JPS63157108A - Optical dividing and combining circuit - Google Patents

Abstract

PURPOSE:To improve the assembly operability by allowing all waveguide ends to face once side edge of a substrate, providing a groove on a branch part and providing a partial transmitting and reflecting filter in the groove, and also, providing an optical reflecting body on a turning-back part. CONSTITUTION:All waveguide ends of an input and an output are allowed to face one substrate side edge 1a. On the surface of a substrate 1, a groove 7 for parting the waveguide is carved and provided, and in this groove 7, an interference filter 8 is fitted and installed. In this constitution, when mixed light beams whose wavelengths are, for instance, 0.85mum and 1.3mum are made incident on an input path 2, the light beam whose wavelength is 0.85mum is led to a reflected light waveguide 3 by the filter 8, and the light beam whose wavelength is 1.3mum is led to a transmission light waveguide 4. The light beam propagated through this waveguide 4 reaches a turning-back part 5 and reflected by a reflecting body 10, propagated as it is in a waveguide 4b, transmits through an interference filter 9, and thereafter, emitted from the waveguide end of the side edge 1a and made incident on an optical fiber 11c. The light beam reflected by the filter 8 is made incident on an optical fiber 11b. In such a way, the assembly operability is improved, and also the assembly work can be executed easily.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、伝送光を波長あるいはパワーで分割したり合
流させるために用いられる光分割合流回路に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical splitting/combining circuit used to split or combine transmitted light according to wavelength or power.

〔従来技術の説明〕[Description of prior art]

導波路型の光分割合流回路として従来、第を図に示す構
造のものが知られている（例えば信学技報０ＱＥｌｒ！
−２９，特開昭１−／９ｒ’ｌＯｌ’等）。Conventionally, a waveguide-type light splitting/combining circuit with a structure shown in the figure is known (for example, IEICE Technical Report 0QElr!
-29, JP-A-1-/9r'lOl', etc.).

同図のものは、８１基板上に、５ｉ０２−　ＴｉＯ２系
の光導波路２７．コｒａ−２ｒｆを直線的に突出形成し
、回路中の各分岐部で導波路を分断してこの分断箇所に
干渉フィルタ、２９　ａ−ｊ　９　Ｇを介装して、基板
上に立設したフィルタガイドと溝によってフィルタを保
持させている。In the figure, a 5i02-TiO2 optical waveguide 27. is placed on a substrate 81. A RA-2RF was formed to protrude linearly, the waveguide was divided at each branch part in the circuit, and an interference filter, 29 a-j 9 G, was interposed at this divided part, and it was installed upright on the board. The filter is held by the filter guide and groove.

上記のフィルタは、その面法線が両分岐路の光軸の成す
角を二等分する如く傾斜させである。The above filter is inclined so that its surface normal bisects the angle formed by the optical axes of both branch paths.

また各導波路の端部は基板側縁よりも内側で終っており
、これら導波路端には、基板上に設けられたファイバガ
イド３０ａ〜３０ｅで、挾持固定した光７アイパ２ｔａ
−２６，ｅが接続される。Furthermore, the ends of each waveguide end inside the side edge of the substrate, and at the ends of these waveguides, optical fiber guides 30a to 30e provided on the substrate sandwich and fix optical fibers 2ta.
-26,e is connected.

