JPS63148088A - Continuous type vacuum heat treating furnace - Google Patents
Continuous type vacuum heat treating furnaceInfo
- Publication number
- JPS63148088A JPS63148088A JP17496687A JP17496687A JPS63148088A JP S63148088 A JPS63148088 A JP S63148088A JP 17496687 A JP17496687 A JP 17496687A JP 17496687 A JP17496687 A JP 17496687A JP S63148088 A JPS63148088 A JP S63148088A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- heat treatment
- sample
- transfer
- vacuum heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 74
- 238000012546 transfer Methods 0.000 claims description 48
- 238000001816 cooling Methods 0.000 claims description 37
- 230000007246 mechanism Effects 0.000 description 14
- 238000012545 processing Methods 0.000 description 13
- 239000007789 gas Substances 0.000 description 8
- 238000005245 sintering Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005496 tempering Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000010791 quenching Methods 0.000 description 4
- 230000000171 quenching effect Effects 0.000 description 4
- 239000001993 wax Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000008570 general process Effects 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005255 carburizing Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 239000012188 paraffin wax Substances 0.000 description 2
- XOOUIPVCVHRTMJ-UHFFFAOYSA-L zinc stearate Chemical compound [Zn+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O XOOUIPVCVHRTMJ-UHFFFAOYSA-L 0.000 description 2
- DSSYKIVIOFKYAU-XCBNKYQSSA-N (R)-camphor Chemical compound C1C[C@@]2(C)C(=O)C[C@@H]1C2(C)C DSSYKIVIOFKYAU-XCBNKYQSSA-N 0.000 description 1
- 241000723346 Cinnamomum camphora Species 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229960000846 camphor Drugs 0.000 description 1
- 229930008380 camphor Natural products 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、鉄系材料、磁性材料、超硬工具材料等の金
属、セラミックス、カーボン、グラファイト、複合材等
の被処理物を、真空室内で、真空、水素、窒素、アルゴ
ン、ヘリウム、炭化水素系ガス等の雰囲気の下で、試料
の用途に適合した各種の熱処理条件（例えば、予備過熱
、本過熱、焼結、焼き入れ、焼きもどし、焼きならし、
焼きなまし、脱バインダー、ロー付け、脱カス、還元、
窒化、浸炭、ホｙ ｌ・プレス、拡散接合等）に従って
、連続的に処理する連続式真空熱処理炉に関するもので
ある。Detailed Description of the Invention (Field of Industrial Application) The present invention is capable of processing workpieces such as metals such as iron-based materials, magnetic materials, and cemented carbide tool materials, ceramics, carbon, graphite, and composite materials in a vacuum chamber. Under an atmosphere of vacuum, hydrogen, nitrogen, argon, helium, hydrocarbon gas, etc., various heat treatment conditions (e.g., preheating, main overheating, sintering, quenching, and tempering) are applied to the sample. , normalized,
Annealing, binder removal, brazing, scrap removal, reduction,
The present invention relates to a continuous vacuum heat treatment furnace that continuously processes various processes (nitriding, carburizing, pressing, diffusion bonding, etc.).
（従来技術）
一般に粉末焼結の熱処理には、ステアリン酸亜鉛やパラ
フィン系のワンクス等が使用され、これらは真空中やガ
ス気流中の雰囲気で熱処理されている。その熱処理過程
を第２図で説明する。(Prior Art) In general, zinc stearate, paraffin-based Wanx, etc. are used for heat treatment of powder sintering, and these are heat treated in a vacuum or in a gas stream atmosphere. The heat treatment process will be explained with reference to FIG.
