JPS63239043A - Infrared reflecting article - Google Patents
Infrared reflecting articleInfo
- Publication number
- JPS63239043A JPS63239043A JP62296117A JP29611787A JPS63239043A JP S63239043 A JPS63239043 A JP S63239043A JP 62296117 A JP62296117 A JP 62296117A JP 29611787 A JP29611787 A JP 29611787A JP S63239043 A JPS63239043 A JP S63239043A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- reflectance
- infrared
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002834 transmittance Methods 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 17
- 229910052709 silver Inorganic materials 0.000 claims description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 11
- 239000004332 silver Substances 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 239000011521 glass Substances 0.000 description 14
- 230000003595 spectral effect Effects 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 239000011701 zinc Substances 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 239000006018 Li-aluminosilicate Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- -1 blue color Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000005329 float glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、十分な可視光線透過率を有する赤外反射物品
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an infrared reflective article having sufficient visible light transmittance.
[従来の技術]
従来より、赤外反射物品として知られているものには、
主に冷房負荷を軽減する目的で用いられるソーラーコン
トロールと呼ばれるタイプのものと、主に暖房負荷を軽
減する目的で用いられるヒートミラーと呼ばれるタイプ
のものがある。後者に最低限必要とされる特性は可視域
での高い透過率と赤外域での十分高い反射率とであるが
、近赤外域での反射率を上げることができれば、同時に
ソーラーコントロールとしての働きも合わせ持つことに
なり、より好ましい。[Prior Art] Conventionally known infrared reflective articles include:
There is a type called solar control, which is mainly used to reduce the cooling load, and a type called heat mirror, which is used mainly to reduce the heating load. The minimum characteristics required for the latter are high transmittance in the visible range and sufficiently high reflectance in the infrared range, but if the reflectance in the near-infrared range can be increased, it will also work as a solar control device. It is more preferable to have both.
従来このタイプの熱線反射ガラスとしては(1)金属の
100人程鹿の薄膜
(2)ドープされた酸化物半導体の膜
(3)誘電体膜/金属膜/誘電体膜の3層構成の3種類
が知られていた。具体的には(りとしてはAu、 Ag
、 Cuのg膜などが用いられており、(2)としては
’3n02. In2O3などの5000Å以上の膜が
用いられている。又(3)としてはAg膜を誘電体の膜
でサンドイッチした構成が特公昭47−8315号に開
示されている。Conventionally, this type of heat-reflecting glass has (1) a thin metal film (2) a doped oxide semiconductor film (3) a three-layer structure of dielectric film/metal film/dielectric film. type was known. Specifically (as Au, Ag
, Cu g film, etc. are used, and (2) is '3n02. A film of 5000 Å or more such as In2O3 is used. As for (3), a structure in which an Ag film is sandwiched between dielectric films is disclosed in Japanese Patent Publication No. 47-8315.
これらのうち(1)のタイプでは赤外域での反射率を十
分高くするためには金属膜の膜厚を大きくする必要があ
り、可視域での透過率が下がってしまうことが欠点とな
る。又、(2)のタイプでは赤外域での反射率を十分高
くするためには膜厚が5oooÅ以上と大きくなる点と
、近赤外域での反射率を上げられないなどの欠点がある
。Among these types, type (1) requires the thickness of the metal film to be increased in order to sufficiently increase the reflectance in the infrared region, and the drawback is that the transmittance in the visible region decreases. Further, type (2) has drawbacks such as the fact that the film thickness must be as large as 500 Å or more in order to sufficiently increase the reflectance in the infrared region, and the reflectance in the near-infrared region cannot be increased.
これに対しく3)のタイプでは金属膜を挟んだ誘電体膜
が反射防止膜として作用するため、赤外域での十分高い
反射率と可視域での高い透過率とを、全体として100
0Å以下の膜厚で実現できるなどの利点があり、広く用
いられている。On the other hand, in type 3), the dielectric film sandwiching the metal film acts as an antireflection film, so it has a sufficiently high reflectance in the infrared region and a high transmittance in the visible region.
It has the advantage that it can be realized with a film thickness of 0 Å or less, and is widely used.
