JPS63257473A - Ultrasonic motor - Google Patents

Ultrasonic motor

Info

Publication number
JPS63257473A
JPS63257473A JP62089134A JP8913487A JPS63257473A JP S63257473 A JPS63257473 A JP S63257473A JP 62089134 A JP62089134 A JP 62089134A JP 8913487 A JP8913487 A JP 8913487A JP S63257473 A JPS63257473 A JP S63257473A
Authority
JP
Japan
Prior art keywords
hole
piezoelectric vibrator
driven body
ultrasonic motor
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62089134A
Other languages
Japanese (ja)
Other versions
JP2632158B2 (en
Inventor
Keisuke Honda
本多　敬介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Electronics Co Ltd
Original Assignee
Honda Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Electronics Co Ltd filed Critical Honda Electronics Co Ltd
Priority to JP62089134A priority Critical patent/JP2632158B2/en
Publication of JPS63257473A publication Critical patent/JPS63257473A/en
Application granted granted Critical
Publication of JP2632158B2 publication Critical patent/JP2632158B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To reduce the cost of an apparatus and to miniaturize the same by using a concentric ring form piezoelectric vibrator with a hole center made eccentric with respect to a disc center and by combining said vibrator with a driven body. CONSTITUTION:The center of a disc and that of a hole 7a are made to deviate from each other so that a nonconcentric ring form piezoelectric vibrator 7 is formed. When AC electric field is applied to electrodes 8-9 of said vibrator 7, a vibration is generated in the direction of the thickness. Also, an uniform vibration is generated on the side surface 7b and the plane surface and in the inner surface 7c of said hole 7a to generate a progressive wave in said side surface 7b and others, because the hole 7a is located eccentric with respect to a circular form of the vibrator 7. Thus, the driven body 11 of a rotator with a rotating shaft 10 supported by a bearing and the like is combined with a part of the side surface 7b of this vibrator 7 so that the driven body 11 can be driven by said progressive wave.

Description

【発明の詳細な説明】 産−上の 本発明は、偏心した穴を持つ非同心リング状圧電体振動
子を使用する超音波モータに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic motor using a non-concentric ring-shaped piezoelectric vibrator having an eccentric hole.

従ｍ忙 現在提案されている超音波モータは、円環形圧電セラミ
ックの片面に２組の電極群を接着し、それぞれの電極群
によって励振される定在波が位置的に９０°ずれるよう
に電極を配置し、さらにこれら２組の電極群に印加する
交流電界が時間的に９０°位相差がある２組の発振器を
それぞれ接続している。The currently proposed ultrasonic motor has two sets of electrodes glued to one side of an annular piezoelectric ceramic, and the electrodes are arranged so that the standing waves excited by each electrode set are shifted by 90 degrees. are arranged, and two sets of oscillators are connected to each other, and the alternating current electric fields applied to these two sets of electrode groups have a temporal phase difference of 90°.

このように構成した従来の超音波モータは、２組の発振
器からそれぞれの電極群に交流電界を印加することによ
って円環形圧電セラミックの周囲の表面に９０°位相が
ずれた２つの定在波が発生し、この２つの定在波が合成
された進行波が発生する。従って、円環形圧電セラミッ
クの上に接着された櫛形の振動体の上に円環形の移動体
を載置して接触を強くすると、移動体が進行波によって
移動される。The conventional ultrasonic motor configured in this way generates two standing waves with a 90° phase shift on the surface around the annular piezoelectric ceramic by applying an alternating electric field from two sets of oscillators to each electrode group. A traveling wave is generated by combining these two standing waves. Therefore, when a toroidal moving body is placed on a comb-shaped vibrating body bonded to a toroidal piezoelectric ceramic and the contact is strengthened, the movable body is moved by a traveling wave.

■が　　しようとする、 しかしながら、この従来の超音波モータでは、複数の電
極と、これらの電極に交流電界を印加する２組の発振器
が必要であり、電極の構成が複雑で、また振動体の構成
も複雑であり、コストが高くなるという問題があった。However, this conventional ultrasonic motor requires multiple electrodes and two sets of oscillators that apply an alternating electric field to these electrodes, making the electrode configuration complicated and the vibrating body The structure is also complicated, and the cost is high.

