JPS63170459U - - Google Patents
Info
- Publication number
- JPS63170459U JPS63170459U JP6149187U JP6149187U JPS63170459U JP S63170459 U JPS63170459 U JP S63170459U JP 6149187 U JP6149187 U JP 6149187U JP 6149187 U JP6149187 U JP 6149187U JP S63170459 U JPS63170459 U JP S63170459U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- sputtering apparatus
- processed
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の縦断面図、第２図
は従来装置の一例の縦断面図である。
１……基板ホルダ、２……被処理基板、３……
案内ローラ、４……移送装置、５……ターゲツト
、６……カソードボデイ、７……載置部、８……
開口部。
FIG. 1 is a longitudinal sectional view of an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of an example of a conventional device. 1...Substrate holder, 2...Substrate to be processed, 3...
Guide roller, 4... Transfer device, 5... Target, 6... Cathode body, 7... Placement section, 8...
Aperture.
Claims (1)
の姿勢で移動しながら成膜処理を施す方式のスパ
ツタリング装置において、前記基板ホルダを断面
形状が凸型になるように形成し、基板ホルダの移
送装置や案内部分よりも基板の載置部及びターゲ
ツト面が高くなるようにしたことを特徴とするス
パツタリング装置。 In a sputtering apparatus that performs a film forming process while moving a substrate holder that holds a substrate to be processed in a generally horizontal posture, the substrate holder is formed to have a convex cross-sectional shape, and the substrate holder is transferred. A sputtering apparatus characterized in that a substrate mounting part and a target surface are higher than the apparatus and a guide part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6149187U JPS63170459U (en) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6149187U JPS63170459U (en) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170459U true JPS63170459U (en) | 1988-11-07 |
Family
ID=30894880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6149187U Pending JPS63170459U (en) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170459U (en) |
-
1987
- 1987-04-24 JP JP6149187U patent/JPS63170459U/ja active Pending