上記回路において、四種の波長の混合光を導波路２７に
入射させると、伝搬光は第１の分岐部の干渉フィルタ２
ワａで、フィルタの波長選択特性に応じた透過光と反射
光とに分波され、このうち透過光は導波路、２Ｊ’ａ中
を伝搬して第２の分岐部の干渉フィルタ２９ｂに至り、
このフィルタを透過した特定波長光は光ファイバＪ４Ｃ
に出力され、フィルタ！９ｂで反射された歿りの波長光
は光ファイバ２１、ｂに出力される。また第１フイルタ
２９ａで反射された光は導波路２ｒＣ１を伝搬して第３
の分岐部の干渉フィルタ２ｑＣに至り、一部がフィルタ
を透過して導波路コＩｆを伝搬した後、光７アイパコ≦
ｅに出力され、またフィルタ２９Ｃで反射された光は導
波路２ｒｅを伝搬した後、光７アイパ、！６ｄに出力さ
れる。In the above circuit, when mixed light of four different wavelengths is input to the waveguide 27, the propagating light passes through the interference filter 2 of the first branch.
At wave a, the light is split into transmitted light and reflected light according to the wavelength selection characteristics of the filter, and the transmitted light propagates through the waveguide 2J'a and reaches the interference filter 29b at the second branch. ,
The specific wavelength light transmitted through this filter is passed through the optical fiber J4C.
Output to and filter! The light of the other wavelength reflected by the optical fiber 9b is output to the optical fiber 21,b. Further, the light reflected by the first filter 29a propagates through the waveguide 2rC1 and passes through the third filter.
reaches the interference filter 2qC at the branching part of , and a part of the light passes through the filter and propagates through the waveguide if, and then the light 7 ipaco≦
After the light output to e and reflected by the filter 29C propagates through the waveguide 2re, the light 7aipa, ! 6d.

このようＫして、入力用光ファイバ２４ａを通して導波
路、！７に入射した四種の波長の混合光は、各波長光に
分割されて光ファイバ２≦ｂ　、　２６０　。In this way, the input optical fiber 24a is passed through the waveguide, ! The mixed light of four wavelengths incident on the optical fiber 7 is divided into light of each wavelength and is passed through the optical fiber 2≦b, 260.

、？ｇｄ、２ｔｅにそれぞれ出力される。また導波路２
１ｒｂ、２ＩｒＣ中を逆に各波長光が伝搬するとこれら
の伝送光は導波路２ｒａに合流し、導波路２ｒａ。,? They are output to gd and 2te, respectively. Also, waveguide 2
When light of each wavelength propagates reversely through IrC 1rb and 2IrC, these transmitted lights merge into waveguide 2ra.

２ｔｄを伝搬する光はフィルタｊ９ａｌｃよって導波路
２７中に合流する。The light propagating through 2td merges into waveguide 27 through filter j9alc.

このようにして上記回路は、互いに異なる二種の波長の
混合光を各波長毎に分割したり、あるいは各波長光を合
流させる分波合波回路として機能する。また従来の他の
分波合波回路例（例えば特開昭４／−／６１乙０２）を
＠５図に示す。In this way, the circuit functions as a demultiplexing/multiplexing circuit that divides mixed light of two different wavelengths into each wavelength, or combines the lights of each wavelength. Further, another example of a conventional demultiplexing and multiplexing circuit (for example, Japanese Patent Application Laid-open No. 4/1983-61 Otsu 02) is shown in Fig. @5.

本例のものは１つの基板３ｒＫ、導波路３２゜３３．３
’ｌを設け、このうち導波路３２と３３とを基板側縁の
法線に対し対称に傾斜配置するとともに、両路端を側縁
で連結し、また導波路３≠を導波路３３に平行に且つ独
立して設け、導波路３２と３３との連結部及び導波路３
≠の端部が露出している基板側縁に、特定波長光を透過
（又は反射）し、他の波長光を反射（又は透過）する干
渉フィルタ膜３ｊを設け、さらに上記の導波路が設けら
れた基板の側縁に透明スペーサー３６を接合し、このス
ペーサー３６０側縁に反射膜３７を設けている。In this example, one substrate 3rK, waveguide 32°33.3
waveguides 32 and 33 are arranged symmetrically and inclined with respect to the normal to the side edge of the substrate, and both ends are connected at the side edge, and waveguide 3≠ is parallel to waveguide 33. The connecting portion between the waveguides 32 and 33 and the waveguide 3
An interference filter film 3j that transmits (or reflects) light of a specific wavelength and reflects (or transmits) light of other wavelengths is provided on the side edge of the substrate where the end of ≠ is exposed, and the above-mentioned waveguide is further provided. A transparent spacer 36 is bonded to the side edge of the substrate, and a reflective film 37 is provided on the side edge of the spacer 360.

