JPS6321518A - Vibration sensor - Google Patents
Vibration sensorInfo
- Publication number
- JPS6321518A JPS6321518A JP16585186A JP16585186A JPS6321518A JP S6321518 A JPS6321518 A JP S6321518A JP 16585186 A JP16585186 A JP 16585186A JP 16585186 A JP16585186 A JP 16585186A JP S6321518 A JPS6321518 A JP S6321518A
- Authority
- JP
- Japan
- Prior art keywords
- bending
- vibrators
- vibration
- output signals
- different
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005452 bending Methods 0.000 claims abstract description 29
- 230000010287 polarization Effects 0.000 claims abstract description 4
- 238000003754 machining Methods 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、振動物体における弾性振動を検出するのに適
した振動センサ、特に所定の周波数について検出感度の
優れた共振型振動センサに関するものである。DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to a vibration sensor suitable for detecting elastic vibrations in a vibrating object, and particularly to a resonant vibration sensor with excellent detection sensitivity at a predetermined frequency.
従来の技術
従来、振動物体における弾性振動を検出する圧電型セン
サとして、振動物体の固有振動数に共振周波数を合わせ
特定周波数成分のみを検出する共振型、あるいは所定周
波数領域の振動成分を検出する非共振型、特に低周波に
おける感度向上をはかった、屈曲振動モードの片持ち染
型構造である矩形状貼り合わせ圧電振動子が広く知られ
ている。Conventional technology Conventionally, piezoelectric sensors that detect elastic vibrations in a vibrating object have been either resonant type sensors that match the resonance frequency to the natural frequency of the vibrating object and detect only a specific frequency component, or non-resonant sensors that detect vibration components in a predetermined frequency range. BACKGROUND ART A rectangular bonded piezoelectric vibrator of a resonant type, which has a cantilever dyed structure in a bending vibration mode and is designed to improve sensitivity particularly at low frequencies, is widely known.
片持ち染型構造をとる振動センサの場合、振動子の一端
固定という固定条件の実現が雉しいが、特開昭５９−７
０９２３号公報に示されているように、振動検出部分で
ある片持ち染型構造の屈曲振動子を円板状貼り合わせ圧
電素子中に溝を切ることによって作り込み、前記屈曲振
動子はその一端に２いて貼り合わせ圧電素子円板と一体
であり、円板の周辺部を固定支持した構造にすることに
より、固定条件の安定化がはかられているものがある。In the case of a vibration sensor with a cantilever-dyed structure, it is difficult to realize the fixing condition of fixing one end of the vibrator.
As shown in Japanese Patent No. 0923, a bending vibrator with a cantilevered dye structure, which is a vibration detection part, is fabricated by cutting a groove in a disk-shaped bonded piezoelectric element, and the bending vibrator is attached to one end of the bending vibrator. In some cases, the bonded piezoelectric element is integrated with a disk and has a structure in which the peripheral portion of the disk is fixed and supported, thereby stabilizing the fixing conditions.
発明が解決しようとする問題点
貼り合わせ圧電素子中に作り込んだ屈曲振動モード振動
子の周囲を固定することにより安定した特性が得られる
が、前記屈曲振動子の機械的損失係数Ｑが高いため一定
振動入力に対し共振点近傍での出力電圧変化が大きく、
検出する振動周波数がわずかずれても出力電圧は大きく
変化するという問題点があった、
問題点を解決するための手段
厚さ方向に分極軸を有する板状圧電素子２枚を貼り合わ
せた構造の貼り合わせ圧電素子中に切抜きを設けること
により形成された複数個の長さの異なる矩形状屈曲振動
モード振動子と、前記屈曲振動子の周囲を固定する固定
部材から構成され、前記屈曲振動子の上下面と貼り合わ
せ面には電極を有している。Problems to be Solved by the Invention Stable characteristics can be obtained by fixing the periphery of the bending vibration mode vibrator built into the bonded piezoelectric element, but the mechanical loss coefficient Q of the bending vibrator is high. For a constant vibration input, the output voltage change is large near the resonance point.
There was a problem in that even if the detected vibration frequency shifted slightly, the output voltage changed significantly.A method to solve the problem was a structure in which two plate-shaped piezoelectric elements with the polarization axis in the thickness direction were bonded together. It is composed of a plurality of rectangular bending vibration mode vibrators of different lengths formed by providing cutouts in a bonded piezoelectric element, and a fixing member that fixes the periphery of the bending vibrator. Electrodes are provided on the upper and lower surfaces and the bonding surface.
