JPS63220781A - Piezoelectric actuator and driving method thereof - Google Patents

Piezoelectric actuator and driving method thereof

Info

Publication number
JPS63220781A
JPS63220781A JP62054457A JP5445787A JPS63220781A JP S63220781 A JPS63220781 A JP S63220781A JP 62054457 A JP62054457 A JP 62054457A JP 5445787 A JP5445787 A JP 5445787A JP S63220781 A JPS63220781 A JP S63220781A
Authority
JP
Japan
Prior art keywords
piezoelectric
driving
driving body
piezoelectric element
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62054457A
Other languages
Japanese (ja)
Inventor
Nobutoshi Sasaki
佐々木　信俊
Akira Endo
晃 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marcon Electronics Co Ltd
Original Assignee
Marcon Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marcon Electronics Co Ltd filed Critical Marcon Electronics Co Ltd
Priority to JP62054457A priority Critical patent/JPS63220781A/en
Publication of JPS63220781A publication Critical patent/JPS63220781A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To increase travel and speed by fixing a piezoelectric element conducting longitudinal viblations to the side face of a driver. CONSTITUTION:Piezoelectric elements 2 mutually performing longitudinal vibrations are fastened to the side faces of a driver 1 consisting of a square pole body, thus constituting a vibrator 3. When voltage is applied to the piezoelectric elements 2 and the elements 2 are driven, said vibrator 3 conducts flexural vibrations 4, and the driver 1 is displaced in the oblique direction. When only one piezoelectric element 1 is driven at that time, the driver 1 is displaced vertically (right and left). Accordingly, a moving body 7 is shifted in the direction of the arrow A when a piezoelectric actuator is organized by using such a vibrator 1 and vibrators 3a, 3c are driven, and the moving body 7 can be moved in the direction of the arrow B when vibrators 3b, 3d are driven.

Description

【発明の詳細な説明】 ［発明の目的］ （ａ業上の利用分野） この発明は屈曲振動を利用した圧電アクチュエータおよ
びその駆動方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Application in Industry A) The present invention relates to a piezoelectric actuator using bending vibration and a method for driving the same.

（従来の技術） 近年、圧電素子を用いた圧電アクチェータの研究２ｍ１
発が注目を集めているが、その原理。(Prior art) In recent years, research on piezoelectric actuators using piezoelectric elements has been carried out 2m1
The principle behind this development is attracting attention.

構造もさまざまである。例えば直進形の圧電アクチュエ
ータにはインチワームと呼ばれている圧電７クチユエー
タが知られており、その原理構成図を第１７図〜第１９
図に示す。すなわら第１７図において５１．５２はべ・
−ス、５３゜５４．５５は圧電素子である。これらの圧
電素子５３，５４．５５は縦方向振動を行うものである
が、この変位状況を第１８図により訓明すると、圧電索
子５３−５４−５５は圧電セラミック５６と電極５７ど
からなり、該電極５７に電圧を印加することにより分極
方向５８、つまり矢符弓ｃ−ｃ’方向に歪みを生ずるも
のであるから、この伸縮を前記圧電素子５３，５４゜５
５に行わせる。このような原理からなる圧電素子５３，
５４．５５を使用した前記インチワームの動作を第１９
図（ａ）〜（ｒ）を使用して説明する。まず（ａ）のよ
うに圧電素子５５に電圧を印加して伸長させ、ベース５
１．５２間に固定させ、ついで（ｂ）のように圧電素子
５４を駆ｖＪδせ、該圧電素子５４が伸長した分だけ圧
電素子５３が移動する。つぎに（Ｃ）のように圧電素子
５３に電圧を印加すると、伸長してベース５１．５２間
に固定し、この状態では圧電素子５３，５４．５５がい
ずれも電圧が印加されている。そして（ｄ）のように圧
電素子５５に印加していた電圧を解除するが、該解除に
より圧電素子５５は縮小し、ベース５１゜５２から離れ
る。ついで（ｅ）のように圧電索子５４の電圧も解除す
るので、該解除により圧電素子５４も縮小し、その分だ
け圧電素子５５は圧Ｍ素子５３側に寄せられることとな
り、ついで（ｆ）の如＜／Ｅで素子５５に電圧印加され
。The structure also varies. For example, a piezoelectric 7 actuator called Inchworm is known as a linear piezoelectric actuator, and its principle configuration is shown in Figures 17 to 19.
As shown in the figure. In other words, in Figure 17, 51.52 is
- 53°54.55 is a piezoelectric element. These piezoelectric elements 53, 54, and 55 vibrate in the longitudinal direction, and to explain the displacement situation with reference to FIG. By applying a voltage to the electrode 57, distortion is produced in the polarization direction 58, that is, in the arrow c-c' direction.
Let 5 do it. A piezoelectric element 53 based on such a principle,
The operation of the inchworm using 54.55 is shown in the 19th
This will be explained using Figures (a) to (r). First, as shown in (a), a voltage is applied to the piezoelectric element 55 to cause it to expand, and the base 5
1.52, then the piezoelectric element 54 is driven by vJδ as shown in (b), and the piezoelectric element 53 moves by the amount that the piezoelectric element 54 has expanded. Next, when a voltage is applied to the piezoelectric element 53 as shown in (C), it expands and is fixed between the bases 51, 52, and in this state, voltage is applied to both the piezoelectric elements 53, 54, 55. Then, as shown in (d), the voltage applied to the piezoelectric element 55 is released, and as a result of this release, the piezoelectric element 55 contracts and separates from the bases 51 and 52. Then, as shown in (e), the voltage on the piezoelectric cable 54 is also released, so that the piezoelectric element 54 is also reduced in size, and the piezoelectric element 55 is moved closer to the piezo M element 53 by that amount, and then (f) A voltage is applied to the element 55 as follows.