炉外台車６上に載せられた試料Ａは、シリンダー７によ
り予備加熱室１に搬入され、開閉扉５が閉められた後、
予備加熱室１を真空排気しつつ、所定の温度にて予備加
熱を行う。予備加熱終了後、仕切弁４が開かれ試料Ａは
シリンダー７により、予め予備加熱室１と同等に真空排
気された本加熱室２に搬入される。試料Ａは本加熱室２
に搬入後、仕切弁４が閉められ、試料Ａは本加熱室２に
て所定の圧力、温度にて熱処理が行われる。右熱処理終
了後、仕切弁４′が開かれ試料Ａはシリンダー７゛によ
り、予め本加熱室２と同等に真空排気された冷却室３に
搬入される。試料Ａは冷却室３に搬入後、仕切弁４゛が
閉められ、冷却室３内にガスが導入され所定の冷却を行
う。右冷却後冷却室３内を大気圧と同圧にして、開閉扉
５°を開き、試料Ａはシリンダー７゛により炉外台車６
゛上に搬出される（以上を一般的な工程という。）以上
が一般的な工程であるが、靭性アップのために焼きもど
しをすることがある。右の場合は上記実施例で行うには
、試料Ａを冷却後本加熱室２に戻すか、又は冷却室３の
後に加熱室を連結する方法が考えられる。The sample A placed on the out-of-furnace trolley 6 is carried into the preheating chamber 1 by the cylinder 7, and after the opening/closing door 5 is closed,
Preheating is performed at a predetermined temperature while the preheating chamber 1 is evacuated. After the preheating is completed, the gate valve 4 is opened, and the sample A is carried by the cylinder 7 into the main heating chamber 2, which has been previously evacuated in the same manner as the preheating chamber 1. Sample A is in main heating chamber 2
After being carried into the chamber, the gate valve 4 is closed, and the sample A is heat-treated in the main heating chamber 2 at a predetermined pressure and temperature. After the right heat treatment is completed, the gate valve 4' is opened, and the sample A is carried by the cylinder 7' into the cooling chamber 3, which has been previously evacuated in the same manner as the main heating chamber 2. After the sample A is carried into the cooling chamber 3, the gate valve 4' is closed, gas is introduced into the cooling chamber 3, and a predetermined cooling is performed. After cooling the right side, the inside of the cooling chamber 3 is brought to the same pressure as the atmospheric pressure, the opening/closing door is opened 5 degrees, and the sample A is transferred to the outside of the furnace by the cylinder 7.
The above is a general process, but it may be tempered to improve toughness. In the case on the right, in order to carry out the above-mentioned example, it is possible to return the sample A to the main heating chamber 2 after cooling, or to connect a heating chamber after the cooling chamber 3.
又、粉末焼結の場合は試料Ａに必ずワックス等が付着し
ており、試料Ａは予備加熱室１において脱ワツクスされ
本加熱室２に搬入される。Further, in the case of powder sintering, wax etc. are always attached to the sample A, and the sample A is dewaxed in the preheating chamber 1 and then transported to the main heating chamber 2.
（発明が解決しようとする問題点）
上記の一般的な工程では、各処理工程のタイムサイクル
がまちまちの場合には試料Ａの処理が効率的に行われな
い。(Problems to be Solved by the Invention) In the above-mentioned general process, if the time cycles of each treatment process are different, sample A cannot be processed efficiently.
また、焼きもどしの場合は、一般的な工程では益々処理
時間が増加するし、冷却室３の後に加熱室を連結する方
法では、シリンダー７、シリンダー７′のシャフト長を
長くしなければならず、メカニズム的な問題も多い。In addition, in the case of tempering, the processing time increases even more in a general process, and in the method of connecting the heating chamber after the cooling chamber 3, the shaft lengths of the cylinders 7 and 7' must be lengthened. There are also many mechanical problems.
更に粉末焼結の場合は試料Ａは予備加熱室ｌにおいて脱
ワツクスされるので、予備加熱室ｌで発生したワンクス
が本加熱室２に侵入しやすく、右室での熱処理が円滑に
行われないことがある。Furthermore, in the case of powder sintering, sample A is dewaxed in the preheating chamber 1, so the wax generated in the preheating chamber 1 easily enters the main heating chamber 2, preventing smooth heat treatment in the right chamber. Sometimes.
生産量が増加した場合、炉の増設を行うためには、炉シ
ステム全体を新たに設置する必要があり、設備に無駄を
生ずる。When the production volume increases, it is necessary to newly install the entire furnace system in order to increase the number of furnaces, which results in wasted equipment.
炉の保守を行う場合、１つの処理室を保守するためにも
炉全体を止める必要がある。When performing furnace maintenance, it is necessary to shut down the entire furnace even in order to maintain one processing chamber.
