JPS63247617A - Optical scale - Google Patents
Optical scaleInfo
- Publication number
- JPS63247617A JPS63247617A JP8225287A JP8225287A JPS63247617A JP S63247617 A JPS63247617 A JP S63247617A JP 8225287 A JP8225287 A JP 8225287A JP 8225287 A JP8225287 A JP 8225287A JP S63247617 A JPS63247617 A JP S63247617A
- Authority
- JP
- Japan
- Prior art keywords
- scale
- light
- rotary shaft
- optical scale
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 238000005530 etching Methods 0.000 description 4
- 239000003550 marker Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
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- 229910052804 chromium Inorganic materials 0.000 description 1
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- 229910052802 copper Inorganic materials 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Optical Transform (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は光学式スケールに関し、特に光学式ロータリー
エンコーダー等の被検物の回転状態を測定する際に該被
検物に装着する光学式スケールに関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to an optical scale, and in particular to an optical scale that is attached to an object to be measured, such as an optical rotary encoder, when measuring the rotational state of the object. It is related to.
（従来の技術）
従来より電子タイプライタ−等の情報機器に３いて、キ
ャリッジ等の可動部の位置・速度を検出する為に、光学
式エンコーダが多く用いられてきた。このような光学式
エンコーダは、通常可動部に固定され、光学式符号が記
録された光学式スケールに光を投射し、該光学式スケー
ルで変調された光を光電変換することによって前記可動
部の位置情報を符号化した電気信号として取り出すよう
に構成されていた。そして、光学式スケールとしては、
（Ｉ）金属板にエツチングによりスリットを加工したも
の
（ＩＩ）ガラス、プラスチック等の透明基板上に銀、銅
、クロム、アルミニウムなどの金属を蒸着し、金属層の
みをエツチング辷よってスリット状に削除したもの
等が用いられていた。(Prior Art) Optical encoders have traditionally been widely used in information devices such as electronic typewriters to detect the position and speed of movable parts such as carriages. Such an optical encoder is usually fixed to a movable part, projects light onto an optical scale on which an optical code is recorded, and photoelectrically converts the light modulated by the optical scale, thereby controlling the movable part. It was configured to extract location information as an encoded electrical signal. Optical scales are (I) a metal plate with slits etched into it (II) metals such as silver, copper, chromium, aluminum, etc. are deposited on a transparent substrate such as glass or plastic, and only the metal layer is used. A slit-like material was used by etching the material into a slit shape.
しかし、これらはエツチング可能なスリット幅が構成上
金属の厚みの２倍以上に制限され、微細な符号を記録す
ることが困難であった。また、製作工程が複雑で、しか
もエツチングに高価な感光性樹脂を用いる為、コスト高
になるといった欠点があった。However, the width of the slit that can be etched is limited to twice or more the thickness of the metal due to the structure, making it difficult to record fine symbols. In addition, the manufacturing process is complicated, and expensive photosensitive resin is used for etching, resulting in high costs.
又、従来の光学式スケールは、例えば第５図に示すよう
な方法で被検物に取り付けられていた。Furthermore, conventional optical scales have been attached to objects to be tested, for example, by the method shown in FIG.
第５図は従来の光学式スケールを用いて光学式エンコー
ダを構成した一例の概略図であり、図中２１は光源、２
２は金属板をエツチングすることによって光透過部と光
非透過部とを有する標識部を形成した従来の光学式スケ
ール、３０はコリメータレンズ、２３は金属板をエツチ
ングすることにより製作した固定光学格子、２４は受光
素子、２５は波形整形回路であり、受光素子２４からの
信号、例えば正弦波形を波形整形して同図のＳに示した
ような信号波形に整形するものである。２６は本光学式
エンコーダにより位置検出をされるべき被検物の回転軸
、２７は光学式スケール２２を軸２６に取り付けるため
に軸２６に接着されている取付板、２８は光学式スケー
ル２２を取付板２７に固定する際の押え板であり、２９
はその際に用いられるネジである。光源２１．固定光学
格子２３．受光素子２４はプラスチックや金属からなる
ケース（図示せず）に固定され、またケースは回転軸２
６にベアリング等を介して位置決められている。FIG. 5 is a schematic diagram of an example of an optical encoder configured using a conventional optical scale, in which reference numeral 21 indicates a light source;
2 is a conventional optical scale in which a marking part having a light transmitting part and a non-light transmitting part is formed by etching a metal plate, 30 is a collimator lens, and 23 is a fixed optical grating manufactured by etching a metal plate. , 24 is a light receiving element, and 25 is a waveform shaping circuit, which shapes the signal from the light receiving element 24, for example, a sine waveform, into a signal waveform as shown in S in the figure. Reference numeral 26 indicates a rotation axis of the object to be detected whose position is to be detected by this optical encoder, 27 indicates a mounting plate glued to the shaft 26 in order to attach the optical scale 22 to the shaft 26, and 28 indicates a mounting plate for attaching the optical scale 22 to the shaft 26. It is a holding plate when fixing to the mounting plate 27, and 29
is the screw used at that time. Light source 21. Fixed optical grating 23. The light receiving element 24 is fixed to a case (not shown) made of plastic or metal, and the case is connected to the rotating shaft 2.
