JPS63155420A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPS63155420A JPS63155420A JP30124486A JP30124486A JPS63155420A JP S63155420 A JPS63155420 A JP S63155420A JP 30124486 A JP30124486 A JP 30124486A JP 30124486 A JP30124486 A JP 30124486A JP S63155420 A JPS63155420 A JP S63155420A
- Authority
- JP
- Japan
- Prior art keywords
- recording
- substrate
- reproducing
- converting element
- slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052710 silicon Inorganic materials 0.000 abstract description 3
- 239000010703 silicon Substances 0.000 abstract description 3
- 229910002076 stabilized zirconia Inorganic materials 0.000 abstract description 2
- 239000010409 thin film Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 8
- 239000011521 glass Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/10—Structure or manufacture of housings or shields for heads
- G11B5/105—Mounting of head within housing or assembling of head and housing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記憶装置に用いる磁気ヘッドに係り、電磁
変換素子と記録再生用回路を含んだスライダを容易に形
成するに適した磁気ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head used in a magnetic storage device, and more particularly, to a magnetic head suitable for easily forming a slider including an electromagnetic transducer and a recording/reproducing circuit. .
従来の磁気記憶装置における磁気ヘッドは、電磁変換素
子をスライダとなる基板を用い、または基板上に形成し
、前記電磁変換素子用の記録再生回路管スライダ、ジン
バルを含む浮上機構の支持体上に配置して−る。また、
外部雑音による信号雑音比の劣化や記録再生系の小型化
を目的として、同一スライダに薄膜ヘッドと記録再生用
回路を形成した磁気ヘッドが特開昭58−118016
に開示されている。しかし、前記開示例では、同一基板
上に薄膜ヘッドと記録再生用回路を形成していた。A magnetic head in a conventional magnetic storage device includes an electromagnetic transducer using a substrate serving as a slider, or formed on a substrate, and a recording/reproducing circuit for the electromagnetic transducer on a support of a floating mechanism including a slider and a gimbal. It is arranged. Also,
For the purpose of reducing the signal-to-noise ratio due to external noise and downsizing the recording/reproducing system, a magnetic head in which a thin film head and a recording/reproducing circuit were formed on the same slider was published in JP-A-58-118016.
has been disclosed. However, in the disclosed example, the thin film head and the recording/reproducing circuit are formed on the same substrate.
上記開示例においては、薄膜ヘッドと記録再生用回路の
形成プロセスの差異について配慮されておらず、プロセ
スが複雑になるという問題があった。さらに、薄膜ヘッ
ドおよび記録再生用回路が所望の特性を得るために各々
に適した基板を用いることかで@ないという問題を有し
ていた。In the disclosed example, no consideration was given to the difference in the formation process of the thin film head and the recording/reproducing circuit, and there was a problem that the process became complicated. Furthermore, there is a problem in that it is difficult to use substrates suitable for each thin film head and recording/reproducing circuit in order to obtain desired characteristics.
#膜形成技術を用いて作られる戒g&変換素子の作成プ
ロセスには、有機系樹脂によル10μm前後の段差部を
所望の形状で形成したり、該段差部に所望の磁気特性を
待った磁性薄膜を形成するプロセスが含まれている。前
記段差形状は形成プロセス後の温度条件に大きく影響さ
れる。また、磁性薄膜の磁気特性も形成後の温度条件や
基板によって変化する。このため1通常の4膜ヘツドプ
ロセスでは上記磁気特性に悪影響を与えない基板を選択
し、かつ、各プロセスの温度条件t−400Cを越えな
いように設定している。# The process of creating a transducer element made using film formation technology involves forming a stepped portion of approximately 10 μm in the desired shape with organic resin, and adding magnetic material with the desired magnetic properties to the stepped portion. It involves the process of forming a thin film. The shape of the step is greatly influenced by the temperature conditions after the formation process. Furthermore, the magnetic properties of the magnetic thin film also change depending on the temperature conditions after formation and the substrate. For this reason, in the conventional four-film head process, a substrate is selected that does not adversely affect the above-mentioned magnetic properties, and the temperature conditions for each process are set so as not to exceed t-400C.