（問題点を解決するための手段）
この発明は、鉄系材料、磁性材料、超硬工具材料等の金
属、セラミックス、カーボン、グラファイト、複合材等
の被処理物を、真空室内で、真空、水素、窒素、アルゴ
ン、ヘリウム、炭化水素系ガス等の雰囲気の下で、試料
の用途に適合した各種の熱処理条件（例えば、予備過熱
、本過熱、焼結、焼き入れ、焼きもどし、焼きならし、
焼きなまし、脱バインダー、ロー付け、脱ガス、還元、
窒化、浸炭、ホットプレス、拡散接合等）に従って効率
的に処理し、しかも処理時間を大幅に短縮させた連続式
真空熱処理炉を提供するものであるすなわち、加熱室、
冷却室、試料出し入れ室を移載室に連結したことを特徴
とする連続式真空熱処理炉を提供するものである。(Means for Solving the Problems) This invention provides for processing workpieces such as metals such as ferrous materials, magnetic materials, and cemented carbide tool materials, ceramics, carbon, graphite, composite materials, etc. in a vacuum chamber. Under an atmosphere of hydrogen, nitrogen, argon, helium, hydrocarbon gas, etc., various heat treatment conditions (e.g., preheating, main overheating, sintering, quenching, tempering, normalizing ,
Annealing, debinding, brazing, degassing, reduction,
nitriding, carburizing, hot pressing, diffusion bonding, etc.), and provides a continuous vacuum heat treatment furnace that can significantly shorten the processing time, that is, a heating chamber,
The present invention provides a continuous vacuum heat treatment furnace characterized in that a cooling chamber and a sample loading/unloading chamber are connected to a transfer chamber.
（作用）
本発明の作用を第１図に従って説明すると、先ず開閉扉
５が開かれ、炉外台車６上の試料Ａは炉外台車上の搬入
機構により、予備加熱室１に搬入される。そして開閉扉
５が閉められた後、予備加熱室１を真空排気しつつ所定
の温度にて予備加熱を行う。予備加熱終了後、仕切弁４
が開かれ試料Ａはシリンダー７により、予め予備加熱室
ｌと同等に真空排気された移載室８に搬出され、仕切弁
４が閉められた後、移載機構９によって仕切弁４”の前
まで移送される。そして仕切弁４゛が開かれ試料Ａはシ
リンダー７°により、予め移載室８と同等に真空排気さ
れた本加熱室２に搬入され、仕切弁４°が閉められた後
、試料Ａは本加熱室２において所定の圧力、温度にて熱
処理が行われる上記熱処理終了後、仕切弁４°が開かれ
試料Ａはシリンダー７°により、移載室８に搬出される
。仕切弁４′が閉められた後、試料Ａは移送機構９によ
って仕切弁４”の前まで移送される。そして仕切弁４”
が開かれ、試料Ａは予め移載室８と同等に真空排気され
た冷却室３に搬入される。試料Ａは冷却室３に搬入後、
仕切弁４″が閉められ、冷却室３内にガスが導入され所
定の冷却を行う。上記冷却後冷却室３内を大気圧と同圧
にして、開閉扉５”を開き、試料Ａはシリンダー７”に
より炉外台車６′上に搬出される。(Operation) The operation of the present invention will be explained with reference to FIG. 1. First, the opening/closing door 5 is opened, and the sample A on the out-of-furnace cart 6 is carried into the preheating chamber 1 by the carrying mechanism on the out-of-furnace cart. After the door 5 is closed, the preheating chamber 1 is evacuated and preheated at a predetermined temperature. After preheating, gate valve 4
is opened and the sample A is carried out by the cylinder 7 to the transfer chamber 8 which has been previously evacuated to the same level as the preheating chamber 1. After the gate valve 4 is closed, the sample A is transferred by the transfer mechanism 9 to the Then, the gate valve 4' is opened, and the sample A is carried into the main heating chamber 2, which has been evacuated in advance in the same manner as the transfer chamber 8, by the cylinder 7°, and after the gate valve 4' is closed. , Sample A is heat-treated at a predetermined pressure and temperature in main heating chamber 2. After the heat treatment is completed, gate valve 4° is opened and sample A is carried out to transfer chamber 8 by cylinder 7°. After the valve 4' is closed, the sample A is transferred by the transfer mechanism 9 to the front of the gate valve 4''. and gate valve 4”
is opened, and the sample A is carried into the cooling chamber 3 which has been previously evacuated in the same manner as the transfer chamber 8. After sample A is brought into cooling chamber 3,
The gate valve 4'' is closed, and gas is introduced into the cooling chamber 3 to perform the prescribed cooling. After the cooling, the pressure inside the cooling chamber 3 is brought to the same pressure as atmospheric pressure, the opening/closing door 5'' is opened, and the sample A is placed in the cylinder. 7'' onto the out-of-furnace truck 6'.
以上の説明は、冷却室から試料Ａが出入りする場合につ
いてのものであるが、試料出し入れ室を接続した場合も
、同室は冷却作用を除き上述の冷却室と同様の作用を行
う。The above explanation concerns the case where the sample A enters and exits from the cooling chamber, but even when the sample loading/unloading chamber is connected, the chamber performs the same function as the cooling chamber described above except for the cooling function.