6 via a bearing or the like.
ここで、光学式スケール２２と固定光学格子２３との隙
間は光学式エンコーダの性能に大きく影響を与えるため
微少であり、かつ、光学式スケール２２は隙間を変化さ
せることなく回転しなければならない。このためには、
取付板２７等に高い部品精度、接着精度が要求され、又
、同時に光学式スケール２２を被検物に回転軸２６に強
固に安定した状態で取り付けることも要求され、これら
のことを満足させようとすると作業工程及び装置全体が
複雑化してくる傾向があった。Here, the gap between the optical scale 22 and the fixed optical grating 23 is minute because it greatly affects the performance of the optical encoder, and the optical scale 22 must rotate without changing the gap. For this purpose,
High component accuracy and adhesion accuracy are required for the mounting plate 27, etc., and at the same time, it is also required that the optical scale 22 be firmly and stably attached to the rotating shaft 26 on the test object, so it is necessary to satisfy these requirements. In this case, the work process and the entire device tended to become complicated.
（発明が解決しようとする問題点）
本発明は本出願人の先の出願である特願昭６０−１４３
１３０号で提案した光学式スケールを更に改良し、簡単
な組立工程で被検物の回転軸に高錆度にしかも安定的に
取り付けることのできる光学式スケールの提供を目的と
する。(Problems to be solved by the invention) The present invention is based on the patent application filed in Japanese Patent Application No. 60-143, which was filed earlier by the present applicant.
The objective is to further improve the optical scale proposed in No. 130, and to provide an optical scale that can be stably attached to the rotating shaft of a test object with a high degree of rust through a simple assembly process.
（問題点を解決するための手段）
回転可能な円形状の部材の周縁部に設けた、該部材の回
転状態を検出する為の標識部と、該部材の回転中心に被
検物の回転軸を嵌入する為の内壁に溝部を有した穴部と
を設けたことである。(Means for Solving the Problem) A marking part is provided on the periphery of a rotatable circular member to detect the rotation state of the member, and a rotation axis of the specimen is located at the center of rotation of the member. A hole with a groove is provided in the inner wall for inserting the hole.
この他本発明の特徴は実施例において記載されている。Other features of the invention are described in the Examples.
（実施例）
第１図は、本発明の光学式スケールを用いて光学式エン
コーダを構成した一実施例を示す斜視図である。同図に
おいて、１は光源、２はコリメータレンズ、３は本発明
に基づいたロータリー型の光学式スケールで、被検物の
回転軸７に固定され、この駆動に伴なって回転する。光
学式スケール３の周縁部には、光透過部と光非透過部と
が交互に形成された標識部８と回転軸７に嵌入させる為
の回転中心に設けた穴部３２、そして後述するように穴
部３２の内壁には複数の溝部３１とが設けられている。(Embodiment) FIG. 1 is a perspective view showing an embodiment of an optical encoder using the optical scale of the present invention. In the figure, 1 is a light source, 2 is a collimator lens, and 3 is a rotary type optical scale based on the present invention, which is fixed to a rotation axis 7 of the object to be examined and rotates as the object is driven. The periphery of the optical scale 3 includes a marking part 8 in which light-transmitting parts and non-light-transmitting parts are formed alternately, a hole part 32 provided at the center of rotation for fitting the rotating shaft 7, and as described later. A plurality of grooves 31 are provided on the inner wall of the hole 32.
１１はフランジ部で光学式スケール３を回転軸７に嵌入
する際の双方の接合面を増大させている。Reference numeral 11 denotes a flange portion which increases the contact surface between the optical scale 3 and the rotary shaft 7 when the optical scale 3 is inserted into the rotating shaft 7.