上記の回路では、例えば二種の波長λ１．λ２の混合光
を導波路３２に入射させると、フィルタ膜３夕によって
伝搬光のうちλ１の波長光は反射されて導波路３３に入
射し、またλ２の波長光はフィルタ膜３３を透過し、反
射膜３７で反射されフィルタ膜３５を再度透過した後導
波路３≠に入射し、波長λ１及びλ２の光をそれぞれ導
波路３３及び３≠から取り出すことができる。In the above circuit, for example, two wavelengths λ1. When the mixed light of λ2 is made to enter the waveguide 32, the light of the wavelength λ1 of the propagating light is reflected by the filter film 3 and enters the waveguide 33, and the light of the wavelength λ2 is transmitted through the filter film 33. After being reflected by the reflective film 37 and transmitted through the filter film 35 again, the light enters the waveguide 3≠, and the lights with wavelengths λ1 and λ2 can be taken out from the waveguides 33 and 3≠, respectively.

また逆に、導波路３３へ波長λ１の光を、また導波路３
≠に波長λ２の光をそれぞれ入射させれば、これら両波
長の混合した光を導波路３２から取り出すことができる
。Conversely, the light of wavelength λ1 is sent to the waveguide 33, and the light of wavelength λ1 is sent to the waveguide 33.
If light with a wavelength λ2 is made incident on each of the wavelengths ≠, a mixture of these two wavelengths can be extracted from the waveguide 32.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

第ｔ１図の構造では、光の入出力のために導波路の端部
に接読される光７アイパ等の部材が基板上の周辺に分散
して、しかも異なる角度で配置され、したがって回路を
装置内に組み付ける場合に導波回路基板に大きな配置ス
ペースを要するとともに、組み立て時に作業が煩雑にな
るという間順がある。In the structure shown in Fig. t1, components such as an optical 7-eyeper that is read directly at the end of the waveguide for inputting and outputting light are distributed around the board and are arranged at different angles, so that the circuit is When assembled into a device, the waveguide circuit board requires a large installation space and the assembly process becomes complicated.

また第５図の従来構造では、干渉フィルタ膜３ｊに接す
る導波路３２．３３の連結部と導波路３グの端部との位
置関係に合せて、スペーサー３６の厚みを厳密に加工仕
上げする必要があり、また導波回路基板に接合する作業
を必要とするため製作に手間がかかり、量産に適してい
ないという問題がある。In addition, in the conventional structure shown in FIG. 5, the thickness of the spacer 36 must be precisely processed to match the positional relationship between the connecting portion of the waveguides 32 and 33 in contact with the interference filter film 3j and the end of the waveguide 3g. Furthermore, since it requires bonding to a waveguide circuit board, it is time-consuming to manufacture, making it unsuitable for mass production.

〔問題点を解決するための手段〕[Means for solving problems]

上記の問題を解決する本発明の分割合流回路は、基板に
形成した光導波回路中に、分岐部と、分岐した一方の導
波路を折り返す折り返し部とを設けて、全ての導波路端
を基板の一側縁に臨ませ、前記分岐部に導波路を分断す
る溝を設けて該溝中に部分透過反射フィルタを介装する
とともに、前記折り返し部に光反射体を配置した。The splitting and merging circuit of the present invention that solves the above problems is provided with a branching part and a folding part for folding back one of the branched waveguides in an optical waveguide circuit formed on a substrate, so that all waveguide ends are connected to the substrate. A groove for dividing the waveguide was provided in the branch part facing one side edge of the waveguide, a partially transmitting reflection filter was interposed in the groove, and a light reflector was arranged in the folded part.