前記圧電素子５３の印加を解除されて一連の動作を終了
し、（ａ）の状態に戻る。この動作を繰り返すことによ
り圧電索子５３．５４．５５は第１７図に示づ゛矢符９
八方向に移動する。なお上記第１９図（ａ）−（ｆ）に
おいて斜線を施した圧電素子は電圧印加されていること
を示したものである。The application to the piezoelectric element 53 is removed, the series of operations ends, and the state returns to (a). By repeating this operation, the piezoelectric cables 53, 54, 55 are moved to the position indicated by the arrow 9 in FIG.
Move in eight directions. Note that in FIGS. 19(a) to 19(f), the piezoelectric elements shaded with diagonal lines indicate that a voltage is applied to them.

しかしながら１、このような構成からなるアクチア−１
−タでは少なくとも３個の圧電素子が必廷であり、これ
らをシーケンスしなければならヂ、その結末複雑なｌ！
！！！１１回路を要し、かつ該回路（４，正確なシ〜ク
ンス動作をしなければならない問題点があ］だ。そして
アクチュエータの移動■は圧電索子の礎位聞となり、縦
方向振動を行う圧電索子Ｇｅｔ変位偵が小さいため大き
な移動距離を望めず、敗ａｘ　／　Ｑ　ｉ口程度しか（
びることができない。ざらに４ｉｓ迄上、高精度の加工
技術が要求され、μｍオ・・−ダーのＡ差が性能に大き
くひびき、動作しない、または移動が所定移動距離に満
たないなどの問題点があった。However, 1, Actia-1 consisting of such a configuration
At least three piezoelectric elements are required in the -ta, and these must be sequenced, resulting in a complicated l!
! ! ! 11 circuits are required, and the circuit (4) has the problem of having to perform accurate sequential operation.And the movement of the actuator becomes the base position of the piezoelectric cord, which causes longitudinal vibration. Because the piezoelectric cable get displacement rectangle is small, it is not possible to expect a large moving distance, and the distance is only about ax / Q i mouth (
I can't move. Roughly up to 4IS, high-precision machining techniques were required, and the A difference in μm order greatly affected performance, resulting in problems such as inoperability or movement less than a predetermined distance.

（発明がＷｉ決しようとする問題点） 上記した如く、インチワームと呼ばれるアクチュエータ
では構造的に高精度の加工製作技術が要求され、移動距
離や移動速度ら小さい欠点がある。(Problems to be Solved by the Invention) As described above, the actuator called an inchworm requires highly precise processing and manufacturing technology for its structure, and has drawbacks such as short travel distance and travel speed.

そこで本発明は以上の欠点を除去するもので、構成簡易
にして移動距離や移動速度を大きくできる圧電アクチュ
エータを提供することを目的とする。SUMMARY OF THE INVENTION The present invention aims to eliminate the above-mentioned drawbacks, and aims to provide a piezoelectric actuator that has a simple structure and can increase the moving distance and moving speed.