一方、記録再生用回路として集積回路を形成する九めK
は1通常シリコン基板が用いられる。これは、半導体層
が必要なためであるが、磁性薄膜を形成するための基板
としては、熱膨張係数の違いが大きいため適していない
。また半導体層の形成プロセスでは1oooc前後の温
度条件が必要である。この温度は薄膜ヘッドの段差部形
状の変化や磁性薄膜の磁気特性を劣化させる。On the other hand, KumeK, which forms integrated circuits as recording and reproducing circuits,
1. Usually a silicon substrate is used. This is because a semiconductor layer is required, but it is not suitable as a substrate for forming a magnetic thin film because of the large difference in coefficient of thermal expansion. Further, the semiconductor layer formation process requires temperature conditions of around 100°C. This temperature changes the shape of the stepped portion of the thin film head and deteriorates the magnetic properties of the magnetic thin film.
以上述べたように、電磁変換素子の形成プロセスと集積
回路の形成プロセスでは、性格のことなった基板および
プロセスを各々必要とする。このため同一基板上に電磁
変換素子と記録再生用回路を作成することは、上記素子
および回路を別々に作成するよシも複雑なプロセスが必
要である。As described above, the electromagnetic conversion element formation process and the integrated circuit formation process require substrates and processes with different characteristics. Therefore, creating an electromagnetic conversion element and a recording/reproducing circuit on the same substrate requires a more complicated process than creating the above-mentioned element and circuit separately.
本発明の目的は、形成プロセスを複雑化することなく、
電磁変換素子と記録再生用集積回路を同一スライダ上に
形成または配置した磁気ヘッドを提供することにある。The purpose of the present invention is to, without complicating the formation process,
An object of the present invention is to provide a magnetic head in which an electromagnetic transducer and a recording/reproducing integrated circuit are formed or arranged on the same slider.
上記目的は、1!磁変換素子を形成した基板と記録再生
用集積回路を形成した基板を別個に作成した後、各々の
基板を接着しスライダーを作ることにより、達成される
。The above purpose is 1! This is achieved by separately manufacturing a substrate on which a magnetic transducer is formed and a substrate on which a recording/reproducing integrated circuit is formed, and then bonding each substrate to form a slider.
本発明の如く電磁変換素子と記録再生用集積回路を別個
に作成することによシ、各々の素子および回路形成に適
した形成プロセスおよび基板を選択することができ、そ
の形成プロセスを複雑にする必要がなくなる。By separately producing the electromagnetic transducer element and the recording/reproducing integrated circuit as in the present invention, it is possible to select a forming process and substrate suitable for forming each element and circuit, which makes the forming process complicated. There will be no need.
以下、本発明の一実施例を第1図、第2図によシ説明す
る。電磁変換素子を安定化ジルコニア基板上に、記録再
生用集積回路をシリコン基板上に別個に作成した。電磁
変換素子に用いた磁性薄膜はパーマロイである。一基板
には素子3または回路4を5ヶ含んだブロックを約60
ブロツク配置形成した。この基板から素子3または回路
4を5ケ積載した直方体状のブロック1.2を切断し、
ブロック間をガラス5で加熱融着した(第2図)。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. An electromagnetic transducer was fabricated on a stabilized zirconia substrate, and an integrated circuit for recording and reproduction was fabricated on a silicon substrate. The magnetic thin film used for the electromagnetic transducer is permalloy. One board has approximately 60 blocks each containing 5 elements 3 or circuits 4.
A block arrangement was formed. A rectangular parallelepiped block 1.2 loaded with five elements 3 or circuits 4 is cut from this substrate,
Glass 5 was heat-fused between the blocks (Figure 2).
しかる後に、融着したブロックをスライダ切断線6で切
断し1機械加工によシスライダに加工した。Thereafter, the fused block was cut along the slider cutting line 6 and processed into a syslider by one machining process.
