JPS63237240A - Improvement of magneto-optical recording medium - Google Patents
Improvement of magneto-optical recording mediumInfo
- Publication number
- JPS63237240A JPS63237240A JP7228887A JP7228887A JPS63237240A JP S63237240 A JPS63237240 A JP S63237240A JP 7228887 A JP7228887 A JP 7228887A JP 7228887 A JP7228887 A JP 7228887A JP S63237240 A JPS63237240 A JP S63237240A
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- recording
- recording medium
- optical recording
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 239000010409 thin film Substances 0.000 claims abstract description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract description 7
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 6
- 229910052718 tin Inorganic materials 0.000 claims abstract description 6
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 6
- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract description 5
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 5
- 150000002910 rare earth metals Chemical class 0.000 claims abstract description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 4
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 4
- 239000010941 cobalt Substances 0.000 claims abstract description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 4
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims abstract description 4
- 230000005415 magnetization Effects 0.000 claims abstract description 4
- 229910052745 lead Inorganic materials 0.000 claims abstract 2
- 239000000203 mixture Substances 0.000 claims description 18
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 8
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 229910045601 alloy Inorganic materials 0.000 abstract description 10
- 239000000956 alloy Substances 0.000 abstract description 10
- 239000000463 material Substances 0.000 description 15
- 239000011521 glass Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910017061 Fe Co Inorganic materials 0.000 description 1
- 229910017112 Fe—C Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 208000003028 Stuttering Diseases 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910000982 rare earth metal group alloy Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
（発明の分野）
本発明はレーザービームの照射により情報の記録、再生
、消去を行う光磁気記録方式に用し１られる光磁気記録
媒体に関するものであり、特に、この記録媒体に用いら
れるＮｄ−ＤＶ−Ｆｅ−Ｃ。DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to a magneto-optical recording medium used in a magneto-optical recording method in which information is recorded, reproduced and erased by irradiation with a laser beam. Nd-DV-Fe-C used for recording media.
系の記録材料の改良に関するものである。This paper relates to the improvement of recording materials of this type.
（発明の背景）
光ディスク、光カード、光テープ等に用いられる光磁気
記録媒体用の記録材料として【よ希土類金属（Ｒｅ）と
遷移金１ｍ（ＴＨ）とのアモルファス合金が一般に良く
研究されており、これら合金はス１＜ツタリング等によ
って基板上に１，０ＯＯＡ程度の厚さの薄膜とされて記
録層を構成する。(Background of the Invention) Amorphous alloys of rare earth metals (Re) and transition gold (TH) have generally been well studied as recording materials for magneto-optical recording media used in optical disks, optical cards, optical tapes, etc. , these alloys are formed into a thin film of about 1,000A on a substrate by stuttering or the like to form a recording layer.
上記希土類（ＲＥ）としてはＧｄ、Ｔｂ、Ｄ’／等が、
また遷移金属（ＴＨ）としては［ｅ、Ｇｏ等が一般に用
いられており、最も一般的な組成としてはＴｂＧｄＦｅ
、 ＴｂｒｅＣｏ、ＧｄＣｏ等を挙げることができる。The above rare earths (RE) include Gd, Tb, D'/, etc.
In addition, as transition metals (TH), [e, Go, etc. are generally used, and the most common composition is TbGdFe.
, TbreCo, GdCo, and the like.
これら公知の記録材料は、実用的な性能、すなわち記録
−再生特性および耐久性（信頼性）を有し且つ工業レベ
ルで製造できるという点で、一応満足できるものである
が、記録感度の点でさらに優れた記録材料が要求されて
いる。すなわち、光磁気ディスクの持つ大容量記録密度
という特色は利点である反面、転送レートが低いという
欠点にもつながる。この転送レートを上げるためにはデ
ィスクの回転速度を上げなければならないが、従来の記
録材料では記録感度が悪いため、回転速度を上げること
ができなかった。These known recording materials are somewhat satisfactory in that they have practical performance, that is, recording-reproducing characteristics and durability (reliability), and can be manufactured at an industrial level, but they have poor recording sensitivity. Even better recording materials are required. In other words, while the feature of magneto-optical disks is their high capacity recording density, which is an advantage, it also has the disadvantage of a low transfer rate. In order to increase this transfer rate, it is necessary to increase the rotational speed of the disk, but because of the poor recording sensitivity of conventional recording materials, it has been impossible to increase the rotational speed.