［発明の構成］ （問題点を解決するための手段） 本発明の圧電アクチュエータおよびその駆動方法は、駆
動体の側面に長さ方向振動を行う圧電索子を固着した構
成からなり、前記駆動体に移動体を接触させるか、また
は該移動体と一体化させた圧電アクチェータおよび前記
圧電素子に位相の異なる駆動信号を印加して駆動させる
圧電アクチュエータの駆動方法である。[Structure of the Invention] (Means for Solving the Problems) The piezoelectric actuator and the driving method thereof of the present invention have a structure in which a piezoelectric cord that vibrates in a longitudinal direction is fixed to the side surface of a driving body, This is a method of driving a piezoelectric actuator, in which driving signals of different phases are applied to the piezoelectric actuator and the piezoelectric element, which are brought into contact with a moving body or integrated with the moving body, and the piezoelectric element is driven.

（作用） 本発明の圧電アクチュエータは、長さ方向振動を行う圧
電素子を駆動することにより、駆動体に屈曲振動を生じ
させ、該駆動体を上下、斜め９円、楕円などの運動をさ
せ、移動体を直線または回転運動、およびこれらの往復
運動や間欠運動をさせることができる。そしてこれらの
各運動によって得られる圧電アクチュエータの出力は、
従来に比して高速化および高効率化を図ることができる
。(Function) The piezoelectric actuator of the present invention generates bending vibration in the driving body by driving a piezoelectric element that vibrates in the longitudinal direction, and causes the driving body to move vertically, diagonally in a nine-circle direction, in an elliptical direction, etc. The movable body can be made to perform linear or rotational movement, reciprocating movement, or intermittent movement. The output of the piezoelectric actuator obtained by each of these movements is
It is possible to achieve higher speed and higher efficiency than in the past.

（実施例） 実施例１ 第１図に斜視図で示ずように、四角柱体からなる駆動体
１の側面に互いに直角の関係となるように長さ方向振動
を行う圧電素子２を接着などにより固着し、振動子３を
構成する。前記圧′ＩＵｉ素子２に電圧を印加して駆動
させると前記振動子３は、図示のような屈曲振動４を行
う。第２図、第３図に振動子３の正面図を示すが、第２
図のように両圧電素子２を同一の信号で駆動すると、駆
動体１は５で示すような斜め方向の変位を行う。ここで
、一方の圧電素子のみを駆動すれば駆動体１は上下ある
いは左右の変位を行う。また一方の圧電素子を他方の圧
電素子に比べ位相差を持たせて駆動すれば、駆動体１は
楕円あるいは円軌道の変位を行う。第３図にはその位相
差を９０°、つまり一方をＶ、＝Ｖ。(Example) Example 1 As shown in the perspective view in FIG. 1, piezoelectric elements 2 that vibrate in the longitudinal direction are bonded to the side surfaces of a driving body 1 made of a rectangular prism so that they are perpendicular to each other. is fixed to form the vibrator 3. When a voltage is applied to the pressure IUi element 2 to drive it, the vibrator 3 performs a bending vibration 4 as shown in the figure. 2 and 3 show front views of the vibrator 3.
When both piezoelectric elements 2 are driven with the same signal as shown in the figure, the driver 1 performs a diagonal displacement as shown by 5. Here, if only one piezoelectric element is driven, the driver 1 can be displaced vertically or horizontally. Furthermore, if one piezoelectric element is driven with a phase difference compared to the other piezoelectric element, the driving body 1 is displaced in an elliptical or circular orbit. In Figure 3, the phase difference is 90°, that is, one side is V, =V.

ｓｉｎ　ωｔ　、他方をＶ２−Ｖ□　ｃｏｓ　（１）ｔ
とした信号を圧電素子２に印加した様子を示す。このと
き駆動体１は６で示すような円軌道の変位を行う。この
ような振動子を用い圧電アクチュエータを構成したのが
第４図である。７は移動体であり、例えば振動子３ａ、
３Ｇを駆動すると移動体７は矢符９八方向に移動し、振
動子３ｂ。sin ωt, the other V2-V□ cos (1)t
This shows how a signal with the following values is applied to the piezoelectric element 2. At this time, the driving body 1 performs a circular orbit displacement as shown by 6. FIG. 4 shows a piezoelectric actuator constructed using such a vibrator. 7 is a moving body, for example, a vibrator 3a,
When 3G is driven, the movable body 7 moves in the direction of arrow 98, and the vibrator 3b.

