JPS6319563U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例の断面図、第２図
はそのシヤツタ板の平面図、第３図は同じくその
ロータリアクチユエータの下面図、第４図は従来
の蒸着装置の説明図、第５図はそのシヤツタ装置
の断面図、第６図は同じくそのシヤツタ装置のシ
ヤツタ板の平面図、第７図は同じくそのシヤツタ
装置の回動駆動手段の下面図である。 １…回転軸、２…シヤツタ板、３…ハウジング
、３ａ…軸嵌合孔、４…真空室、７…ロータリア
クチユエータ、１０…冷却媒体路、１１…供給路
部、１２…排出路部、１１ａ，１２ａ…連通口、
１５，１６…被連通口、１７…冷却媒体供給口、
１８…冷却媒体排出口。 Fig. 1 is a sectional view of an embodiment of this invention, Fig. 2 is a plan view of its shutter plate, Fig. 3 is a bottom view of its rotary actuator, and Fig. 4 is an explanatory diagram of a conventional vapor deposition apparatus. 5 is a sectional view of the shutter device, FIG. 6 is a plan view of the shutter plate of the shutter device, and FIG. 7 is a bottom view of the rotary drive means of the shutter device. DESCRIPTION OF SYMBOLS 1... Rotating shaft, 2... Shutter plate, 3... Housing, 3a... Shaft fitting hole, 4... Vacuum chamber, 7... Rotary actuator, 10... Cooling medium path, 11... Supply path part, 12... Discharge path part , 11a, 12a... communication port,
15, 16...Communicated port, 17...Cooling medium supply port,
18...Cooling medium outlet.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ハウジングの軸嵌合孔に回転自在に嵌合した回
転軸の先端にシヤツタ板を取付け、前記回転軸を
回転させる駆動装置を設け、前記シヤツタ板へ冷
却媒体を循環させる冷却媒体路の供給路部と排出
路部とを前記回転軸内に設け、これら供給路部と
排出路部に前記回転軸の外周面に開口した連通口
を設け、前記ハウジングの外面に設けた冷却媒体
供給口および冷却媒体排出口から各々開通して前
記供路部および排出路部の前記連通口と各々連通
する被連通口を前記軸嵌合孔の内周面に設け、前
記連通口および被連通口の少なくとも一方を、前
記回転軸の周方向に延びるものとしたシヤツタ装
置。 A shutter plate is attached to the tip of a rotary shaft that is rotatably fitted into a shaft fitting hole of the housing, a drive device for rotating the rotary shaft is provided, and a supply path section of a cooling medium path circulates a cooling medium to the shutter plate. and a discharge passage portion are provided in the rotating shaft, a communication port opening on the outer circumferential surface of the rotating shaft is provided in the supply passage portion and the discharge passage portion, and a cooling medium supply port and a cooling medium provided on the outer surface of the housing. Communicating ports are provided on the inner circumferential surface of the shaft fitting hole, each opening from the discharge port and communicating with the communication ports of the supply channel portion and the discharge channel portion, and at least one of the communicating port and the communicating port is provided. , a shutter device extending in the circumferential direction of the rotating shaft.