”（従来技術）
ＲＥ−ＴＭアモルファス合金の組成に関しては既に多数
の系が提案されている。Ｊ、Ａｐｐｌ、ＰｈｙＳ、５７
（１）１９８５年４月号、第３９０６〜３９０８頁には
Ｎｄ （Ｆｅ Ｃｏ ） の組成が示され
てｙ １−ｘ ｘ １−ｙ
いる。特開昭６０−１０７７５１号には希土類（ＲＥ）
としてＤｙを必須構成要素とする組成が示され、特開昭
６０−１１７４３６号にはＲＥとしてＮｄ−Ｇｄを必須
構成要素とする組成が示されている。また、特開昭６１
−１６５８４６号にはＲＥとしてＮｄを必須構成要件と
する組成が示されている。しかし、これらの組成によっ
ても高速書込み特性すなわち記録感度の高い記録材料は
得られない。さらに、Ｎｄ、Ｄｙ、ＦｅあるいはＮｄ、
ＤＶ、Ｆｅ１Ｇｏを用いた光磁気記録材料に関するもの
も公開されている（例、特開昭６２−１２９４１号、特
開昭６２−４３８４７号、特開昭６２−４７４７５号、
特開昭６２−４７８４６号）。” (Prior Art) Many systems have already been proposed regarding the composition of RE-TM amorphous alloys. J. Appl. PhyS., 57.
(1) April 1985 issue, pages 3906 to 3908, shows the composition of Nd (Fe Co ) y 1-x x 1-y. JP-A-60-107751 contains rare earth elements (RE).
A composition in which Dy is an essential constituent is shown as RE, and JP-A-60-117436 shows a composition in which Nd-Gd is an essential constituent as RE. Also, JP-A-61
No.-165846 discloses a composition in which Nd is an essential component as RE. However, even with these compositions, a recording material with high speed writing characteristics, that is, high recording sensitivity cannot be obtained. Furthermore, Nd, Dy, Fe or Nd,
Information regarding magneto-optical recording materials using DV and Fe1Go has also been published (for example, JP-A-62-12941, JP-A-62-43847, JP-A-62-47475,
JP-A-62-47846).
本出願人は特願昭６２−４０８８号（発明の名称「光磁
気記録媒体」）において、Ｎｄ１Ｄｙ、Ｆｅを必須成分
とした高感度の光磁気記録膜組成を提案した。この系は
高速度記録用媒体として優れたものであるが、耐久性の
向上にはさらに改良の余地があることがわかってきた。The present applicant proposed a highly sensitive magneto-optical recording film composition containing Nd1Dy and Fe as essential components in Japanese Patent Application No. 1988-4088 (title of the invention "Magneto-Optical Recording Medium"). Although this system is excellent as a high-speed recording medium, it has been found that there is room for further improvement in durability.
すなわら、この特許出願の発明の系は結晶化Ｙ！Ａ度（
Ｔｃｒｙ）が低いため、記録−再生を反復していると、
記録膜がアモルファス状態から結晶状態に変化し、その
結果、結晶粒界に起因する雑音が増大し、さらには垂直
磁気異方性に変化が生じるため記録媒体としての信頼性
すなわち耐久性を改善する必要がある。In other words, the system of the invention of this patent application is crystallized Y! A degree (
Tcry) is low, so when recording and reproducing are repeated,
The recording film changes from an amorphous state to a crystalline state, resulting in an increase in noise caused by grain boundaries and a change in perpendicular magnetic anisotropy, which improves the reliability or durability of the recording medium. There is a need.