また、他の超音波モータとして、第１６図に示すように
上下面に電極２．３を設けた薄し１圧電体振動子（例え
ば厚さが１１１１、直径が４０ｍｍ）を固定子とし、こ
の圧電体振動子１の側面に被駆動体を接触させて回転す
るものが提案されている。As another ultrasonic motor, as shown in Fig. 16, a thin piezoelectric vibrator (for example, 1111 mm in thickness and 40 mm in diameter) with electrodes 2.3 provided on the upper and lower surfaces is used as a stator. A type of piezoelectric vibrator 1 has been proposed in which a driven body is brought into contact with the side surface of the piezoelectric vibrator 1 and rotated.

この超音波モータは、圧電体振動子１の電極２．３に交
流電界を印加すると、圧電体振動子１の側面に円盤の中
心を少し外れた点を軸にして円盤が回わるような微細な
変形が生じるものであるが、このように構成した圧電体
振動子１の側面に回転自在に支持された被駆動体を接触
させることにより、微細な変形によって被駆動体を回転
するものである。In this ultrasonic motor, when an alternating current electric field is applied to the electrodes 2.3 of the piezoelectric vibrator 1, a small disc is formed on the side of the piezoelectric vibrator 1 so that the disc rotates around a point slightly off the center of the disc. However, by bringing a rotatably supported driven body into contact with the side surface of the piezoelectric vibrator 1 configured in this way, the driven body is rotated by minute deformation. .

しかしながら、この従来の超音波モータは、圧電体振動
子１が薄いので１強力な回転トルクが得られないという
問題があった。なお、この回転トルクを強くするために
、圧電体振動子１の厚さを厚くした場合（例えば厚さ５
ｍｍ、直径を３０−履）には、圧電体振動子ｌの側面ま
たは上面からは微細な回転変位は全く得られない。However, this conventional ultrasonic motor has a problem in that a strong rotational torque cannot be obtained because the piezoelectric vibrator 1 is thin. Note that in order to increase this rotational torque, when the thickness of the piezoelectric vibrator 1 is increased (for example, when the thickness is 5
mm, diameter is 30 mm), no minute rotational displacement can be obtained from the side or top surface of the piezoelectric vibrator l.

。　屯を　　するための手 本発明は、上記問題点を解決するために、円盤の中心と
該円盤に設けた穴の中心とをずらして設けた非同心リン
グ状圧電体振動子の対向面、側面または穴の内側面と被
駆動体を組合わせることを特徴とし、また円盤の中心と
該円盤に設けた穴の中心とをずらして設け、かつ上記円
盤の側面から上記穴にかけて切除部を設けた非同心リン
グ状圧電体振動子の対向面、側面または穴の内側面と被
駆動体を組合わせることを特徴とする。. In order to solve the above-mentioned problems, the present invention provides an opposing surface and a side surface of a non-concentric ring-shaped piezoelectric vibrator in which the center of the disk and the center of the hole provided in the disk are shifted from each other. Alternatively, the inner surface of the hole and the driven body are combined, the center of the disk is offset from the center of the hole provided in the disk, and a cutout is provided from the side of the disk to the hole. It is characterized by combining the opposing surface, side surface, or inner surface of the hole of a non-concentric ring-shaped piezoelectric vibrator with a driven body.

化工 本発明によれば、円盤の中心と該円盤の穴の中心とをず
らして設けた非同心リング状圧電体振動子または円盤の
中心と該円盤の穴の中心とをずらして設け、かつ円盤の
外側面から上記穴にかけて切除部を設けた非同心リング
状圧電体振動子の対向面の電極に交流電界を印加すると
、厚み方向の振動が発生するとともに、この厚み方向の
振動に対して９０°位相がずれた径方向の振動が発生す
る。According to the present invention, there is provided a non-concentric ring-shaped piezoelectric vibrator in which the center of a disk and the center of a hole in the disk are offset, or a disk in which the center of the disk and the center of a hole in the disk are offset, and When an alternating current electric field is applied to the electrodes on the opposing surface of a non-concentric ring-shaped piezoelectric vibrator having a cutout section extending from the outer surface to the hole, vibration in the thickness direction is generated, and a 90° °Out-of-phase radial vibrations occur.