〔作　用〕[For production]

導波路中を伝搬する光は、分岐部にあるフィルタによっ
て透過光と夏射光とに波長あるいはパワー分割され、分
割された光は分岐路を伝搬した後、折り返し部で反射体
により反射されてそのまま折り返し導波路中を伝搬し、
必要に応じて多段階に設けられた上記の分岐と反射折り
返しとを繰り返した後、各伝搬光はすべて基板の一側縁
に入力端とともに配置された出力端から取り出される。The light propagating through the waveguide is split in wavelength or power into transmitted light and summer radiation by a filter in the branching section, and after propagating through the branching section, the split light is reflected by a reflector at the folding section and remains as it is. Propagates in a folded waveguide,
After repeating the above-mentioned branching and reflection folding, which are provided in multiple stages as necessary, all of the propagating lights are taken out from the output end, which is arranged along with the input end on one side edge of the substrate.

〔実　施　例〕〔Example〕

以下本発明を図面に示した実施例に基づいて詳細に説明
する。The present invention will be described in detail below based on embodiments shown in the drawings.

第１図において、ｌはガラス、合成樹脂等の透明板から
成る基板で、この基板ｌには周辺よりも高屈折率の領域
から成る光導波路が、二段階イオン交換法等の方法で埋
め込み形成しである。In Figure 1, l is a substrate made of a transparent plate made of glass, synthetic resin, etc., and an optical waveguide consisting of a region with a higher refractive index than the surrounding area is embedded in this substrate l by a method such as a two-step ion exchange method. It is.

上記の光導波路は、入力路２と、この入力路λから一定
角度（例えば、２００）を成して分岐する反射光導波路
３および入力路の延長上にある透過光導波路ψとを有し
、透過光導波路ψは基板の側縁／ｂ付近で入射ｉ側に向
けて折り返す折り返し部ｊを有し、この折り返し部ｊで
導波路角部が基板側縁ｌｂＫ露出しており、折り返し部
５前後の入射路ｔＩａと反射路ダｂとは、基板側縁ｌｂ
の面法線に対し一定角（−例として１Ｏ０）を成して対
称に光軸な傾けた略Ｖ字型を成している。The optical waveguide has an input path 2, a reflective optical waveguide 3 branching from the input path λ at a certain angle (for example, 200 degrees), and a transmission optical waveguide ψ extending from the input path, The transmitted light waveguide ψ has a folded part j that is folded back toward the incident i side near the side edge /b of the substrate, and at this folded part j, the corner part of the waveguide is exposed at the substrate side edge lbK, and around the folded part 5 The incident path tIa and the reflection path dab are at the substrate side edge lb.
The optical axis is symmetrically inclined at a constant angle (for example, 100) with respect to the surface normal of the lens, forming a substantially V-shape.

そして反射光導波路３および透過光導波路ゲは端部付近
に曲線状にカーブする曲り部を形成して、基板側縁／ａ
から一定距離の範囲で光軸な基板側縁／ａＫ対し垂直と
している。The reflected light waveguide 3 and the transmitted light waveguide 3 form a curved part near the end of the substrate side edge/a.
The optical axis is perpendicular to the substrate side edge /aK within a certain distance from the optical axis.

また入出労金ての導波路端を一方の基板側縁／ａに臨ま
せである。そして基板表面には、導波路分岐部６で導波
路を分断する溝７が基板の側縁／ａ。In addition, the end of the waveguide for input and output is made to face the side edge /a of one of the substrates. On the surface of the substrate, there is a groove 7 that divides the waveguide at the waveguide branching portion 6 at the side edge /a of the substrate.

／ｂ　Ｋ対し平行に且つ基板全幅にわたり刻設してあり
、この溝７中の分岐部乙の箇所には特定波長の光を透過
（又は反射）シ、他の波長光を反射（又は？ｊ過）する
干渉フィルタｒが嵌装してあり、このフィルタの面法線
が入力路コと反射光導波路３との成す角を二等分するよ
うに両導波路２，３を傾斜させである。−例として溝７
を幅ｊＯμｍ。/b is engraved parallel to K and over the entire width of the board, and the branch part B in this groove 7 transmits (or reflects) light of a specific wavelength and reflects light of other wavelengths (or ?j An interference filter (r) is fitted in which the waveguides 2 and 3 are inclined so that the normal to the surface of this filter bisects the angle formed by the input path and the reflective optical waveguide 3. . -Groove 7 as an example
The width is jOμm.

