JPS6322565B2 - - Google Patents
Info
- Publication number
- JPS6322565B2 JPS6322565B2 JP59029003A JP2900384A JPS6322565B2 JP S6322565 B2 JPS6322565 B2 JP S6322565B2 JP 59029003 A JP59029003 A JP 59029003A JP 2900384 A JP2900384 A JP 2900384A JP S6322565 B2 JPS6322565 B2 JP S6322565B2
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- light receiving
- light
- receiving element
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013307 optical fiber Substances 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 57
- 230000003287 optical effect Effects 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
Description
【発明の詳細な説明】
(a) 発明の技術分野
本発明は光フアイバで伝送された光信号を受光
して電気信号に変換する光受光器の構造に関す
る。DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to the structure of an optical receiver that receives an optical signal transmitted through an optical fiber and converts it into an electrical signal.
(b) 技術の背景
近年、光フアイバ伝送装置の小形化に伴いガリ
ウム砒素，シリコンなどの半導体基板の表面に
APD（Avalanche Phote Diode）などの受光素
子を並列に設けた半導体基板が光受光器用に使用
されている。この傾向に伴い光受光器としては光
フアイバと半導体基板上の受光素子との光結合部
分が小形に構成されることが望まれている。(b) Background of technology In recent years, with the miniaturization of optical fiber transmission equipment, the surface of semiconductor substrates made of gallium arsenide, silicon, etc.
Semiconductor substrates on which light-receiving elements such as APDs (Avalanche Photo Diodes) are arranged in parallel are used for optical receivers. In line with this trend, it is desired that a light receiver has a small optical coupling portion between an optical fiber and a light receiving element on a semiconductor substrate.
(c) 従来技術と問題点
第１図は従来の光受光器の全体構造を示す一部
破断斜視図である。(c) Prior Art and Problems FIG. 1 is a partially cutaway perspective view showing the overall structure of a conventional optical receiver.
第１図において角板形のシリコン等の半導体基
板１の表面に、伝送システムの要求により複数
本、図では２本の光フアイバ４の出射光を受光す
る２つの受光素子２が並列に設けられている。 In FIG. 1, two light-receiving elements 2 are provided in parallel on the surface of a rectangular plate-shaped semiconductor substrate 1 made of silicon or the like to receive light emitted from a plurality of optical fibers 4 (in the figure, two optical fibers) according to the requirements of the transmission system. ing.
そして半導体基板１は、２つの受光素子２の
夫々の電子回路が設けられるプリント基板３の表
面に塔載されている。 The semiconductor substrate 1 is mounted on the surface of a printed circuit board 3 on which the electronic circuits of the two light receiving elements 2 are provided.
光フアイバ４をプリント基板３に保持する保持
金具６は半導体基板１に対接する底板６Ａを有
し、底板６Ａには半導体基板１上の２つの受光素
子２に対向して垂直の挿通孔が夫々設けられてい
る。 The holding fitting 6 that holds the optical fiber 4 on the printed circuit board 3 has a bottom plate 6A that is in contact with the semiconductor substrate 1, and the bottom plate 6A has vertical insertion holes that face the two light receiving elements 2 on the semiconductor substrate 1, respectively. It is provided.
受光素子２に光結合する光フアイバ４の端部に
は、先端保護用のフエルール５が装着されてい
る。そしてこのフエルール５が保持金具６の挿通
孔に挿着されて、光を出射する光フアイバ４の端
面が受光素子２の受光面に近接して対向してい
る。そして光フアイバ４の夫々の出射光は受光素
子２の受光面に投射され光結合し光受光器を構成
している。 A ferrule 5 for protecting the tip is attached to the end of the optical fiber 4 optically coupled to the light receiving element 2 . The ferrule 5 is inserted into the insertion hole of the holding fitting 6, so that the end face of the optical fiber 4 that emits light is close to and opposed to the light receiving surface of the light receiving element 2. The respective emitted lights from the optical fibers 4 are projected onto the light receiving surface of the light receiving element 2 and optically coupled to form a light receiver.
従来の光受光器は、上述の様に、２本の光フア
イバ４がその先端にフエルール５をもち受光素子
２の受光面に対して垂直方向に並設される構造に
なつているので、光フアイバ４を並設する取付ピ
ツチはフエルール５の外径以上としなければなら
ない。このことは、光受光器の小形化に支障とな
つている。 As mentioned above, the conventional optical receiver has a structure in which two optical fibers 4 have ferrules 5 at their tips and are arranged in parallel in a direction perpendicular to the light-receiving surface of the light-receiving element 2. The mounting pitch where the fibers 4 are arranged side by side must be larger than the outer diameter of the ferrule 5. This poses an obstacle to miniaturization of the optical receiver.