４は透明部材から成る固定光学格子で、５は前記透明光
学路Ｙ−４を透過した光を電気信号に変換する受光素子
、６は波形整形回路で、受光素子５からの出力信号を波
形整形して同図の右側にＳで示したような信号波形に整
形するものである。4 is a fixed optical grating made of a transparent member, 5 is a light receiving element that converts the light transmitted through the transparent optical path Y-4 into an electrical signal, and 6 is a waveform shaping circuit that shapes the waveform of the output signal from the light receiving element 5. Then, the signal waveform is shaped as shown by S on the right side of the figure.
第２図（Ａ）、（Ｂ）は、航記光学式スケール３の構成
を示す概略図であり、同図（Ａ）は下面から見た図、同
図（Ｂ）は同図（Ａ）のＡＡ’における略断面図である
。光学式スケール３はガラス、プラスチック等の透過性
部材を用いて、凸状の標識部８とフランジ部１１とが一
体に成形されて成る。またこの標識部８には、光透過部
９と光非透過部ｌＯとが交互に規則正しく形成され、該
標識部８により第１図にように照射された光を変調する
。FIGS. 2(A) and 2(B) are schematic diagrams showing the configuration of the navigation optical scale 3; FIG. 2(A) is a view seen from the bottom, and FIG. It is a schematic cross-sectional view at AA' of The optical scale 3 is formed by integrally molding a convex marker portion 8 and a flange portion 11 using a transparent member such as glass or plastic. Further, light transmitting portions 9 and light non-transmitting portions 1O are regularly and alternately formed in this marker portion 8, and the light irradiated by the marker portion 8 is modulated as shown in FIG.
第３図は、第２図（Ａ）におけるＢＢ’の１部断面図で
ある。館述の光透過部９は、入射光Ｌ１に対し、その入
射角が臨界角より小さな角度をなす、例えば９ａのよう
な平坦面から成る。また、光非透過部１０は、入射光Ｌ
２に対し、その入射角が臨界角以上の角度となるように
傾斜している傾斜面１０ａ及び１０ｂから成る。例えば
、傾斜面１０ａと１０ｂのなす角度を９０°とし、傾斜
面１０ａと１０ｂとを合わせた水平方向の幅Ｗ＋（入射
光の光軸に垂直な面への傾斜面の投影像の幅を示す）と
平坦面９ａ夫々の幅Ｗ２とを同一とする。すると同図か
ら明らかなように、傾斜部１０ａに入射した光は入射角
が４５°となるので全反射されて直角に反射され、もう
１つの他の傾斜部Ｊｏｂに４５°の角度をなして入射し
、再び全反射されて直角に反射されてもとの入射側に戻
る。又、傾斜部１０ｂに入射した光についても上記と同
様に入射側に戻る。ところが、平坦面９ａに入射する光
はそのまま透過してしまう。このことは平坦面のみが開
口のスリットの役割を果たすことを意味する。従って、
この光学式スケール３は丁度スリットと遮光部が同一幅
、等ピッチで配列されたものと同じとなる。又、眞述の
固定光学格子４にも光学式スケール３と同様の凹凸が形
成されている。FIG. 3 is a partial sectional view of BB' in FIG. 2(A). The light transmitting section 9 mentioned above is made of a flat surface, such as 9a, which has an angle of incidence smaller than the critical angle with respect to the incident light L1. In addition, the light non-transmissive portion 10 is configured so that the incident light L
2, it consists of inclined surfaces 10a and 10b which are inclined so that the angle of incidence is greater than the critical angle. For example, assuming that the angle formed by the inclined surfaces 10a and 10b is 90°, the combined horizontal width W+ of the inclined surfaces 10a and 10b (indicates the width of the projected image of the inclined surface on a plane perpendicular to the optical axis of the incident light) ) and the width W2 of each flat surface 9a are the same. Then, as is clear from the figure, the light incident on the slope 10a has an incident angle of 45°, so it is totally reflected and reflected at a right angle, and the light enters another slope Job at an angle of 45°. The light enters, is totally reflected again, is reflected at right angles, and returns to the original incident side. Further, the light incident on the inclined portion 10b also returns to the incident side in the same manner as described above. However, the light incident on the flat surface 9a is transmitted as is. This means that only the flat surface plays the role of the opening slit. Therefore,
This optical scale 3 is exactly the same as one in which slits and light shielding parts are arranged with the same width and at equal pitches. Further, the fixed optical grating 4 mentioned above also has concavities and convexities similar to those of the optical scale 3.