しかしこのタイプのものでも、可視域での高透過率を得
るためには中間の金属膜の厚みはおよそ200Å以下、
好ましくは150Å以下であることが必要であるため、
赤外域での反射率はせいぜい95%程度であり、故に放
射率は5%程度となる。又、近赤外域の反射が上がらず
、太陽エネルギー反射率は25%程度以下となってしま
う、更にあとで比較例として述べるように1分光反射特
性は可視域でU字型となり、反射色としては紫系統の色
調しか出すことができないため1色彩上のバリエーショ
ンが限られてしまい、意匠性の点からは大きな欠点とな
っていた。However, even with this type, in order to obtain high transmittance in the visible range, the thickness of the intermediate metal film must be approximately 200 Å or less.
Since it is necessary that the thickness is preferably 150 Å or less,
The reflectance in the infrared region is about 95% at most, and therefore the emissivity is about 5%. In addition, the reflection in the near-infrared region does not increase, and the solar energy reflectance is about 25% or less.Furthermore, as will be described later as a comparative example, the 1-spectral reflection characteristics are U-shaped in the visible region, and the reflected color is Since it can only produce purple-based tones, variations in one color are limited, which is a major drawback from a design point of view.
以上をまとめると、従来の技術では
(1) 可視域の高透過率と赤外域での十分高い反射
率を得るためには(3)のタイプが最も良いが、なお不
十分であり、更に
(2) 反射色調が紫系統に限られる(3) 近赤
外域での反射の立上がりが鈍いという欠点を有していた
のである。To summarize the above, in the conventional technology, (1) type (3) is the best in order to obtain high transmittance in the visible range and sufficiently high reflectance in the infrared range, but it is still insufficient, and furthermore, ( 2) The reflected color tone is limited to purple. (3) The reflection has a slow rise in the near-infrared region.
[発明の解決しようとする問題点]
本発明の目的は、従来技術の有していた前述の欠点を解
消し赤外域での非常に高い反射率と可視域での十分高い
透過率とを有し、かつ反射色がかなりの自由度で変化さ
せることができるような新規な赤外反射物品を提供する
ことにある。[Problems to be Solved by the Invention] The object of the present invention is to eliminate the above-mentioned drawbacks of the prior art and to provide a system that has extremely high reflectance in the infrared region and sufficiently high transmittance in the visible region. The object of the present invention is to provide a novel infrared reflective article whose reflective color can be changed with a considerable degree of freedom.
又、本発明の別の目的は、赤外域での非常に高い反射率
と可視域での十分高い透過率とを有し、かつ近赤外域で
反射率が鋭い立ち上がりを示すような新規な赤外反射物
品を提供することにある。Another object of the present invention is to develop a novel infrared ray material that has extremely high reflectance in the infrared region, sufficiently high transmittance in the visible region, and exhibits a sharp rise in reflectance in the near-infrared region. The purpose of the present invention is to provide an externally reflective article.
[問題点を解決するための手段]
本発明は前述の問題点を解決するべくなされたものであ
り、透明基板と該基板上に形成された5層コーティング
からなり、該コーティングは基板側から順にZnO膜の
第1層、Ag膜の第2層、ZnOl1iaの第3層、A
g膜の第4層、ZnO膜の第5層より成り、上記Ag膜
の厚みが80〜250人の範囲にあり、可視光線透過率
が805以上であるような赤外反射物品を提供するもの
である。[Means for Solving the Problems] The present invention has been made to solve the above-mentioned problems, and consists of a transparent substrate and a five-layer coating formed on the substrate. First layer of ZnO film, second layer of Ag film, third layer of ZnOl1ia, A
To provide an infrared reflective article comprising a fourth layer of G film and a fifth layer of ZnO film, the thickness of the Ag film is in the range of 80 to 250, and the visible light transmittance is 805 or more. It is.
以下、本発明を更に詳細に説明する。The present invention will be explained in more detail below.
図1は、本発明に係る5層コーティングの形成された赤
外線反射物品の一部断面図を示し、図1において10は
透明基板、 11はZnO膜からなる第1層、12は銀
膜からなる第2層、13はZnO膜からなる第3層、
14は銀膜からなる第4層、15はZnO膜からなる第
5層を示す。FIG. 1 shows a partial cross-sectional view of an infrared reflective article formed with a five-layer coating according to the present invention, in which 10 is a transparent substrate, 11 is a first layer made of a ZnO film, and 12 is a silver film. The second layer, 13 is the third layer made of ZnO film,
14 is a fourth layer made of a silver film, and 15 is a fifth layer made of a ZnO film.