また、光フアイバ４を受光素子２の受光面に対
して垂直に設けることは、受光素子２の受光面の
上方に光フアイバ４の取付空間を広く必要とす
る。従つて受光素子用の半導体基板１を塔載した
プリント基板３をシステム要求により多数並列す
るような場合、装置ユニツトが大形になるという
問題点がある。 Further, providing the optical fiber 4 perpendicularly to the light receiving surface of the light receiving element 2 requires a large space for mounting the optical fiber 4 above the light receiving surface of the light receiving element 2. Therefore, when a large number of printed circuit boards 3 carrying semiconductor substrates 1 for light receiving elements are arranged in parallel according to system requirements, there is a problem that the device unit becomes large.
(d) 発明の目的
本発明の目的は、光フアイバ４を受光素子２の
受光面に対して垂直に設けることは、装置ユニツ
トが大形になるという問題を解決して小形の光受
光器を提供する構造、特に製造の容易な小形の光
受光器を提供することにある。(d) Purpose of the Invention The purpose of the present invention is to provide the optical fiber 4 perpendicularly to the light-receiving surface of the light-receiving element 2, thereby solving the problem of a large device unit and making it possible to create a small-sized light receiver. The object of the present invention is to provide a structure, particularly a small optical receiver that is easy to manufacture.
(e) 発明の構成
本発明の光受光器の構成は、光フアイバ保持基
板７と受光素子基板１１とからなり、光フアイバ
保持基板７は、半導体基板の一面に平行して光フ
アイバ４が挿着されるＶ溝８と該挿着された光フ
アイバ端面から出射される光を該端面とは直交方
向に反射偏向する反射壁面１０を有する凹溝９が
エツチングによつて一体形成される。(e) Structure of the Invention The structure of the optical receiver of the present invention consists of an optical fiber holding substrate 7 and a light receiving element substrate 11. The optical fiber holding substrate 7 has an optical fiber 4 inserted therein parallel to one surface of the semiconductor substrate. A V-groove 8 to be attached and a concave groove 9 having a reflective wall surface 10 that reflects and deflects light emitted from the end face of the inserted optical fiber in a direction perpendicular to the end face are integrally formed by etching.
そして受光素子基板１１は、別の半導体基板の
表面の光フアイバ４単体で定まる所定位置に受光
素子２を並列に設ける。 The light receiving element substrate 11 has the light receiving elements 2 arranged in parallel at predetermined positions determined by the single optical fiber 4 on the surface of another semiconductor substrate.
そして上記の光フアイバ保持基板７の一面と受
光素子基板１１の表面とが対向密着して所定の位
置関係となる位置決め手段を備えて位置決め固定
される構造をもつことを特徴とする。 The present invention is characterized in that it has a structure in which one surface of the optical fiber holding substrate 7 and the surface of the light-receiving element substrate 11 are positioned and fixed by means of a positioning means that allows them to face each other in close contact with each other in a predetermined positional relationship.
(f) 発明の実施例
第２図は本発明の実施例の光受光器の光フアイ
バ保持基板７の構造を示す斜視図、第３図は本実
施例の光受光器の受光素子基板１１の斜視図、第
４図は第２図の光フアイバ保持基板７と第３図の
受光素子基板１１を組合せた本発明の実施例の光
受光器の全体構造を示す断面図である。(f) Embodiment of the Invention FIG. 2 is a perspective view showing the structure of the optical fiber holding substrate 7 of the optical receiver according to the embodiment of the invention, and FIG. 3 is a perspective view showing the structure of the optical fiber holding substrate 7 of the optical receiver of the embodiment. The perspective view and FIG. 4 are cross-sectional views showing the overall structure of an optical receiver according to an embodiment of the present invention, which is a combination of the optical fiber holding substrate 7 of FIG. 2 and the light receiving element substrate 11 of FIG. 3.
