JPS63159707U - - Google Patents
Info
- Publication number
- JPS63159707U JPS63159707U JP5287087U JP5287087U JPS63159707U JP S63159707 U JPS63159707 U JP S63159707U JP 5287087 U JP5287087 U JP 5287087U JP 5287087 U JP5287087 U JP 5287087U JP S63159707 U JPS63159707 U JP S63159707U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- interference fringes
- light source
- optical system
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 4
- 239000000463 material Substances 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
第1図は本考案に係る分離型レーザ干渉計を真
空装置に適用した一実施例を示す説明図、第2図
は第1図に示した光フアイバの構造を示す断面図
、第3図は第1図に示した干渉計本体の内部構造
を示す説明図、第4図は第1図に示した干渉計本
体の光電変換部の電気信号波形図、第5図は第1
図に示したカウンタの概略構成を示す回路ブロツ
ク図、第6図は本発明に係る分離型レーザ干渉計
の他の実施例の概略構成を示す説明図である。
2……光源、4……光フアイバ、6……干渉計
本体、8……ケーブル、10……カウンタ、46
……被測定物。
FIG. 1 is an explanatory diagram showing an embodiment in which the separated laser interferometer according to the present invention is applied to a vacuum device, FIG. 2 is a cross-sectional view showing the structure of the optical fiber shown in FIG. 1, and FIG. Fig. 4 is an explanatory diagram showing the internal structure of the interferometer main body shown in Fig. 1, Fig. 4 is an electrical signal waveform diagram of the photoelectric conversion section of the interferometer main body shown in Fig.
FIG. 6 is a circuit block diagram showing the schematic structure of the counter shown in the figure, and FIG. 6 is an explanatory diagram showing the schematic structure of another embodiment of the separated laser interferometer according to the present invention. 2... Light source, 4... Optical fiber, 6... Interferometer body, 8... Cable, 10... Counter, 46
...Object to be measured.
Claims (1)
割した一方のレーザビームを被測定物側の可動反
射体に照射させて反射光を得ると共に他方のレー
ザビームを参照反射鏡に照射させて反射光を得、
これらの反射光を干渉させて干渉縞を発生させる
光学系と、 前記干渉縞を検出素子で検出すると共にその検
出信号に基づいて干渉縞をカウントして前記被測
定物の長さ等を表示する表示部と、 から構成される分離型レーザ干渉計において、前
記レーザ光源と前記光学系とが真空中で放出ガス
の少ない材料で被覆されている光フアイバによつ
て光結合されると共に、前記光学系と表示部とが
電気ケーブルを介して接続され、前記検出素子は
1周期の干渉縞間に空間位相をずらして複数配置
されると共に各検出素子から得られる電気信号を
演算することによつて光フアイバの外乱を相殺す
ることを特徴とするレーザ干渉計。 (2) 前記光学系はセラミツクス等の不揮発性部
材によつて形成されたケースに収納されているこ
とを特徴とする特許請求の範囲第(1)項記載の分
離型レーザ干渉計。[Scope of Claim for Utility Model Registration] (1) A laser light source that generates a laser beam, the laser beam from the laser light source is split, and one of the split laser beams is irradiated onto a movable reflector on the side of the object to be measured. Obtain reflected light and irradiate the other laser beam onto a reference reflector to obtain reflected light,
an optical system that causes these reflected lights to interfere to generate interference fringes; and a detection element that detects the interference fringes and counts the interference fringes based on the detection signal to display the length of the object to be measured. In a separate laser interferometer, the laser light source and the optical system are optically coupled in vacuum by an optical fiber coated with a material that releases little gas, and the optical The system and the display unit are connected via an electric cable, and a plurality of the detection elements are arranged with spatial phases shifted between one period of interference fringes, and the electric signals obtained from each detection element are calculated. A laser interferometer characterized by canceling disturbances in an optical fiber. (2) The separated laser interferometer according to claim (1), wherein the optical system is housed in a case made of a nonvolatile material such as ceramics.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987052870U JPH064246Y2 (en) | 1987-04-08 | 1987-04-08 | Separate laser interferometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987052870U JPH064246Y2 (en) | 1987-04-08 | 1987-04-08 | Separate laser interferometer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63159707U true JPS63159707U (en) | 1988-10-19 |
JPH064246Y2 JPH064246Y2 (en) | 1994-02-02 |
Family
ID=30878431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987052870U Expired - Lifetime JPH064246Y2 (en) | 1987-04-08 | 1987-04-08 | Separate laser interferometer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH064246Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015502032A (en) * | 2011-11-09 | 2015-01-19 | ザイゴ コーポレーションZygo Corporation | Fiber transmission for metrology systems used in lithography tools |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3738754A (en) * | 1970-03-20 | 1973-06-12 | Thomson Csf | Optical contacting systems for positioning and metrology systems |
JPS5928842A (en) * | 1982-07-30 | 1984-02-15 | ウエスチングハウス エレクトリック コ−ポレ−ション | Stationary reactive power compensating device |
JPS6018727A (en) * | 1983-07-12 | 1985-01-30 | Hitachi Cable Ltd | Optical interferometer |
JPS60176109U (en) * | 1984-04-28 | 1985-11-21 | 鈴木 範人 | Interference fringe moving direction determination device |
JPS6113206A (en) * | 1984-06-29 | 1986-01-21 | Sumitomo Electric Ind Ltd | Glass fiber for optical transmission |
JPS6121936A (en) * | 1984-07-09 | 1986-01-30 | Nippon Telegr & Teleph Corp <Ntt> | Cladding material for optical fiber |
JPS6152616A (en) * | 1984-08-22 | 1986-03-15 | Sumitomo Electric Ind Ltd | Glass fiber for optical transmission |
JPS61219803A (en) * | 1985-03-27 | 1986-09-30 | Nippon Kogaku Kk <Nikon> | Apparatus for measuring physical quantity |
-
1987
- 1987-04-08 JP JP1987052870U patent/JPH064246Y2/en not_active Expired - Lifetime
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3738754A (en) * | 1970-03-20 | 1973-06-12 | Thomson Csf | Optical contacting systems for positioning and metrology systems |
JPS5928842A (en) * | 1982-07-30 | 1984-02-15 | ウエスチングハウス エレクトリック コ−ポレ−ション | Stationary reactive power compensating device |
JPS6018727A (en) * | 1983-07-12 | 1985-01-30 | Hitachi Cable Ltd | Optical interferometer |
JPS60176109U (en) * | 1984-04-28 | 1985-11-21 | 鈴木 範人 | Interference fringe moving direction determination device |
JPS6113206A (en) * | 1984-06-29 | 1986-01-21 | Sumitomo Electric Ind Ltd | Glass fiber for optical transmission |
JPS6121936A (en) * | 1984-07-09 | 1986-01-30 | Nippon Telegr & Teleph Corp <Ntt> | Cladding material for optical fiber |
JPS6152616A (en) * | 1984-08-22 | 1986-03-15 | Sumitomo Electric Ind Ltd | Glass fiber for optical transmission |
JPS61219803A (en) * | 1985-03-27 | 1986-09-30 | Nippon Kogaku Kk <Nikon> | Apparatus for measuring physical quantity |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015502032A (en) * | 2011-11-09 | 2015-01-19 | ザイゴ コーポレーションZygo Corporation | Fiber transmission for metrology systems used in lithography tools |
Also Published As
Publication number | Publication date |
---|---|
JPH064246Y2 (en) | 1994-02-02 |
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