ここで、径方向の振動が発生するとき、穴が円盤の中心
からずれているため、径方向の振動は外側面を複雑に変
形させる。従って、圧電体振動子の対向面、側面及び穴
の内側面に外周方向に移動する進行波が発生するので、
圧電体振動子の対向面。Here, when radial vibration occurs, since the hole is offset from the center of the disk, the radial vibration deforms the outer surface in a complicated manner. Therefore, traveling waves moving in the outer circumferential direction are generated on the opposing surface of the piezoelectric vibrator, the side surface, and the inner surface of the hole.
Opposite surface of piezoelectric vibrator.

側面及び穴の内側面と被駆動体を組合わせることにより
被駆動体を駆動することができる。The driven body can be driven by combining the side surface and the inner surface of the hole with the driven body.

大蓋■ 本発明の詳細な説明する前に原理を説明する。Large lid■ Before explaining the present invention in detail, the principle will be explained.

第１図は１通常のリング状圧電体振動子の平面図及び側
面図で、リング状圧電体振動子４の電極５．６に交流電
界を印加すると、第１図（ｂ）の点線Ａ、Ｂで示すよう
に厚み方向に振動する。この厚み方向の振動に対して９
０°位相がずれた径方向の振動が点線Ｃ，Ｄに示したよ
うに発生する。この厚み方向の振動が発生して、点線Ａ
のように厚さ方向に膨張したとき、リングの内径４ａは
収縮せず。FIG. 1 shows a plan view and a side view of a typical ring-shaped piezoelectric vibrator 4. When an alternating current electric field is applied to the electrodes 5.6 of the ring-shaped piezoelectric vibrator 4, the dotted line A in FIG. As shown by B, it vibrates in the thickness direction. 9 for this vibration in the thickness direction.
Radial vibrations with a 0° phase shift occur as shown by dotted lines C and D. This vibration in the thickness direction occurs, and the dotted line A
When the ring expands in the thickness direction, the inner diameter 4a of the ring does not contract.

外径４ｂのみが収縮するので、第１図（ａ）の矢印Ｅで
示したように進行波が発生する。しかし、第１図（ｂ）
の点線Ｂのように厚み方向に収縮して。Since only the outer diameter 4b contracts, a traveling wave is generated as shown by arrow E in FIG. 1(a). However, Fig. 1(b)
Shrinks in the thickness direction as shown by dotted line B.

第１図（ａ）の点線りのように圧電体振動子１が径方向
に膨張しても均等に拡大するだけであり、側面に円周方
向の進行波は発生しない。Even if the piezoelectric vibrator 1 expands in the radial direction as indicated by the dotted line in FIG. 1(a), it only expands uniformly, and no traveling wave in the circumferential direction is generated on the side surface.

第２図は１本発明の非同心リング状圧電体振動子の平面
図及び側面図で、圧電体振動子７の電極８．９に交流電
界を印加すると、第２図（ｂ）の点線Ａ、Ｂで示すよう
に厚み方向の振動が生じる。しかし、穴７ａが圧電体振
動子７の円形に対して偏心しているため、側面７ｂ及び
平面及び穴７ａの内面７Ｃで不均一な振動を生じ、従っ
て、圧電体振動子７の側面７ｂのそれぞれの部分で第２
図（ａ）の矢印Ｃ，Ｄで示す進行波が発生し、また圧電
体振動子７の表面で矢印Ｅ、Ｆで示す進行波が発生し、
さらに穴７ａの内面７ｃで矢印Ｇ、Ｈに示す進行波が発
生することが確認された。FIG. 2 is a plan view and a side view of a non-concentric ring-shaped piezoelectric vibrator of the present invention. When an alternating current electric field is applied to the electrodes 8.9 of the piezoelectric vibrator 7, the dotted line A , B, vibrations occur in the thickness direction. However, since the hole 7a is eccentric with respect to the circular shape of the piezoelectric vibrator 7, uneven vibration occurs on the side surface 7b, the plane, and the inner surface 7C of the hole 7a. The second part
Traveling waves shown by arrows C and D in Figure (a) are generated, and traveling waves shown by arrows E and F are generated on the surface of the piezoelectric vibrator 7,
Furthermore, it was confirmed that traveling waves shown by arrows G and H were generated on the inner surface 7c of the hole 7a.