３ｄを駆動すると移動体７は矢符号Ｂ方向に移動する。When 3d is driven, the moving body 7 moves in the direction of arrow B.

このような振動子の他の実施例を第５図および第６図に
示すが、ｌｅ、１ｆが駆動体で、２ｅ、２ｆが圧電素子
である。第５図に示すように円柱体状の駆動体１ｅには
四部が設けられ、類！！部に圧電素子２ｅが固着されて
いる。Other embodiments of such a vibrator are shown in FIGS. 5 and 6, in which le and 1f are driving bodies, and 2e and 2f are piezoelectric elements. As shown in FIG. 5, the cylindrical driving body 1e is provided with four parts. ! A piezoelectric element 2e is fixed to the portion.

このように駆動体は、円柱体、多角柱体でもよく、また
これらの側面に四部または凸部を設けたものを用いても
よい。また第６図に示すように圧電素子２ｆはズレを持
って固着されてもよく、さらに駆動体の一側面に１個の
圧電素子とは限らず複数の圧電素子を固着させてもよい
。In this way, the driving body may be a cylindrical body or a polygonal column body, or may have four parts or convex parts on the side surfaces thereof. Furthermore, as shown in FIG. 6, the piezoelectric elements 2f may be fixed with a shift, and not only one piezoelectric element but a plurality of piezoelectric elements may be fixed to one side of the driving body.

また、第１図において駆動体１は一次の屈曲振動を行う
旨述べたが、駆動周波数を変えて高次の屈曲ｗｔｖＪを
行わせてもよい。この場合、駆動体１が移動体に接する
点を多くとれ、かつ振動周期が短くなることから、より
高速に、かつスムーズに移動体を移動できる。さらに圧
ＦＭＬｌ子に印加する信号は交流信号に限らず、パルス
信号の如きものでもよい。Further, although it has been described in FIG. 1 that the driving body 1 performs first-order bending vibration, the driving frequency may be changed to perform higher-order bending wtvJ. In this case, the driving body 1 can contact the movable body at many points, and the vibration period can be shortened, so that the movable body can be moved faster and more smoothly. Further, the signal applied to the pressure FML element is not limited to an alternating current signal, but may be a pulse signal.

実施例２ 第７図に斜視図で示づように、根状の駆動体７１の一側
面に凸部１４を設け、前記側面と直交する一側面に圧電
素子１２を固着し振動子１３を構成する。該振動子１３
を用い圧電アクブコエータを構成したときの正面図を第
８図に、銅面図を第９図に示す。第８図、第９図におい
て圧電素子１２を固着した駆動体１１は、ネジ１６によ
り取付台１５に移動体１７とは６０’なる角度を有する
ように取付けられており、該取付台１５はベース１８に
固定されている。ここで駆動体１１の凸部１４は、移動
体１７の上下部に複数個配置され、わずかの隙間を有す
るように、またはわずかの接触を有するようになってい
る。Embodiment 2 As shown in a perspective view in FIG. 7, a convex portion 14 is provided on one side of a root-shaped driving body 71, and a piezoelectric element 12 is fixed to one side perpendicular to the side to form a vibrator 13. do. The vibrator 13
FIG. 8 shows a front view of a piezoelectric akubucoator constructed using the same, and FIG. 9 shows a copper side view thereof. In FIGS. 8 and 9, the driving body 11 to which the piezoelectric element 12 is fixed is attached to the mounting base 15 with screws 16 at an angle of 60' with respect to the movable body 17, and the mounting base 15 is attached to the base. It is fixed at 18. Here, a plurality of convex portions 14 of the driving body 11 are arranged at the upper and lower portions of the movable body 17 so as to have a slight gap or slight contact.

このような構成からなる圧電アクチュエータにおいて、
圧電素子１２を駆動することにより、移動体１７は、駆
動体１１の屈曲振動により矢符号Ｃ方向に移動する。In a piezoelectric actuator with such a configuration,
By driving the piezoelectric element 12, the movable body 17 moves in the direction of arrow C due to the bending vibration of the drive body 11.

