JPS63186484A - Apparatus for removing reactive material - Google Patents
Apparatus for removing reactive materialInfo
- Publication number
- JPS63186484A JPS63186484A JP62017784A JP1778487A JPS63186484A JP S63186484 A JPS63186484 A JP S63186484A JP 62017784 A JP62017784 A JP 62017784A JP 1778487 A JP1778487 A JP 1778487A JP S63186484 A JPS63186484 A JP S63186484A
- Authority
- JP
- Japan
- Prior art keywords
- halogen
- adsorbent
- gas
- temperature sensor
- reactive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title abstract 5
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 41
- 150000002367 halogens Chemical class 0.000 claims abstract description 39
- 239000003463 adsorbent Substances 0.000 claims abstract description 26
- 239000000126 substance Substances 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 229910021536 Zeolite Inorganic materials 0.000 abstract description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 239000010457 zeolite Substances 0.000 abstract description 2
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 abstract 1
- 238000001179 sorption measurement Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
Ａ、産業上の利用分野
本発明は、ハロゲンの如き反応性物質の除去装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to an apparatus for removing reactive substances such as halogens.
Ｂ、従来の技術
ハロゲン混合ガスを使用する例えば希ガス−ハロゲンエ
キシマレーザでは、第４図のように、レーザチャンバＬ
Ｃ内のハロゲン混合ガスＬＧを電磁弁Ｖを介して真空ポ
ンプＰで吸引し、吸着フィルタＦＩでハロゲンを吸着除
去してから外部に排気している。この吸着フィルタＦＩ
には反応性吸着材を用いているので、吸着材の全てが反
応したら吸着機能がなくなるため交換する必要がある。B. Conventional technology In a rare gas-halogen excimer laser using a halogen mixed gas, for example, the laser chamber L is
The halogen mixed gas LG in C is sucked in by a vacuum pump P via a solenoid valve V, and the halogen is adsorbed and removed by an adsorption filter FI before being exhausted to the outside. This adsorption filter FI
Since this uses a reactive adsorbent, if all of the adsorbent reacts, the adsorption function will be lost and it will be necessary to replace it.
従来は、レーザチャンバＬＣ内に充填されたガスの交換
回数からフィルタＦＩの交換時期を判断していた。なお
、第４図中、Ｇはガス供給装置である。Conventionally, the time to replace the filter FI has been determined based on the number of times the gas filled in the laser chamber LC has been replaced. In addition, in FIG. 4, G is a gas supply device.
Ｃ０発明が解決しようとする問題点
このため、交換時期の判断が難しく、吸着機能が残って
いるのに交換したり、吸着機能がないまま使用しつづけ
たりしていた。また、フィルタによるハロゲン除去能力
以上の流量や濃度のハロゲンガスが流れたときにもそれ
を知ることができなかった。Problems to be Solved by the C0 Invention For this reason, it is difficult to judge when it is time to replace the product, leading to people replacing it even though it still has the suction function, or continuing to use it without the suction function. Furthermore, it was not possible to know when halogen gas flowed at a flow rate or concentration higher than the halogen removal ability of the filter.
本発明の目的は、フィルタの交換時期等を適切に知るこ
とのできるハロゲンの如き反応性物質の除去装置を提供
することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a device for removing reactive substances such as halogens that can appropriately determine when to replace a filter.
Ｄ１問題点を解決するための手段
一実施例を示す第１図により本発明を説明すると、本発
明に係る反応性物質（ハロゲン）除去装置は、吸着材３
がハロゲンを吸着する際の発熱反応による温度変化を検
知する温度センサ４を設けてなる。The present invention will be explained with reference to FIG. 1 showing an embodiment of means for solving problem D1.
A temperature sensor 4 is provided to detect a temperature change due to an exothermic reaction when halogen is adsorbed.
Ｅ０作用
ハロゲンが吸着材３に吸着されると発熱するが、吸着材
３の吸着機能が失われると反応せず発熱しない。この温
度の変化を温度センサ４で監視することにより、吸着材
３にハロゲン吸着機能があるのか、あるいは除去能力以
上のハロゲン流量が通過しているか等を的確に知ること
ができる。When the E0 effect halogen is adsorbed by the adsorbent 3, it generates heat, but if the adsorption function of the adsorbent 3 is lost, it does not react and does not generate heat. By monitoring this change in temperature with the temperature sensor 4, it is possible to accurately know whether the adsorbent 3 has a halogen adsorption function or whether a halogen flow rate exceeding the removal capacity is passing through.
Ｆ、実施例
エキシマレーザ装置のハロゲンガスフィルタＦＩを示す
第１図により本発明の一実施例を説明する。F. Embodiment An embodiment of the present invention will be explained with reference to FIG. 1 showing a halogen gas filter FI of an excimer laser device.
フィルタ容器１の両端にガス流入口１ａとガス流出口１
ｂとが設けられ、容器１内には、モール状の金属等から
成る粒子フィルタ２ａ、２ｂに挟まれて、ハロゲンと反
応性の高い粒子状の活性炭。A gas inlet 1a and a gas outlet 1 are provided at both ends of the filter container 1.