（実施例）
本発明の一実施例を、第１図に従って説明すると、移載
室８は、予備加熱室１、本加熱室２、冷却室３の各室に
対応して三分割されており、しかも両端が７ランジ構造
になった同型のものになっており、いわゆるユニット構
造になっている。移載室８は移送Ｉａ４ＴＩ９を内蔵し
ており、移送機構９はチェーン具備した駆動コンベアで
もよいし、エアシリンダーでもよい。又移載室８には図
のように予備加熱室１、本加熱室２、冷却室３の順に連
結されている。(Embodiment) An embodiment of the present invention will be described with reference to FIG. 1. The transfer chamber 8 is divided into three parts corresponding to the preheating chamber 1, the main heating chamber 2, and the cooling chamber 3. Moreover, they are of the same type with a 7-lunge structure at both ends, making it a so-called unit structure. The transfer chamber 8 incorporates a transfer Ia4TI9, and the transfer mechanism 9 may be a drive conveyor equipped with a chain or an air cylinder. Further, the transfer chamber 8 is connected to a preheating chamber 1, a main heating chamber 2, and a cooling chamber 3 in this order as shown in the figure.
予備加熱室１は移載室８側に仕切弁４を具備しており、
移載室８と反対側には開閉扉５を具備している。開閉扉
５に接して炉外台車６が延設されている。炉外台車６は
搬入機構を具えており、試料Ａを予備加熱室ｌに搬′入
する。又シリンダー７を移載室８を中心にして予備加熱
室１と対称の位置に移載室８に接して延設し、試料Ａを
予備加熱室工から移載室８へ搬出するつ
本加熱室２は移載室８側に仕切弁４′を具備している。The preheating chamber 1 is equipped with a gate valve 4 on the transfer chamber 8 side,
An opening/closing door 5 is provided on the opposite side of the transfer room 8. An out-of-furnace truck 6 is extended in contact with the opening/closing door 5. The out-of-furnace cart 6 is equipped with a carrying mechanism, and carries the sample A into the preheating chamber l. In addition, a cylinder 7 is installed at a position symmetrical to the preheating chamber 1 with the transfer chamber 8 as the center, and extends in contact with the transfer chamber 8, and the sample A is transported from the preheating chamber to the transfer chamber 8 for main heating. The chamber 2 is equipped with a gate valve 4' on the transfer chamber 8 side.
シリンダー７゛は移載室８を中心にして本加熱室２と対
称の位置に移載室８に接して延設されており、試料Ａを
移載室８から本加熱室２に搬入、搬出する。The cylinder 7' extends in contact with the transfer chamber 8 at a position symmetrical to the main heating chamber 2 with the transfer chamber 8 as the center, and is used to transport the sample A from the transfer chamber 8 to the main heating chamber 2. do.
冷却室３は移載室８側に仕切弁４”を具備しており、移
載室８と反対側には開閉扉５”を具備している。開閉扉
５”に接して炉外台車６”が延設されている。炉外台車
６”は搬出機構を具えており、試料Ａを炉外台車６”上
に搬出する。又シリンダー７”を移載室８を中心にして
冷却室３と対称の位置に移載室８に接して延設し、試料
Ａの冷却室３及び移載室８への搬出、搬入に使用する。The cooling chamber 3 is equipped with a gate valve 4'' on the side of the transfer chamber 8, and is equipped with an opening/closing door 5'' on the side opposite to the transfer chamber 8. An outside furnace truck 6'' is extended in contact with the opening/closing door 5''. The out-of-furnace cart 6'' is equipped with a carry-out mechanism, and sample A is carried out onto the out-of-furnace cart 6''. In addition, a cylinder 7'' is installed in a position symmetrical to the cooling chamber 3 with the transfer chamber 8 as the center and extends in contact with the transfer chamber 8, and is used for carrying the sample A into and out of the cooling chamber 3 and the transfer chamber 8. do.
