JPS63161335A - Clean room - Google Patents
Clean roomInfo
- Publication number
- JPS63161335A JPS63161335A JP30740386A JP30740386A JPS63161335A JP S63161335 A JPS63161335 A JP S63161335A JP 30740386 A JP30740386 A JP 30740386A JP 30740386 A JP30740386 A JP 30740386A JP S63161335 A JPS63161335 A JP S63161335A
- Authority
- JP
- Japan
- Prior art keywords
- air
- room
- duct
- clean
- fan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 13
- 238000004887 air purification Methods 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims 1
- 238000007664 blowing Methods 0.000 abstract description 10
- 238000007599 discharging Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract 1
- 239000000428 dust Substances 0.000 description 9
- 230000003749 cleanliness Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000009423 ventilation Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、空気清浄室に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to an air cleaning room.
第７図に従来技術に係る代表的な空気清浄室の断面図を
示す。FIG. 7 shows a sectional view of a typical air cleaning room according to the prior art.
空気清浄室１は壁ＩＡ、天井２、床３、基礎床４および
支柱５から構成されており、天井部には給気を導くため
の給気ダクト６と吹出ファン７、た、床３には、吸込口
１１が設けられ、床３と基礎４との間の壁ｌＡには室内
空気を排出するための排気ダクト１２および空気の循環
ダクト１３が設げられている。以下、この排気ダクトＩ
２と循環ダクト１３の前半部を排気系ダクトと呼び、前
記給気ダクト６と、このダクトに接続する循環ダクト１
３の後半部を給気系ダクトと呼ぶ。さらに排気ダク）１
２には排気ファン１４が接続している。The air purification room 1 is composed of a wall IA, a ceiling 2, a floor 3, a foundation floor 4, and pillars 5, and an air supply duct 6 and a blow-off fan 7 for guiding supply air are installed in the ceiling. A suction port 11 is provided, and an exhaust duct 12 and an air circulation duct 13 for discharging room air are provided on the wall 1A between the floor 3 and the foundation 4. Below, this exhaust duct I
2 and the first half of the circulation duct 13 are called an exhaust system duct, and the air supply duct 6 and the circulation duct 1 connected to this duct are called an exhaust system duct.
The second half of 3 is called the air supply system duct. Furthermore, exhaust duct) 1
2 is connected to an exhaust fan 14.
このように構成された空気清浄室ｌでは、外気取入ダク
ト１６から取入れられ、空気調和機１５によって調温、
調！髭された空気が給気ダクト６を経て吹出ユニットｌ
Ｏの吹出ファン７から高性能エアフィルタ８に導入され
て塵埃が除去され、清浄空気となったのち、吹出口９が
ら空気清浄室１に吹出される。さらに゛、この吹出され
た清浄空気は室内で発生した塵埃を巻込んで吸込口１１
から一部が排気ダク）１２を経て室外に排出され、−止
すると、外気の侵入により室内の清浄度が急激に低下し
てしまう。清浄度を高く維持するためＫは、高性能エア
フィルタ８を通過した清浄空気を常時清浄室に送り込む
必要があり、夜間、休日などの非使用時でも、室内の機
器、製品に対する汚染を防止するために送風を停止する
ことができず、送風動力を多く要するという欠点があっ
た。In the air cleaning room l configured in this way, outside air is taken in through the intake duct 16, and the temperature is controlled and controlled by the air conditioner 15.
Tone! The blown air passes through the supply air duct 6 and reaches the blowout unit l.
The air is introduced from the air blowing fan 7 into the high-performance air filter 8 to remove dust and become clean air, which is then blown into the air cleaning chamber 1 through the air outlet 9. Furthermore, this blown clean air entrains dust generated indoors and
A part of the air is discharged outside through the exhaust duct 12, and when the air is stopped, the cleanliness inside the room rapidly decreases due to the intrusion of outside air. In order to maintain a high degree of cleanliness, the K needs to constantly send clean air that has passed through a high-performance air filter 8 into the clean room, preventing contamination of indoor equipment and products even when not in use, such as at night or on holidays. Therefore, the air blowing cannot be stopped and a large amount of air blowing power is required.