本出願人は本出願人による上記の記録膜組成の耐久性を
向上させる研究を続けた結果、本発明を完成させた。The present applicant has completed the present invention as a result of continuing research by the present applicant to improve the durability of the above-mentioned recording film composition.
（発明の目的）
本発明の目的は記録感度が高く且つ耐久性に侵れた光磁
気記録材料を提供することにある。(Object of the Invention) An object of the present invention is to provide a magneto-optical recording material with high recording sensitivity and durability.
本発明の他の目的は高速転送レート用記録媒体に要求さ
れる高い記録感度と読取り性能に直接間係する高いＣ／
Ｎ比とを有し、しかも耐久性に優れた光磁気記録材料を
提供することにある。Another object of the present invention is to provide a high C/C ratio that is directly related to the high recording sensitivity and read performance required for high-speed transfer rate recording media.
The object of the present invention is to provide a magneto-optical recording material having a high N ratio and excellent durability.
（発明の構成）
本発明は、基板上に膜面に垂直な方向に磁化容易軸を有
する希土類−遷移金属アモルファス合金より成る薄膜が
形成され、このアモルファス合金がネオジム（Ｎｄ）と
、ジスプロシウム（Ｄｙ）と、鉄（Ｆｅ）と、コバルト
（Ｃｏ）より成る光磁気記録媒体において、上記アモル
ファス合金がさらにスズ、アンチモンおよび鉛より成る
群の中から選ばれる少なくとも一つの成分を含むことを
特徴としている。(Structure of the Invention) In the present invention, a thin film made of a rare earth-transition metal amorphous alloy having an axis of easy magnetization in a direction perpendicular to the film surface is formed on a substrate, and this amorphous alloy contains neodymium (Nd) and dysprosium (Dy). ), iron (Fe), and cobalt (Co), wherein the amorphous alloy further contains at least one component selected from the group consisting of tin, antimony, and lead. .
上記基板としてはプラスチック、ガラス、セラミック、
金属等任意の材料を用いることができ、その形態として
はディスク、カード、テープ等任意のものにすることが
できる。The above substrates include plastic, glass, ceramic,
Any material such as metal can be used, and the material can be in any form such as a disk, card, or tape.
本発明の記録媒体は上記基板と上記アモルファス合金薄
膜より成る記録材料の層を必須構成要件とするものであ
るが、これらの他に、公知の他の追加的な膜、例、えば
、保護膜、エンハンス膜、断熱膜、光反射膜等を必要に
応じて上記基板および／または記録材料の層の上に形成
することができる。The recording medium of the present invention has the above-mentioned substrate and the above-mentioned amorphous alloy thin film recording material layer as essential components, but in addition to these, other known additional films, such as a protective film, are also included. , an enhancement film, a heat insulating film, a light reflecting film, etc. can be formed on the substrate and/or the recording material layer as necessary.
本発明による上記アモルファス合金より成る記録材料の
薄膜の組成はネオジウム（Ｎｄ）と、ジスプロシウム（
Ｄｙ）と、鉄（Ｆｅ）と、コバルト（Ｃｏ）と、スズ（
Ｓｎ）、アンチモン（Ｓｂ）および鉛（Ｐｂ）より成る
群から選ばれる少なくとも一つの成分とを必須構成要件
としている。The composition of the thin film of the recording material made of the amorphous alloy according to the present invention is neodymium (Nd) and dysprosium (Nd).
Dy), iron (Fe), cobalt (Co), and tin (
Sn), antimony (Sb), and lead (Pb).
上記薄膜は常用に従ってスパッタリングや蒸着法といっ
た物理的蒸着（ｐｖｏ）法によって基板上に形成するこ
とができる。この薄膜の厚さは一般に２０ＯＡから１５
００△の範囲、好ましくは５００Ａから１０００Ａの範
囲である。The thin film described above can be formed on a substrate by a physical vapor deposition (PVO) method such as sputtering or evaporation method according to common practice. The thickness of this thin film is generally between 20OA and 15OA.
