JPS63164217U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案による回転塗布装置の一実施
例を示す縦断面図、第２図はこの考案の他の実施
例を示す要部縦断面図、第３図及び第４図は従来
の回転塗布装置を示す図で、第３図は縦断面図、
第４図は第３図の要部拡大断面図である。 図中、１は容器、２はノズル、３はホトレジス
ト、７は回転軸、７Ａは回転軸延在部、７ａは穴
、９は封止体、１２はチヤツク、１２ａは穴、１
３はウエハ、１８は封止体（磁性流体シール）で
ある。なお、図中同一符号は同一又は相当部分を
示す。 Fig. 1 is a longitudinal cross-sectional view showing one embodiment of a rotary coating device according to this invention, Fig. 2 is a longitudinal cross-sectional view of main parts showing another embodiment of this invention, and Figs. This is a diagram showing the coating device, and FIG. 3 is a longitudinal sectional view;
FIG. 4 is an enlarged sectional view of the main part of FIG. 3. In the figure, 1 is a container, 2 is a nozzle, 3 is a photoresist, 7 is a rotating shaft, 7A is a rotating shaft extension part, 7a is a hole, 9 is a sealing body, 12 is a chuck, 12a is a hole, 1
3 is a wafer, and 18 is a sealing body (magnetic fluid seal). Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] モータの回転軸の上端に嵌入されたチヤツクと
、上記回転軸に接触して気密を保つ封止体を介し
て供給される吸気により上記チヤツクに保持され
るウエハとを容器内に収納し、上記容器に上記ウ
エハ上にホトレジストを滴下するノズルを設けた
ものにおいて、上記回転軸を上記モータの下方に
も延在させ、上記封止体を上記回転軸の延在部に
設けたことを特徴とする回転塗布装置。 A chuck fitted into the upper end of the rotating shaft of the motor, and a wafer held in the chuck by air supplied through a sealing member that contacts the rotating shaft to maintain airtightness are housed in a container. The container is provided with a nozzle for dropping photoresist onto the wafer, characterized in that the rotating shaft extends below the motor, and the sealing body is provided at the extending portion of the rotating shaft. Rotary coating equipment.