この発明の目的は、前記従来技術の欠点を解消し、夜間
、休日等の非使用時においても、室内の清浄度を維持し
つつ、送風動力を節減することができる空気清浄室を提
供することにある。An object of the present invention is to eliminate the drawbacks of the prior art and provide an air purifying room that can maintain indoor cleanliness and reduce blowing power even when not in use, such as at night or on holidays. It is in.
〔問題点を解決するための手段〕
この発明は、空気清浄室への清浄空気の供給を停止して
からの室内の清浄度の低下（汚染）が、給気系ダクトや
排気系ダクトおよび室を構成する壁、天井、床等の部材
相互の隙間から外気が室内・に侵入するのが主原因であ
ることを確認し、このれ、非使用時には閉止される空気
しゃ断手段を備え、非使用時においては、給気系ダクト
から室内を僅かな陽圧に保持する程度に清浄空気を給気
するようにして、汚染源となる外気の侵入を防止するよ
うにしたことを特徴とする。[Means for Solving the Problems] This invention aims at reducing the amount of cleanliness that occurs in the air supply system duct, exhaust system duct, and the room after the supply of clean air to the air clean room is stopped. We confirmed that the main cause of the problem was outside air entering the room through gaps between the walls, ceiling, floor, and other members that make up the room, and we installed air-blocking means that are closed when not in use. In some cases, clean air is supplied from the air supply system duct to the extent that the interior of the room is maintained at a slight positive pressure, thereby preventing the intrusion of outside air, which can be a source of contamination.
第１図は本発明に係る空気清浄室の第１実施例を示す断
面図である。前記第７図に示した従来の空気清浄室と異
なる点は、排気ダク）１２および循環ダクト１３０室接
続位置と、外気取入ダクト１６の外気取入口に、それぞ
れ電動式の空気しゃ断シャッタ１７，１８．１９を備え
たこと、給気ダクト６の上流部に新たに外気取入補助ダ
クト２０を接続し、このダクトに非使用時用の給気ファ
ン２１と電動式の空気しゃ断シャッタ２２を備えたこと
、室内圧力センサ２３と室外圧力センサ２４と備え、こ
れらのセンサの出力信号に基づい用時すなわち通常運転
時は空気しゃ断シャッタ１７．１８．１９を開放し、空
気しゃ断シャッタ２２を閉止し、給気ファン２１を停止
の状態で前記従来技術と同様に運転する。また、夜間、
休日等の非使用時は、空気調和機１５、吹出ファン７が
停止すると、前記とは逆に、空気しゃ断シャッタ１７，
１８．１９を自動的に閉止させ、排気系ダクトからの外
気の侵入を防止する。同２時に空気しゃ断シャッタ２２
を開放して給気ファン２１を稼動させることによって、
給気ダクト６に外気を導入し、この外気は吹出ユニット
ｌＯの高性能エアフィルタを経て、清浄空気として室内
に供給し続ける。この清浄空気の供給量は室内を僅かな
陽圧（例えばＯ−１＝ １−ＯｍＡ（Ｌ ）に保持する
程度で十分であり、換言すれば、室を構成する壁ゝ、天
井、床等の部材相互の隙間や前記排気系ダクトの空気し
ゃ断シャッタ１７．１８からの空気の漏洩量分る。FIG. 1 is a sectional view showing a first embodiment of an air cleaning room according to the present invention. The difference from the conventional air cleaning room shown in FIG. 7 is that electric air cutoff shutters 17, 18.19, a new outside air intake auxiliary duct 20 is connected to the upstream part of the air supply duct 6, and this duct is equipped with an air supply fan 21 for use when not in use and an electric air cutoff shutter 22. It is equipped with an indoor pressure sensor 23 and an outdoor pressure sensor 24, and based on the output signals of these sensors, during use, that is, during normal operation, the air cutoff shutters 17, 18, and 19 are opened and the air cutoff shutter 22 is closed. The air supply fan 21 is operated in the same manner as in the prior art with the air supply fan 21 stopped. Also, at night,
When not in use, such as on holidays, when the air conditioner 15 and blowing fan 7 stop, the air cutoff shutter 17,
18 and 19 are automatically closed to prevent outside air from entering through the exhaust system duct. Air cutoff shutter 22 at 2 o'clock
By opening the air supply fan 21 and operating the air supply fan 21,
Outside air is introduced into the air supply duct 6, and this outside air passes through the high-performance air filter of the blow-off unit 1O and continues to be supplied into the room as clean air. The amount of clean air supplied is sufficient to maintain the room at a slight positive pressure (for example, O-1 = 1-OmA (L)). The amount of air leakage from the gaps between the members and the air cutoff shutters 17 and 18 of the exhaust system duct is known.