次に、本発明の光学式スケールを用いた光学式エンコー
ダの動作を第１図及び第４図（八） 、 （Ｂ）を用い
て説明する。第４図（八） 、 （Ｂ）は光学式スケー
ル３．固定光学格子４及び受光素子５の略断面図で５間
図（Ａ）が光学式スケール３と固定光学格子４とに形成
された標識の位相が一致した状態、同図（Ｂ）が１／２
周期位相がずれた状態を示す。Next, the operation of the optical encoder using the optical scale of the present invention will be explained using FIG. 1 and FIG. 4 (8) and (B). Figures 4 (8) and (B) show the optical scale 3. In the schematic cross-sectional views of the fixed optical grating 4 and the light receiving element 5, (A) shows the state in which the phases of the marks formed on the optical scale 3 and the fixed optical grating 4 match, and (B) shows the state in which the phases of the marks formed on the optical scale 3 and the fixed optical grating 4 match. 2
Indicates a state where the periodic phase is shifted.
第１図において、光源ｌからの光はコリメータレンズ２
により平行光とされ光学式スケール３の上方から入射す
る。上述のように上方から入射した光はその平坦面で光
学式スケール３を透過する。又、その傾斜面では２回全
反射されて光学式スケール３を透過しない。従って、光
学式スケール３を透過した光により規則的な光の明暗分
布を生じる。ここで光学式スケール３はその回転軸７と
共に図示矢印方向に回転し、その明暗分布も同方向に移
動する。ここで、固定光学格子４と光学式スケールとに
形成された符号は同一、即ち、固定光学格子４の明暗分
布と、入射する光の明暗分布とは等ピッチとなっている
ので、双方の凹凸の位相が第４図（Ａ）の如く一致した
時には、光学式スケール３を透過した光は全て固定光学
格子４を透過するので受光素子５へ入射する光量は最大
となる。又、凹凸の位相が第４図（Ｂ）のように１／２
周期ズした時には光学格子同士の傾斜面と平坦面とが夫
々対応した位置となるので、光学式スケール３を透過す
る光は全て固定光学格子４の傾斜面で２回全反射されて
入射側に戻り、受光素子５へ入射する光量は最小となる
。In Fig. 1, the light from the light source l is transmitted through the collimator lens 2.
The light is made into parallel light and enters the optical scale 3 from above. As described above, the light incident from above is transmitted through the optical scale 3 through its flat surface. Furthermore, the light is totally reflected twice on the inclined surface and does not pass through the optical scale 3. Therefore, the light transmitted through the optical scale 3 produces a regular brightness/darkness distribution of light. Here, the optical scale 3 rotates in the direction of the arrow shown in the figure together with its rotation axis 7, and its brightness distribution also moves in the same direction. Here, the signs formed on the fixed optical grating 4 and the optical scale are the same, that is, the brightness distribution of the fixed optical grating 4 and the brightness and darkness distribution of the incident light are at the same pitch, so the unevenness of both When the phases match as shown in FIG. 4(A), all of the light that has passed through the optical scale 3 passes through the fixed optical grating 4, so the amount of light that enters the light receiving element 5 becomes maximum. Also, the phase of the unevenness is 1/2 as shown in Figure 4 (B).
When the period is shifted, the inclined surfaces and flat surfaces of the optical gratings correspond to each other, so all the light that passes through the optical scale 3 is totally reflected twice by the inclined surface of the fixed optical grating 4 and returns to the incident side. The amount of light that returns and enters the light receiving element 5 becomes minimum.
そして、この光量が最大になるときと最小になるときと
の間には、光学式スケール３の平坦面と固定光学格子４
の平坦面とが部分的に一致し、その一致した部分の面積
の割合に応じた光量を受光素子５は受光する。従って、
受光素子５からの出力信号は正弦波状となり、この出力
信号は波形整形回路６により第１図のＳのようなパルス
状の信号に整形される。Between the time when the amount of light is maximum and the time when it is minimum, there is a gap between the flat surface of the optical scale 3 and the fixed optical grating 4.
The light-receiving element 5 receives a light amount corresponding to the proportion of the area of the matched portion. Therefore,
The output signal from the light-receiving element 5 has a sinusoidal waveform, and this output signal is shaped by the waveform shaping circuit 6 into a pulse-like signal such as S in FIG.