さらに取付台１５を１８０゛回転させて駆動体１１を取
付けると逆方向に移動し、組合ぜによっては双方向移動
が可能となる。この例では、板状の駆動体に１個の圧電
素子を固着させたしのについて述べたが、前記実施例と
同様に駆動体は色々の形状でよく、圧電素子の数も固着
位首もこれらに限定されるものではない。また、移動体
と駆動体とがなす角度も６０°に限るわけではない。例
えば、５０”　、４０’と小さくすることにより速度は
遅いが、より強力、かつ確実に移動体を移動することが
でき、一方７０°、８０°とすることにより高速の移動
が１９られる。Further, when the mount 15 is rotated 180 degrees and the driver 11 is attached, it moves in the opposite direction, and bidirectional movement is possible depending on the combination. In this example, one piezoelectric element is fixed to a plate-shaped drive body, but as in the previous embodiment, the drive body may have various shapes, and the number of piezoelectric elements and the fixing position can also be varied. It is not limited to these. Furthermore, the angle formed between the moving body and the driving body is not limited to 60°. For example, by setting the angles to 50'' and 40', the moving body can be moved more powerfully and reliably, although the speed is slow, while by setting the angles to 70° and 80°, the moving object can be moved at high speed.

実施例３ 第１０図に斜視図で示す駆動体２１を用いた圧電アクチ
ュエータの実施例を示す。第１１図は第１０図の六角柱
体からなる駆動体２１の隣合う側面および対向する側面
に長さ方向振動を行う圧電素子２２を計４個固着した振
動子の側面図である。前記駆動体２１の一側面部には、
細分化された凸部２４が設けられている。このような振
動子を用い圧電アクチュエータを構成したのが第１２図
である。振動子２５は移動体２７に一体化されており、
細分化された凸部２４が移動面に接するように配置され
ている。Example 3 An example of a piezoelectric actuator using a driving body 21 shown in a perspective view in FIG. 10 is shown. FIG. 11 is a side view of a vibrator in which a total of four piezoelectric elements 22 that vibrate in the longitudinal direction are fixed to adjacent and opposing side surfaces of the driving body 21 made of a hexagonal prism shown in FIG. 10. On one side of the driving body 21,
Segmented convex portions 24 are provided. FIG. 12 shows a piezoelectric actuator constructed using such a vibrator. The vibrator 25 is integrated into the moving body 27,
The subdivided convex portions 24 are arranged so as to be in contact with the moving surface.

この場合、振動子２５には４個の圧電素子を設けたが、
全部の圧電素子２２を駆動してもよいし、１個数または
任意の２個あるいは任意の３個を駆動しても移動体２７
の移動は行える。In this case, the vibrator 25 was provided with four piezoelectric elements;
All of the piezoelectric elements 22 may be driven, or even one, any two, or any three of the piezoelectric elements 22 may be driven.
can be moved.

実施例４ 第１３図に正面図、第１４図に甲面図で示す振動子を用
い、ｆｆ１１５図に斜視図で示づような圧電アクテコ１
−タを開成する。第７３図に示すように駆動体３１の一
側面に１よ１．中空部３４゜四部３５が設けられており
、各側面に対向するように４６個の長さ方向振動を行う
１［’１′：ｔｆ索了３２が固着されている。第１５図
に示１ように駆動体３１は、ネジ３６によりベース３８
に固定されてＪ３す、前記中空部３４を移動体３７　／
Ｊ＜通っている。このような振動子の圧電索子３２の駆
動方法は、各圧電素子の分極方向、信■３の有無、信号
の位相差などにより多数あるが、例えば駆動体３１の上
下面に位置する各圧電素子３２をＶ　　＝　Ｖ　□　Ｓ
ｌｎωｔ、右側面あるいは左側面に位置する２個の圧電
素子３２をｖ２−Ｖ□　ＣＯ８ωｔなる電圧で駆動する
とか、下面に位置する圧電素子と側面上部に位置する２
個の圧電素子に同一の交流信号またはパルス信号を与え
るなどの方法を用いることにより、移動体３７は駆動体
３１の中空部３４中を移動する。Example 4 Using the vibrator shown in the front view in Fig. 13 and the top view in Fig. 14, a piezoelectric actuator 1 as shown in the perspective view in Fig. ff115 was used.
- Open data. As shown in FIG. 73, 1 and 1 are attached to one side of the driving body 31. A hollow portion 34° and a four portion 35 are provided, and 46 1['1':TF cables 32 that vibrate in the longitudinal direction are fixed so as to face each side surface. As shown in FIG. 15, the driver 31 is attached to the base 38 by screws
The hollow part 34 is fixed to the moving body 37 /
J< I go to school. There are many ways to drive the piezoelectric cord 32 of such a vibrator, depending on the polarization direction of each piezoelectric element, the presence or absence of the signal 3, the phase difference of the signal, etc. The element 32 is V = V □ S
lnωt, the two piezoelectric elements 32 located on the right side or left side are driven with a voltage of v2-V□CO8ωt, or the piezoelectric element 32 located on the bottom surface and the two piezoelectric elements 32 located on the upper side
The movable body 37 is moved within the hollow portion 34 of the driving body 31 by using a method such as applying the same alternating current signal or pulse signal to each piezoelectric element.