本発明における透明基板としては、所望の可視光透過率
、色調等に応じて、無色透明又は着色透明性のソーダラ
イムシリケートガラスからなる普通板ガラス、フロート
ガラス、ブルー色、ブロンズ色、グリーン色、その他各
種色調の熱線吸収ガラス、あるいはアルミノシリケート
ガラス、リチウムアルミノシリケートガラス、硼珪酸塩
ガラス、その他の各種ガラスから選ばれるガラス板、又
はプラスチック板等が使用できる。The transparent substrate in the present invention may be a plain glass made of colorless transparent or colored transparent soda lime silicate glass, float glass, blue color, bronze color, green color, etc. depending on the desired visible light transmittance, color tone, etc. Heat-absorbing glasses of various colors, glass plates selected from aluminosilicate glass, lithium aluminosilicate glass, borosilicate glass, and various other glasses, or plastic plates can be used.
又、本発明における第1.第3.第5層にはZnO膜が
用いられるが、これに若干の添加物を含んでいてもよい
、 ZnO膜は、耐久性に優れているとともに、スパッ
ターでコーティングする際の成膜スピードが速く、生産
性の面からも最適である。In addition, the first aspect of the present invention. Third. A ZnO film is used for the fifth layer, but it may contain some additives. ZnO film has excellent durability and can be coated by sputtering at a fast film formation speed, making it easy to manufacture. It is also optimal in terms of sex.
本発明の望ましい態様における各層の膜厚範囲としては
、おおよそ次の通りである。すなわち、第1層のZnO
膜としては200〜eoo人、第2層のAg膜としては
80〜250人、第3層のZnO膜としては400−1
200人、第4層のAg膜とじては80〜250人、第
5層のZnO膜としては200^600人の範囲が最適
である。これらの膜厚範因は、可視域での高透過率を実
現させるために8定されたものであり、H々厚がこの範
囲を逸脱jると、干渉条件からはずれ、反射防止効果が
契揮されず、可視光線透過率が低下してしまう。The thickness range of each layer in a desirable embodiment of the present invention is approximately as follows. That is, the first layer of ZnO
200~eoo for the film, 80~250 for the second layer Ag film, 400~1 for the third layer ZnO film
The optimal number is 200 people, 80 to 250 people for the fourth layer Ag film, and 200^600 people for the fifth layer ZnO film. These film thickness ranges have been established in order to achieve high transmittance in the visible range, and if the film thickness deviates from this range, the interference condition will be violated and the antireflection effect will not be achieved. visible light transmittance decreases.
銀膜の膜厚は、近赤外域での反射率の立ち」がりを鋭く
するには厚い方が好ましいが、透辿率が低下すると共に
低反射領域が狭くなり、か射色調のバリエーションが得
られなくなるとしう副作用を伴なう。一方、透過率の上
昇と反身色調の自由度という点からは銀膜の膜厚はgt
r方が好ましいが、近赤外域での反射率の立ち」がりが
鈍くなり、赤外域での反射率も低下しズしまう。このた
め銀膜の膜厚としては80〜110人の範囲にあること
が最も好ましい。It is preferable for the silver film to be thicker in order to sharpen the rise in reflectance in the near-infrared region, but as the transmittance decreases, the low reflection region becomes narrower, resulting in variations in reflective color tone. It is accompanied by side effects. On the other hand, from the viewpoint of increasing transmittance and freedom of color tone, the thickness of the silver film is
Although r is preferable, the rise of the reflectance in the near-infrared region becomes slow, and the reflectance in the infrared region also decreases. Therefore, it is most preferable that the thickness of the silver film is in the range of 80 to 110.
本発明の5層コーティングは、真空蒸着法イスバッタリ
ング法又はイオンプレーティングカにより容易に形成す
ることができるが、これrの方法に限定されるものでは
なく、他の手法、i 成してもよい。The five-layer coating of the present invention can be easily formed by vacuum evaporation, chair battering, or ion plating, but is not limited to these methods, and may also be formed by other methods. good.
又、本発明の5層コーティングは付着力や耐久性を向上
させる等の目的により、その基板との界面又は各層間の
界面又は空気との界面においてその光学的特性を変化さ
せない程度の膜厚をもった境界層が挿入されてもよい。In addition, for the purpose of improving adhesion and durability, the five-layer coating of the present invention has a thickness that does not change the optical properties at the interface with the substrate, the interface between each layer, or the interface with air. A boundary layer may also be inserted.