深さ２００μｍとし、厚さ１７０μｍに研磨薄板化した
フィルタｔを入れ、紫外線硬化型の光学接着剤で固定す
る。また溝７の、透過光導波路を分断する箇所には、伝
搬光中のノイズ光をカットするための特定波長バンドパ
スフィルタ９を嵌装する。A filter t polished and thinned to a depth of 200 μm and a thickness of 170 μm is inserted and fixed with an ultraviolet curing optical adhesive. Further, a specific wavelength bandpass filter 9 for cutting noise light in the propagating light is fitted in the groove 7 at a location where the transmitted light waveguide is divided.

例えばフィルタ！を５ｉ０２膜とＴｉＯ２膜とを交互に
積層した波長７μｍ以上の光を透過させる長波長パスフ
ィルタとし、フィルタ９として波長へ３μｍＫ透過帯の
中心があるバンドパスフィルタを用いる。またフィルタ
透過光導波路の折り返し部ｊが露出している基板側縁／
ｂには光反射体１０を配置する。この反射体１０は例え
ばＯｕ、Ａｇ等の蒸着膜あるいは干渉フィルタなどが使
用でき、厚み５ｏｏＸのＣｕ膜の場合波長へ３μｍで９
６％の反射率が得られる。そして入力路２、反射光及び
憑過光各出力路３．グｂの端部には光ファイバ／／ａ、
／／ｂ。For example, a filter! is a long-wavelength pass filter that transmits light with a wavelength of 7 μm or more, which is made by alternately laminating 5i02 films and TiO2 films, and a band-pass filter having a center transmission band of 3 μmK wavelength is used as filter 9. Also, the side edge of the substrate where the folded part j of the filter-transmitted optical waveguide is exposed/
A light reflector 10 is placed at b. For this reflector 10, a deposited film of Ou, Ag, etc. or an interference filter can be used, and in the case of a Cu film with a thickness of 50X, the wavelength is 3 μm and 9
A reflectance of 6% is obtained. and an input path 2, and output paths 3 for each of the reflected light and the transmitted light. At the end of the group b, there is an optical fiber //a,
//b.

Ｉｌｏを接続する。Connect Ilo.

第２図に本発明の他の実施例を示す。FIG. 2 shows another embodiment of the invention.

本例が第１図のものと異なる点は、フィルタ透過光導波
路ダの折り返し部！を基板側縁ｔｂよりも内側に位置さ
せ、この折り返し部Ｓの角を切断するように且つ溝７に
平行に他の向／２を刻設し、この溝１２中の折り返し部
ｊの位置に薄板状の光反射体ＩＯを嵌装し、紫外線硬化
型の光学接着剤等で固定している。The difference between this example and the one in FIG. 1 is the folded portion of the filter-transmitting optical waveguide! is located inside the side edge tb of the substrate, and another direction /2 is carved in parallel to the groove 7 so as to cut the corner of this folded part S, and at the position of the folded part j in this groove 12. A thin plate-shaped light reflector IO is fitted and fixed with an ultraviolet curing optical adhesive or the like.