第３図は、本発明の実施例の超音波モータの平面図で、
圧電体振動子７の側面７ｂの一部に１回転軸１０をベア
リング等で支持した回転体の被駆動体１１を組合わせる
ことにより、側面７ｂに発生した進行波で被駆動体１１
を駆動することができる。FIG. 3 is a plan view of an ultrasonic motor according to an embodiment of the present invention.
By combining a driven body 11, which is a rotary body with a rotating shaft 10 supported by a bearing or the like, on a part of the side surface 7b of the piezoelectric vibrator 7, the driven body 11 is driven by a traveling wave generated on the side surface 7b.
can be driven.

第４図は、本発明の他の実施例の超音波リニアモータの
側面図で、圧電体振動子７の側面７ｂの一部に耐摩耗性
部材１２を固着し、この対摩耗性部材１２とベアリング
等で軸方向に摺動できるように支持した棒状体の被駆動
体１１を組合わせることにより、側面７ｂに発生した進
行波で被駆動体１１を駆動することができる。FIG. 4 is a side view of an ultrasonic linear motor according to another embodiment of the present invention, in which a wear-resistant member 12 is fixed to a part of the side surface 7b of the piezoelectric vibrator 7. By combining the rod-shaped driven body 11 supported so as to be slidable in the axial direction with a bearing or the like, the driven body 11 can be driven by a traveling wave generated on the side surface 7b.

第５図は、本発明のさらに他の実施例の超音波モータの
平面図及び側面図で、回転軸１０をベアリング等で支持
した回転体の被駆動体１１を圧電体振動子７の上面と組
合わせて、圧電体振動子７の上面に発生する進行波によ
って被駆動体１１を駆動することができる。FIG. 5 is a plan view and a side view of an ultrasonic motor according to still another embodiment of the present invention, in which a driven body 11 of a rotating body supporting a rotating shaft 10 with a bearing or the like is connected to the upper surface of a piezoelectric vibrator 7. In combination, the driven body 11 can be driven by a traveling wave generated on the upper surface of the piezoelectric vibrator 7.

第６図は１本発明のさらに他の実施例の超音波モータの
側面図で、圧電体振動子７の上面に耐摩耗性部材１２を
設け１回転軸１０をベアリング等で支持した回転体の被
駆動体１１を耐摩耗性部材１２と組合わせて、耐摩耗性
部材１２に発生する進行波によって被駆動体１１を駆動
することができる。FIG. 6 is a side view of an ultrasonic motor according to still another embodiment of the present invention, in which a wear-resistant member 12 is provided on the top surface of a piezoelectric vibrator 7, and a rotating shaft 10 is supported by a bearing or the like. By combining the driven body 11 with the wear-resistant member 12, the driven body 11 can be driven by a traveling wave generated in the wear-resistant member 12.

第７図は、本発明のさらに他の実施例の超音波モータの
側面図で１回転軸１０をベアリング等で支持した回転体
の被駆動体１１を、圧電体振動子７の穴７ａの内側面と
組合わせることにより、穴７ａの内側面に発生する進行
波によって被駆動体１１を駆動することができる。FIG. 7 is a side view of an ultrasonic motor according to still another embodiment of the present invention, in which a driven body 11, which is a rotary body with a rotating shaft 10 supported by a bearing or the like, is inserted into a hole 7a of a piezoelectric vibrator 7. By combining with the side surface, the driven body 11 can be driven by a traveling wave generated on the inner surface of the hole 7a.

なお、本実施例では、周波数を変更することにより進行
波の方向を逆転することができるため、被駆動体１１を
反転させることができる。Note that in this embodiment, the direction of the traveling wave can be reversed by changing the frequency, so the driven body 11 can be reversed.