I [作用]
本発明において、第2Mと第4層の銀膜は近赤外域より
長波長領域における反射率を上げる働きをする。この意
味では1aIl!i!は厚い程好ましいが、可視域での
透過率を上げるためには薄い方が良い。I [Function] In the present invention, the silver films of the second M and fourth layers serve to increase the reflectance in the wavelength region longer than the near-infrared region. In this sense, 1aIl! i! The thicker it is, the better, but the thinner it is in order to increase the transmittance in the visible range.
又、本発明において第1層、第3層及び第5層のZnO
膜は銀膜の可視域における反射防止層として作用し、可
視域の透過率を上昇させる働) きをする。Furthermore, in the present invention, the first, third and fifth layers of ZnO
The film acts as an anti-reflection layer for the silver film in the visible range, increasing the transmittance in the visible range.
又、本発明において各層の膜厚を適当な範囲で5Ill
整することにより、可視域での高透過率と近赤外域〜赤
外域における高反射率とを保持したまま1反射色調を相
当自由に変化させることができる。In addition, in the present invention, the thickness of each layer is set within an appropriate range of 5Ill.
By adjusting the reflectance, the color tone of one reflection can be changed fairly freely while maintaining high transmittance in the visible region and high reflectance in the near-infrared region to infrared region.
以下、実施例に即して本発明をより詳細に述べることに
する。Hereinafter, the present invention will be described in more detail with reference to Examples.
[実施例〕
実施例1
ガラス基板を真空槽にセットし、 IX 1O−6To
rrまで排気した。次に酸素ガスを導入し、圧力を 1
.7X 1O−3Torrとし、亜鉛ターゲットを高周
波マグネトロンスパッタして、基板上に第1層としてZ
nO膜を形成した。このときの膜厚は約400人となる
ようにした0次にアルゴン雰囲気で1.4X 10へ3
Torrの圧力で銀ターゲットをM周波マグネトロンス
パッタして、第2層としIAg膜を形成した。このとき
の膜厚は約140人となるようにした0次いで、第1層
と同じ条件2−ZnO膜の第3層を約800A形成した
0次いで第2層と同じ条件でAg膜の第4層を約140
人形成した6次いで第1層と同じ条件でZnO膜の第5
層を約400人形成した。[Example] Example 1 A glass substrate was set in a vacuum chamber, and IX 1O-6To
Exhausted to rr. Next, introduce oxygen gas and increase the pressure to 1
.. 7X 1O-3 Torr, a zinc target was high-frequency magnetron sputtered, and Z was deposited as the first layer on the substrate.
An nO film was formed. At this time, the film thickness was 1.4X 10 to 3 in a zero-order argon atmosphere so that the film thickness was about 400.
A silver target was subjected to M-frequency magnetron sputtering under a pressure of Torr to form an IAg film as a second layer. The film thickness at this time was set to about 140 layers.Next, the third layer of ZnO film was formed at about 800A under the same conditions as the first layer.Then, the fourth layer of Ag film was formed under the same conditions as the second layer. Approximately 140 layers
The fifth layer of ZnO film was formed under the same conditions as the first layer.
A group of about 400 people was formed.
こうして得られた試料lの分光透過率及び分光反射率を
示したのが図2の21.22である。可視域での高透過
率と、近赤外域での反射の鋭い立ち上がり及び可視中央
部における反射の極大の存在を示しており、反射色は紫
であった。21.22 in FIG. 2 shows the spectral transmittance and spectral reflectance of sample 1 thus obtained. It showed high transmittance in the visible region, a sharp rise in reflection in the near-infrared region, and the presence of a maximum reflection in the central visible region, and the reflected color was purple.
又、波長10uLにおける反射率は98%であった。Further, the reflectance at a wavelength of 10 μL was 98%.
又、この5層コーテイング膜の表面抵抗は3.4Ω/口
であった。Moreover, the surface resistance of this five-layer coating film was 3.4Ω/hole.
特性を下にまとめた。The characteristics are summarized below.
実施例2
:52、第4層のAg膜の厚みを約100人とし、第3
層のZnO膜の厚みを約650人とした以外は実施例1
と同じ条件でガラス基板上へ5層コーティングを行なっ
た。得られた試料2の分光曲線は可視域での高い透過率
と近赤外域における反射率の鋭い立ち上がり及び可視域
における右上がりの反射特性を示し、反射色はブロンズ
であった。又、波長10JLにおける反射率は95%で
あった。又、この5層コーテイング膜の表面抵抗は5.