In the container 1, particulate activated carbon that is highly reactive with halogen is sandwiched between particulate filters 2a and 2b made of molded metal or the like.
ソーダラムネ、ゼオライト等の吸着材３が収容されてい
る。ガス流出口１ｂ側の吸着材３の端部には、熱電対、
抵抗温度計、サーミスタ等から成り温度に相応した電気
信号を出力する温度センサ４が設けられている。バイメ
タルや形状記憶合金等のように温度で接点を開閉するよ
うな温度センサも使用できる。温度センサ４の出力は図
示しない警報ランプや警報ブザー等に接続されている。An adsorbent 3 such as soda ramune or zeolite is accommodated. At the end of the adsorbent 3 on the gas outlet 1b side, a thermocouple,
A temperature sensor 4 is provided, which is composed of a resistance thermometer, a thermistor, etc., and outputs an electrical signal corresponding to the temperature. Temperature sensors that open and close contacts based on temperature, such as bimetals and shape memory alloys, can also be used. The output of the temperature sensor 4 is connected to an alarm lamp, an alarm buzzer, etc. (not shown).
なお、温度センサ４にはＮｉコーティングやテフロンコ
ーティングを施し、ハロゲンガス雰囲気中でも十分使用
できるようにする。The temperature sensor 4 is coated with Ni or Teflon so that it can be used even in a halogen gas atmosphere.
以上の実施例の動作を説明する。The operation of the above embodiment will be explained.
矢印ＸおよびＹで示すようにガス流入口１ａからガス流
出口１ｂに向けてハロゲン混合ガスを流すと、ハロゲン
が吸着材３に吸着し発熱反応する。ガス流量が０．１Ω
／ｍｉｎ程度以下の少量ならば発熱範囲が狭いから、レ
ーザチャンバ内のハロゲン混合ガスを交換する度に、発
熱する領域がガス流出側に徐々に移行する。すなわち、
一旦反応した吸着材はハロゲンを吸着しないので、ハロ
ゲンを吸着して反応する発熱領域がガス流出側に移行す
る。何回かレーザチャンバ内のハロゲン混合ガスを交換
すると、発熱領域が温度センサ４が設置された領域に到
達し、温度センサ４が発熱温度に相応した信号を出力す
る。この出力信号により警報ランプを点灯したり、警報
ブザーを鳴動させると的確に吸着材の交換時期を知るこ
とができる。温度センサ４の出力により温度を表示して
交換時期を知らせても良い、また、センサ出力に応答し
て吸着材３に再生ガスを流して再生したり、自動的に吸
着材を交換するようにしても良い。When the halogen mixed gas is flowed from the gas inlet 1a to the gas outlet 1b as indicated by arrows X and Y, the halogen is adsorbed on the adsorbent 3 and undergoes an exothermic reaction. Gas flow rate is 0.1Ω
If the amount is as small as /min or less, the heat generation range is narrow, so each time the halogen mixed gas in the laser chamber is replaced, the heat generation area gradually shifts to the gas outlet side. That is,
Once reacted, the adsorbent does not adsorb halogen, so the exothermic region where halogen adsorbs and reacts shifts to the gas outflow side. When the halogen mixed gas in the laser chamber is replaced several times, the heat generating area reaches the area where the temperature sensor 4 is installed, and the temperature sensor 4 outputs a signal corresponding to the heat generating temperature. By lighting an alarm lamp or sounding an alarm buzzer based on this output signal, it is possible to accurately know when it is time to replace the adsorbent. The temperature may be displayed based on the output of the temperature sensor 4 to notify the replacement time, or the adsorbent may be regenerated by flowing regeneration gas to the adsorbent 3 in response to the sensor output, or the adsorbent may be replaced automatically. It's okay.
なお、第２図のように、温度センサ４を容器１の外側に
設置しても良い。この場合、温度センサに耐ハロゲン処
理を施す必要がない。Note that, as shown in FIG. 2, the temperature sensor 4 may be installed outside the container 1. In this case, there is no need to perform halogen resistance treatment on the temperature sensor.
第３図は１本発明に係るハロゲン除去装置を希ガス−ハ
ロゲンエキシマレーザ装置に用いた場合の概略構成図で
ある。FIG. 3 is a schematic diagram of a case where the halogen removal device according to the present invention is used in a rare gas-halogen excimer laser device.
ガス供給装［ＧからレーザチャンバＬＣに充填されたハ
ロゲン混合ガスは、真空ポンプＰにより電磁弁Ｖを介し
てハロゲンフィルタＦＩに導かれ、ここでハロゲンを除
去してから排気される。The halogen mixed gas filled into the laser chamber LC from the gas supply device [G is guided by a vacuum pump P through a solenoid valve V to a halogen filter FI, where halogen is removed and then exhausted.