第８図は、本発明の他の実施例の非同心リング状圧電体
振動子の平面図で、この圧電体振動子７は側面７ｂから
穴７ａにかけて切除部１２が設けられている。この圧電
体振動子７の両面の電極に所定の周波数の交流電界を印
加すると、側面７ｂにおいて切除部１２の対向面近傍か
ら切除部１２にかけて矢印Ａ、Ｂのように対向する進行
波が発生する。また両端面においては、矢印Ｃ，Ｄのよ
うに切除部１２から穴７ａの周囲に互いに反対方向に進
行する進行波が発生し、切除部１２の穴７ａの対向面付
近で矢印Ｅのように穴７ａの方向に向う進行波が発生し
、さらに穴７ａの内壁７ｃでは、切除部１２の近傍で矢
印Ｃ１Ｄと同じ方向の進行波Ｆ、Ｇが発生することが確
認された。FIG. 8 is a plan view of a non-concentric ring-shaped piezoelectric vibrator according to another embodiment of the present invention. This piezoelectric vibrator 7 is provided with a cutout 12 extending from the side surface 7b to the hole 7a. When an alternating current electric field of a predetermined frequency is applied to the electrodes on both sides of the piezoelectric vibrator 7, opposing traveling waves are generated as shown by arrows A and B from the vicinity of the opposing surface of the cutout 12 to the cutout 12 on the side surface 7b. . Further, on both end faces, traveling waves traveling in opposite directions are generated from the cutout part 12 around the hole 7a as shown by arrows C and D, and as shown by arrow E near the face of the cutout part 12 facing the hole 7a. It was confirmed that a traveling wave was generated in the direction of the hole 7a, and that traveling waves F and G in the same direction as the arrow C1D were generated on the inner wall 7c of the hole 7a near the cut portion 12.

このように構成した圧電体振動子７の側面７ｂ、穴７ａ
の内面７ｃ、端面と被駆動体を組合わせることにより、
被駆動体を駆動することができる。Side surface 7b and hole 7a of piezoelectric vibrator 7 configured in this way
By combining the inner surface 7c, the end surface and the driven body,
A driven body can be driven.

第９図は１本発明の他の実施例の超音波モータの平面図
で、圧電体振動子７の切除部１２の近傍の側面７ｂの一
部に、回転軸１０をベアリング等で支持した回転体の被
駆動体１１を組合わせることにより、側面７ｂに発生し
た進行波で被駆動体１１を駆動することができる。FIG. 9 is a plan view of an ultrasonic motor according to another embodiment of the present invention, in which a rotating shaft 10 is supported by a bearing or the like on a part of the side surface 7b near the cutout 12 of the piezoelectric vibrator 7. By combining the driven bodies 11 of the bodies, the driven bodies 11 can be driven by traveling waves generated on the side surface 7b.

第１０図は、本発明の他の実施例の超音波モータの平面
図で、圧電体振動子７の切除部１２の近傍の穴７ａの内
面７ｃの一部に、回転軸ｌＯをベアリング等で支持した
回転体の被駆動体１１を組合わせることにより、側面７
ｂに発生した進行波で被駆動体１１を駆動することがで
きる。FIG. 10 is a plan view of an ultrasonic motor according to another embodiment of the present invention, in which the rotation axis lO is mounted on a part of the inner surface 7c of the hole 7a near the cutout 12 of the piezoelectric vibrator 7 using a bearing or the like. By combining the supported driven body 11 of the rotating body, the side surface 7
The driven body 11 can be driven by the traveling wave generated at point b.

第１１図は、本発明の他の実施例の超音波モータの平面
図で、圧電体振動子７の切除部１２の近傍の端面の一部
に、回転軸１０をベアリング等で支持した回転体の被駆
動体１１の端面を組合わせることにより、圧電体振動子
７の端面に発生した進行波で被駆動体１１を駆動するこ
とができる。FIG. 11 is a plan view of an ultrasonic motor according to another embodiment of the present invention, in which a rotating shaft 10 is supported by a bearing or the like on a part of the end surface of the piezoelectric vibrator 7 near the cutout 12. By combining the end faces of the driven body 11, the driven body 11 can be driven by a traveling wave generated at the end face of the piezoelectric vibrator 7.

第１２図は１本発明の他の実施例の非同心リング状圧電
体振動子の斜視図で、第８＠の圧電体振動子７の両面の
電極に第８図とは異なった周波数の交流電界を印加する
と、切除部１２の近傍の側面７ｂにおいて、上側は矢印
Ａのような進行波が発生し、下側で矢印Ｂのような進行
波が発生し、また切除部１２の穴７ａの内面７ｃの上側
で矢印Ｃの進行波が発生し、下側で矢印りの進行波が発
生することが確認された。さらに、この進行波は周波数
を変更すると、方向が逆になることが確認された。FIG. 12 is a perspective view of a non-concentric ring-shaped piezoelectric vibrator according to another embodiment of the present invention. When an electric field is applied, on the side surface 7b near the excised part 12, a traveling wave as shown by arrow A is generated on the upper side, a traveling wave as shown by arrow B is generated on the lower side, and a traveling wave as shown in arrow B is generated on the lower side. It was confirmed that a traveling wave as indicated by arrow C was generated on the upper side of the inner surface 7c, and a traveling wave as indicated by arrow C was generated on the lower side. Furthermore, it was confirmed that the direction of this traveling wave reverses when the frequency is changed.