ここで、ネジ３６が通っている部分を接点となるような
屈曲振動を駆動体３１に与えると移動体３７は、より高
速で移動することが確認された。Here, it has been confirmed that if a bending vibration is applied to the drive body 31 such that the portion through which the screw 36 passes serves as a contact point, the movable body 37 moves at a higher speed.

実施例５ 第１６図に回転運動を行う圧電アクチュエータの側面図
を示す。図において、駆動体４１の側面部には第５図に
示したように四部が設置プられており、該凹部に圧電素
子４２が三方に固着されている。また４７はシャフトで
移動体となっており、４９はゴム、　１Ｉｏｒｔ、パル
プ、Ｉｓ分子材料あるいはこれらを含む複合材料からな
る摩擦材で、前記シャフトに固着されている。このよう
な駆動体４１を前述の実施例に記載の方法にて駆動する
ことによりシャツｉ・４７は回転する。また図のように
駆動体４１を配置し、これら駆動体４１の外周に円筒形
のシャフトを配しても該シャフトを回転させることはで
きる。Embodiment 5 FIG. 16 shows a side view of a piezoelectric actuator that performs rotational motion. In the figure, four parts are installed on the side surface of the driving body 41 as shown in FIG. 5, and piezoelectric elements 42 are fixed to the recesses on three sides. Further, 47 is a shaft and is a moving body, and 49 is a friction material made of rubber, 1Iort, pulp, Is molecular material, or a composite material containing these, and is fixed to the shaft. By driving such a driving body 41 in the method described in the previous embodiment, the shirt i.47 is rotated. Furthermore, it is also possible to rotate the shafts by arranging the driving bodies 41 as shown in the figure and arranging cylindrical shafts around the outer peripheries of these driving bodies 41.

なお、以上述べた実施例のほか、駆動体の移動体と接触
する而、または駆動体が物体に接触する面が直線的また
は曲線的な勾配を右するもの、細分化し勾配を有する段
差としたものでもよい。また駆動体の移動体と接触する
部分、または駆動体が物体に接触する部分あるいは移動
体の駆動体と接触する部分には、ゴム、繊維。In addition to the above-mentioned embodiments, the surface of the driving body in contact with the moving body or the surface of the driving body in contact with the object has a linear or curved slope, and the surface of the driving body in contact with the object has a linear or curved slope. It can be anything. In addition, rubber or fiber is used in the part of the driving body that comes into contact with the moving body, the part of the driving body that comes into contact with an object, or the part of the moving body that comes into contact with the driving body.

パルプ、高分子材料あるいはこれらを含む複合材料から
なるｒＪ擦祠を段ｔＪてもよい。The rJ grinder may be made of pulp, a polymer material, or a composite material containing these materials.

［発朗の効果１ この発明になる圧電アクチュエータおよびその駆動方法
では、アクチュエータの加エエ精度をあまり要求されず
、１ＩＪａ１１回路も節用で、大きな移動距離や移動速
度、移動力をＶすることができる。[Hatsuro's effect 1] The piezoelectric actuator and its driving method according to the present invention do not require much precision in actuating the actuator, the 1IJa11 circuit is also economical, and large moving distances, moving speeds, and moving forces can be achieved. .

【図面の簡単な説明】[Brief explanation of the drawing]