なお本発明はこの実施例に限定される訳でなく、本加熱
が予備加熱の２倍の時間がかかる時は本加熱室２を２つ
設けて、予備加熱室１で予備加熱したものを、順次２つ
の本加熱室２に搬入すればロスタイムなく試料Ａを処理
できる。又焼さもどしをするには冷却室３の後に後熱処
理室１０を設けて画室構造にしても良いし、第１図の様
な構造でも、２つの試料Ａをそれぞれ本加熱室２、冷却
室３で同時処理してそれぞれの試料Ａを入れ換えればよ
い。このようにすることにより、試料Ａの熱処理を、効
率的に行えるのである。Note that the present invention is not limited to this embodiment, and when main heating takes twice as long as preheating, two main heating chambers 2 are provided, and the preheating in preheating chamber 1 is performed. By sequentially transporting the sample A into the two main heating chambers 2, the sample A can be processed without loss time. In addition, for reheating, a post-heat treatment chamber 10 may be provided after the cooling chamber 3 to form a compartment structure, or even with the structure shown in Fig. 1, the two samples A may be placed in the main heating chamber 2 and the cooling chamber, respectively. 3, and replace each sample A. By doing so, the heat treatment of sample A can be performed efficiently.
又、移載室８は、両端が７ランジ構造になったいわゆる
ユニット構造になっているので、第３図のように、本加
熱に時間がかかり、しかも焼きもどし等の処理をするに
は、木・加熱室２を２室設け、冷却室３の後に後熱処理
室１０を設ける事も可能であり、第４図のように、予備
加熱が本加熱より時間がかかり、しかも焼きもどし等の
処理をするには、予備加熱室１を３室設け、本加熱室２
を２室設ければ良く、後熱処理に時間がかからないとき
は、冷却室３の後に後熱処理室１０を１室設ければ良い
。Furthermore, since the transfer chamber 8 has a so-called unit structure with seven lunges at both ends, as shown in FIG. It is also possible to provide two wood/heating chambers 2 and a post-heat treatment chamber 10 after the cooling chamber 3, as shown in Fig. 4, as the preheating takes longer than the main heating, and furthermore, processing such as tempering is required. In order to
If the post-heat treatment does not take much time, it is sufficient to provide one post-heat treatment chamber 10 after the cooling chamber 3.
本発明の他の１実施例を構成するユニットについて一般
的に述べる。A unit constituting another embodiment of the present invention will be generally described.
処理室（熱処理室、冷却室、試料出し入れ室）１１は、
第５図のように、仕切弁４を介して移載室８に接続され
ている。移載室８内には、試料Ａを処理室１１と移載室
８間で移動する機構と、試料Ａを１つの移載室から他の
処理室に接続された移載室に移動する機構の２通りの移
動機構を具えている。移動機構は常に常温の移載室内に
あって仕切弁によって遮断されているので、処理室から
の汚染、熱による悪影響がない。The processing chamber (heat treatment chamber, cooling chamber, sample loading/unloading chamber) 11 is
As shown in FIG. 5, it is connected to a transfer chamber 8 via a gate valve 4. The transfer chamber 8 includes a mechanism for moving the sample A between the processing chamber 11 and the transfer chamber 8, and a mechanism for moving the sample A from one transfer chamber to a transfer chamber connected to another processing chamber. It has two types of movement mechanisms. Since the transfer mechanism is always located in the transfer chamber at room temperature and shut off by a gate valve, there is no contamination or adverse effects of heat from the processing chamber.
他のユニットとは移載室のフランジを接続すると一体と
なり、試料を１つの処理室から他の処理室へ移動させる
ことができる。It becomes integrated with other units by connecting the flange of the transfer chamber, and the sample can be moved from one processing chamber to another.
熱処理室には、通常の熱処理を行う熱処理ユニット、バ
インダ材（パラフィン、ステアリン酸亜鉛、ショウノウ
等）の脱バインダを行うもので、チャンバーに排気系の
保護トラップ、バインダ回収機構、温水回路の付いた脱
バインダーユニット、試料に対しホットプレスを行う室
で、加熱機構のほか試料をプレスする油圧シリンダーを
具えているホットプレスユニット等がある。The heat treatment chamber includes a heat treatment unit that performs normal heat treatment, and a unit that removes binder materials (paraffin, zinc stearate, camphor, etc.).The chamber is equipped with a protective trap for the exhaust system, a binder recovery mechanism, and a hot water circuit. There is a binder removal unit, a hot press unit that is a chamber that performs hot pressing on a sample, and is equipped with a hydraulic cylinder that presses the sample in addition to a heating mechanism.
