち、磁気ヘッドの接触に対して優れた耐衝撃性ももっ
ている。したがって、優れた固体潤滑剤を塗布すれば、
耐摩耗性も著しく向上し、耐ａｓｓ性は高められる。In general, carbonaceous films have a certain degree of self-lubricating property as described above, and also have excellent impact resistance against contact with magnetic heads. Therefore, if you apply a good solid lubricant,
Abrasion resistance is also significantly improved, and ass resistance is enhanced.
潤滑剤は最終的に炭素質膜との組み合わせにおいてミニ
コンポジットヘッド、および薄膜ヘッドによるａＳＳに
対して十分に低摩擦係数を維持することが必須であるが
、選択の基準としては、少なくとも磁気ディスク装置の
使用温度領域で固体であること、加湿下で水分と反応あ
るいは水分を吸着して変質しないことが要求される６以
上の観点に立って選択評価し比較的良好な性質を示すの
が脂肪酸の金属塩系であったが、中でもステアリン酸カ
リウムは最も優れた性質が認められた。It is essential that the lubricant maintains a sufficiently low coefficient of friction against mini-composite heads and aSS by thin-film heads in combination with the carbon film, but as a selection criterion, at least Fatty acids are selected and evaluated from the viewpoint of 6 or more, which requires that they be solid in the usage temperature range and that they do not deteriorate by reacting with or adsorbing moisture under humidified conditions.Fatty acids show relatively good properties. Among the metal salts, potassium stearate was found to have the best properties.
以下に各形成被膜の形成条件を示す。The conditions for forming each film are shown below.
金属磁性薄膜媒体と炭素質膜との中間層であるＣｒ、Ｔ
ｉ、Ｔａ、Ｗｂから選ばれる少なくとも一種の金属は上
下層のより一層の密着性向上のためのも、のでその有無
はあまり重要でないが、形成する場合はスパッタリング
あるいはイオンブレーティングにより、２００１以下の
膜厚が望ましい炭素質膜はグラファイトあるいはアルモ
ル７アス性、ダイヤモンドライク等いずれでもよい。Cr, T, which is an intermediate layer between the metal magnetic thin film medium and the carbonaceous film
At least one metal selected from i, Ta, and Wb is used to further improve the adhesion between the upper and lower layers, so its presence or absence is not very important. The carbonaceous film having a desirable thickness may be made of graphite, aluminous, diamond-like, or the like.
形成法はスパッタリングあるいはプラズマＣＶＤ等で可
能である。膜厚は１５０〜７００１がよいステアリン酸
カリウムは溶剤に溶解し、ディッピング法、スピンコー
ド法、スプレー法などで形成するか、真空蒸着法で形成
してもよい。The formation method can be sputtering, plasma CVD, or the like. Potassium stearate, which preferably has a thickness of 150 to 700 mm, may be dissolved in a solvent and formed by a dipping method, a spin code method, a spray method, or the like, or may be formed by a vacuum evaporation method.
膜厚は２０〜１５０１が適当と思われる。溶剤に溶解し
て塗布する場合はできるだけ、低沸点のメタノールやエ
タノールに溶解し、ディッピング法で形成する場合には
さらにステアリン酸カリウムのメタノール溶液、エタノ
ール溶液をフロン系溶媒と混合して用いると、外観的に
もムラなく均一な塗布が可能となる。It seems appropriate for the film thickness to be 20 to 1,501 mm. When dissolving it in a solvent and applying it, dissolve it in low boiling point methanol or ethanol as much as possible, and when forming it by dipping, mix a methanol solution or an ethanol solution of potassium stearate with a fluorocarbon solvent. It is possible to apply the coating evenly and uniformly in terms of appearance.
また、特にディッピング法で形成する場合、例えばｓｏ
Ｘの膜厚で形成する場合、−回のディッピングで５０１
形成するよりも、例えば２５１形成してさらに２５１つ
けるなどの方法で２回に分けてディップし形成したほう
がより被膜の均一化に効果的である。（一度アルコール
／フロン系の溶液から析出したステアリン酸カリウムは
、再びアルコール／フロン混合溶媒には溶けにくいため
このような塗布法が可能である。）
〔実施例〕
直径五５“のアルミニウム合金ディスク基板上無電解Ｎ
１−Ｐメッキ膜を２０μｍ形成した後、メカノケミカル
法により約１５μｍになるまで研磨した。さらに金属磁
性薄膜媒体としてＣ０−Ｎ１−Ｐメッキ膜を７００１の
膜厚で形成した。In addition, especially when forming by dipping method, for example, SO
When forming a film with a thickness of X, -501 times of dipping
It is more effective to form a uniform film by dipping the film in two steps, for example, by forming 251 and then applying 251, rather than forming the film. (This coating method is possible because potassium stearate, once precipitated from an alcohol/fluorocarbon solution, is difficult to dissolve in an alcohol/fluorocarbon mixed solvent.) [Example] Aluminum alloy disk with a diameter of 55" Electroless N on board
After forming a 1-P plating film of 20 μm, it was polished to a thickness of about 15 μm using a mechanochemical method. Furthermore, a C0-N1-P plating film was formed with a thickness of 7001 mm as a metal magnetic thin film medium.