第１図〜第１６図は本発明の実施例を示し、第１図は振
動子の斜視図、第２図は同じ駆動信号を印加した振動子
の正面図、第３図は異なる駆動信号を印加した振動子の
正面図、第４図は駆動体に移動体を接触させたｈ１成図
、第５図および第６図は圧電素子を固着した他の実施例
になる駆動体をそれぞれ示す斜視図、第７図は他の実施
例になる振動子を示す斜視図、第８図は第７図に示した
振動子を使用したアクチュエータを示す正面図、第９図
は同じく第７図に示した振動子を使用したアクチュエー
タを示す側面図、第１０図は他の実施例になる駆動体の
斜視図、第１１図は第１０図に示した！ｊ１動体を使用
した振動子の側面図、第１２図は第１１図の振動子に移
動体を接触させたアクチュエータを示す正面図、第１３
図は他の実施例になる駆動体を示１正面図、第１４図は
第１３図に示した駆動体の平面図、第１５図は第１３図
に示した駆動体を使用したアクチュエータを示ず斜視図
、第１６図は他の実施例になる回転形アクチュエータを
示す側面図、第１７図〜第１９図は従来例を示し、第１
７図はインチワームを示す構成図、第１８図はインチワ
ームに使用される圧電素子の変位原理を示す斜視図、第
１９図は動作状態を示す説明図である。 １．１１，２１．３１．４１・・・・・・駆動体２．１
２，２２．３２．４２・・・・・・圧電素子３．１３・
・・・・・振動子 ４・・・・・・屈曲振動 ７．１７．２７．３７．４７・・・・・・移動体１４．
２４・・・・・・凸部 ３４・・・・・・中空部 ３５・・・・・・凹部 特　　許　　出　　願　　人 マルコン電子株式会社 第８図 第？図 ｒ１ｊ六号３アクらエータ丙戎りΔｂ刀す第１６図 第７５図　　　　　第１？図1 to 16 show examples of the present invention. FIG. 1 is a perspective view of a vibrator, FIG. 2 is a front view of a vibrator to which the same drive signal is applied, and FIG. A front view of the applied vibrator, FIG. 4 is an h1 diagram with a movable body in contact with the drive body, and FIGS. 5 and 6 are perspective views showing other embodiments of the drive body in which a piezoelectric element is fixed. 7 is a perspective view showing a vibrator according to another embodiment, FIG. 8 is a front view showing an actuator using the vibrator shown in FIG. 7, and FIG. 9 is a perspective view showing an actuator using the vibrator shown in FIG. FIG. 10 is a side view showing an actuator using a vibrator, FIG. 10 is a perspective view of a drive body according to another embodiment, and FIG. 11 is shown in FIG. j1 A side view of a vibrator using a moving body, FIG. 12 is a front view showing an actuator in which a movable body is brought into contact with the vibrator of FIG.
The figure shows a front view of a driving body according to another embodiment, FIG. 14 is a plan view of the driving body shown in FIG. 13, and FIG. 15 shows an actuator using the driving body shown in FIG. 13. 16 is a side view showing a rotary actuator according to another embodiment, FIGS. 17 to 19 show a conventional example, and FIG.
FIG. 7 is a configuration diagram showing the inchworm, FIG. 18 is a perspective view showing the displacement principle of the piezoelectric element used in the inchworm, and FIG. 19 is an explanatory diagram showing the operating state. 1.11, 21.31.41...Driver 2.1
2,22.32.42...Piezoelectric element 3.13.
... Vibrator 4 ... Bending vibration 7.17.27.37.47 ... Moving body 14.
24...Convex portion 34...Hollow portion 35...Concave portion Patent application Marcon Electronics Co., Ltd. Figure 8? Figure r1j No. 6 3 Acura Eta Hei Ekiri Δb Sword Figure 16 Figure 75 Figure 1? figure

Claims (7)