It is in the range of 00Δ, preferably in the range of 500A to 1000A.
本発明による上記合金組成をＦ２式：
％式％
で表わした場合、
Ｍは３ｎ、３ｂおよびＰｂより成る群の中から選ばれる
少なくとも一つの元素を表わし、０．１≦Ｘ≦０．４
０＜ｙ≦０．１
０．２≦α≦０．７５
０くβ≦０゜４
とするのが好ましい。すなわち、Ｎｄ−ＤＶのＲＥ元累
の比率（Ｘ）が１０原子％以下では！Ｉ！直磁他磁化膜
られず、逆に４０原子％以上ではカー回転角（θｋ）が
急激に低下するため実用的ではない。また、ＲＥ元素の
中でのＮｄのが含有率（α）は比較的広い範囲の中から
選択できる。ＮｄＱこの含有率（α）を増加させると、
換言すればＤｙの含有率（１−α）を減少させると、θ
に１従って、光磁気効果が増加するが、逆に感度が低下
し、また材料費も増加するので、ＮｄのＤｙに対する比
率（α）は２０から７５原子％の範囲内にするのが好ま
しい。 本発明の合金組成はＮｄ、ＤｙおよびＦｅの他
にＴＭとしてＦＣの一部をＣＯに代えたものである。こ
のＧｏを加えることによって磁気光学効果、換言すれば
θｋが上がる。ＴＭの中で、ＣＯの含有率が４０原子％
を超えるとキュリ一温度（ＴＣ）２２０℃以上となり、
記録感度が低下するので、Ｆｅに対するＣｏの比率（β
）は４０原子％以下にするのが好ましい。また、Ｍの含
有率（Ｖ）がゼロでは耐−気性向上の効果が無く、逆に
１０原子％を超えると感度または再生特性が低下する。When the above alloy composition according to the present invention is expressed as F2 formula: % formula %, M represents at least one element selected from the group consisting of 3n, 3b and Pb, and 0.1≦X≦0.4 0 It is preferable that <y≦0.1 0.2≦α≦0.75 0 β≦0°4. In other words, if the ratio (X) of RE elements in Nd-DV is less than 10 atomic %! I! On the other hand, if the magnetization is 40 atomic % or more, the Kerr rotation angle (θk) will decrease rapidly, which is not practical. Further, the content rate (α) of Nd in the RE element can be selected from a relatively wide range. When this content (α) of NdQ is increased,
In other words, when the Dy content (1-α) is decreased, θ
Accordingly, the magneto-optical effect increases, but the sensitivity decreases and the material cost also increases. Therefore, the ratio (α) of Nd to Dy is preferably within the range of 20 to 75 atomic %. In the alloy composition of the present invention, in addition to Nd, Dy and Fe, a part of FC is replaced with CO as TM. By adding this Go, the magneto-optical effect, in other words, θk increases. In TM, the content of CO is 40 at%
If it exceeds the Curie temperature (TC) of 220℃ or more,
Since the recording sensitivity decreases, the ratio of Co to Fe (β
) is preferably 40 atomic % or less. Further, if the content (V) of M is zero, there is no effect of improving the resistance to gas, and conversely, if it exceeds 10 atomic %, the sensitivity or reproduction characteristics will decrease.
本発明による上記成分Ｍは本出願人による前記特願昭６
２−４０８８号の希土類金属（Ｎｄ−ＤＶ）および／ま
たは遷移金属（Ｆｅ、Ｃｏ）の一部と置換されたもので
あって、耐久性以外の記録膜の特性は特願昭６２−４０
８８号記載のものと同じであり、本明細古では特願昭６
２−４０８８号の明細書を参照する。The above-mentioned component M according to the present invention is obtained from the above-mentioned patent application filed in 1983 by the present applicant.