第２図に実験結果を示す。従来の空気清浄室において吹
出ファンを停止すると、室内塵埃濃度Ｂは約２時間後に
外気塵埃濃度Ａとほぼ同程度となる。Figure 2 shows the experimental results. When the blowing fan is stopped in a conventional air cleaning room, the indoor dust concentration B becomes almost the same as the outside air dust concentration A after about 2 hours.
一方、本発明に係る空気清浄室を前記のように作動させ
ると非使用時の室内塵埃濃度はＣ−Ｆのようになる。Ｃ
−Ｆは給気量を変化させたときの状況に示し、給気量を
換気回数に換算して示すとＣは２回／ｈＸＤは５回／ｈ
、Ｅは１０回／ ｈＮＦは２０回／ｈに相当する。すな
わち、換気回数５回／ｈ程度で室内の清浄度を維持でき
ることが分る。この値は、通常運転時の換気回数の数１
０分の１に相当する。もちろん、上記の実繋結果は空気
清浄室の気密度によって異った傾向を示す。On the other hand, when the air cleaning room according to the present invention is operated as described above, the indoor dust concentration when not in use becomes C-F. C
-F shows the situation when the air supply amount is changed, and when the air supply amount is converted into the number of ventilations, C is 2 times/hXD is 5 times/h
, E corresponds to 10 times/hNF corresponds to 20 times/h. That is, it can be seen that the cleanliness of the room can be maintained with a ventilation frequency of about 5 times/h. This value is the number of ventilations during normal operation.
It corresponds to 1/0. Of course, the above actual results show different trends depending on the airtightness of the air purification room.
したがって、前記実施例の給気ファン２１は、室内外の
圧力差（室内の陽圧塵）が所定値以上と選定するならば
、室内圧力センサ２３、室外圧力センサ２４および制御
器２５は省略することもできる。Therefore, in the air supply fan 21 of the embodiment, the indoor pressure sensor 23, the outdoor pressure sensor 24, and the controller 25 are omitted if the pressure difference between indoor and outdoor (indoor positive pressure dust) is selected to be equal to or higher than a predetermined value. You can also do that.
第３図は本発明の第２実施例を示す断面図である。本実
施例は前記第１実施例のような非使用時用の給気ファン
２１を別置しない構成であって、非使用時には空気調和
機１５に内蔵した送気ファン２６を給気用に使用するも
のである。すなわち、本実施例では、空気しゃ断シャッ
タ１７．１８以外に、循環ダクト１３と外気取入ダク）
１６とを連通させるダクトの部分に空気しゃ断シャッタ
２７が設げられており、吹出ファン７が停止すると同時
に、制御器２８かもの信号により、これらの空気しゃ断
シャッタ１７，１８．２７が閉止される。このため、外
気取入ダク）１６から取込んだ外気は空気調和機１５お
よび給気ダクト６を経由して室内に給気される。送気フ
ァン２６はイン使゛用時においても取入れ外気を必要に
応じて調温、調湿することかでき、また第１実施例のよ
うな給気ファンを別置しないで済むという長所がある。FIG. 3 is a sectional view showing a second embodiment of the present invention. This embodiment has a configuration in which the air supply fan 21 for use when not in use is not separately installed as in the first embodiment, and an air supply fan 26 built into the air conditioner 15 is used for supplying air when not in use. It is something to do. That is, in this embodiment, in addition to the air cutoff shutters 17 and 18, the circulation duct 13 and the outside air intake duct)
An air cutoff shutter 27 is provided at the part of the duct that communicates with the blower 16, and at the same time as the blowing fan 7 stops, these air cutoff shutters 17, 18.27 are closed by a signal from the controller 28. . Therefore, the outside air taken in from the outside air intake duct 16 is supplied into the room via the air conditioner 15 and the air supply duct 6. The air supply fan 26 can take in outside air and adjust its temperature and humidity as necessary even when the indoor unit is in use, and has the advantage that there is no need to separately install an air supply fan as in the first embodiment. .
