JPS63153523U - - Google Patents
Info
- Publication number
- JPS63153523U JPS63153523U JP4855187U JP4855187U JPS63153523U JP S63153523 U JPS63153523 U JP S63153523U JP 4855187 U JP4855187 U JP 4855187U JP 4855187 U JP4855187 U JP 4855187U JP S63153523 U JPS63153523 U JP S63153523U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- furnace opening
- creating
- around
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims 1
Description
第1図は実施例の斜視図、第2図は実施例の断
面図、第3図は従来例の断面図、第4図は他の従
来例の断面図である。
1はヒータ、2は熱処理部、3は炉口、4はク
リーンユニツト、5はN2ガス、6は上壷型の縦
型炉、7はウエハ、8はボートである。
FIG. 1 is a perspective view of the embodiment, FIG. 2 is a sectional view of the embodiment, FIG. 3 is a sectional view of a conventional example, and FIG. 4 is a sectional view of another conventional example. 1 is a heater, 2 is a heat treatment section, 3 is a furnace opening, 4 is a clean unit, 5 is N2 gas, 6 is an upper pot type vertical furnace, 7 is a wafer, and 8 is a boat.
Claims (1)
とする手段を設けたことを特徴とする熱処理装置
。[Claims for Utility Model Registration] A heat treatment apparatus, characterized in that a furnace opening is formed below a heat treatment section, and means is provided for creating an inert gas atmosphere at least around the furnace opening.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4855187U JPS63153523U (en) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4855187U JPS63153523U (en) | 1987-03-30 | 1987-03-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63153523U true JPS63153523U (en) | 1988-10-07 |
Family
ID=30870188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4855187U Pending JPS63153523U (en) | 1987-03-30 | 1987-03-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63153523U (en) |
-
1987
- 1987-03-30 JP JP4855187U patent/JPS63153523U/ja active Pending