5Ω/口であった。Example 2: 52, the thickness of the fourth layer Ag film was about 100, and the third layer
Example 1 except that the thickness of the ZnO film was approximately 650.
Five layers were coated on a glass substrate under the same conditions as above. The resulting spectral curve of Sample 2 showed high transmittance in the visible region, a sharp rise in reflectance in the near-infrared region, and upward-sloping reflection characteristics in the visible region, and the reflected color was bronze. Further, the reflectance at a wavelength of 10 JL was 95%. Also, the surface resistance of this five-layer coating film is 5.
It was 5Ω/mouth.
特性を下にまとめた。The characteristics are summarized below.
実施例3
第3層のZnO膜の厚みを 約950人とした以外は実
施例2と同じ条件でガラス基板上へ5層コーティングを
行なった。得られた試料3の分光曲線は可視域での高い
透過率と近赤外域での反射率の鋭い立ち上がり及び可視
域における左−ヒがりの反射特性を示し、反射色はブル
ーグリーンであった。又、波長10ルにおける反射率は
95%であった。又、この5層コーテイング膜の表面抵
抗は5.4Ω/口であった。Example 3 Five layers were coated on a glass substrate under the same conditions as in Example 2, except that the thickness of the third layer ZnO film was about 950 layers. The resulting spectral curve of Sample 3 showed high transmittance in the visible region, a sharp rise in reflectance in the near-infrared region, and left-leaning reflection characteristics in the visible region, and the reflected color was blue-green. Further, the reflectance at a wavelength of 10 liters was 95%. Further, the surface resistance of this five-layer coating film was 5.4Ω/mouth.
特性を下にまとめた。The characteristics are summarized below.
実施例4
第2、第4層のAg膜の厚みを約200人とした以外は
実施例1と同じ条件でガラス基板上へ5層コーティング
を行なった。得られた試料4の分光曲線は可視域での高
い透過率と近赤外域における反射率の鋭い立ち上がりを
示し、反射色はパープルであった。又、波長10終にお
ける反射率は99%であった。又、この5層コーテイン
グ膜の表面抵抗は1Ω/口であった。Example 4 Five layers were coated on a glass substrate under the same conditions as in Example 1, except that the thickness of the second and fourth Ag films was about 200 layers. The resulting spectral curve of Sample 4 showed high transmittance in the visible region and a sharp rise in reflectance in the near-infrared region, and the reflected color was purple. Further, the reflectance at wavelength 10 was 99%. Further, the surface resistance of this five-layer coating film was 1Ω/mouth.
特性を下にまとめた。The characteristics are summarized below.
実施例5
実施例4により得られた試料4(寸法5 cmX15c
mX O,3cm )について電磁波シールド効果測定
装置(タケダ理研■T R4172型)を用いて電界強
度の減衰率を周波数との関係を測定した結果を下表に示
す、なお、試料5は5n02をコートした表面抵抗15
Ω/sqのガラス板であり、比較例として挙げたもので
ある。Example 5 Sample 4 obtained in Example 4 (dimensions 5 cm x 15 cm
The table below shows the results of measuring the relationship between the attenuation rate of the electric field strength and the frequency using an electromagnetic shielding effect measurement device (Takeda Riken model TR4172) for the sample (mX O, 3 cm).Sample 5 was coated with 5n02. surface resistance 15
This is a glass plate of Ω/sq, and is used as a comparative example.
上記表から明らかなように、本発明に係る試料4は、電
磁遮蔽性能が高いことが認められる。As is clear from the above table, Sample 4 according to the present invention is recognized to have high electromagnetic shielding performance.
比較例1
実施例1と同様にしてガラス基板を準備した後、まず亜
鉛ターゲットを高周波マグネトロンスパッタして基板上
に第1層としてZnO膜を約400人形成した。次いで
実施例1と同様にして第2層としてAg膜を約140人
形成した。次いで第1層と同じ条件で第3層としてZn
O膜を約400人形成した。Comparative Example 1 After preparing a glass substrate in the same manner as in Example 1, about 400 ZnO films were formed as a first layer on the substrate by high-frequency magnetron sputtering using a zinc target. Next, in the same manner as in Example 1, approximately 140 Ag films were formed as a second layer. Next, Zn was added as the third layer under the same conditions as the first layer.