このように構成した圧電体振動子７の側面７ｂ及び穴７
ａの内面７ｃと被駆動体を組合わせることにより、被駆
動体を駆動することができる。Side surface 7b and hole 7 of piezoelectric vibrator 7 configured in this way
By combining the inner surface 7c of a and the driven body, the driven body can be driven.

第１３図は、本発明の他の実施例の超音波モータの平面
図及び一部所面側面図で、被駆動体１１は回転軸１０を
ベアリング等で回転自在に支持され、また被駆動体１１
に空洞１３が設けられ、第１３図（ｂ）では、この空洞
１３の端部１３′と圧電体振動子７の切除部１２の近傍
の側面７ｂの下半分が組合わされ、また第１３図（ｃ）
では、この空洞１３の端部１３′と圧電体振動子７の切
除部１２の近傍の側面７ｂの上半分が組合わされている
。FIG. 13 is a plan view and a partial side view of an ultrasonic motor according to another embodiment of the present invention, in which a driven body 11 has a rotary shaft 10 rotatably supported by a bearing or the like; 11
A cavity 13 is provided in FIG. 13(b), and in FIG. c)
Here, the end 13' of the cavity 13 and the upper half of the side surface 7b near the cutout 12 of the piezoelectric vibrator 7 are combined.

このように構成することにより、側面７ｂに発生した進
行波ＡまたはＢで被駆動体１１を駆動することができる
。With this configuration, the driven body 11 can be driven by the traveling wave A or B generated on the side surface 7b.

第１４図は１本発明の他の実施例の超音波モータの平面
図及び側面図で、回転軸１０をベアリング等で回転自在
に支持された被駆動体１１は、第１３図（ｂ）では、圧
電体振動子７の切除部１２の近傍の穴７日の内面７ｃの
上半分と組合わされ、また第１３図（ｃ）では、圧電体
振動子７の切除部１２の近傍の穴７ａの内面７ｃの下半
分が組合わされている。FIG. 14 is a plan view and a side view of an ultrasonic motor according to another embodiment of the present invention, in which a driven body 11 rotatably supported by a rotating shaft 10 with a bearing or the like is shown in FIG. 13(b). , is combined with the upper half of the inner surface 7c of the hole 7 near the cutout 12 of the piezoelectric vibrator 7, and in FIG. 13(c), the hole 7a near the cutout 12 of the piezoelectric vibrator 7 The lower half of the inner surface 7c is combined.

このように構成することにより、穴７ａの内面７ｃに発
生した進行波ＡまたはＢで被駆動体１１を駆動すること
ができる。With this configuration, the driven body 11 can be driven by the traveling wave A or B generated on the inner surface 7c of the hole 7a.

第１５図は、本発明の他の実施例の超音波モータの平面
図で、回転軸ＩＯをベアリング等で支持した回転体の被
駆動体１１は空洞１４が設けられ、この空洞１４の内面
に３つの圧電体振動子７の切除部１２の近傍の端面が組
合わされている。これによって。FIG. 15 is a plan view of an ultrasonic motor according to another embodiment of the present invention. A driven body 11, which is a rotary body that supports a rotating shaft IO with a bearing or the like, is provided with a cavity 14, and the inner surface of this cavity 14 is provided with a cavity 14. The end faces of the three piezoelectric vibrators 7 near the cutout portion 12 are combined. by this.

３つの圧電体振動子７の端面に発生した進行波で被駆動
体１１を駆動することができる。The driven body 11 can be driven by traveling waves generated on the end faces of the three piezoelectric vibrators 7.