本発明の光学式スケールは、例えば第２図の如きスケー
ルと同一形状のマスク型を加工し、ここからＮｉ電鋳等
によって反転型をとり、次にこれを成形用金型として、
プラスチック等の材料に凹凸を転写することによって作
製される。従って、被検物（実施例では回転軸７）にス
ケールを取り付ける為の接合部たるフランジ部１１も、
高精度にしかも簡単に形成される。又、第１図において
、光学式スケール３を回転軸７に取り付ける場合には、
まず光学式スケール３と固定光学格子４間の受光素子５
に形容を与えない部分に、隙間ｌに相当する厚さのスペ
ーサーをはさみ、次に光学式スケール３を押さえて回転
させながらフランジ部１１と回転軸７との間及び溝部３
１に接着剤を流し込む。そして、接着剤が完全に乾燥し
た後、スペーサーを引きぬく。この作業によって光学式
スケール３と固定光学格子４との隙間は正しくスペーサ
ーの厚み！に調整され、又回転させながら接着されるの
で隙間の変化はほとんどない。For the optical scale of the present invention, for example, a mask mold having the same shape as the scale as shown in FIG.
It is manufactured by transferring the unevenness to a material such as plastic. Therefore, the flange part 11, which is the joint part for attaching the scale to the test object (rotary shaft 7 in the embodiment), also
It can be easily formed with high precision. In addition, in FIG. 1, when attaching the optical scale 3 to the rotating shaft 7,
First, the light receiving element 5 between the optical scale 3 and the fixed optical grating 4
A spacer with a thickness corresponding to the gap l is inserted between the parts that do not give shape to the spacer, and then the optical scale 3 is held down and rotated while the spacer between the flange part 11 and the rotating shaft 7 and the groove part 3 are inserted.
Pour the adhesive into 1. Then, after the adhesive is completely dry, pull out the spacer. With this process, the gap between the optical scale 3 and the fixed optical grating 4 is the correct thickness of the spacer! Since it is adjusted and glued while rotating, there is almost no change in the gap.
特に本実施例ではフランジ部１１に設けた穴部３２と回
転軸７との取付精度を高める為に、双方の嵌合がきつく
なるようにしている。この為穴部３２と回転軸７との隙
間は全んどなくなるが、穴部３２の内壁に複数の溝部３
１を設け、該構部３１に接着剤を流し込むようにして、
これによりフランジ部１１の接着強度を高めている。In particular, in this embodiment, in order to improve the accuracy of attachment between the hole 32 provided in the flange portion 11 and the rotary shaft 7, the fitting between the two is made tight. Therefore, the gap between the hole 32 and the rotating shaft 7 is completely eliminated, but there are a plurality of grooves 3 on the inner wall of the hole 32.
1 and pour the adhesive into the structural part 31,
This increases the adhesive strength of the flange portion 11.
尚、本実施例において穴部３２の内壁に設ける溝部３１
は回転軸７の回転軸方向に平行に又は非平行に複数個設
けても良く、又、内壁に添って螺施状や８次状に設けて
も良い。Note that in this embodiment, the groove 31 provided on the inner wall of the hole 32
A plurality of these may be provided in parallel or non-parallel to the direction of the rotation axis of the rotating shaft 7, or may be provided in a spiral shape or an octagonal shape along the inner wall.
又、本実施例においては溝部３１をフランジ部１１の穴
部３２の代わりに回転軸７の外周に若しくは双方に設け
ても良い。Further, in this embodiment, the groove portion 31 may be provided on the outer periphery of the rotating shaft 7 or on both sides instead of the hole portion 32 of the flange portion 11.
尚、光学式スケール３と固定光学格子４との間に設ける
スペーサーとしては、ウレタンシート等を使用すると、
光学式スケールに傷が付きにくく好都合である。又、ス
ペーサーをはさみ込む場所として、光学式スケール３の
標識部８の更に外周に平坦な部分を設け、これに対向す
る固定光学格子４の部分も平坦に形成して、これらの平
坦部を基準にすると、より作業が容易となる。Note that if a urethane sheet or the like is used as a spacer between the optical scale 3 and the fixed optical grating 4,
This is advantageous because the optical scale is less likely to be scratched. Further, a flat part is provided on the outer periphery of the marking part 8 of the optical scale 3 as a place for inserting the spacer, and a part of the fixed optical grating 4 facing this is also formed flat, and these flat parts are used as a reference. This will make the work easier.