Approximately 400 people formed O membranes.
こうして得られた試料6の分光透過率及び反射率を示し
たのが図3の31.32である。図2と比べると近赤外
域での反射率の立ち上がりが鈍く、可視域での反射カー
ブがU字形を示しており反射色は青紫であった。又、波
長IOルにおける反射率は89%であり、実施例1〜4
に比べると劣っていた。特性を下にまとめた。31.32 in FIG. 3 shows the spectral transmittance and reflectance of sample 6 thus obtained. Compared to FIG. 2, the rise in reflectance in the near-infrared region was slow, the reflection curve in the visible region was U-shaped, and the reflected color was blue-purple. In addition, the reflectance at wavelength IO was 89%, and Examples 1 to 4
was inferior compared to The characteristics are summarized below.
[発明の効果]
以上の実施例及び比較例から明らかなように、本発明に
よれば、十分高い可視光線透過率と非常に高い赤外反射
率及び近赤外域での反射率の鋭い立上がりを有する赤外
反射物品を得ることができる。特に本発明によれば低輻
射のガラス、特にε≦0.1のガラスを得ることができ
る。[Effects of the Invention] As is clear from the above Examples and Comparative Examples, the present invention achieves sufficiently high visible light transmittance, very high infrared reflectance, and a sharp rise in reflectance in the near-infrared region. It is possible to obtain an infrared reflective article having the following characteristics. In particular, according to the present invention, it is possible to obtain a glass with low radiation, especially a glass with ε≦0.1.
又、各層の膜厚を適当な範囲で調整することにより、反
射色調を相当自由に変化させることができ、意匠面での
メリットが非常に大きいという特長を持っている。特に
淡色調の反射色調を得るのが容易である。Furthermore, by adjusting the thickness of each layer within an appropriate range, the reflected color tone can be changed quite freely, which has a great advantage in terms of design. In particular, it is easy to obtain a light reflective color tone.
又、本発明の赤外線反射物品は、電磁波遮蔽効果が高い
ので、コンピューター機器類、ワード°プロセッサーな
どから放射される電磁波が室内から室外へ漏れるのを防
止することができ、又、室外から室内へ妨害電波が入り
、コンピューター産業ロボット等の誤動作、テレビ受像
機への障害を防ぐことができる。従って、本発明の赤外
線反射物品は、電磁遮蔽窓ガラスとして有用である。In addition, the infrared reflective article of the present invention has a high electromagnetic wave shielding effect, so it can prevent electromagnetic waves emitted from computer equipment, word processors, etc. from leaking from indoors to outdoors, and can also prevent electromagnetic waves emitted from computer equipment, word processors, etc. from leaking from indoors to outdoors. This can prevent jamming radio waves from entering, causing malfunctions of computer industrial robots, etc., and damage to television receivers. Therefore, the infrared reflective article of the present invention is useful as an electromagnetic shielding window glass.
本発明の好ましい実施様態としては、5層コーティング
の施された透明基板を単独に用いるばかりでなく、本発
明による透明プラスチックフィルムをガラスに貼り付け
て用いる他、複層窓の一部として用いることもできるし
、又、三重窓の一部として使用することもできる。Preferred embodiments of the present invention include not only using the transparent substrate coated with five layers alone, but also using the transparent plastic film of the present invention attached to glass, or as part of a multi-layer window. It can also be used as part of a triple glazed window.
このようにして本発明を用いることにより、十分高い可
視光線透過率と多彩な反射色調を有するヒートミラーを
構成することができ、ビルや一般住宅などにおける暖房
負荷を効果的に軽減することができる。In this way, by using the present invention, it is possible to construct a heat mirror that has sufficiently high visible light transmittance and a variety of reflection colors, and it is possible to effectively reduce the heating load in buildings and general residences. .
図1は、本発明の一実施例の断面を模式的に示したもの
であり、IOは透明基板、11.13.15はZnO膜
、12.14は銀膜である。
図2は実施例1の分光特性を示したものであり、21.
22はそれぞれ実施例1の分光透過率及び反射率を示す
。
図3は比較例1の分光特性を示したものであり、31.
32はそれぞれ比較例1の分光透過率及び反射率を示す
。
図4は比較例1の断面図を模式的に示したものであり、
40は透明基板、41.43はZnO膜、42は銀膜で
ある。
岬
O
D斗FIG. 1 schematically shows a cross section of an embodiment of the present invention, in which IO is a transparent substrate, 11.13.15 is a ZnO film, and 12.14 is a silver film. FIG. 2 shows the spectral characteristics of Example 1, and 21.