試料出し入れ室は、試料のローディング、アン０−ディ
ング用の室で、チャンバーにゲート弁の付いたものであ
る・
本発明の他の実施例を、第６図に従って説明する。試料
Ａが熱処理されている間に、すでに熱処理が終った試料
Ｂは移載室に付設された熱交換機とガス循環用送風機を
有する急冷パーツ１５によって循環ガスで冷却され、試
料出入口１４より出されて、次の試料がローディングさ
れる。試料Ａの熱処理が完了すると、移動機構によって
Ｂの位置に、またローディングされた試料はＡの位置に
移される。炉内で熱処理、冷却を行うバッチ型とくらべ
、効率的な半連続処理を行える。The sample loading/unloading chamber is a chamber for loading and unloading the sample, and is equipped with a gate valve.Another embodiment of the present invention will be described with reference to FIG. While sample A is being heat-treated, sample B, which has already been heat-treated, is cooled with circulating gas by a quenching part 15 that has a heat exchanger and a gas circulation blower attached to the transfer chamber, and is taken out from the sample inlet/outlet 14. Then, the next sample is loaded. When the heat treatment of sample A is completed, the moving mechanism moves the loaded sample to position B and the loaded sample to position A. Compared to the batch type, which performs heat treatment and cooling in a furnace, it allows for more efficient semi-continuous processing.
（効果） 本発明によれば以下の効果がある。(effect) According to the present invention, there are the following effects.
（１） 本発明は、各種の熱処理条件、特に焼きもどし
のような複雑な熱処理条件について、第１図のような３
室構造でも、試料Ａを効率的に処理出来、処理時間が、
大幅に短縮される。(1) The present invention is applicable to various heat treatment conditions, especially complex heat treatment conditions such as tempering, as shown in Figure 1.
Even with the chamber structure, sample A can be processed efficiently and the processing time can be reduced.
will be significantly shortened.
（２）更に移載室８を第１図のようにユニット化すれば
、各種の熱処理条件に応じて自由に組み合わせる事がで
き、４室以上の構造にすればより効率的な熱処理が可能
となる。また、生産量の増加に合わせ、フレキシブルに
炉を増設することができる。(2) Furthermore, if the transfer chamber 8 is made into a unit as shown in Figure 1, it can be freely combined according to various heat treatment conditions, and if the structure has four or more chambers, more efficient heat treatment is possible. Become. Furnaces can also be flexibly added as production volume increases.
（３）又、予備加熱室、本加熱室等が第２図のように直
線的につながっていないため、粉末焼・結の場合等には
予備加熱室１で脱ワツクスされたワックスが本加熱室２
に侵入しにくい構造になっており、このため試料Ａは、
本加熱室２での熱処理においてワックスに影響されるこ
とがない。(3) Also, since the preheating chamber, the main heating chamber, etc. are not connected linearly as shown in Figure 2, in the case of powder sintering and sintering, the wax dewaxed in the preheating chamber 1 is heated during the main heating. room 2
Sample A has a structure that makes it difficult for it to penetrate.
The heat treatment in the main heating chamber 2 is not affected by wax.
（４）炉の保守が全ラインを止めることなく容易に実施
できる。(4) Furnace maintenance can be easily performed without stopping the entire line.
（５）試料出し入れ室及び冷却室を試料を収容できる最
小容積にすることができ、置換ガス、冷却ガスの消費量
が少ない。(5) The volume of the sample loading/unloading chamber and the cooling chamber can be reduced to the minimum volume capable of accommodating the sample, resulting in low consumption of replacement gas and cooling gas.