本発明は、以上の実施例に限らず、紳々の応用が可能で
ある。例えば光学式エンコーダに用いる場合、透過光で
はなく、反射光を検出するようにしてもかまわない。The present invention is not limited to the above embodiments, and can be applied in various ways. For example, when used in an optical encoder, reflected light may be detected instead of transmitted light.
（発明の効果）
本発明によれば光学式スケールの回転軸取付は用穴部の
内壁に溝部を一体成形して設けることにより、被検物の
回転軸への取付けを容易にし、しかも取付は強度を高め
た高精度の光学式スケールを達成することができる。(Effects of the Invention) According to the present invention, the rotary shaft of the optical scale is mounted by integrally molding the groove on the inner wall of the hole, thereby making it easy to mount the object to be measured on the rotary shaft. A highly accurate optical scale with increased strength can be achieved.
第１図は本発明の光学式スケールを用いて光学式エンコ
ーダを構成した例を示す斜視図、第２図（Δ） 、 （
Ｂ）は夫々本発明の光学式スケールの一実施例を示す概
略図、第３図は第２図の光学式スケールの部分断面図、
第４図（八） 、 （Ｂ）は夫々第１図の光学式エンコ
ーダの動作を説明する要部断面図、第５図は従来の光学
式スケールを用いた光学式エンコーダの構成例を示す斜
視図である。
３−−−−−−光学式スケール、８−−−−−標識部、
９・・・・・・光透過部 ９ ａ−＝平坦面、１
０−・・光非透過部、
１０ａ、１０ｂ −傾斜部、 １１−・・フランジ
部、３２−・・穴部、 ３１・・・溝部。Fig. 1 is a perspective view showing an example of an optical encoder configured using the optical scale of the present invention, and Fig. 2 (Δ), (
B) is a schematic diagram showing one embodiment of the optical scale of the present invention, FIG. 3 is a partial cross-sectional view of the optical scale of FIG. 2,
Figures 4 (8) and (B) are sectional views of essential parts explaining the operation of the optical encoder shown in Figure 1, respectively, and Figure 5 is a perspective view showing an example of the configuration of an optical encoder using a conventional optical scale. It is a diagram. 3------Optical scale, 8---Label part,
9...Light transmitting part 9 a-=flat surface, 1
0--Light non-transmissive portion, 10a, 10b-Slanted portion, 11--Flange portion, 32--Hole portion, 31--Groove portion.
Claims (2)
材の回転状態を検出する為の標識部と、該部材の回転中
心に被検物の回転軸を嵌入する為の内壁に溝部を有した
穴部とを設けたことを特徴とする光学式スケール。(1) A marking part provided on the peripheral edge of a rotatable circular member to detect the rotational state of the member, and an inner wall for fitting the rotation axis of the specimen into the rotation center of the member. An optical scale characterized by having a hole having a groove.
標識部を光透過部と入射光線に対し、その入射角が臨界
角以上となるように設定した傾斜面から成る光非透過部
とを交互に設けて構成したことを特徴とする特許請求の
範囲第１項記載の光学式スケール。(2) The member is made of a light-transmitting member, and the marking part is made of a light-transmitting part and a light-impermeable part consisting of an inclined surface set such that the angle of incidence is equal to or greater than a critical angle with respect to the incident light beam. 2. The optical scale according to claim 1, wherein the optical scale is configured by alternately providing the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8225287A JPS63247617A (en) | 1987-04-03 | 1987-04-03 | Optical scale |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8225287A JPS63247617A (en) | 1987-04-03 | 1987-04-03 | Optical scale |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63247617A true JPS63247617A (en) | 1988-10-14 |
Family
ID=13769248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8225287A Pending JPS63247617A (en) | 1987-04-03 | 1987-04-03 | Optical scale |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63247617A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02161311A (en) * | 1988-12-14 | 1990-06-21 | Matsushita Electric Ind Co Ltd | Optical encoder |
| JPH02118823U (en) * | 1989-03-13 | 1990-09-25 |
-
1987
- 1987-04-03 JP JP8225287A patent/JPS63247617A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02161311A (en) * | 1988-12-14 | 1990-06-21 | Matsushita Electric Ind Co Ltd | Optical encoder |
| JPH02118823U (en) * | 1989-03-13 | 1990-09-25 |
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