JPS6326522B2 - - Google Patents
Info
- Publication number
- JPS6326522B2 JPS6326522B2 JP54150535A JP15053579A JPS6326522B2 JP S6326522 B2 JPS6326522 B2 JP S6326522B2 JP 54150535 A JP54150535 A JP 54150535A JP 15053579 A JP15053579 A JP 15053579A JP S6326522 B2 JPS6326522 B2 JP S6326522B2
- Authority
- JP
- Japan
- Prior art keywords
- particles
- tantalum nitride
- resistor
- tantalum
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 66
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 51
- 239000002245 particle Substances 0.000 claims description 49
- 239000011521 glass Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 28
- 239000000203 mixture Substances 0.000 claims description 23
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 22
- 229910052715 tantalum Inorganic materials 0.000 claims description 19
- 239000000654 additive Substances 0.000 claims description 17
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 14
- 230000000996 additive effect Effects 0.000 claims description 14
- 229910004479 Ta2N Inorganic materials 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 13
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 10
- 229910052796 boron Inorganic materials 0.000 claims description 10
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 9
- 229910052749 magnesium Inorganic materials 0.000 claims description 9
- 239000011777 magnesium Substances 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 7
- 239000012298 atmosphere Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 6
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 239000000155 melt Substances 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 5
- 239000012777 electrically insulating material Substances 0.000 claims description 4
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 24
- 229910052759 nickel Inorganic materials 0.000 description 12
- 238000012360 testing method Methods 0.000 description 10
- 239000000037 vitreous enamel Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- 238000012216 screening Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- 238000000498 ball milling Methods 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- DAFHKNAQFPVRKR-UHFFFAOYSA-N (3-hydroxy-2,2,4-trimethylpentyl) 2-methylpropanoate Chemical compound CC(C)C(O)C(C)(C)COC(=O)C(C)C DAFHKNAQFPVRKR-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 244000191761 Sida cordifolia Species 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- -1 steatite Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
- H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
- H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Non-Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Paints Or Removers (AREA)
- Glass Compositions (AREA)
Description
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Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/962,233 US4205298A (en) | 1978-11-20 | 1978-11-20 | Resistor material, resistor made therefrom and method of making the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5595303A JPS5595303A (en) | 1980-07-19 |
JPS6326522B2 true JPS6326522B2 (ja) | 1988-05-30 |
Family
ID=25505579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15053579A Granted JPS5595303A (en) | 1978-11-20 | 1979-11-20 | Resistor material* resistor fabricated thereof and method of fabricating resistor |
Country Status (10)
Country | Link |
---|---|
US (1) | US4205298A (ja) |
JP (1) | JPS5595303A (ja) |
AU (1) | AU524075B2 (ja) |
DE (1) | DE2946679A1 (ja) |
DK (1) | DK487279A (ja) |
FR (1) | FR2441908A1 (ja) |
GB (1) | GB2035293B (ja) |
IN (1) | IN154028B (ja) |
IT (1) | IT1126182B (ja) |
SE (1) | SE438942B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4657699A (en) * | 1984-12-17 | 1987-04-14 | E. I. Du Pont De Nemours And Company | Resistor compositions |
US4645621A (en) * | 1984-12-17 | 1987-02-24 | E. I. Du Pont De Nemours And Company | Resistor compositions |
US4652397A (en) * | 1984-12-17 | 1987-03-24 | E. I. Du Pont De Nemours And Company | Resistor compositions |
US4655965A (en) * | 1985-02-25 | 1987-04-07 | Cts Corporation | Base metal resistive paints |
WO1991004562A1 (en) * | 1989-09-25 | 1991-04-04 | E.I. Du Pont De Nemours And Company | Improved composite dielectric |
US5294374A (en) * | 1992-03-20 | 1994-03-15 | Leviton Manufacturing Co., Inc. | Electrical overstress materials and method of manufacture |
JPH09120713A (ja) * | 1995-10-25 | 1997-05-06 | Murata Mfg Co Ltd | æµæææçµæç© |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3394087A (en) * | 1966-02-01 | 1968-07-23 | Irc Inc | Glass bonded resistor compositions containing refractory metal nitrides and refractory metal |
JPS5212399A (en) * | 1975-07-14 | 1977-01-29 | Fumie Wada | Reducing method of free formaldehyde leaved in fiber |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB874257A (en) * | 1960-03-02 | 1961-08-02 | Controllix Corp | Improvements in or relating to circuit-breaker actuating mechanisms |
US3441516A (en) * | 1966-04-21 | 1969-04-29 | Trw Inc | Vitreous enamel resistor composition and resistor made therefrom |
US3788997A (en) * | 1971-12-17 | 1974-01-29 | Trw Inc | Resistance material and electrical resistor made therefrom |
US4053866A (en) * | 1975-11-24 | 1977-10-11 | Trw Inc. | Electrical resistor with novel termination and method of making same |
-
1978
- 1978-11-20 US US05/962,233 patent/US4205298A/en not_active Expired - Lifetime
-
1979
- 1979-11-05 GB GB7938227A patent/GB2035293B/en not_active Expired
- 1979-11-14 IT IT83630/79A patent/IT1126182B/it active
- 1979-11-16 SE SE7909500A patent/SE438942B/sv not_active IP Right Cessation
- 1979-11-16 DK DK487279A patent/DK487279A/da not_active Application Discontinuation
- 1979-11-16 AU AU52904/79A patent/AU524075B2/en not_active Ceased
- 1979-11-19 FR FR7928451A patent/FR2441908A1/fr active Granted
- 1979-11-19 IN IN1206/CAL/79A patent/IN154028B/en unknown
- 1979-11-20 JP JP15053579A patent/JPS5595303A/ja active Granted
- 1979-11-20 DE DE19792946679 patent/DE2946679A1/de active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3394087A (en) * | 1966-02-01 | 1968-07-23 | Irc Inc | Glass bonded resistor compositions containing refractory metal nitrides and refractory metal |
JPS5212399A (en) * | 1975-07-14 | 1977-01-29 | Fumie Wada | Reducing method of free formaldehyde leaved in fiber |
Also Published As
Publication number | Publication date |
---|---|
AU524075B2 (en) | 1982-08-26 |
SE7909500L (sv) | 1980-05-21 |
DE2946679A1 (de) | 1980-05-29 |
SE438942B (sv) | 1985-05-13 |
FR2441908A1 (fr) | 1980-06-13 |
FR2441908B1 (ja) | 1984-11-23 |
IN154028B (ja) | 1984-09-08 |
DE2946679C2 (ja) | 1990-10-25 |
AU5290479A (en) | 1980-05-29 |
GB2035293B (en) | 1983-09-14 |
GB2035293A (en) | 1980-06-18 |
US4205298A (en) | 1980-05-27 |
DK487279A (da) | 1980-05-21 |
IT7983630A0 (it) | 1979-11-14 |
JPS5595303A (en) | 1980-07-19 |
IT1126182B (it) | 1986-05-14 |
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