第２図において、７は材料が半導体シリコンよ
りなる角板状の光フアイバ保持基板であつて、光
フアイバ保持基板７の表面には、光フアイバ４を
挿着する２条のＶ溝８が、光フアイバ４の並列ピ
ツチに等しいピツチで平行にエツチング形成され
ている。そしてＶ溝８は光フアイバ４が挿入され
るように十分に深く形成されている。 In FIG. 2, reference numeral 7 denotes a square plate-shaped optical fiber holding substrate made of semiconductor silicon, and the surface of the optical fiber holding substrate 7 has two V-grooves 8 into which the optical fibers 4 are inserted. They are etched in parallel with a pitch equal to the parallel pitch of the optical fibers 4. The V-groove 8 is formed deep enough to allow the optical fiber 4 to be inserted therein.
また光フアイバ保持基板７の表面には、Ｖ溝８
の開口側と反対側の端部でＶ溝８に直交する凹溝
９がエツチング形成されている。 Further, the surface of the optical fiber holding substrate 7 has a V-groove 8.
A concave groove 9 perpendicular to the V-groove 8 is etched at the end opposite to the opening side.
このＶ溝８、凹溝９は、異方性エツチング液に
て容易にその側壁の傾斜面を平滑にすることが出
来る。従つて凹溝９のＶ溝８側と反対側の側壁の
傾斜面を平滑にして光を反射する反射壁面１０を
形成する。従つてＶ溝８に光フアイバ４を挿入固
着した場合に、反射壁面１０は光フアイバ４から
出射される出射光を図の光フアイバ保持基板７の
上方表面方向に反射する。 The inclined surfaces of the side walls of the V-groove 8 and the groove 9 can be easily smoothed using an anisotropic etching solution. Therefore, the inclined surface of the side wall of the concave groove 9 on the side opposite to the V-groove 8 side is made smooth to form a reflective wall surface 10 that reflects light. Therefore, when the optical fiber 4 is inserted and fixed in the V-groove 8, the reflective wall surface 10 reflects the light emitted from the optical fiber 4 toward the upper surface of the optical fiber holding substrate 7 shown in the figure.
なお、光フアイバ４をＶ溝８に固着するには、
接着剤で接着するか、又はＶ溝８の軸心方向に光
フアイバ保持基板７の表面に所望巾のスリツトの
ある金属膜を形成して、この金属膜のスリツト部
分で光フアイバ４をＶ溝８の内側に圧接して固着
すれば良い。 In addition, in order to fix the optical fiber 4 in the V-groove 8,
Either by bonding with adhesive or by forming a metal film with a slit of a desired width on the surface of the optical fiber holding substrate 7 in the axial direction of the V-groove 8, the optical fiber 4 is attached to the V-groove using the slit portion of this metal film. All you have to do is press it against the inside of 8 and fix it.
第３図において、１１はシリコンなどの半導体
材料よりなる角板状の受光素子基板である。受光
素子基板１１は、その表面に第２図の光フアイバ
保持基板７が嵌合するように、コ形の凹部１２が
設けられ、凹部１２の底板部分の所望の位置に、
２ケの受光素子２が並置されている。所望の位置
とは光フアイバ保持基板７の表面が、凹部１２の
底板部分の表面に密着するように光フアイバ保持
基板７を受光素子基板１１に嵌挿した場合に、受
光素子２の受光面が反射壁面１０の反射光に対向
する位置である。なお、受光素子基板１１の凹部
１２は、光フアイバ保持基板７を嵌挿するときの
ガイドとなり、受光素子２のリード端子は図示し
ていない。 In FIG. 3, reference numeral 11 denotes a square plate-shaped light receiving element substrate made of a semiconductor material such as silicon. The light-receiving element substrate 11 is provided with a U-shaped recess 12 on its surface so that the optical fiber holding substrate 7 shown in FIG.
Two light receiving elements 2 are arranged side by side. A desired position is a position where, when the optical fiber holding substrate 7 is inserted into the light receiving element substrate 11 so that the surface of the optical fiber holding substrate 7 is in close contact with the surface of the bottom plate portion of the recess 12, the light receiving surface of the light receiving element 2 is This is a position facing the reflected light from the reflective wall surface 10. Note that the recess 12 of the light-receiving element substrate 11 serves as a guide when the optical fiber holding board 7 is inserted, and the lead terminals of the light-receiving element 2 are not shown.