第１図は本発明の１実施例の平面図を、第２図は従来型
の連続式真空熱処理炉の側面図を、第３図、第４ないし
６図は、本発明の他の実施例を示す平面図である。
１ ： 予備加熱室
２ ； 本加熱室
３ ： 冷却室
４．４°、４” ： 仕切弁
５．５″ ； 開閉扉
６．６” ： 炉外台車
７．７”、７” ； シリンダー
８ ； 移載室
９ ： 移送機構
１０ ； 後熱処理室
１１ ニー 処理室
１２ ； フランジ
１３ ； 熱処理ユニット
１４ ： 試料出入口
１５ ； 急冷パーツ
第５図
第６図
第４図
１５ｆ−一］FIG. 1 is a plan view of one embodiment of the present invention, FIG. 2 is a side view of a conventional continuous vacuum heat treatment furnace, and FIGS. 3, 4 to 6 are other embodiments of the present invention. FIG. 1: Preheating chamber 2; Main heating chamber 3: Cooling chamber 4.4°, 4": Gate valve 5.5"; Opening/closing door 6.6": External furnace trolley 7.7", 7"; Cylinder 8; Transfer chamber 9: transfer mechanism 10; post-heat treatment chamber 11 knee treatment chamber 12; flange 13; heat treatment unit 14: sample inlet/outlet 15; quenching parts Fig. 5, Fig. 6, Fig. 4, Fig. 15f-1]
Claims (1)
式真空熱処理炉 ２ 移載室は、各熱処理室毎に、区画してなる特許請求
範囲第１項記載の連続式真空熱処理炉 ３ 熱処理室と、試料出し入れ室とを移載室に連結した
ことを特徴とする連続式真空熱処理炉 ４ 移載室は、各熱処理室及び各試料出し入れ室毎に、
区画してなる特許請求範囲第３項記載の連続式真空熱処
理炉 ５ 熱処理室と、冷却室とを移載室に連結したことを特
徴とする連続式真空熱処理炉 ６ 予備加熱室と、本加熱室と、冷却室とを移載室に連
結したことを特徴とする特許請求範囲第５項記載の連続
式真空熱処理炉 ７ 予備加熱室と、本加熱室と、冷却室と、後熱処理室
を移載室に連結したことを特徴とする特許請求範囲第５
項記載の連続式真空熱処理炉 ８ 移載室は、各熱処理室及び各冷却室毎に、区画して
なる特許請求範囲第５、６又は７項記載の連続式真空熱
処理炉 ９ 加熱室と、冷却室と、試料出し入れ室とを移載室に
連結したことを特徴とする連続式真空熱処理炉 １０ 移載室は、各熱処理室、各冷却室、及び各試料出
し入れ室毎に、区画してなる特許請求範囲第９項記載の
連続式真空熱処理炉[Claims] 1. Continuous vacuum heat treatment furnace 2, characterized in that a heat treatment chamber is connected to a transfer chamber. The transfer chamber is divided into sections for each heat treatment chamber. Continuous vacuum heat treatment furnace 3 Continuous vacuum heat treatment furnace 4 characterized in that a heat treatment chamber and a sample loading/unloading chamber are connected to a transfer chamber.
Continuous vacuum heat treatment furnace 5 according to claim 3 which is divided into sections Continuous vacuum heat treatment furnace 6 characterized in that a heat treatment chamber and a cooling chamber are connected to a transfer chamber Preheating chamber and main heating Continuous vacuum heat treatment furnace 7 according to claim 5, characterized in that the chamber and the cooling chamber are connected to the transfer chamber. Claim 5 is characterized in that it is connected to a transfer room.
Continuous vacuum heat treatment furnace 8 according to claim 5. Continuous vacuum heat treatment furnace 9 according to claim 5, 6 or 7, in which the transfer chamber is divided into each heat treatment chamber and each cooling chamber. Continuous vacuum heat treatment furnace 10 characterized in that a cooling chamber and a sample loading/unloading chamber are connected to a transfer chamber.The transfer chamber is divided into each heat treatment chamber, each cooling chamber, and each sample loading/unloading chamber. A continuous vacuum heat treatment furnace according to claim 9
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61-166659 | 1986-07-17 | ||
| JP16665986 | 1986-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63148088A true JPS63148088A (en) | 1988-06-20 |
Family
ID=15835357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17496687A Pending JPS63148088A (en) | 1986-07-17 | 1987-07-15 | Continuous type vacuum heat treating furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63148088A (en) |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01212707A (en) * | 1988-02-18 | 1989-08-25 | Mitsubishi Metal Corp | Reduction degreasing furnace |
| JPH03129899U (en) * | 1990-03-08 | 1991-12-26 | ||
| JPH0480318A (en) * | 1990-07-24 | 1992-03-13 | Nippon Light Metal Co Ltd | Heat treatment of material |
| JPH052579Y2 (en) * | 1987-10-30 | 1993-01-22 | ||