22 indicates the spectral transmittance and reflectance of Example 1, respectively. FIG. 3 shows the spectral characteristics of Comparative Example 1, and 31.
32 indicates the spectral transmittance and reflectance of Comparative Example 1, respectively. FIG. 4 schematically shows a cross-sectional view of Comparative Example 1,
40 is a transparent substrate, 41.43 is a ZnO film, and 42 is a silver film. Misaki OD
Claims (1)
Ag膜の第2層、ZnO膜の第3層、Ag膜の第4層、
ZnO膜の第5層から成る5層コーティングが設けられ
た赤外反射物品において、上記銀膜の厚みが60〜25
0Åであり、可視光線透過率が60%以上であることを
特徴とする赤外反射物品。(1) A first layer of ZnO film on a transparent substrate sequentially from the substrate side,
A second layer of Ag film, a third layer of ZnO film, a fourth layer of Ag film,
In the infrared reflective article provided with a five-layer coating consisting of a fifth layer of ZnO film, the thickness of the silver film is 60 to 25
0 Å and a visible light transmittance of 60% or more.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61-280644 | 1986-11-27 | ||
JP28064486 | 1986-11-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63239043A true JPS63239043A (en) | 1988-10-05 |
Family
ID=17627924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62296117A Pending JPS63239043A (en) | 1986-11-27 | 1987-11-26 | Infrared reflecting article |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63239043A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1990002653A1 (en) * | 1988-09-01 | 1990-03-22 | The Boc Group, Inc. | Solar control layered coating for glass windows |
US5618626A (en) * | 1992-11-09 | 1997-04-08 | Central Glass Company, Limited | Glass plate with ultraviolet absorbing multilayer coating |
JP2000105312A (en) * | 1998-09-30 | 2000-04-11 | Nitto Denko Corp | Filter for plasma display panel |
EP1108693A1 (en) | 1999-12-06 | 2001-06-20 | Nippon Sheet Glass Co., Ltd. | Heat shading glass, method for manufacturing the same, and heat shading laminated glass using the same |
US6838159B2 (en) * | 1992-03-27 | 2005-01-04 | Cardinal Glass Industries, Inc. | High transmittance, low emissivity coatings for substrates |
WO2007072877A1 (en) * | 2005-12-22 | 2007-06-28 | Central Glass Company, Limited | Low emissivity glass |
JP2015180528A (en) * | 2014-03-07 | 2015-10-15 | 北川工業株式会社 | Transparent heat ray reflection film |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61280646A (en) * | 1985-05-20 | 1986-12-11 | Sanyo Electric Co Ltd | Semiconductor integrated circuit device |
-
1987
- 1987-11-26 JP JP62296117A patent/JPS63239043A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61280646A (en) * | 1985-05-20 | 1986-12-11 | Sanyo Electric Co Ltd | Semiconductor integrated circuit device |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1990002653A1 (en) * | 1988-09-01 | 1990-03-22 | The Boc Group, Inc. | Solar control layered coating for glass windows |
US4965121A (en) * | 1988-09-01 | 1990-10-23 | The Boc Group, Inc. | Solar control layered coating for glass windows |
US6838159B2 (en) * | 1992-03-27 | 2005-01-04 | Cardinal Glass Industries, Inc. | High transmittance, low emissivity coatings for substrates |
US7060359B2 (en) | 1992-03-27 | 2006-06-13 | Cardinal Cg Company | High transmittance, low emissivity coatings for substrates |
US5618626A (en) * | 1992-11-09 | 1997-04-08 | Central Glass Company, Limited | Glass plate with ultraviolet absorbing multilayer coating |
JP2000105312A (en) * | 1998-09-30 | 2000-04-11 | Nitto Denko Corp | Filter for plasma display panel |
EP1108693A1 (en) | 1999-12-06 | 2001-06-20 | Nippon Sheet Glass Co., Ltd. | Heat shading glass, method for manufacturing the same, and heat shading laminated glass using the same |
WO2007072877A1 (en) * | 2005-12-22 | 2007-06-28 | Central Glass Company, Limited | Low emissivity glass |
JP2015180528A (en) * | 2014-03-07 | 2015-10-15 | 北川工業株式会社 | Transparent heat ray reflection film |
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