第４図において、受光素子基板１１はプリント
基板３に塔載され、光フアイバ保持基板７が受光
素子基板１の凹部１２に嵌挿されて、夫々接着剤
で接着されている。従つて光フアイバ保持基板７
のＶ溝８に挿着された光フアイバ４は、プリント
基板３の表面に近接し平行に配置される。従つて
光フアイバ４より出射する光は、光フアイバ保持
基板７の凹溝９の反射壁面１０で反射され、受光
素子２の受光面に投射され光結合して光受光器を
形成している。 In FIG. 4, the light-receiving element substrate 11 is mounted on the printed circuit board 3, and the optical fiber holding substrate 7 is fitted into the recess 12 of the light-receiving element substrate 1 and bonded to each other with an adhesive. Therefore, the optical fiber holding substrate 7
The optical fiber 4 inserted into the V-groove 8 is arranged close to and parallel to the surface of the printed circuit board 3. Therefore, the light emitted from the optical fiber 4 is reflected by the reflective wall surface 10 of the groove 9 of the optical fiber holding substrate 7, projected onto the light receiving surface of the light receiving element 2, and optically coupled to form a light receiver.
上述のように、光フアイバ４を挿入するＶ溝８
を光フアイバ保持基板７の表面に、受光素子２の
受光面に平行に近接して形成してあるので、光フ
アイバ４を保持する光フアイバ保持基板７を小さ
くすることが出来る。したがつて光受光器を小形
にすることが容易になる。なお、受光素子基板１
１に凹部１２を設けず、受光素子基板１の表面形
状を光フアイバ保持基板７よりわずかに大きい平
担面として、この受光素子基板の表面に、光フア
イバ保持基板７の位置合せをするマーカを形成す
るようにすれば、光受光器をさらに小形にするこ
とが出来る。 As mentioned above, the V-groove 8 into which the optical fiber 4 is inserted
is formed on the surface of the optical fiber holding substrate 7 in parallel and close to the light receiving surface of the light receiving element 2, so that the optical fiber holding substrate 7 that holds the optical fiber 4 can be made small. Therefore, it becomes easy to make the light receiver compact. Note that the light receiving element substrate 1
1 is not provided with a recess 12, the surface shape of the light receiving element substrate 1 is a flat surface slightly larger than the optical fiber holding substrate 7, and a marker for aligning the optical fiber holding substrate 7 is provided on the surface of this light receiving element substrate. By forming such a structure, the light receiver can be made even more compact.
また、光フアイバ４は、プリント基板３に平行
に配設されていて、光受光器の塔載高が低いの
で、システムの要求により多数の光フアイバ４を
配設する場合、多数のプリント基板３を近接して
ユニツトとして並列配置することも出来る。 Furthermore, since the optical fibers 4 are arranged parallel to the printed circuit board 3 and the mounting height of the optical receiver is low, when a large number of optical fibers 4 are arranged according to system requirements, many printed circuit boards 3 It is also possible to arrange them in parallel in close proximity as a unit.
そして、受光素子基板１１と光フアイバ保持基
板７は、同一の半導体材料シリコンを使用してい
るので、エツチングで光フアイバ保持基板７のＶ
溝８、凹溝９、反射壁面１０、受光素子基板１１
の嵌合のための凹部１２や表面が同時に加工でき
るので正確な位置決めが可能となり製造も容易に
なり問題がない。 Since the light-receiving element substrate 11 and the optical fiber holding substrate 7 use the same semiconductor material silicon, the V of the optical fiber holding substrate 7 is etched.
Groove 8, groove 9, reflective wall surface 10, light receiving element substrate 11
Since the recess 12 and the surface for fitting can be processed at the same time, accurate positioning is possible, and manufacturing is easy and problem-free.
以上の説明は光フアイバから光信号を受ける光
受光器について述べたが、光信号を発生して光フ
アイバに供給する光送光器においても、原則的に
同様の考えが適用されることは云うまでもない。 The above explanation has been about an optical receiver that receives an optical signal from an optical fiber, but it can be said that the same principle applies to an optical transmitter that generates an optical signal and supplies it to an optical fiber. Not even.
(g) 発明の効果
以上説明した如く、本発明によれば、光受光器
の小形化と製造の容易化が可能となるので、光フ
アイバを多数使用する伝送システムの場合も、伝
送装置の小形化とコストダウンを可能にする実用
上で優れた効果がえられる。(g) Effects of the Invention As explained above, according to the present invention, the optical receiver can be made smaller and easier to manufacture, so even in the case of a transmission system that uses a large number of optical fibers, the transmission equipment can be made smaller and easier to manufacture. Excellent practical effects can be obtained, making it possible to reduce costs and reduce costs.