第４図は本発明の第３実施例を示す断面図である。本実
施例も前記第２実施例と同様に、格別の給気ファンは別
置しない構成である。非使用時には天井部に設けた吹出
ユニッ）１０の吹出ファン７を利用して室内に清浄空気
を供給する。すなわち、第５図に示すように、空気清浄
室の天井部には通常、複数の吹出ユニット１０が縦横に
配列されているので、これらの吹出ユニット１０のうち
、非使用時に必要な給気量に見合う台数、例えば１台ま
た２台のみの吹出ファン７を稼動し、残りの吹出ユニッ
トについては、吹出ファン７の稼動を停止する。空気し
ゃ断シャッタは前記第１．第２実施例と同様に、排気系
ダクトに取り付ける。また、空気調和機１５０入ロダク
トにも空気しゃ断ンヤツタ２９を取り付ける。非使用時
には、これらの空気じゃ析シャッタ＋７．１８．２９を
閉止によって、外気取入グク）１６かも取入れた外気を
循環ダクト１３、天井部、高性能エアフィルタ８を経由
させて、室内に必要帯の清浄空気を供給する。本実施例
によれば、第１実施例のような給気ファンを別置する必
要がな（、また、循環ダクトが外気取り入れ用の経路と
して利用されるので負圧に維持される。このため、空気
しゃ断シャッタ１８に万一の漏洩があっても、清浄度の
低い外気が床部から逆流して室内を汚染するということ
がない。なお、本実施例においては、非使用時に稼動さ
せる吹出ファン７を特定位置のものに限定せずに、例え
ば１日毎に切替えることが好ましい。FIG. 4 is a sectional view showing a third embodiment of the present invention. Similar to the second embodiment, this embodiment also has a configuration in which no separate air supply fan is provided. When not in use, clean air is supplied into the room using the blow-off fan 7 of the blow-off unit (10) installed on the ceiling. That is, as shown in FIG. 5, since a plurality of blow-off units 10 are usually arranged vertically and horizontally on the ceiling of an air purification room, the amount of air supplied by these blow-off units 10 when not in use is For example, only one or two blow-off fans 7 are operated, and the blow-off fans 7 of the remaining blow-off units are stopped. The air cutoff shutter is the same as the first one. As in the second embodiment, it is attached to the exhaust system duct. Furthermore, an air cutoff 29 is also attached to the air conditioner 150-input rod duct. When not in use, these air-dissipating shutters are closed to allow outside air to enter the room via the circulation duct 13, the ceiling, and the high-performance air filter 8. Supply clean air to the belt. According to this embodiment, there is no need to separately install an air supply fan as in the first embodiment (also, since the circulation duct is used as a path for taking in outside air, negative pressure is maintained. Even if there is a leak in the air cutoff shutter 18, there will be no possibility that low-purity outside air will flow back from the floor and contaminate the room. It is preferable to switch the fan 7, for example, every day without limiting the fan 7 to a specific location.
すなわち、第５図において、非使用時において稼動させ
る吹出ファンが１台の場合には（ａ） ｌ （ｂ） 、
・・・。That is, in FIG. 5, when only one blower fan is operated when not in use, (a) l (b),
....
（ｔ）の順に、また２台の場合には、（ａ） （ｂ）
ｌ （Ｃ） （ｄ） 、 ・。(t), or in the case of two units, (a) (b)
l (C) (d) , .