No. 2-4088, in which rare earth metals (Nd-DV) and/or transition metals (Fe, Co) are partially substituted, and the characteristics of the recording film other than durability are as specified in Japanese Patent Application No. 62-40.
It is the same as that described in No. 88, and in this specification it is
Please refer to the specification of No. 2-4088.
発明による上記合金組成は再生特性（θｋ）および記録
特性（記録感度）を低下させずに、耐久性を大巾に向上
させることができるバランスのとれた実用性の高い組成
である。The above-mentioned alloy composition according to the invention is a well-balanced and highly practical composition that can greatly improve durability without reducing reproduction characteristics (θk) and recording characteristics (recording sensitivity).
以下、実施例を用いて本発明を説明する。The present invention will be explained below using examples.
実施例１
基板に１３０ｍφのポリカーボネート、１．６μｍピッ
チ溝付基板と３０×３０Ｉ！ＭＡの研磨ガラスを用いた
。ポリカーボネート基板はＣ／Ｎ比の測定に、研磨ガラ
スは磁気特性の測定に供した。電子ビーム蒸着装置にお
いてチャンバー内を１×１Ｏ−７Ｔｏｒｒ以下まで排気
した後、基板上に真空溶解したＦｃ７５ Ｃｏ２５とＮ
ｄ３０ ＤＶγ０とｓｎとを別々の炉から同時に蒸発さ
せ合計膜厚が１０００Ａになる様にレート（比）をコン
トロールして成膜した。しかる棲、酸化防止膜として５
ｉ０２を真空を破ることなく１０００Ａの膜厚で、Ｎｄ
ＤＶＳｎＦｅＣｏ合金薄膜上に形成した。Example 1 130mφ polycarbonate substrate, 1.6μm pitch grooved substrate and 30×30I! MA polished glass was used. The polycarbonate substrate was used to measure the C/N ratio, and the polished glass was used to measure the magnetic properties. After evacuating the chamber to below 1×1O-7 Torr in an electron beam evaporation device, Fc75Co25 and N were vacuum-dissolved on the substrate.
d30 DVγ0 and sn were simultaneously evaporated from separate furnaces to form a film by controlling the rate (ratio) so that the total film thickness was 1000A. As a scolding, anti-oxidation film 5
i02 with a film thickness of 1000A without breaking the vacuum, Nd
It was formed on a DVSnFeCo alloy thin film.
組成は蛍光Ｘ線により
（Ｎｄ２１０ｖ１９）１９Ｓｎ４（Ｆｅ８ｏＣ０２ｏ）
１１であった。The composition was determined by fluorescent X-rays (Nd210v19)19Sn4(Fe8oC02o)
It was 11.
カー回転角は波長６３３止の＠ｅ−Ｎｅレーザより、ガ
ラス基板面より測定したところ０．３８゜であった。１
−１ＧおよびＴｃはガラスを１１０Ｘ６に切断し、ＶＳ
Ｍにより測定したところぞれぞれ５．５ｋＯｅ１１５０
℃であった。これらの値はいずれも実用的光磁気記録媒
体としての要求を満す値である。The Kerr rotation angle was measured from the surface of the glass substrate using an @e-Ne laser with a wavelength of 633, and was found to be 0.38°. 1
-1G and Tc cut the glass to 110X6 and VS
As measured by M, each 5.5kOe1150
It was ℃. All of these values satisfy the requirements for a practical magneto-optical recording medium.
