JPS6321815U - - Google Patents

Info

Publication number
JPS6321815U
JPS6321815U JP11624686U JP11624686U JPS6321815U JP S6321815 U JPS6321815 U JP S6321815U JP 11624686 U JP11624686 U JP 11624686U JP 11624686 U JP11624686 U JP 11624686U JP S6321815 U JPS6321815 U JP S6321815U
Authority
JP
Japan
Prior art keywords
electrode body
electrode
electrodes
concave
convex
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11624686U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11624686U priority Critical patent/JPS6321815U/ja
Publication of JPS6321815U publication Critical patent/JPS6321815U/ja
Pending legal-status Critical Current

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Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案による回転角センサの一実施例
の全体構成を示す断面図、第2図a,bはその固
定側電極体を示す平面図及び断面図、第3図a,
bは同じく回転側電極体を示す平面図及び断面図
、第4図及び第5図は固定側電極と回転側電極と
の互いに異なる位置関係を示す拡大断面図、第6
図aは両電極間の静電容量の変化状態を示す波形
図、第6図bは電圧信号を示す波形図、第6図c
は波形整形したパルス信号を示す波形図、第7図
は回転角検出回路の一例を示すブロツク図、第8
図は従来の静電容量式直線変位計を示す図である
。 1:固定側電極体、2:回転側電極体、12:
支持壁、16:固定側電極、17a,17b,2
4a,24b:絶縁用突起部、23:回転側電極
FIG. 1 is a sectional view showing the overall configuration of an embodiment of the rotation angle sensor according to the present invention, FIGS. 2a and 2b are plan views and sectional views showing the fixed electrode body, and FIGS.
FIG. 4 and FIG. 5 are enlarged sectional views showing mutually different positional relationships between the stationary electrode and the rotating electrode, and FIG.
Figure a is a waveform diagram showing the changing state of capacitance between both electrodes, Figure 6b is a waveform diagram showing the voltage signal, Figure 6c
7 is a waveform diagram showing a waveform-shaped pulse signal, FIG. 7 is a block diagram showing an example of a rotation angle detection circuit, and FIG.
The figure shows a conventional capacitive linear displacement meter. 1: Fixed side electrode body, 2: Rotating side electrode body, 12:
Support wall, 16: Fixed side electrode, 17a, 17b, 2
4a, 24b: Insulating protrusion, 23: Rotating side electrode.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 同軸で相対回転可能にかつ対向して配置された
第1の電極体及び第2の電極体を有し、各電極体
の対向面に所定ピツチの凹凸電極をそれぞれ形成
するとともに、各電極体相互の凹凸電極を電気的
に絶縁する絶縁部材を両電極体にそれぞれ一体に
形成し、両絶縁部材を回転摺動可能に当接させて
両電極を離間し両電極体の凹凸電極の対向位置関
係に応じた静電容量を形成することを特徴とする
静電容量式回転角センサ。
It has a first electrode body and a second electrode body arranged coaxially and relatively rotatably and facing each other, and a concave and convex electrode of a predetermined pitch is formed on the opposing surface of each electrode body. An insulating member for electrically insulating the concave and convex electrodes of both electrode bodies is formed integrally with each other, and both insulating members are rotatably and slidably brought into contact with each other to separate the electrodes. A capacitive rotation angle sensor that is characterized by forming a capacitance according to.
JP11624686U 1986-07-29 1986-07-29 Pending JPS6321815U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11624686U JPS6321815U (en) 1986-07-29 1986-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11624686U JPS6321815U (en) 1986-07-29 1986-07-29

Publications (1)

Publication Number Publication Date
JPS6321815U true JPS6321815U (en) 1988-02-13

Family

ID=31000656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11624686U Pending JPS6321815U (en) 1986-07-29 1986-07-29

Country Status (1)

Country Link
JP (1) JPS6321815U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053183A (en) * 2007-07-31 2009-03-12 Kyocera Corp Device for detecting location variation of stage and transporting device equipped with the same
JP2009288058A (en) * 2008-05-29 2009-12-10 Kyocera Corp Device for detecting position variation of stage and conveyor provided with it

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150865A (en) * 1982-12-06 1983-09-07 Sony Corp Manufacture of electrode for capacity varying rotary state detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150865A (en) * 1982-12-06 1983-09-07 Sony Corp Manufacture of electrode for capacity varying rotary state detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053183A (en) * 2007-07-31 2009-03-12 Kyocera Corp Device for detecting location variation of stage and transporting device equipped with the same
JP2009288058A (en) * 2008-05-29 2009-12-10 Kyocera Corp Device for detecting position variation of stage and conveyor provided with it

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