（ｋ） ＜６の順に切替える。このようにすることによ
って、各吹出ユニットｌＯＯ高性能エアフィルタ８に対
する非使用時の除塵負荷を平均化させること時の取入れ
外気が循環ダクトを経由する構成としたが、これに限ら
ず、第３図に示したと同一の構成とし、吹出ユニット７
の稼動によって取入れる外気を空気調和機１５を経由さ
せるようにしてもよい。(k) Switch in the order of <6. By doing this, the dust removal load on each blow-off unit lOO high-performance air filter 8 when not in use is averaged, and the outside air taken in when the air is not in use is routed through the circulation duct. The configuration is the same as that shown in the figure, and the blow-off unit 7
The outside air taken in by the operation of the air conditioner 15 may be passed through the air conditioner 15.
前記の各実施例では空気しゃ断手段として、開閉式の空
気しゃ断ンヤツタを説明したが、しゃ断機能をより完全
とするために、第６図に示す水封式の空気しゃ断手段を
用いてもよい。ダク）３０は仕切板３１によってＵ字路
を形成し、非使用時には、電磁弁３２を開とじて、管路
３３から給水し、Ｕ字路内に水封部３４を形成する。こ
の水封部によって空気しゃ断は完全となる。使用時にダ
クト３０の空気しゃ断を解除するときは、電磁弁３５を
開として、Ｕ字路内の水を管路３６から排出する。In each of the embodiments described above, an openable/closable type air cutter was used as the air cutoff means, but in order to make the cutoff function more complete, a water seal type air cutoff means shown in FIG. 6 may be used. The duct 30 forms a U-junction with a partition plate 31, and when not in use, the solenoid valve 32 is opened and water is supplied from the pipe 33, forming a water seal 34 in the U-junction. This water seal provides complete air shutoff. When the air cut-off of the duct 30 is released during use, the solenoid valve 35 is opened and the water in the U-junction is discharged from the pipe line 36.
烹発明は空気清浄室を夜間、休日のため使用し度の少量
の清浄空気を給気するようにしたので、非使用時におい
ても、少ない送風動力で室内の清浄度を維持できる。In the invention, a small amount of clean air is supplied each time the air purifying room is used at night or on holidays, so even when the room is not in use, the cleanliness of the room can be maintained with less blowing power.
第１図は本発明の第１実施例を示す側断面図、第２図は
本発明に係る空気清浄室について実験した結果を示す室
内の塵埃濃度経過図、第３図は本発明の第２実施例を示
す側断面図、第４図は本発明の第３実施例を示す側断面
図、第５図は第３実施例に関して天井部における吹出ユ
ニットの配置例を示す平面図、第６図は本発明に係る空
気しや。
断手段の変形例を示す説明図、第７図は従来技術に係る
空気清浄室の側断面図である。
ｌ・・・空気清浄室、 ６・・・給気ダクト。
７・・・吹出ファン、 ８・・・高性能エアフィ
ルタ。
１２・・・排気ダク）、 １３・・・循環ダクト。
２０・・・外気取入補助ダク）、２１・・・給気ファン
。
２２・・・空気しゃ断シャッタ、２３・・・室内圧力セ
ンサ。
２４・・・室外圧力センサ、２５・・・制御器。
２７．２９・・・空気しゃ断シャッタ。
第１図
第２図
７７シ１４−止部ｆｉ’）の厩遁晴間（ｈ）第３図
第４図
第５図
第６図
第７図Fig. 1 is a side sectional view showing the first embodiment of the present invention, Fig. 2 is a graph showing the progress of dust concentration in the room showing the results of an experiment on the air purification room according to the present invention, and Fig. 3 is a diagram showing the progress of the dust concentration in the room showing the results of experiments on the air cleaning room according to the present invention. FIG. 4 is a side sectional view showing the third embodiment of the present invention; FIG. 5 is a plan view showing an example of arrangement of the blow-off unit in the ceiling regarding the third embodiment; FIG. 6 is a side sectional view showing the embodiment; is an air chamber according to the present invention. FIG. 7 is an explanatory view showing a modification of the cutting means, and is a side sectional view of an air cleaning chamber according to the prior art. l...Air cleaning room, 6...Air supply duct. 7...Blowout fan, 8...High performance air filter. 12...exhaust duct), 13...circulation duct. 20... outside air intake auxiliary duct), 21... air supply fan. 22...Air cutoff shutter, 23...Indoor pressure sensor. 24...Outdoor pressure sensor, 25...Controller. 27.29...Air cutoff shutter. Fig. 1 Fig. 2 Fig. 77 C14-stop part fi') stable release interval (h) Fig. 3 Fig. 4 Fig. 5 Fig. 6 Fig. 7