第１図、第２図の回路において、例えばｏ、ｒｓμｍ及
び／、３μｍの二種の波長の混合光を入力路λへ入射さ
せると、干渉フィルタｒで波長ｏ、ｒｒμｍの光はほと
んど反射されて反射光導波路３へ導かれ、また波長／、
Ｊμｍの光はほとんど透過して透過光導波路ダヘ導かれ
る。この導波路ダを伝搬する波長／、Ｊμｍの光は、導
波路弘の折り返し部５に至り、反射体１０で反射されて
折り返し部以降の導波路グｂ内をそのまま伝搬し、フィ
ルタタを透過した後、基板側縁／ａの導波路端から出て
光７アイパ／１０Ｋ入射する。フィルタｒで反射された
Ｏｌに５８ｍの波長光は基板側縁／ａ上の導波路端から
出射して光７アイパ／／ｂに入射す、る。In the circuits shown in Figures 1 and 2, for example, when mixed light of two wavelengths o, rsμm and/or 3μm is input to the input path λ, most of the light with wavelengths o and rrμm is reflected by the interference filter r. is guided to the reflected light waveguide 3, and the wavelength /,
Most of the light of J μm is transmitted and guided to the transmitted light waveguide. The light with a wavelength of /, Jμm propagating through this waveguide reaches the folded part 5 of the waveguide, is reflected by the reflector 10, propagates as it is in the waveguide b after the folded part, and is transmitted through the filter. After that, the light exits from the waveguide end of the substrate side edge /a and enters the light at 7 eye per/10K. The 58 m wavelength light O1 reflected by the filter r is emitted from the waveguide end on the substrate side edge /a and enters the light 7 eyeper//b.

上記の回路を用いて挿入損失を測定したところ、波長ｏ
、ｒｓｔｔｍのチャンネＡｔ’Ｏ，ｊｄ１３．波長／、
３μｍチャンネルで／、ＩＣ１Ｂであった。その内訳は
、００７ｄＢがフィルタ嵌入溝７による損失、０．２Ｃ
ＩＢが入力路２及びフィルタ反射光導波路３による損失
、Ｏ、Ｊ　（ｉＢが入力路２とフィルタ透過光導波路ｌ
ＩＫよる損失である。When we measured the insertion loss using the above circuit, we found that the wavelength o
, rsttm channel At'O, jd13. wavelength/,
It was IC1B in the 3 μm channel. The breakdown is as follows: 007dB is the loss due to the filter fitting groove 7, and 0.2C
IB is the loss due to the input path 2 and the filter-reflecting optical waveguide 3, O, J (iB is the loss due to the input path 2 and the filter-transmitting optical waveguide l
This is a loss due to IK.

また遠端漏話減衰量は３０ｄＢ以上であった。Further, the far end crosstalk attenuation was 30 dB or more.

第３図に本発明の他の実施例を示す。FIG. 3 shows another embodiment of the invention.

本例は導波回路中に３ケ所の分岐部６　ａ　＋　６　ｂ
　ｒｄ０と、３ケ所の折り返し部ｊａ、ｊｂ、ｊｃを設
け、これら３ケ所の分岐部を通る１本の溝７中に、波長
選択特性の５％なる１種の干渉フィルタｒａ　、　ｌｒ
ｂ　。In this example, there are three branch parts 6a + 6b in the waveguide circuit.
rd0 and three folded parts ja, jb, and jc are provided, and in one groove 7 passing through these three branching parts, one type of interference filter ra, lr having a wavelength selection characteristic of 5% is provided.
b.

ＩＱ　、　ｒｄを間隔をおいて固定している。回路パタ
ーンは、第１段のフィルタ、ｒａを透過した後反射体１
０で反射され折り返し路を進む光を第２段フィルタｒｂ
に導き、このフィルタの透過光を第１の折り返し路を通
して光ファイバ／／Ｃに出射させ、反射光は第２段のフ
ィルタ反射光導波路で反射体１０に導き、第２段折り返
し路で第３フィルタｔＯＫ導き、このフィルタｒｃの透
過光を導波路を通して光ファイバ／／ｄに出射させ、ま
た反射光は第３段の反射光導波路を通して反射体ｉｏに
導き第３段の折り返し路を伝搬させてフィルタ、１’（
１を透過させた後、光ファイバ／／ｅに出射させるよう
にしている。IQ and rd are fixed at intervals. The circuit pattern consists of a reflector 1 after passing through the first stage filter and ra.
The light reflected at 0 and traveling along the return path is passed through the second stage filter rb.
The transmitted light of this filter is emitted to the optical fiber //C through the first folding path, and the reflected light is guided to the reflector 10 by the second-stage filter reflection waveguide, and the reflected light is guided to the reflector 10 by the second-stage filter reflection waveguide. The filter tOK is guided, and the transmitted light of this filter rc is emitted to the optical fiber //d through the waveguide, and the reflected light is guided to the reflector io through the third-stage reflective optical waveguide and propagated through the third-stage folded path. Filter, 1'(
After transmitting the light 1, the light is emitted to the optical fiber //e.