作用
個々の屈曲振動子の長さが異なることから共振周波数が
異なり、これらの出力を加算することにより振動検出帯
域を広くすることができる。Function: Since the lengths of the individual bending vibrators are different, the resonance frequencies are different, and by adding these outputs, it is possible to widen the vibration detection band.
この結果、振動検出において所定の帯域幅を持つ振動の
バンドパスフィルタを構成することができる。As a result, a vibration bandpass filter having a predetermined bandwidth can be configured in vibration detection.
実施例
以下、本発明の実施例について図面を用いて詳細に説明
する。Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
第１図は、本発明にかかる振動センサの分解斜視図であ
る。厚さ方向に分極軸を有する板状圧電素子１ａ、１ｂ
ｉ貼り合わせた構造の貼り合わせ圧電素子１に、レーザ
加工等によって９コ”の字状のスリット（切抜き）２を
大きさを変えて３つ形成し、スリット２で囲まれた部分
は長さの異なった片持ち梁型構造の屈曲振動モード振動
子（以下屈曲振動子と略す）３，４．５とする。屈曲振
動子３．４．５が肖たる部分に溝３’＋ ４’ｌ ５’
を設けた固定部材６を貼り合わせ圧電素子１に接着等に
より固着し、屈曲振動子の周囲を固定して用いる。屈曲
振動子３．４．５の上下面と貼り合わせ面には電極（図
示省略）を有し、上下面電極より出力信号をとり出す。FIG. 1 is an exploded perspective view of a vibration sensor according to the present invention. Plate piezoelectric elements 1a and 1b having polarization axes in the thickness direction
i A laminated piezoelectric element 1 having a laminated structure is formed with three U-shaped slits (cutouts) 2 of different sizes by laser processing, etc., and the portion surrounded by the slits 2 has a length. Flexural vibration mode oscillators (hereinafter referred to as flexural oscillators) 3 and 4.5 have different cantilever structure. Grooves 3'+4'l are formed in the portion where the flexural oscillators 3.4.5 are located. 5'
The fixing member 6 provided with the piezoelectric element 1 is fixed to the bonded piezoelectric element 1 by adhesive or the like, and the periphery of the bending vibrator is fixed for use. Electrodes (not shown) are provided on the upper and lower surfaces and the bonded surface of the bending vibrator 3.4.5, and output signals are taken out from the electrodes on the upper and lower surfaces.
個々の屈曲振動子３．４゜６は、振動子の長さが違うこ
とから共振周波数が異なり、振動に対する出力信号が最
大となる周波数がずれている。共振周波数は、屈曲振動
子の長さの２乗に反比例することから所定の共振周波数
に設定することができる。したがって、所定の共振周波
数に設定した屈曲振動子の出力信号を加算することによ
り、振動の所定帯域のみを検出できる。すなわち振動の
バンドパスフィルタを簡単にかつ安価に構成することが
できる。したがって検出する振動周波数がわずかにずれ
ても出力電圧は大きく変わらない。第２図は、同実施例
における振動センサの周波数に対する出力電圧変化を示
した一例である。３つの長さの違う屈曲振動子３゜４．
６の出力特性を３ ＆＋ ４ ＆ ＋ ５ Ａで示し、
３つの屈曲振動子の出力を加算した特性を実線で示して
いる。このように屈曲振動子のＱが高いため、複数個の
共振周波数がわずかに異なる屈曲振動子の出力信号を加
算することによりパントノくスフイルタとなる。The individual bending vibrators 3.4.degree. 6 have different resonant frequencies because of their different lengths, and the frequencies at which the output signals for vibration are maximized are shifted. Since the resonance frequency is inversely proportional to the square of the length of the bending vibrator, it can be set to a predetermined resonance frequency. Therefore, by adding the output signals of the bending vibrators set to a predetermined resonance frequency, only a predetermined vibration band can be detected. In other words, a vibration bandpass filter can be constructed easily and inexpensively. Therefore, even if the detected vibration frequency shifts slightly, the output voltage does not change significantly. FIG. 2 is an example showing a change in output voltage with respect to frequency of the vibration sensor in the same embodiment. Three bending vibrators with different lengths 3°4.