次に素子3および回路4間を金線7でワイヤボンディン
グ法により接続した。Next, the element 3 and the circuit 4 were connected using a gold wire 7 by wire bonding.
本発明によれば、素子および回路を形成したブロックを
接着する手段と各々を電気的に接続する手段を追加する
ことで、電磁変換素子および記録再生用集積回路を同一
基板に作成するという複雑な形成プロセスを用いる必要
を解消することができる。ここで、前記実施例において
は、ガラスを用いる方法でブロックを接着させたが、樹
脂を用いるなどの他の方法によりブロックを接着させる
ことによっても、本発明の目的を達せられることは明ら
かである。According to the present invention, an electromagnetic transducer element and an integrated circuit for recording/reproduction can be created on the same substrate by adding means for gluing blocks forming elements and circuits and means for electrically connecting each. The need to use a forming process can be eliminated. Here, in the above embodiment, the blocks were bonded together using a method using glass, but it is clear that the objects of the present invention can also be achieved by bonding blocks using other methods such as using resin. .
第1図は本発明の一実施例を示す磁気へラドスライダの
全体斜視図、第2図は第1図のスライダの製造途中の平
面図である。
1・・・電磁変換素子ブロック、2・・・記録再生用集
積回路ブロック、2・・・電磁変換素子、4・・・記録
再生用集積回路、5・・・ガラス、6・・・スライダ切
断線。FIG. 1 is an overall perspective view of a magnetic helide slider showing an embodiment of the present invention, and FIG. 2 is a plan view of the slider shown in FIG. 1 during manufacture. DESCRIPTION OF SYMBOLS 1... Electromagnetic conversion element block, 2... Integrated circuit block for recording and reproduction, 2... Electromagnetic conversion element, 4... Integrated circuit for recording and reproduction, 5... Glass, 6... Slider cutting line.
Claims (1)
子用記録再生回路を形成または配置してなる磁気ヘッド
において、電磁変換素子を形成または配置した基板と、
電磁変換素子用記録再生回路を形成または配置した基板
とを接着してスライダを形成したことを特徴とする磁気
ヘッド。1. In a magnetic head in which an electromagnetic transducer and a recording/reproducing circuit for the electromagnetic transducer are formed or arranged in a part of the slider, a substrate on which the electromagnetic transducer is formed or arranged;
A magnetic head characterized in that a slider is formed by bonding a substrate on which a recording/reproducing circuit for an electromagnetic conversion element is formed or arranged.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30124486A JPS63155420A (en) | 1986-12-19 | 1986-12-19 | Magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30124486A JPS63155420A (en) | 1986-12-19 | 1986-12-19 | Magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63155420A true JPS63155420A (en) | 1988-06-28 |
Family
ID=17894508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30124486A Pending JPS63155420A (en) | 1986-12-19 | 1986-12-19 | Magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63155420A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5402074A (en) * | 1993-05-13 | 1995-03-28 | Seagate Technology, Inc. | Thin film magnetic head having electrical connection to core |
US6870717B2 (en) | 2002-05-16 | 2005-03-22 | Hitachi Global Storage Technologies Netherlands B.V. | Semiconductor slider with an integral spin valve transistor structure and method for making same without a bonding step |
-
1986
- 1986-12-19 JP JP30124486A patent/JPS63155420A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5402074A (en) * | 1993-05-13 | 1995-03-28 | Seagate Technology, Inc. | Thin film magnetic head having electrical connection to core |
US6870717B2 (en) | 2002-05-16 | 2005-03-22 | Hitachi Global Storage Technologies Netherlands B.V. | Semiconductor slider with an integral spin valve transistor structure and method for making same without a bonding step |
US7230805B2 (en) | 2002-05-16 | 2007-06-12 | Hitachi Global Storage Technologies Netherlands, B.V. | Semiconductor slider with an integral spin valve transistor structure and method for making same without a bonding step |
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