なお、上記実施例においては、圧電体振動子７と被駆動
体１１との間に耐摩耗性部材を介在させてもよい。また
、圧電体振動子７の切除部１２をさらに大きく５１円盤
の半分またはそれ以上にしてもよい。In the above embodiment, a wear-resistant member may be interposed between the piezoelectric vibrator 7 and the driven body 11. Further, the cutout portion 12 of the piezoelectric vibrator 7 may be made larger to half or more than 51 disks.

久」！紹り艮 以上の説明から明らかなように、本発明は、穴の中心を
円盤の中心に対して偏心させ、またはさらに側面から穴
に切除部を設けた簡単な構造の非同心リング状圧電体振
動子を使用して被駆動体と組合わせたので、非常に製造
が容易で、コストが安く、小型化も容易であるという利
点がある。Ku”! Introduction As is clear from the above description, the present invention provides a non-concentric ring-shaped piezoelectric body with a simple structure in which the center of the hole is eccentric to the center of the disk, or a cutout is provided in the hole from the side. Since a vibrator is used in combination with the driven body, it has the advantage of being extremely easy to manufacture, low in cost, and easy to downsize.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は同心型リング状圧電体振動子の平面図及び側面
図、第２図は本発明で使用する非同心リング状圧電体振
動子の平面図及び側面図、第３図は本発明の実施例の超
音波モータの平面図、第４図は本発明の他の実施例の超
音波リニアモータの側面図、第５図は本発明のさらに他
の実施例の超音波モータの平面図及び側面図、第６図は
本発明のさらに他の実施例の超音波モータの側面図、第
７図は本発明のさらに他の実施例の超音波モータの平面
図、第８図は本発明で使用する他の実施例の非同心リン
グ状圧電体振動子の平面図、第９図〜第１１図は本発明
の他の実施例の超音波モータの平面図、第１２図は本発
明で使用する他の実施例の非同心リング状圧電体振動子
の斜視図、第１３図は本発明のさらに他の実施例の超音
波モータの平面図及び一部所面側面図、第１４図は本発
明のさらに他の実施例の超音波モータの平面図及び側面
図、第１５図は本発明のさらに他の実施例の超音波モー
タの平面図、第１６図は従来の超音波モータの固定子の
斜視図である。 ７・・・圧電体振動子、７ａ・・・穴、８，９・・・電
極、１０・・・回転軸、１１・・・被駆動体、１２・・
・接触体。FIG. 1 is a plan view and a side view of a concentric ring-shaped piezoelectric vibrator, FIG. 2 is a plan view and a side view of a non-concentric ring-shaped piezoelectric vibrator used in the present invention, and FIG. 3 is a plan view and a side view of a concentric ring-shaped piezoelectric vibrator used in the present invention. FIG. 4 is a side view of an ultrasonic linear motor according to another embodiment of the present invention, and FIG. 5 is a plan view of an ultrasonic motor according to still another embodiment of the present invention. 6 is a side view of an ultrasonic motor according to still another embodiment of the present invention, FIG. 7 is a plan view of an ultrasonic motor according to still another embodiment of the present invention, and FIG. A plan view of a non-concentric ring-shaped piezoelectric vibrator of another embodiment used, FIGS. 9 to 11 are plan views of an ultrasonic motor of another embodiment of the present invention, and FIG. 12 is a plan view of a non-concentric ring-shaped piezoelectric vibrator used in the present invention. FIG. 13 is a plan view and partial side view of an ultrasonic motor according to still another embodiment of the present invention, and FIG. 14 is a perspective view of a non-concentric ring-shaped piezoelectric vibrator according to another embodiment of the present invention. A plan view and a side view of an ultrasonic motor according to still another embodiment of the invention, FIG. 15 is a plan view of an ultrasonic motor according to still another embodiment of the invention, and FIG. 16 shows a stator of a conventional ultrasonic motor. FIG. 7... Piezoelectric vibrator, 7a... Hole, 8, 9... Electrode, 10... Rotating shaft, 11... Driven body, 12...
・Contact body.