次に、８３０口■の半導体レーザを光源として９ｏｏｒ
ｐｍの回転数で１ＭＨ７の信号を４０００ｅの外部磁界
の下で上記ポリカーボネート基板上に形成した記録膜の
半径４５１ｍの位置に記録し、再生した。その結果、記
録パワー４ｍＷにおいて４６ｄＢのＣ／Ｎ比が得られた
。このＣ／Ｎ比は実用上の光磁気記録媒体のＣ／Ｎ比と
して十分な値である。なお、表中の記録パワーとは再生
デュ−ティーが５０−５０になる記録パワーをいう。Next, we used a 830-inch semiconductor laser as a light source and
A signal of 1 MH7 was recorded and reproduced at a radius of 451 m on the recording film formed on the polycarbonate substrate under an external magnetic field of 4000 e at a rotational speed of pm. As a result, a C/N ratio of 46 dB was obtained at a recording power of 4 mW. This C/N ratio is a sufficient value as a C/N ratio of a practical magneto-optical recording medium. Note that the recording power in the table refers to the recording power at which the reproduction duty is 50-50.
上記と同じ位置において上記と同じ信号の書込みと消去
を１０．０００回反復したＣ／Ｎ比は４５ｄＢで、Ｃ／
Ｎ比の劣化は１ｄＢであった。この光磁気ディスクを６
０℃、９０％ＲＨの環境下に放置してＣ／Ｎ比の変化率
を調べた。上記と同じ条件で記録−再生した２００時間
および５００時間経過後でのＣ／Ｎ比は各々４３ｄＢで
、記録膜の劣化が少ないことが示された。When writing and erasing the same signal as above at the same position as above is repeated 10,000 times, the C/N ratio is 45 dB, and the C/N ratio is 45 dB.
The deterioration of the N ratio was 1 dB. This magneto-optical disk is 6
The sample was left in an environment of 0° C. and 90% RH to examine the rate of change in C/N ratio. The C/N ratios after 200 hours and 500 hours of recording and reproduction under the same conditions as above were each 43 dB, indicating that the recording film had little deterioration.
比較例１
実施例１と同じ操作を繰返したが、ｓｎを入れた炉を使
用しなかった。記録膜の組成は（Ｎｄ２１０Ｖ７ｇ）
２１ （ＦｅａｏＣＯ２ｏ） ７９であった。Comparative Example 1 The same operations as in Example 1 were repeated, but the furnace containing sn was not used. The composition of the recording film is (Nd210V7g)
21 (FeaoCO2o) 79.
この記録膜の成膜直後の磁気特性、記録−再生特性は実
施例１と同じであったが、実施例１と同じ書込みと消去
を反復したところ、１００回の反復でＣ／Ｎ比は４２ｄ
Ｂに低下した。The magnetic properties and recording/reproducing properties of this recording film immediately after film formation were the same as in Example 1, but when the same writing and erasing as in Example 1 was repeated, the C/N ratio was 42d after 100 repetitions.
It decreased to B.
で表わされる（Ｍは表工に示す元素）記録膜組成が本発
明の範囲内に入るもの（実施例２〜１０）と範囲外のも
の（比較例２〜５）を作った。これは実施
例１と同じ操作で、蒸着レートを変えて行った。Recording film compositions represented by (M is an element shown in the surface finish) were made within the range of the present invention (Examples 2 to 10) and those outside the range (Comparative Examples 2 to 5). This was carried out in the same manner as in Example 1, but with different deposition rates.
結果は表工にまとめて示しである。The results are summarized in the table below.
夷Ｔ
衷１ｊ口二り二２１
Ｆｅ：Ｃｏ−８０：２５、Ｎｄ：Ｄｙ＝５０：５０に各
々真空溶解した炉とズ■に示１金属元素Ｍとを入れた炉
とを同時蒸着させた他は実施例１と同じ操作を繰り返し
た。夷T 衷 1j 口 2 21 Fe:Co-80:25 and Nd:Dy=50:50 were melted in a vacuum in a furnace and a furnace containing the metal element M shown in the box was simultaneously deposited. Otherwise, the same operations as in Example 1 were repeated.
この系では書込みパワーが少し上昇するが、ＣＮＲは改
善される。Although the write power increases slightly in this system, the CNR is improved.
結果は表■にまとめて示しである。The results are summarized in Table ■.