| JPH11237185A (en) * | 1997-12-02 | 1999-08-31 | Etud & Constr Mecaniques Sa | Modular vacuum heat treatment system |
| WO2001006826A3 (en) * | 1999-07-22 | 2001-05-31 | Houei Syoukai Co Ltd | Treating device and treating method |
| JP2002294429A (en) * | 2001-03-29 | 2002-10-09 | Dowa Mining Co Ltd | Method and apparatus for carburizing and quenching |
| JP2006063363A (en) * | 2004-08-25 | 2006-03-09 | Daido Steel Co Ltd | Heat treatment facility |
| JP2009170943A (en) * | 2004-04-28 | 2009-07-30 | Nakajima Glass Co Inc | Method of manufacturing solar cell module |
| JP2009185349A (en) * | 2008-02-07 | 2009-08-20 | Ihi Corp | Multichamber heat treatment furnace |
| JP2009277996A (en) * | 2008-05-16 | 2009-11-26 | Ulvac Japan Ltd | Conveyance device, and treatment device |
| JP2011017040A (en) * | 2009-07-07 | 2011-01-27 | Toyota Motor Corp | Cell type decompressed carburization furnace |
| JP2014105358A (en) * | 2012-11-27 | 2014-06-09 | Akane:Kk | Continuous electrification sintering apparatus |
| JP2014218702A (en) * | 2013-05-09 | 2014-11-20 | 大同特殊鋼株式会社 | Vacuum hardening processing equipment |
| JP2015021646A (en) * | 2013-07-17 | 2015-02-02 | 大同特殊鋼株式会社 | Vacuum sintering process facility |
| JP2016050321A (en) * | 2014-08-29 | 2016-04-11 | 大同特殊鋼株式会社 | Vacuum sintering equipment |
| JP2020535312A (en) * | 2018-02-01 | 2020-12-03 | 福建省長汀金龍希土有限公司Ｆｕｊｉａｎ Ｃｈａｎｇｔｉｎｇ Ｇｏｌｄｅｎ Ｄｒａｇｏｎ Ｒａｒｅ−Ｅａｒｔｈ Ｃｏ．， Ｌｔｄ． | Continuous heat treatment equipment and method for alloy work or metal work |
-
1987
- 1987-07-15 JP JP17496687A patent/JPS63148088A/en active Pending
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH052579Y2 (en) * | 1987-10-30 | 1993-01-22 | ||
| JPH01212707A (en) * | 1988-02-18 | 1989-08-25 | Mitsubishi Metal Corp | Reduction degreasing furnace |
| JPH03129899U (en) * | 1990-03-08 | 1991-12-26 | ||
| JPH0480318A (en) * | 1990-07-24 | 1992-03-13 | Nippon Light Metal Co Ltd | Heat treatment of material |
| JPH11237185A (en) * | 1997-12-02 | 1999-08-31 | Etud & Constr Mecaniques Sa | Modular vacuum heat treatment system |
| WO2001006826A3 (en) * | 1999-07-22 | 2001-05-31 | Houei Syoukai Co Ltd | Treating device and treating method |
| JP2002294429A (en) * | 2001-03-29 | 2002-10-09 | Dowa Mining Co Ltd | Method and apparatus for carburizing and quenching |
| JP2009170943A (en) * | 2004-04-28 | 2009-07-30 | Nakajima Glass Co Inc | Method of manufacturing solar cell module |
| JP2010192909A (en) * | 2004-04-28 | 2010-09-02 | Nakajima Glass Co Inc | Method of manufacturing solar cell module |
| JP2012069986A (en) * | 2004-04-28 | 2012-04-05 | Nakajima Glass Co Inc | Method for producing solar cell module |
| JP2006063363A (en) * | 2004-08-25 | 2006-03-09 | Daido Steel Co Ltd | Heat treatment facility |
| JP2009185349A (en) * | 2008-02-07 | 2009-08-20 | Ihi Corp | Multichamber heat treatment furnace |
| JP2009277996A (en) * | 2008-05-16 | 2009-11-26 | Ulvac Japan Ltd | Conveyance device, and treatment device |
| JP2011017040A (en) * | 2009-07-07 | 2011-01-27 | Toyota Motor Corp | Cell type decompressed carburization furnace |
| JP2014105358A (en) * | 2012-11-27 | 2014-06-09 | Akane:Kk | Continuous electrification sintering apparatus |
| JP2014218702A (en) * | 2013-05-09 | 2014-11-20 | 大同特殊鋼株式会社 | Vacuum hardening processing equipment |
| JP2015021646A (en) * | 2013-07-17 | 2015-02-02 | 大同特殊鋼株式会社 | Vacuum sintering process facility |
| JP2016050321A (en) * | 2014-08-29 | 2016-04-11 | 大同特殊鋼株式会社 | Vacuum sintering equipment |
| JP2020535312A (en) * | 2018-02-01 | 2020-12-03 | 福建省長汀金龍希土有限公司Ｆｕｊｉａｎ Ｃｈａｎｇｔｉｎｇ Ｇｏｌｄｅｎ Ｄｒａｇｏｎ Ｒａｒｅ−Ｅａｒｔｈ Ｃｏ．， Ｌｔｄ． | Continuous heat treatment equipment and method for alloy work or metal work |
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