上記の回路において入力路／りに例えば１７種の波長０
．７１ｒｌＬｍ　、　０．！＃μｍ　、　／、２μｍ　
、　／、３／１ｍの光を含む混合光を入射させると第１
段フィルタＩｒａを波長Ｏｉ２μｍ付近より長波長の光
を透過する長波長バスフィルタとしておけば０．７ｒμ
ｍ波長光だけが反射されて光ファイバ／ｒｂＶｃ出力さ
れ、フィルタｒａを透過した残りの波長光は第２段フィ
ルタＣ０Ｊｒμｍバンドパスフィルタ）ｔｂに至り、こ
こでｏ、ｒｒμｍ波長光がフィルタを透過して光ファイ
バ／ｒＣに出射する。In the above circuit, for example, 17 types of wavelength 0 are input to the input path.
．． 71rlLm, 0. ! #μm, /, 2μm
, /, When mixed light including light of 3/1 m is incident, the first
If the stage filter Ira is set as a long wavelength bass filter that transmits light with a wavelength longer than the wavelength Oi around 2 μm, it will be 0.7 rμ.
Only the m wavelength light is reflected and outputted from the optical fiber/rbVc, and the remaining wavelength light that has passed through the filter ra reaches the second stage filter C0Jrμm bandpass filter)tb, where the o and rrμm wavelength light passes through the filter. and outputs it to an optical fiber/rC.

またフィルタｒｂで反射された八２μｍと八３μｍの混
合光は第３段のフィルタ（７，２μｍバンドパスフィル
タ）ｒＣに至り、ここでへコμｍの光はフィルタｒＣを
透過した後光ファイバｌｒｄに出射し、フィルタＩＣで
反射された八３μｍの光は第グ段フィルタ（／、３μｍ
バンドパスフィルタ）ｒｄでノイズ光がカットされた後
、光ファイバ／♂ｅに出射する。In addition, the mixed light of 82 μm and 83 μm reflected by filter rb reaches the third stage filter (7.2 μm band pass filter) rC, where the light of 8 μm passes through filter rC and is connected to optical fiber lrd. The 83 μm light emitted from the filter IC and reflected by the filter IC passes through the 8th stage filter
After the noise light is cut by the bandpass filter (bandpass filter) rd, it is emitted to the optical fiber /♂e.

以上本発明を分波器について説明したが、本発明の回路
は合波器あるいは双方向用の分波合波器としても用い得
ることは言うまでもない。Although the present invention has been described above regarding a duplexer, it goes without saying that the circuit of the present invention can also be used as a multiplexer or a bidirectional multiplexer/multiplexer.

またフィルタとして、波長選択性のない部分透過反射フ
ィルタを用いることにより、分岐・合流回路、とじても
使用可能である。Further, by using a partially transmitting/reflecting filter without wavelength selectivity as a filter, it can also be used as a branch/combiner circuit.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、分岐部から分岐する一方の導波路を折
り返すことによってすべての導波路端を基板の一側縁に
臨ませたので、光ファイバを接続する際（、複数のファ
イバを並列一体化した７アイバアレイを用いてすべての
導波路端に同時に接続することができ、組立作業性が大
幅に向上する。According to the present invention, by folding back one of the waveguides branching from the branch part, all the waveguide ends are exposed to one side edge of the substrate. Using the 7-eyebar array, all waveguide ends can be connected simultaneously, greatly improving assembly workability.