以下衣１に示すような１１種の実施例と３種類の比較サ
ンプルを作成した。Eleven types of examples and three types of comparison samples as shown in Cloth 1 below were created.
いずれも中間金属層および炭素質膜はスパッタリングで
形成し、ステアリン酸カリウムはメタノールに溶解した
後ダイフロン（ダイキン工業製）と１：３（メタノール
：ダイア０ン）の容積比に混合した液によりディッピン
グ法で塗布した。膜厚は引き上げ速度でコントロールし
た。In both cases, the intermediate metal layer and the carbonaceous film are formed by sputtering, and potassium stearate is dissolved in methanol and then dipped in a solution mixed with Daiflon (manufactured by Daikin Industries) at a volume ratio of 1:3 (methanol: Diaon). It was applied by law. The film thickness was controlled by the pulling speed.
品質評価はＯＳＳ試験により実施した。使用ヘッドはア
ルプス電気極ミニコン〆ジットおよび自社製薄膜ヘッド
を用い、ａＳＳ回数２万回時点で〔発明の効果〕
以上述べたように、本発明により、ミニコンポジットタ
イプヘッドおよび薄膜ヘッドにも対応可能な保護潤滑膜
を備えた金属磁性薄膜媒体を有する磁気ディスクの提供
が可能になった。Quality evaluation was carried out by OSS test. The heads used were Alps Denki Kyoku mini-composite and in-house manufactured thin-film heads, and after 20,000 aSS operations [Effects of the invention] As described above, the present invention can also be used with mini-composite type heads and thin-film heads. It has now become possible to provide a magnetic disk having a metal magnetic thin film medium with a protective lubricant film.
なお、本発明に使用の保護潤滑膜はメッキあるいはスパ
ッタタイプの固定式磁気ディスクのほかにも、７レキシ
プルデイ不り、あるいは磁気テープへの応用も可能であ
る。The protective lubricant film used in the present invention can be applied not only to plated or sputtered fixed magnetic disks but also to 7-lexiple day disks or magnetic tapes.
以 上 出願人 セイコーエプソン株式会社 代理人 弁理士最上務（他１名） 、″＼that's all Applicant: Seiko Epson Corporation Agent Mogami Patent Attorney (1 other person) ,″＼
Claims (2)
らに該炭素質膜上にステアリン酸カリウムが塗布された
ことを特徴とする磁気ディスク。(1) A magnetic disk characterized in that a carbonaceous thin film is formed on a metal magnetic thin film medium, and potassium stearate is further coated on the carbonaceous film.
Ｔｉ、Ｔａ、Ｎｂから選ばれる少なくとも一種の物質よ
りなる被膜が形成されたことを特徴とする特許請求の範
囲第１項記載の磁気ディスク(2) Between the metal magnetic thin film medium and the carbonaceous thin film, Cr,
A magnetic disk according to claim 1, characterized in that a coating is formed of at least one substance selected from Ti, Ta, and Nb.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11540487A JPS63281220A (en) | 1987-05-12 | 1987-05-12 | Magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11540487A JPS63281220A (en) | 1987-05-12 | 1987-05-12 | Magnetic disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63281220A true JPS63281220A (en) | 1988-11-17 |
Family
ID=14661731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11540487A Pending JPS63281220A (en) | 1987-05-12 | 1987-05-12 | Magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63281220A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009041423A1 (en) * | 2007-09-28 | 2009-04-02 | Hoya Corporation | Vertical magnetic recording medium and method for manufacturing the same |
-
1987
- 1987-05-12 JP JP11540487A patent/JPS63281220A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009041423A1 (en) * | 2007-09-28 | 2009-04-02 | Hoya Corporation | Vertical magnetic recording medium and method for manufacturing the same |
| JP2009099247A (en) * | 2007-09-28 | 2009-05-07 | Hoya Corp | Perpendicular magnetic recording medium and method for manufacturing the same |
| US8795857B2 (en) | 2007-09-28 | 2014-08-05 | Wd Media (Singapore) Pte. Ltd. | Perpendicular magnetic recording medium and manufacturing method of the same |
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