第１図は従来の光受光器の構造を示す斜視図、
第２図は本発明の実施例の光受光器の光フアイバ
保持基板の斜視図、第３図は本実施例の光受光器
の受光素子基板の斜視図、第４図は第２図の光フ
アイバ保持基板と第３図の受光素子基板を組合せ
た光受光器の断面図である。
図中の１，１１……受光素子基板、２……受光
素子、３……プリント基板、４……光フアイバ、
６……保持金具、７……光フアイバ保持基板、８
……Ｖ溝、９……凹溝、１０……反射壁面、１２
……凹部を示す。
FIG. 1 is a perspective view showing the structure of a conventional optical receiver;
FIG. 2 is a perspective view of the optical fiber holding substrate of the optical receiver according to the embodiment of the present invention, FIG. 3 is a perspective view of the light receiving element substrate of the optical receiver of the present embodiment, and FIG. FIG. 4 is a sectional view of a light receiver in which a fiber holding substrate and the light receiving element substrate of FIG. 3 are combined. 1 and 11 in the figure... light receiving element board, 2... light receiving element, 3... printed circuit board, 4... optical fiber,
6... Holding metal fitting, 7... Optical fiber holding board, 8
... V groove, 9 ... Concave groove, 10 ... Reflective wall surface, 12
...Indicates a recess.
Claims (1)
着されるＶ溝と該挿着された光フアイバ端面から
出射される光を該面とは直交方向に反射偏向する
反射壁面を有する凹溝がエツチングによつて一体
形成された光フアイバ保持基板と、表面に受光素
子が所定位置に設けられた受光素子基板とからな
り、上記光フアイバ保持基板の一面と受光素子基
板の表面とが対向密着して所定の位置関係となる
位置決め手段を備えて位置決め固定されてなるこ
とを特徴とする光受光器。 ２ 光フアイバと受光素子とが複数対で並列構成
されてなることを特徴とする特許請求の範囲第１
項に記載の光受光器。[Claims] 1. A V-groove into which an optical fiber is inserted parallel to one surface of a semiconductor substrate, and a reflection device that reflects and deflects light emitted from the end surface of the inserted optical fiber in a direction perpendicular to the surface. It consists of an optical fiber holding substrate on which a concave groove having a wall surface is integrally formed by etching, and a light receiving element substrate on the surface of which a light receiving element is provided at a predetermined position, one surface of the optical fiber holding substrate and the light receiving element substrate. 1. A light receiver characterized in that the light receiver is provided with a positioning means that is positioned and fixed in a predetermined positional relationship by facing and in close contact with a surface. 2. Claim 1, characterized in that a plurality of pairs of optical fibers and light receiving elements are arranged in parallel.
The optical receiver described in section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2900384A JPS60172004A (en) | 1984-02-17 | 1984-02-17 | Optical photodetector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2900384A JPS60172004A (en) | 1984-02-17 | 1984-02-17 | Optical photodetector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60172004A JPS60172004A (en) | 1985-09-05 |
| JPS6322565B2 true JPS6322565B2 (en) | 1988-05-12 |
Family
ID=12264220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2900384A Granted JPS60172004A (en) | 1984-02-17 | 1984-02-17 | Optical photodetector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60172004A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017263A (en) * | 1988-12-23 | 1991-05-21 | At&T Bell Laboratories | Optoelectronic device package method |
| US5357103A (en) * | 1991-10-02 | 1994-10-18 | Sumitomo Electric Industries, Inc. | Light receiving module with optical fiber coupling |
| JPH0573610U (en) * | 1992-03-10 | 1993-10-08 | 日本航空電子工業株式会社 | Light guide device with controlled entrance and exit angles |
| US6353250B1 (en) | 1997-11-07 | 2002-03-05 | Nippon Telegraph And Telephone Corporation | Semiconductor photo-detector, semiconductor photo-detection device, and production methods thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5280042A (en) * | 1975-12-22 | 1977-07-05 | Ibm | Optical coupler |
| JPS53104188A (en) * | 1977-02-22 | 1978-09-11 | Western Electric Co | Photo coupler |
-
1984
- 1984-02-17 JP JP2900384A patent/JPS60172004A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5280042A (en) * | 1975-12-22 | 1977-07-05 | Ibm | Optical coupler |
| JPS53104188A (en) * | 1977-02-22 | 1978-09-11 | Western Electric Co | Photo coupler |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60172004A (en) | 1985-09-05 |
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