【特許請求の範囲】[Claims] （１）板状，円柱体，多角柱体またはこれらの中空体，
もしくはこれらの側面に凹部，凸部を形成した駆動体と
、該駆動体に固着した長さ方向振動を行う圧電素子と、
前記駆動体に接触または一体化した移動体とを具備し、
前記圧電素子が駆動体の側面または中空体内，凹部内，
凸部に固着したことを特徴とする圧電アクチェータ。(1) Plates, cylinders, polygonal cylinders, or hollow bodies thereof,
Alternatively, a driving body having concave portions and convex portions formed on the side surfaces thereof, and a piezoelectric element that vibrates in the longitudinal direction fixed to the driving body,
a moving body that is in contact with or integrated with the driving body,
The piezoelectric element may be placed on the side of the driving body, in the hollow interior, in the recess,
A piezoelectric actuator characterized by being fixed to a convex portion. （２）２個数以上の長さ方向に振動を行う圧電素子を互
いに直角の関係、互いに対向する関係、隣合う関係、ま
たはこれらの組合せの関係となるように駆動体に固着し
たことを特徴とする特許請求の範囲（１）項記載の圧電
アクチェータ。(2) Two or more piezoelectric elements that vibrate in the longitudinal direction are fixed to the driving body so that they are perpendicular to each other, facing each other, adjacent to each other, or a combination thereof. A piezoelectric actuator according to claim (1). （３）駆動体を移動体と角度を持たせて接触または一体
化したことを特徴とする特許請求の範囲第（１）項また
は第（２）項の記級の圧電アクチェータ。(3) A piezoelectric actuator according to claim (1) or (2), characterized in that the driving body contacts or is integrated with the movable body at an angle. （４）駆動体の移動体と接触する部分、あるいは駆動体
が物体に推力を及ぼす部分が細分されていることを特徴
とする特許請求の範囲（１）項〜第（３）項のいずれか
に記載の圧電アクチュエータ。(4) Any one of claims (1) to (3), characterized in that the portion of the driving body that contacts the moving body or the portion of the driving body that exerts thrust on the object is subdivided. The piezoelectric actuator described in . （５）駆動体の移動体と接触する部分、あるいは駆動体
が物体に接触する部分が勾配を有することを特徴とする
特許請求の範囲第（１）項〜第（４）項のいずれかに記
載の圧電アクチュエータ。(5) Any one of claims (1) to (4), characterized in that the portion of the driving body that contacts the moving body or the portion of the driving body that contacts the object has a slope. The piezoelectric actuator described. （６）圧電素子が圧電セラミック，電歪セラミック，高
分子圧電体またはこれらを組合せた複合材料からなる圧
電材料で構成されていることを特徴とする特許請求の範
囲（１）項〜第（５）項のいずれかに記誠の圧電アクチ
ュエータ。(6) Claims (1) to (5) characterized in that the piezoelectric element is made of a piezoelectric material made of a piezoelectric ceramic, an electrostrictive ceramic, a polymeric piezoelectric material, or a composite material combining these. ) Piezoelectric actuators listed in any of the above. （７）板状，円柱体，多角柱体またはこれらの中空体も
しくはこれらの側面に凹部，凸部を形成した駆動体と、
該駆動体に固着した長さ方向振動を行う圧電素子と、前
記駆動体に接触または一体化した移動体とを具備し、前
記駆動体の側面または中空体内，凹部内，凸部に固着し
た圧電素子に位相の異なる信号を印加することを特徴と
する圧電アクチュエータの駆動方法。(7) A driving body having a plate shape, a cylindrical body, a polygonal columnar body, a hollow body thereof, or a concave portion or a convex portion formed on the side surface thereof;
The piezoelectric element includes a piezoelectric element that vibrates in the longitudinal direction and is fixed to the drive body, and a moving body that is in contact with or integrated with the drive body, and the piezoelectric element is fixed to the side surface, hollow interior, recess, or convex part of the drive body. A method for driving a piezoelectric actuator, the method comprising applying signals having different phases to an element.
JP62054457A 1987-03-09 1987-03-09 Piezoelectric actuator and driving method thereof Pending JPS63220781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62054457A JPS63220781A (en) 1987-03-09 1987-03-09 Piezoelectric actuator and driving method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62054457A JPS63220781A (en) 1987-03-09 1987-03-09 Piezoelectric actuator and driving method thereof

Publications (1)

Publication Number Publication Date
JPS63220781A true JPS63220781A (en) 1988-09-14

Family

ID=12971207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62054457A Pending JPS63220781A (en) 1987-03-09 1987-03-09 Piezoelectric actuator and driving method thereof

Country Status (1)

Country Link
JP (1) JPS63220781A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008038817A1 (en) * 2006-09-25 2008-04-03 National University Corporation Tokyo University Of Agriculture And Technology Ultrasonic operation device and microtube inside system
WO2015079736A1 (en) * 2013-11-27 2015-06-04 株式会社村田製作所 Drive device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008038817A1 (en) * 2006-09-25 2008-04-03 National University Corporation Tokyo University Of Agriculture And Technology Ultrasonic operation device and microtube inside system
WO2015079736A1 (en) * 2013-11-27 2015-06-04 株式会社村田製作所 Drive device
CN105765853A (en) * 2013-11-27 2016-07-13 株式会社村田制作所 Drive device
JPWO2015079736A1 (en) * 2013-11-27 2017-03-16 株式会社村田製作所 Drive device
CN105765853B (en) * 2013-11-27 2019-03-08 株式会社村田制作所 Driving device
US10291154B2 (en) 2013-11-27 2019-05-14 Murata Manufacturing Co., Ltd. Driving device

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