The output characteristics of 6 are shown as 3 &+ 4 & + 5 A,
The solid line indicates the characteristic obtained by adding the outputs of the three bending vibrators. Since the Q of the flexural oscillator is thus high, a pantone filter is obtained by adding the output signals of a plurality of flexural oscillators having slightly different resonance frequencies.
発明の効果
貼り合わせ圧電素子中に、長さの異なる屈曲振動子を複
数個形成し、それぞれの出力信号を加算することにより
、振動のバンドパスフィルタを簡単に構成でき、安価で
量産性に富んだものである。Effects of the Invention By forming a plurality of bending vibrators with different lengths in a bonded piezoelectric element and adding their respective output signals, a vibration bandpass filter can be easily constructed, making it inexpensive and highly suitable for mass production. It is something.
第１図は本発明の一実施例における振動センサト・・・
・・貼り合わせ圧電素子、２・・・・・・スリット、３
．４．６・・・・・・屈曲振動モード振動子。FIG. 1 shows a vibration sensor according to an embodiment of the present invention.
...Bonded piezoelectric element, 2...Slit, 3
．． 4.6...Bending vibration mode oscillator.
Claims (2)
り合わせた構造の貼り合わせ圧電素子と、前記貼り合わ
せ圧電素子中にスリット（切抜き）を設けることにより
形成された複数個の長さの異なる矩形状屈曲振動モード
振動子と、前記屈曲振動モード振動子の上下面と貼り合
わせ面に設けられた電極を有し、前記屈曲振動子の周囲
が固定部材に固定されていることを特徴とする振動セン
サ。(1) A bonded piezoelectric element having a structure in which two plate-shaped piezoelectric elements having polarization axes in the thickness direction are bonded together, and a plurality of piezoelectric elements formed by providing slits (cutouts) in the bonded piezoelectric element. It has a rectangular bending vibration mode vibrator having different lengths, and electrodes provided on the upper and lower surfaces of the bending vibration mode vibrator and a bonding surface, and the periphery of the bending vibrator is fixed to a fixing member. A vibration sensor featuring:
を加算してセンサ出力としたことを特徴とする特許請求
の範囲第１項記載の振動センサ。(2) The vibration sensor according to claim 1, wherein the sensor output is obtained by adding the outputs of the bending vibrators provided in the bonded piezoelectric element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16585186A JPS6321518A (en) | 1986-07-15 | 1986-07-15 | Vibration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16585186A JPS6321518A (en) | 1986-07-15 | 1986-07-15 | Vibration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6321518A true JPS6321518A (en) | 1988-01-29 |
Family
ID=15820200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16585186A Pending JPS6321518A (en) | 1986-07-15 | 1986-07-15 | Vibration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6321518A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000054345A1 (en) * | 1999-03-09 | 2000-09-14 | Mide Technology Corporation | Laser machining of electroactive ceramics |
| JP2004117368A (en) * | 2003-10-14 | 2004-04-15 | Tokyo Electron Ltd | Acoustic sensor |
| US20130069483A1 (en) * | 2011-09-19 | 2013-03-21 | Chief Land Electronic Co., Ltd. | Transducer and transducer module |
| JP2014062868A (en) * | 2012-09-24 | 2014-04-10 | Sekisui Chem Co Ltd | Piezoelectric type vibration sensor and water leakage detection method |
| CN105181114A (en) * | 2015-09-15 | 2015-12-23 | 国家电网公司 | Double-cantilever vibration sensor |
-
1986
- 1986-07-15 JP JP16585186A patent/JPS6321518A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000054345A1 (en) * | 1999-03-09 | 2000-09-14 | Mide Technology Corporation | Laser machining of electroactive ceramics |
| JP2004117368A (en) * | 2003-10-14 | 2004-04-15 | Tokyo Electron Ltd | Acoustic sensor |
| US20130069483A1 (en) * | 2011-09-19 | 2013-03-21 | Chief Land Electronic Co., Ltd. | Transducer and transducer module |
| JP2014062868A (en) * | 2012-09-24 | 2014-04-10 | Sekisui Chem Co Ltd | Piezoelectric type vibration sensor and water leakage detection method |
| CN105181114A (en) * | 2015-09-15 | 2015-12-23 | 国家电网公司 | Double-cantilever vibration sensor |
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