また装置内に組み込んだ場合にも小さなスペースで済む
。Furthermore, when it is incorporated into a device, it requires only a small space.

また入出力端を基板の一辺に集中させるための分岐伝搬
光の方向転換も導波路を通したまま行なうようにしてい
るので、前述した従来の透明スペーサー付加型に比べて
組立て作業が容易になり、且つ導波回路は周知の７オ）
　ＩＪソグラフイ技術を用いて高精密にパターン化でき
るため、損失の少ない安定した品質の光分割合流回路が
得られる。In addition, the direction change of branched propagation light to concentrate the input and output ends on one side of the substrate is performed while passing through the waveguide, making assembly easier than the conventional transparent spacer added type mentioned above. , and the waveguide circuit is well-known 7)
Since it can be patterned with high precision using IJ lithography technology, a light splitting/combining circuit with low loss and stable quality can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

８Ｆ１７図は本発明の第７の実施例を示す平面図、第一
図は本発明の第２の実施例を示す平面図、第３図は本発
明の第３の実施例を示す平面図、第グ図は従来の分割合
流回路の例を示す平面図、第３図は従来の他の例を示す
平面図である。 ｌ・・・・・・基　板　２・・曲入力路３・・・・・・
フィルタ反射光導波路 グ・・・・・・フィルタ透過光導波路 ！・・・・・・折り返し部　６・・・・・・分岐部７、
／コ・・・・・・溝！、ワ・・・・・・フィルタ１０・
・・・・・光反射体　／／ａ、　／ｌｂ、　／／Ｃ・・
開光ファイバ １【ゴを？、１ 第１図 第２図 第３図8F17 is a plan view showing the seventh embodiment of the present invention, Fig. 1 is a plan view showing the second embodiment of the invention, Fig. 3 is a plan view showing the third embodiment of the invention, FIG. 3 is a plan view showing an example of a conventional dividing and merging circuit, and FIG. 3 is a plan view showing another example of the conventional circuit. l... Board 2... Song input path 3...
Filter reflection optical waveguide...Filter transmission optical waveguide! ...Turning section 6... Branching section 7,
/ Ko... Groove! , Wa... Filter 10.
...Light reflector //a, /lb, //C...
Opening fiber 1 [Go? , 1 Figure 1 Figure 2 Figure 3

Claims (3)

【特許請求の範囲】[Claims] （１）基板に形成した光導波回路中に、分岐部と、分岐
した一方の導波路を折り返す折り返し部とを設けて、全
ての導波路端を基板の一側縁に臨ませ、前記分岐部に導
波路を分断する溝を設けて該溝中に部分透過反射フィル
タを介装するとともに、前記折り返し部に光反射体を配
置したことを特徴とする光分割合流回路。(1) In the optical waveguide circuit formed on the substrate, a branch part and a folding part for folding back one of the branched waveguides are provided so that all the waveguide ends face one side edge of the substrate, and the branch part 1. A light splitting/combining circuit characterized in that a groove is provided to divide a waveguide, a partially transmitting/reflecting filter is interposed in the groove, and a light reflector is disposed in the folded portion. （２）前記折り返し部の導波路角部を基板の側縁よりも
内側に位置させ、該角部を通る溝を基板に形成して、該
溝中に光反射体を嵌装した特許請求の範囲第１項記載の
光分割合流回路。(2) The waveguide corner of the folded portion is located inside the side edge of the substrate, a groove passing through the corner is formed in the substrate, and a light reflector is fitted in the groove. A light splitting/combining circuit according to scope 1. （３）前記折り返し部の導波路角部を基板の側縁に露出
させ、この露出面に接して光反射体を設けた特許請求の
範囲第１項記載の光分割合流回路。(3) The light splitting/combining circuit according to claim 1, wherein the waveguide corner of the folded portion is exposed at the side edge of the substrate, and a light reflector is provided in contact with this exposed surface.