上述したように複数回にわたるハロゲンガス抜気作業に
よりフィルタＦＩを通過したハロゲンガスの積算流量が
所定値に達すると、吸着材３のガス流出側端部でハロゲ
ンが吸着されて発熱する。温度センサ４は温度変化を示
す信号を出力し、これによりコントローラＣは吸着材３
が使用限界にきたと判定し電磁弁Ｖを閉じハロゲンガス
の排出を停止する。これと同時に操作者に吸着材３が交
換時期であることを警報ランプ等により報知する。As described above, when the cumulative flow rate of the halogen gas that has passed through the filter FI reaches a predetermined value due to the halogen gas venting operation performed multiple times, the halogen is adsorbed at the gas outflow side end of the adsorbent 3 and generates heat. The temperature sensor 4 outputs a signal indicating the temperature change, which causes the controller C to control the adsorbent 3.
It is determined that the halogen gas has reached its usage limit, and the solenoid valve V is closed to stop the discharge of halogen gas. At the same time, an alarm lamp or the like notifies the operator that it is time to replace the adsorbent 3.
また、ハロゲンガス流量が一時的に増大し吸着材３の吸
着能力を上回ると、積算流量が所定値以下も温度センサ
近傍で発熱反応が生じるから、温度センサ４からの出力
を受けたコントローラＣにより電磁弁Ｖが閉じられ、未
吸着のハロゲンガスが排出されるのが防止される。Furthermore, if the halogen gas flow rate temporarily increases and exceeds the adsorption capacity of the adsorbent 3, an exothermic reaction will occur near the temperature sensor even if the integrated flow rate is below a predetermined value. The solenoid valve V is closed to prevent unadsorbed halogen gas from being discharged.
なお、以上では温度センサを吸着材のガス流出側端部に
設は温度上昇時に吸着材の交換時期、あるいは能力以上
のハロゲンガスが流れたことを検知したが、ガス流入側
に設け、＠度が低下したことにより交換時期等を検出し
ても良い。また、エキシマレーザに用いるハロゲン混合
ガスのハロゲン除去に限らず、ガス状又は液状の反応性
物質を除去する種々のフィルタに適用できる。In the above, the temperature sensor was installed at the gas outflow end of the adsorbent to detect when the adsorbent should be replaced when the temperature rose, or to detect when halogen gas exceeded its capacity. It is also possible to detect the time for replacement based on the decrease in the value. Further, the present invention is applicable not only to halogen removal from a halogen mixed gas used in an excimer laser, but also to various filters that remove gaseous or liquid reactive substances.
Ｇ０発明の効果
本発明によれば、吸着材の発熱温度を温度センサにより
検出して吸着材の交換時期等を検出するようにしたので
、吸着材を有効に使用でき、未吸着の反応性物質を排出
するおそれもない。G0 Effects of the Invention According to the present invention, the exothermic temperature of the adsorbent is detected by a temperature sensor to determine when to replace the adsorbent, so the adsorbent can be used effectively and unadsorbed reactive substances can be removed. There is no risk of it being emitted.
第１図は本発明の一実施例を示す断面図、第２図は変形
例を示す断面図、第３図は第１図に示した装置をエキシ
マレーザ装置に適用した場合の概略構成図、第４図は従
来例を示し第３図に相当する図である。FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 2 is a sectional view showing a modified example, and FIG. 3 is a schematic configuration diagram when the device shown in FIG. 1 is applied to an excimer laser device. FIG. 4 shows a conventional example and is a diagram corresponding to FIG. 3.
Claims (1)
反応性物質除去装置において、 前記発熱反応による温度変化を検知する温度センサを設
けたことを特徴とする反応性物質除去装置。 ２）前記反応性物質がハロゲンであることを特徴とする
特許請求の範囲第１項記載の反応性物質除去装置。[Scope of Claims] 1) A reactive substance removal device having an adsorbent that adsorbs a reactive substance and causes an exothermic reaction, characterized in that a temperature sensor is provided to detect a temperature change due to the exothermic reaction. Substance removal equipment. 2) The reactive substance removal device according to claim 1, wherein the reactive substance is a halogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62017784A JPS63186484A (en) | 1987-01-28 | 1987-01-28 | Apparatus for removing reactive material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62017784A JPS63186484A (en) | 1987-01-28 | 1987-01-28 | Apparatus for removing reactive material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63186484A true JPS63186484A (en) | 1988-08-02 |
Family
ID=11953341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62017784A Pending JPS63186484A (en) | 1987-01-28 | 1987-01-28 | Apparatus for removing reactive material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63186484A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020151953A (en) * | 2019-03-20 | 2020-09-24 | 住友重機械工業株式会社 | Injection molder |
| JP2022048987A (en) * | 2020-09-15 | 2022-03-28 | Ｊｆｅスチール株式会社 | Adsorption tower, temperature measurement method of adsorbent, separation drive force calculation method of target gas, degradation state determination method of adsorbent and operation method of pressure swing adsorption equipment |
-
1987
- 1987-01-28 JP JP62017784A patent/JPS63186484A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020151953A (en) * | 2019-03-20 | 2020-09-24 | 住友重機械工業株式会社 | Injection molder |
| JP2022048987A (en) * | 2020-09-15 | 2022-03-28 | Ｊｆｅスチール株式会社 | Adsorption tower, temperature measurement method of adsorbent, separation drive force calculation method of target gas, degradation state determination method of adsorbent and operation method of pressure swing adsorption equipment |
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