夷 ■
（発明の効果）
以上の結果より明らかなように、Ｎｄ−Ｄｙ−Ｆｅ−ｃ
ｏ系の光磁気記録膜の再生劣化と、経時変化の問題は本
発明による元素の添加によって大巾に改善することがで
きる。(Effect of the invention) As is clear from the above results, Nd-Dy-Fe-c
The problems of reproduction deterioration and aging of o-based magneto-optical recording films can be greatly improved by adding the elements according to the present invention.
Claims (1)
土類金属−遷移金属アモルファス合金よりなる薄膜が形
成され、上記アモルファス合金がネオジム（Ｎｄ）と、
ジスプロシウム（Ｄｙ）と、鉄（Ｆｅ）と、コバルト（
Ｃｏ）とを含む光磁気記録媒体において、上記アモルフ
ァス合金にさらにスズ（Ｓｎ）、アンチモン（Ｓｂ）お
よび鉛（Ｐｂ）より成る群の中から選ばれる少なくとも
一つの成分が添加されていることを特徴とする光磁気記
録媒体。 ２）上記薄膜が下記組成： （Ｎｄ＿αＤ＿ｙ＿（＿１＿−＿α＿））＿ｘＭ＿ｙ（
Ｆｅ＿（＿１＿−＿β＿）Ｃｏ＿β）＿１＿−＿ｘ＿−
＿ｙここで、 ＭはＳｎ、ＳｂおよびＰｂの群から選ばれる少なくとも
一つの元素を表わし、 ０．１≦ｘ≦０．４ ０＜ｙ≦０．１ ０．２≦α≦０．７５ ０＜β≦０．４ で表わされることを特徴とする特許請求の範囲第１項に
記載の光磁気記録媒体。[Claims] 1) A thin film made of a rare earth metal-transition metal amorphous alloy having an axis of easy magnetization in a direction perpendicular to the film surface is formed on a substrate 1, and the amorphous alloy is composed of neodymium (Nd),
Dysprosium (Dy), iron (Fe), and cobalt (
A magneto-optical recording medium containing Co), characterized in that at least one component selected from the group consisting of tin (Sn), antimony (Sb) and lead (Pb) is further added to the amorphous alloy. magneto-optical recording medium. 2) The above thin film has the following composition: (Nd_αD_y_(_1_−_α_))_xM_y(
Fe_(_1_-_β_)Co_β)_1_-_x_-
_y Here, M represents at least one element selected from the group of Sn, Sb and Pb, and 0.1≦x≦0.4 0<y≦0.1 0.2≦α≦0.75 0< The magneto-optical recording medium according to claim 1, characterized in that β≦0.4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7228887A JPS63237240A (en) | 1987-03-26 | 1987-03-26 | Improvement of magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7228887A JPS63237240A (en) | 1987-03-26 | 1987-03-26 | Improvement of magneto-optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63237240A true JPS63237240A (en) | 1988-10-03 |
Family
ID=13484941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7228887A Pending JPS63237240A (en) | 1987-03-26 | 1987-03-26 | Improvement of magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63237240A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103314A (en) * | 1982-12-03 | 1984-06-14 | Seiko Instr & Electronics Ltd | Photomagnetic recording medium |
| JPS61222104A (en) * | 1984-11-12 | 1986-10-02 | Sumitomo Special Metals Co Ltd | Vertical magnetic recording medium and manufacture thereof |
| JPS62223839A (en) * | 1986-03-26 | 1987-10-01 | Seiko Epson Corp | Photomagnetic recording medium |
-
1987
- 1987-03-26 JP JP7228887A patent/JPS63237240A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103314A (en) * | 1982-12-03 | 1984-06-14 | Seiko Instr & Electronics Ltd | Photomagnetic recording medium |
| JPS61222104A (en) * | 1984-11-12 | 1986-10-02 | Sumitomo Special Metals Co Ltd | Vertical magnetic recording medium and manufacture thereof |
| JPS62223839A (en) * | 1986-03-26 | 1987-10-01 | Seiko Epson Corp | Photomagnetic recording medium |
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