Claims (10)

【特許請求の範囲】[Claims] （１）円盤の中心と該円盤に設けた穴の中心とをずらし
て設けた非同心リング状圧電体振動子の１つまたは複数
個の対向面、側面または穴の内側面と被駆動体を組合わ
せることを特徴とする超音波モータ。(1) One or more opposing surfaces, side surfaces, or inner surfaces of the hole of a non-concentric ring-shaped piezoelectric vibrator, which is provided with the center of the disk offset from the center of the hole provided in the disk, and the driven body. An ultrasonic motor characterized by combining. （２）上記非同心リング状圧電体振動子の対向面、側面
または穴の内側面と被駆動体の間に知摩耗性部材を介在
させたことを特徴とする特許請求の範囲第１項記載の超
音波モータ。(2) Claim 1, characterized in that a wear-sensitive member is interposed between the opposing surface, side surface, or inner surface of the hole of the non-concentric ring-shaped piezoelectric vibrator and the driven body. ultrasonic motor. （３）被駆動体は回転体であることを特徴とする特許請
求の範囲第１項記載の超音波モータ。(3) The ultrasonic motor according to claim 1, wherein the driven body is a rotating body. （４）被駆動体は棒状体であることを特徴とする特許請
求の範囲第１項記載の超音波モータ。(4) The ultrasonic motor according to claim 1, wherein the driven body is a rod-shaped body. （５）円盤の中心と該円盤に設けた穴の中心とをずらし
て設け、かつ上記円盤の側面から上記穴にかけて切除部
を設けた非同心リング状圧電体振動子の１つまたは複数
個の対向面、側面または穴の内側面と被駆動体を組合わ
せることを特徴とする超音波モータ。(5) One or more non-concentric ring-shaped piezoelectric vibrators in which the center of the disk is offset from the center of the hole provided in the disk, and a cutout is provided from the side of the disk to the hole. An ultrasonic motor characterized by combining an opposing surface, a side surface, or an inner surface of a hole with a driven body. （６）上記非同心リング状圧電体振動子の対向面、側面
または穴の内側面と被駆動体の間に知摩耗性部材を介在
させたことを特徴とする特許請求の範囲第５項記載の超
音波モータ。(6) Claim 5, characterized in that a wear-sensitive member is interposed between the opposing surface, side surface, or inner surface of the hole of the non-concentric ring-shaped piezoelectric vibrator and the driven body. ultrasonic motor. （７）被駆動体は回転体であることを特徴とする特許請
求の範囲第５項記載の超音波モータ。(7) The ultrasonic motor according to claim 5, wherein the driven body is a rotating body. （８）被駆動体は棒状体であることを特徴とする特許請
求の範囲第５項記載の超音波モータ。(8) The ultrasonic motor according to claim 5, wherein the driven body is a rod-shaped body. （９）被駆動体は空洞を持つことを特徴とする特許請求
の範囲第５項記載の超音波モータ。(9) The ultrasonic motor according to claim 5, wherein the driven body has a cavity. （１０）上記切除部は円盤の半分またはそれ以上である
ことを特徴とする特許請求の範囲第５項記載の超音波モ
ータ。(10) The ultrasonic motor according to claim 5, wherein the cut portion is half or more of the disk.
JP62089134A 1987-04-11 1987-04-11 Ultrasonic motor Expired - Lifetime JP2632158B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62089134A JP2632158B2 (en) 1987-04-11 1987-04-11 Ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62089134A JP2632158B2 (en) 1987-04-11 1987-04-11 Ultrasonic motor

Publications (2)

Publication Number Publication Date
JPS63257473A true JPS63257473A (en) 1988-10-25
JP2632158B2 JP2632158B2 (en) 1997-07-23

Family

ID=13962409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62089134A Expired - Lifetime JP2632158B2 (en) 1987-04-11 1987-04-11 Ultrasonic motor

Country Status (1)

Country Link
JP (1) JP2632158B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206883A (en) * 1988-02-13 1989-08-21 Seiko Instr & Electron Ltd Progressive wave motor
US5216313A (en) * 1988-12-16 1993-06-01 Alps Electric Co., Ltd. Ultrasonic wave linear motor
JPH0580192U (en) * 1992-03-30 1993-10-29 株式会社田村電機製作所 Ultrasonic motor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206883A (en) * 1988-02-13 1989-08-21 Seiko Instr & Electron Ltd Progressive wave motor
US5216313A (en) * 1988-12-16 1993-06-01 Alps Electric Co., Ltd. Ultrasonic wave linear motor
JPH0580192U (en) * 1992-03-30 1993-10-29 株式会社田村電機製作所 Ultrasonic motor

Also Published As

Publication number Publication date
JP2632158B2 (en) 1997-07-23

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