Claims (2)
ダクトからの給気を高性能エアフイルタによつて清浄化
して室内に吹出すとともに、室内の空気を排気系ダクト
から排気するようにした空気清浄室において、前記排気
系ダクトの室接属位置近傍に室の使用時には開放され、
非使用時には閉止される空気しや断手段を備え、非使用
時においては、前記給気系ダクトから室内を僅かな陽圧
に保持する程度に清浄空気を給気するようにしたことを
特徴とする空気清浄室。(1) Connect the air supply system duct and exhaust system duct, clean the air supplied from the air supply system duct using a high-performance air filter and blow it into the room, and exhaust the indoor air from the exhaust system duct. In the air cleaning room configured as described above, there is a spacer in the vicinity of the location where the exhaust system duct connects to the room, which is opened when the room is in use;
It is characterized by being equipped with an air shielding means that is closed when not in use, and when not in use, clean air is supplied from the air supply system duct to the extent that the room is maintained at a slight positive pressure. air purification room.
範囲内であることを特徴とする特許請求の範囲第１項に
記載の空気清浄室。(2) The air cleaning room according to claim 1, wherein the slight positive pressure is within a range of 0.1 to 1.0 mmAq.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30740386A JPS63161335A (en) | 1986-12-23 | 1986-12-23 | Clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30740386A JPS63161335A (en) | 1986-12-23 | 1986-12-23 | Clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63161335A true JPS63161335A (en) | 1988-07-05 |
Family
ID=17968630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30740386A Pending JPS63161335A (en) | 1986-12-23 | 1986-12-23 | Clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63161335A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006094754A (en) * | 2004-09-29 | 2006-04-13 | Sanyo Electric Co Ltd | Cell culture facility |
| JP2010065947A (en) * | 2008-09-11 | 2010-03-25 | Toshiba Corp | Room pressure controller and room pressure control method |
| US8217339B2 (en) | 2005-03-14 | 2012-07-10 | Hitachi, Ltd. | Adhering matter inspection equipment and method for inspecting adhering method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6159131A (en) * | 1984-08-28 | 1986-03-26 | Takenaka Komuten Co Ltd | Air shower system |
| JPS61186746A (en) * | 1985-02-13 | 1986-08-20 | Hitachi Plant Eng & Constr Co Ltd | Clean room |
-
1986
- 1986-12-23 JP JP30740386A patent/JPS63161335A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6159131A (en) * | 1984-08-28 | 1986-03-26 | Takenaka Komuten Co Ltd | Air shower system |
| JPS61186746A (en) * | 1985-02-13 | 1986-08-20 | Hitachi Plant Eng & Constr Co Ltd | Clean room |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006094754A (en) * | 2004-09-29 | 2006-04-13 | Sanyo Electric Co Ltd | Cell culture facility |
| JP4632737B2 (en) * | 2004-09-29 | 2011-02-16 | 三洋電機株式会社 | Cell culture facility |
| US8217339B2 (en) | 2005-03-14 | 2012-07-10 | Hitachi, Ltd. | Adhering matter inspection equipment and method for inspecting adhering method |
| US8586916B2 (en) | 2005-03-14 | 2013-11-19 | Hitachi, Ltd. | Adhering matter inspection equipment and method for inspecting adhering matter |
| JP2010065947A (en) * | 2008-09-11 | 2010-03-25 | Toshiba Corp | Room pressure controller and room pressure control method |
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